Federal award (PURCHASE ORDER, fiscal year 2023)
Recipient: JEOL USA, INC.
Awarding agency: Department of Commerce / National Institute of Standards and Technology
Funding agency: Department of Commerce / National Institute of Standards and Technology
Period of performance: 2023-09-19 to 2025-09-30
Current total value of award: $3409716
Description: PURCHASE OF A JBX-8100FS ELECTRON BEAM LITHOGRAPHY SYSTEM