Federal award (PURCHASE ORDER, fiscal year 2023)
Recipient: VEECO PROCESS EQUIPMENT INC.
Awarding agency: Department of Commerce / National Institute of Standards and Technology
Funding agency: Department of Commerce / National Institute of Standards and Technology
Period of performance: 2022-09-22 to 2024-10-31
Current total value of award: $1988690
Description: ION BEAM SPUTTERING SYSTEM