Federal award (PURCHASE ORDER, fiscal year 2023)
Recipient: PEMBROKE INSTRUMENTS, LLC
Awarding agency: Department of Commerce / National Institute of Standards and Technology
Funding agency: Department of Commerce / National Institute of Standards and Technology
Period of performance: 2024-08-29 to 2025-01-02
Current total value of award: $113610
Description: CHIPS-ULTRAVIOLET (EUV) SCATTEROMETRY