Federal award (PURCHASE ORDER, fiscal year 2021)
Recipient: MKS INC.
Awarding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Funding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Period of performance: 2022-07-27 to 2022-12-14
Current total value of award: $14839
Description: ACQUISITION OF A SOLID STATE MICROWAVE SOURCE FOR PLASMA GENERATION IN A RESONANT CAVITY