Federal award (PURCHASE ORDER, fiscal year 2023)
Recipient: SAMCO INC.
Awarding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Funding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Period of performance: 2024-08-01 to 2025-12-31
Current total value of award: $901461
Description: INDUCTIVELY COUPLED PLASMA DEEP REACTIVE ION ETCHING (ICP DRIE) SYSTEM