Federal award (PURCHASE ORDER, fiscal year 2021)
Recipient: VEECO PROCESS EQUIPMENT INC.
Awarding agency: Department of Defense / Department of the Navy
Funding agency: Department of Defense / Washington Headquarters Services
Period of performance: 2021-11-01 to 2022-01-21
Current total value of award: $203624
Description: THERMAL ATOMIC LAYER DEPOSITION SYSTEM