Federal award (PURCHASE ORDER, fiscal year 2023)
Recipient: AXUS TECHNOLOGY LLC
Awarding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Funding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Period of performance: 2020-06-24 to 2021-08-23
Current total value of award: $476000
Description: CHEMICAL MECHANICAL PLANARIZATION SYSTEM