SnO2 filmlerinin bazı fiziksel özellikleri üzerine taban sıcaklığının etkisi
The effect of substrate temperature on some physical properties of SnO2 films
Yazar: MELTEM DEMİR
Danışman: YRD. DOÇ. DR. FERHUNDE ATAY
Eskişehir Osmangazi Üniversitesi / Fen Bilimleri Enstitüsü / Fizik Ana Bilim Dalı
Derece: Yüksek Lisans, 2005
Konu: Fizik ve Fizik Mühendisliği = Physics and Physics Engineering

Özet:
ÖZETSnO2 ILOPOHUL XOWUDVRQLN NLP\DVDO SÂVNÂUWPH WHNQLÃ·L LOH YH350 Â± 5 ºC WDEDQ VÃFDNOÃNODUÃQGD HOGH HGLOPLÃºWLU (OGH HGLOHQ ILOPOHULQ ED]ÃHOHNWULNVHOYHRSWLN|]HOOLNOHULNULVWDOVLVWHPOHULYH\Â]H\PRUIRORMLOHULLQFHOHQPLÃºYH PLNURDQDOL]OHUL \DSÃOPÃÃºWÃU )LOPOHULQ NDOÃQOÃNODUÃQÃQ - P DUDVÃQGDGHÃ·LÃºWLÃ·L YH DUWDQ WDEDQ VÃFDNOÃÃ·ÃQD EDÃ·OÃ RODUDN NDOÃQOÃNODUÃQ D]DOGÃÃ·ÃEHOLUOHQPLÃºWLU ;5' GHVHQOHULQGHQ WÂP ILOPOHULQ SROLNULVWDO \DSÃGD ROGXNODUÃEHOLUOHQPLÃºWLU )LOPOHULQ WHUFLKOL \|QHOLPOHUL LoLQ \DUÃ SLN JHQLÃºOLNOHUL YH WDQHER\XWODUÃ KHVDSODQPÃÃº YH WDEDQ VÃFDNOÃÃ·ÃQÃQ DUWPDVÃ\OD NULVWDOOHÃºPH VHYL\HOHULQLQDUWWÃÃ·Ã EHOLUOHQPLÃºWLU 6(0 J|UÂQWÂOHULQGHQ ILOPOHULQ \Â]H\OHULQLQ KRPRMHQGDÃ·ÃOÃPD VDKLS ROXS ROPDGÃNODUÃ YH WDEDQ VÃFDNOÃÃ·ÃQÃQ DUWPDVÃ\OD KRPRMHQOLÃ·LQDUWWÃÃ·Ã J|]OHQPLÃºWLU ('6 PLNURDQDOL]OHULQGHQ 6Q YH 2 HOHPHQWOHULQLQ NDWÃLoHULVLQGH YDU ROGXÃ·X WHVSLW HGLOPLÃºWir. Tüm filmler için geçirgenlikVSHNWUXPODUÃQGDQID\GDODQDUDN\DQVÃPDYHOLQHHUVRÃ·XUPDNDWVD\ÃODUÃKHVDSODQPÃÃºYH EX SDUDPHWUHOHULQ GDOJDER\XQD EDÃ·OÃ RODUDN GHÃ·LÃºLPOHUL LQFHOHQPLÃºWLU)LOPOHULQ \DVDN HQHUML DUDOÃNODUÃQÃQ - H9 DUDVÃQGD GHÃ·LÃºWLÃ·L EHOLUOHQPLÃºWLU)LOPOHULQ LOHWLP PHNDQL]PDODUÃQÃ LQFHOHPHN DPDFÃ\OD HOGH HGLOHQ ,-VNDUDNWHULVWLNOHULQGHQ ILOPOHULQ RKPLN |]HOOLN J|VWHUGLNOHUL WHVSLW HGLOPLÃºWLU)LOPOHULQ NDUDQOÃNWD LOHWNHQOLNOHULQLQ 5.40x10-1-2.24x10-3 (FP-1 DUDVÃQGDGHÃ·LÃºWLÃ·L J|UÂOPÂÃºWÂU )LOPOHULQ LOHWNHQOLNOHULQLQ VÃFDNOÃÃ·D EDÃ·OÃ GHÃ·LÃºLPOHULQGHQGÂÃºÂN YH \ÂNVHN VÃFDNOÃN E|OJHOHUL LoLQ GRQ|U YH GRQ|U JLEL GDYUDQDQ WX]DNODUÃQHQHUMLOHULQLQ VÃUDVÃ\OD -2.10 meV ve 0.049- H9 DUDVÃQGD GHÃ·LÃºWLÃ·LJ|UÂOPÂÃºWÂUAnahtar Kelimeler: SnO2 filmleri, Ultrasonik kimyasal püskürtme, Elektrik veoptik özellikler, XRD, SEM-EDS.

Abstract:
SUMMARYSnO2 films were deposited at 200, 250, 300 ve 350 Â± 5 ºC substratetemperature by ultrasonic spray pyrolysis technique. It was seen from the XRDpatterns that all films have polycrystalline structure. For preferential orientationsof the films, half peak widths and grain sizes were calculated. Whether the surfaceof the films are homogenous or not was investigated using SEM photographs andwas found that with the increase of substrate temperature homogenity wasincreased. It was determined from EDS microanalyses of the films that Sn and Oelements were present in solid films. Using transmission spectra, reflection andlinear absorbtion coefficients of the films were calculated. The variations of theseparameters depending on the wavelength were investigated. It was determinedthat forbidden energy gaps varied between 3.1-3.7 eV. The conductivity of thefilms in dark were found between 5.40x10-1-2.24x10-3 (FP-1. I-Vcharacteristics were used in order to determine the conductivity mechanisms ofthe films and it was found that all films have ohmic structure. Using the variationsof electrical conductivities with temperature, the energies of donors and traps likedonor were calculated between 0.28-2.10 meV ve 0.049-0.082 eV for low andhigh temperature regions, respectively.Keywords: SnO2 films, Ultrasonic spray pyrolysis, electrical and opticalproperties, XRD, SEM-EDS.