Federal award (PURCHASE ORDER, fiscal year 2022)
Recipient: KLA CORPORATION
Awarding agency: Department of Commerce / National Institute of Standards and Technology
Funding agency: Department of Commerce / National Institute of Standards and Technology
Period of performance: 2023-05-08 to 2023-05-24
Current total value of award: $13959
Description: CHILLER FOR SPTS OMEGA C2L RAPIER ETCH SYSTEM