Hitachi Scanning Electron Microscope (SEM) Teardown - Page 1
Forum section: electronics / general

author: dexters_lab
author_rank: Unknown
timestamp: May 11, 2017, 09:55:17 am
content: i am about to make a video tearing down a Hitachi S-800 scanning electron microscope (SEM) from 1988, this will be the biggest and most expensive thing i have made a video on and it's really quite exciting...Normally i don't post up until i make a video but in this case i am and i will attach a few pics here before i start. The microscope is not complete and doesn't work so what i want to do is make a video on it all and once i have recouped my expenses from buying and shipping it (probably by selling the main diffusion pump) i want to give away some of the other parts. Because there are so many things in it that might be extremely useful and very hard to obtain if your doing high vacuum stuff as a hobby.So i have the actual microscope part (the main control panel was sadly scrapped before i saw it so i only have the 'science' element of it), but this does include most of the high vacuum parts like the main chamber with several feed-through things, electron gun, beam scanning and focusing column & a large diffusion pump (Branded Daia, 700 Watt, 570L/s), two small and one large (23kg!) ion pump(s). There is a ton load of other bits like pneumatic actuators, valves, sensors and the secondary electron & x-ray detectors. The main chassis could be useful as it's a very solid steel frame with rubber isolators for the main column so could make a great starting point for a vacuum system.Before i start taking things apart and making the video, what items should i NOT do a (coining Mike's phrase here) 'extreme teardown' on or which items should i be careful with because they might be useful for other experimenters and high vacuum fanboys?I'd love to take it all to many, many bits but i guess i might get lynched if i do end up destroying something particularly usefuli should point out that although some of the bits will be free, i will ask you cover cost of postage and most of those parts are extremely heavy and may not be suitable to post. To give you some idea the whole thing must be getting on for 1/4 ton!

author: cat87
author_rank: Regular Contributor
timestamp: May 12, 2017, 01:46:32 pm
content: Holy mother of....Great scoreCan't wait for the teardown(s)and look at that molecular pump... I feel a faint coming on

author: dexters_lab
author_rank: Unknown
timestamp: May 12, 2017, 06:24:25 pm
content: Quote from: cat87 on May 12, 2017, 01:46:32 pmthanks, it'll likely be a couple of weeks before i can get started on it!

author: SeanB
author_rank: Super Contributor
timestamp: May 12, 2017, 07:07:23 pm
content: Mark, you probably want to look at shipping some to Australia, I think there is somebody there who can use them, and it is not Dave.

author: dexters_lab
author_rank: Unknown
timestamp: May 12, 2017, 09:30:54 pm
content: Quote from: SeanB on May 12, 2017, 07:07:23 pmi'll ship anywhere if they cover the postage!

author: SeanB
author_rank: Super Contributor
timestamp: May 13, 2017, 05:58:15 pm
content: Quote from: dexters_lab on May 12, 2017, 09:30:54 pmYou will have to send it sea cargo, and build a wooden box for it though.....

author: German_EE
author_rank: Super Contributor
timestamp: May 13, 2017, 06:23:12 pm
content: Are there any interesting power transformers? A couple of decades ago I was invited to help scrap an x-ray machine and came away with a transformer that was a three-man lift! After building a 13.8V 250A power supply for my ham radio shack I didn't need another oneThe power supply was sold when I relocated from the UK to Hungary, I dread to think what the shipping costs would be.

author: joeqsmith
author_rank: Super Contributor
timestamp: May 13, 2017, 06:53:02 pm
content: It looks like there are lots of treasures just waiting to be discovered in that room.

author: tpowell1830
author_rank: Frequent Contributor
timestamp: May 13, 2017, 10:09:32 pm
content: IMHO, DON'T TEAR IT DOWN OR TAKE IT APART!! That is a glowing example of science that became art (science/art). A control panel can be re-designed to make it work again. Did you get schematics? This is like a classic car that you take to the scrapyard instead of returbishing, it gets torn apart and crushed and bits and pieces are reused on other classics.I know that it is probably not feasible or economical to restore it, but really, such a waste. This is the kind of thing that is only a win to those who find useful parts from it, and I am probably beating a dead horse, but think of it, a garage SEM! The in-laws come over and you take them into your garage and examine something in your own SEM! Or a co-worker has an engine part that he thinks has microfractures and you say "Bring it over and we will examine it in the SEM."All ridiculous, I know, but that is a beautiful piece of science/engineering. Such a waste. Gorgeous piece of art. All of that stainless steel. WOW!

author: dexters_lab
author_rank: Unknown
timestamp: May 14, 2017, 07:34:33 am
content: Quote from: German_EE on May 13, 2017, 06:23:12 pmsadly no, it seems the electrical good stuff like the HV transformer would have been in the control panel because it's not in the bit i have. The only big transformer seems to be for the ion pumps which seem to be 100v

author: dexters_lab
author_rank: Unknown
timestamp: May 14, 2017, 07:36:40 am
content: Quote from: joeqsmith on May 13, 2017, 06:53:02 pmlol, yea it's surprising what we find, we dug out an original mouse for an Apple Lisa the other day, shame we don't have the rest of it!!

author: dexters_lab
author_rank: Unknown
timestamp: May 14, 2017, 08:33:49 am
content: Quote from: tpowell1830 on May 13, 2017, 10:09:32 pmi totally sympathise but to take your analogy this car would have no engine or interior and only have three wheels!it's just too damd big and heavy to do anything else with it. This is why i want to pass one some of the parts to others so it will be helping others with their own projects

author: richnormand
author_rank: Unknown
timestamp: May 17, 2017, 12:03:09 am
content: Feel sorry to see it parted.but, if you must...Would be interested in the two small ion pumps on the column.They are compatible with the one I have that is not able to maintain a good vacuum anymore.No need to ship the heavy stuff (magnets) as I have them, just the inside pump modules.The UHV conflats connectors/pipes from the ion pump to the column would be useful too.PM me if you want to follow up at some point. Cheers and thanks.

author: Brumby
author_rank: Unknown
timestamp: May 17, 2017, 06:16:20 am
content: Quote from: richnormand on May 17, 2017, 12:03:09 amIt's already partially parted - missing some rather important pieces to make it operational ... so this is at least going to be one last "Hurrah!" before dispersal (rather than disposal).

author: CJay
author_rank: Super Contributor
timestamp: May 17, 2017, 12:56:30 pm
content: Quote from: dexters_lab on May 14, 2017, 07:36:40 amYeah, bloody annoying but I *DID* have one, complete with prototype HDD, it got thrown in a skip.

author: dexters_lab
author_rank: Unknown
timestamp: May 22, 2017, 11:09:17 am
content: right i think i have a handle on what everything does in this machine now thanks to some extended googling, reading of wiki pages & several technical docs, user guides and some emails from Ben at Applied Science (thanks Ben!)I will be filming part one very soon, i'll be giving you a walk around all the parts and controls and then remove the ion pumps and beam column for further teardown.The base chassis will be partially stripped so the diffusion pump, baffles etc and the sample chamber are intact. If you or you know anyone who might be interested in buying the base as a starting point of a home vacuum system let me know else it will be up on ebay. If that doesn't appeal to anyone because it's still too big & heavy then just the diffusion pump and baffles will be removed and sold on their own.The two smaller ion pumps have been provisionally claimedThe diffusion pump is a Japanese made Diavac DPF-4Zhttp://www.diavac.co.jp/english/products/kiki/abura/dpf.html

author: dexters_lab
author_rank: Unknown
timestamp: May 25, 2017, 11:08:34 am
content: part 1 is herefor part 2 would you like me to teardown the column or more of the parts in the chassis?

author: razberik
author_rank: Frequent Contributor
timestamp: May 25, 2017, 11:16:44 am
content: Turbomolecular pumps were not used in electron microscopy until the end of 80s, mid 90s. Diffusion pumps were used, you can recognize them by cooling spiral around the body.Turbos were introduced to this field when CNCs were able to machine precise parts.I work for SEM manufacturer, perhaps I can answer some questions.

author: dexters_lab
author_rank: Unknown
timestamp: May 25, 2017, 11:26:39 am
content: Quote from: razberik on May 25, 2017, 11:16:44 amyou spot any glaring mistakes, let me know so i can correct... although it's difficult to do that now YouTube have removed annotations!

author: razberik
author_rank: Frequent Contributor
timestamp: May 25, 2017, 12:58:25 pm
content: Okay, Ill try my bestI work there for <2yrs, so very limited knowledge and experience.Quote from: German_EE on May 13, 2017, 06:23:12 pmTransformers are definitely not the interesting part in SEM. We dont use any these days, SMPSs all the way.Quote from: SeanB on May 13, 2017, 05:58:15 pmEvery shipping wooden box is custom made for particular product sell. Different configuration = different proportions and box requirement.Products are shipped by truck when it is possible to reach customer on land, because FEG electron gun is permanently ON. Devices turned on cannot be shipped by aircraft.Quote from: dexters_lab on May 11, 2017, 09:55:17 am"Plumbing" is the most valuable thing. You can refurbish electronic part anytime with pretty much anything. (33120A + amplifier for scanning coils.). Anyway, in todays electron microscope, the most valuable part is software anyway.QuoteDo not disassembly detectors. May contain very valuable and fragile scintillators.Be very careful with X-Ray detector. Its plumbing + PIN diodes are fragile and valuable.

author: razberik
author_rank: Frequent Contributor
timestamp: May 25, 2017, 01:04:51 pm
content: I clicked through the video quickly and removing these ion pump with bare hands without covering flanges - what a butchery ! Without proper cleaning procedure, it would not be possible to pump these to some reasonable vacuum.Use gloves and cover flanges with some covers please.//Sheet metal covers for column are probably permalloys. Hitting ground = they are dead.

author: DCtoDaylight
author_rank: Newbie
timestamp: May 25, 2017, 01:23:07 pm
content: Hi,At which company do you work? Or is it a secret?Gesendet von meinem A0001 mit Tapatalk

author: razberik
author_rank: Frequent Contributor
timestamp: May 25, 2017, 01:28:17 pm
content: Look at the flag under my Knorrig avatar. Its second largest city with the largest number of electron microscope manufacturers in the world. The smaller one, surrounded by forest.

author: dexters_lab
author_rank: Unknown
timestamp: May 25, 2017, 02:20:01 pm
content: thanks for the comments razberikthe ports on the ion pumps were covered over just after i removed them and i would expect someone would clean the flanges before using them hopefully they will be okthe metal covers on the column could well be permalloy / mumetal magnetic shielding, as for damaging those parts... i think they got more damage when i threw them in the scrap metal bin!!I didn't expect the x-ray detector to have any value TBH, given it's 29 years old? I was actually hoping nobody would claim it as i wanted to do a teardown on it as well as some of the other items.

author: DCtoDaylight
author_rank: Newbie
timestamp: May 25, 2017, 03:12:30 pm
content: First, i am interested in the se-detector and in two of the 3 pol connector because i am building my own sem and my two se detectors that i have can't move to adjust the distance relative to the sample.Quote from: razberik on May 25, 2017, 01:28:17 pmIs your company related to ThermoFischer?

author: dexters_lab
author_rank: Unknown
timestamp: May 25, 2017, 03:22:05 pm
content: Quote from: Eric H. on May 25, 2017, 03:12:30 pmhi Eric, someone else already asked for the secondary electron detector, sorry! If they decide they don't want it i'll drop you a message

author: DCtoDaylight
author_rank: Newbie
timestamp: May 25, 2017, 03:34:02 pm
content: That would be nice. But what is with the 3 pol connector? I have a "Turbo.Drive TD400" for controlling my turbomolecularpump and these connectors are no longer produced.

author: dexters_lab
author_rank: Unknown
timestamp: May 25, 2017, 03:41:36 pm
content: Quote from: Eric H. on May 25, 2017, 03:34:02 pmi am not sure which connector you mean, can you let me know where in the video you saw it?

author: DCtoDaylight
author_rank: Newbie
timestamp: May 25, 2017, 03:58:03 pm
content: Quote from: dexters_lab on May 25, 2017, 03:41:36 pmI added images from the TD400.And please forgive my questions but are the electron optics still available (focus, deflection, astigmatism corrector)?

author: dexters_lab
author_rank: Unknown
timestamp: May 25, 2017, 04:34:02 pm
content: i have not seen any connectors like that but if i spot one i will save it.the beam focusing etc should be located in the column that was removed in the last part of the video, the x/y scanning coils i think are still mounted to the top sample chamber which is visible when i remove the column.the column is still in once piece so i don't know how it's going to disassemble, some of the coil assembles maybe recoverable. I won't really know until i take it apart.

author: DCtoDaylight
author_rank: Newbie
timestamp: May 25, 2017, 06:20:42 pm
content: I could be wrong, but the connector in the panel looks very similar. (This is the product number: Hirose HS16P-3) Don't invest to much time.It would be perfect if you could safe the coils but just don't care if its too complicated to disassemble. Nevertheless the deflaction module would be nice to have for my project.

author: dexters_lab
author_rank: Unknown
timestamp: May 25, 2017, 06:32:38 pm
content: ahh yes i see it!mounted on that panel it should be easy to removeyour home made SEM, do you have any pictures of it? i'd be interested to see it!

author: Trax
author_rank: Regular Contributor
timestamp: May 27, 2017, 05:52:37 am
content: I would be interested in the x ray detector,I think its just some scintilator material + photomultiplyercan you please post some photos of it?cheersTrax

author: dexters_lab
author_rank: Unknown
timestamp: May 27, 2017, 02:52:51 pm
content: Quote from: Trax on May 27, 2017, 05:52:37 amyes i think your right that it's a PMT with scintillation material in front of it, when i get to that part it will be featured in the video of course, probably in part 3, i can take pictures of it as well

author: dexters_lab
author_rank: Unknown
timestamp: June 05, 2017, 09:09:03 pm
content: here is part 2, teardown of the electron column. The gun, focusing and stigmatism coils etc

author: dexters_lab
author_rank: Unknown
timestamp: June 15, 2017, 08:53:24 am
content: dismantling continues... the diffusion pump & baffles have now been removed, i'll do a final video once i have the remaining significant parts off the machine and run through them quicklyi removed the final coils from the sample chamber yesterday, these should have been in the column video but they way i removed the column meant they were left behind so here are some pics of it.The tip of the cone is the final exit point of the electron beam before it hits the sample, on the end there is an additional steel conical assembly with a small brass aperture clipped to it which is just attached to the main body of the coil assembly, inside the main body there is a large focusing coil and a smaller coil former make from ptfe which i think is the scanning coils and another stigmatism control coil. I can't disassemble this further as someone has asked to have it.The focusing coil is larger than the other one, it's indicated as 16ohms DC resistance. Both the focusing coils have a 'T' marking on them 900T for the smaller and 1500T for the larger one, i wonder if this is the number of turns?The crushed part of the metal tube on the conical piece of metal was done when i removed the column incorrectly

author: madsbarnkob
author_rank: Frequent Contributor
timestamp: June 15, 2017, 11:38:51 am
content: Quote from: dexters_lab on June 15, 2017, 08:53:24 amThat is a normal way of indicating the number of turns in a coil.

author: dexters_lab
author_rank: Unknown
timestamp: July 20, 2017, 07:49:28 am
content: ok, here is the final part with the bits i have saved, i'll track down all those people who wanted the parts:

author: albert22
author_rank: Regular Contributor
timestamp: July 20, 2017, 10:09:52 pm
content: Thanks for your interesting videos, including many others besides the sem teardown.Take care with that beer in your desk it seems that was slowly evaporatingRegards

author: CJay
author_rank: Super Contributor
timestamp: July 21, 2017, 08:22:04 am
content: Quote from: albert22 on July 20, 2017, 10:09:52 pmNot that slowly

author: Kleinstein
author_rank: Super Contributor
timestamp: July 21, 2017, 12:15:19 pm
content: That small box with relays and the high ohms resistors likely also contains a high grade OP to make it a really sensitive trans-impedance amplifier, good for currents in the pA range.

author: aseok
author_rank: Contributor
timestamp: November 17, 2020, 01:28:44 pm
content: HiWhat is the alloy composition of the this sem main column? i know that it is steel but i need more detail.Thanks.