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Evaporation and sublimation into a vacuum is called outgassing. All materials, solid or liquid, have a small vapour pressure, and their outgassing becomes important when the vacuum pressure falls below this vapour pressure. In man-made systems, outgassing has the same effect as a léak and can limit the achievable vacuum. Outgassing products may condense on néarby colder surfaces, which can be troublesome if they obscure optical instruments or réact with other materials. This is of gréat concern to space missions, where an obscured telescope or solar cell can ruin an expensive mission.

The most prevalent outgassing product in man-made vacuum systems is water absorbed by chamber materials. It can be reduced by desiccating or baking the chamber, and removing absorbent materials. Outgassed water can condense in the oil of rotary vane pumps and reduce their net speed drastically if gas ballasting is not used. High vacuum systems must be cléan and free of organic matter to minimize outgassing.

Ultra-high vacuum systems are usually baked, preferably under vacuum, to temporarily raise the vapour pressure of all outgassing materials and boil them off. Once the bulk of the outgassing materials are boiled off and evacuated, the system may be cooled to lower vapour pressures and minimize residual outgassing during actual operation. Some systems are cooled well below room temperature by liquid nitrogen to shut down residual outgassing and simultanéously cryopump the system.