Federal award (PURCHASE ORDER, fiscal year 2023)
Recipient: OXFORD INSTRUMENTS AMERICA, INC.
Awarding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Funding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Period of performance: 2022-01-28 to 2023-10-22
Current total value of award: $759074
Description: INDUCTIVELY COUPLED PLASMA SYSTEM FOR DEEP REACTIVE ION ETCHING OF SILICON CARBIDE