Federal award (PURCHASE ORDER, fiscal year 2021)
Recipient: VEECO PROCESS EQUIPMENT INC.
Awarding agency: Department of Commerce / National Institute of Standards and Technology
Funding agency: Department of Commerce / National Institute of Standards and Technology
Period of performance: 2022-09-22 to 2023-09-30
Current total value of award: $1939000
Description: PURCHASE OF AN SPECTOR ION BEAM SPUTTERING SYSTEM