Federal award (PURCHASE ORDER, fiscal year 2021)
Recipient: KLA CORPORATION
Awarding agency: Department of Commerce / National Institute of Standards and Technology
Funding agency: Department of Commerce / National Institute of Standards and Technology
Period of performance: 2021-09-23 to 2022-04-28
Current total value of award: $1159638
Description: DEEP REACTIVE ION ETCHING (DRIE) IS A CRITICAL FABRICATION SYSTEM REQUIRED FOR MANY NIST MISSION-CRITICAL DEVICES.