Federal award (PURCHASE ORDER, fiscal year 2022)
Recipient: PLASMA-THERM LLC
Awarding agency: Department of Commerce / National Institute of Standards and Technology
Funding agency: Department of Commerce / National Institute of Standards and Technology
Period of performance: 2023-08-11 to 2025-08-10
Current total value of award: $1076690
Description: PLASMA-THERM HBR-CL SILICON ICP ETCHER AND DRIE SILICON ETCHER