Federal award (PURCHASE ORDER, fiscal year 2022)
Recipient: KLA CORPORATION
Awarding agency: Department of Commerce / National Institute of Standards and Technology
Funding agency: Department of Commerce / National Institute of Standards and Technology
Period of performance: 2023-09-20 to 2025-02-26
Current total value of award: $1713660
Description: RIE05- ELECTRICAL STATIC CHUCK BASED DEEP REACTIVE ION ETCHING SYSTEM WITH 4 YEAR SERVICE AGREEMENT.