Federal award (DEFINITIVE CONTRACT, fiscal year 2023)
Recipient: KLA CORPORATION
Awarding agency: Department of Defense / Defense Microelectronics Activity
Funding agency: Department of Defense / Defense Microelectronics Activity
Period of performance: 2023-09-26 to 2024-09-04
Current total value of award: $2285744
Description: KLA/SPTS SIC TRENCH ETCH TOOL