Federal award (PURCHASE ORDER, fiscal year 2023)
Recipient: HEIDELBERG INSTRUMENTS INC.
Awarding agency: Department of Defense / Department of the Navy
Funding agency: Department of Defense / Department of the Navy
Period of performance: 2023-09-21 to 2024-05-31
Current total value of award: $561800
Description: DWL 66 MASKLESS LITHOGRAPHY SYSTEM