Federal award (PURCHASE ORDER, fiscal year 2022)
Recipient: ATTOCUBE SYSTEMS GMBH
Awarding agency: Department of Commerce / National Institute of Standards and Technology
Funding agency: Department of Commerce / National Institute of Standards and Technology
Period of performance: 2023-09-15 to 2023-09-30
Current total value of award: $17387.2
Description: CLOSED LOOP 3D VACUUM NANO POSITIONING STAGE