Federal award (PURCHASE ORDER, fiscal year 2022)
Recipient: YIELD ENGINEERING SYSTEMS, INC
Awarding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Funding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Period of performance: 2023-01-05 to 2023-04-05
Current total value of award: $79192.2
Description: DUAL FUNCTION, HMDS VAPOR PRIME AND IMAGE REVERSAL OVEN FOR SEMICONDUCTOR PHOTOLITHOGRAPHY