Federal award (PURCHASE ORDER, fiscal year 2023)
Recipient: SMARACT INC.
Awarding agency: Department of Commerce / National Institute of Standards and Technology
Funding agency: Department of Commerce / National Institute of Standards and Technology
Period of performance: 2024-06-11 to 2024-12-16
Current total value of award: $140970
Description: CHIPS R&D: DYNAMIC EUV METROLOGY, NANOPOSITION & PIEZOHEXAPOD (2 SETS)