List of Intel Atom microprocessors MID processors/SoCs (UMPC/Smartphone/IoT) "Silverthorne" (45 nm)

| Model_number | sSpec_number | Frequency | L2_cache | Mult_ | Voltage | Socket | Release_date | Part_numbers | Release_price_USD_ |
|---|---|---|---|---|---|---|---|---|---|
| Atom Z520PT | SLGPP(C0) | 1.33 GHz | 512 KB | 10× | 0.9–1.1V | BGA 437 | March 2, 2009 | CH80566EE014DT | N/A |
| Atom Z530 | SLB6P(C0) | 1.6 GHz | 512 KB | 12× | 0.75–1.1V | BGA 441 | April 2, 2008 | AC80566UE025DW | $95 |
| Atom Z530P | SLGPN(C0) | 1.6 GHz | 512 KB | 12× | 0.8–1.1V | BGA 437 | March 2, 2009 | CH80566EE025DW | N/A |
| Atom Z540 | SLB2M(C0) | 1.87 GHz | 512 KB | 14× | 0.75–1.1V | BGA 441 | April 2, 2008 | AC80566UE036DW | $160 |
| Atom Z550 | SLGPT(C0) | 2 GHz | 512 KB | 15× | 0.75–1.1V | BGA 441 | April 8, 2009 | AC80566UE041DW | $249.47 retail |
| Atom Z560 | SLH63(C0) | 2.13 GHz | 512 KB | 16× | 0.75–1.1V | BGA 441 | Q2 2010 | AC80566UE046DW | $144 |