Federal award (PURCHASE ORDER, fiscal year 2021)
Recipient: CANON U.S.A., INC.
Awarding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Funding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Period of performance: 2021-02-08 to 2022-04-30
Current total value of award: $3755610.55
Description: EO14042  STEPPER LITHOGRAPHY SYSTEM