Federal award (PURCHASE ORDER, fiscal year 2024)
Recipient: OXFORD INSTRUMENTS AMERICA, INC.
Awarding agency: Department of Defense / Department of the Navy
Funding agency: Department of Defense / Department of the Navy
Period of performance: 2025-09-25 to 2026-07-01
Current total value of award: $687895.85
Description: TO PROCURE THE INDUCTIVELY COUPLED PLASMA (ICP) DEEP REACTIVE ION ETCHING (DRIE) TOOL TO INCLUDE ALL OF THE REQUIRED SPECIFICATIONS FOUND IN ATTACHMENT 1.