Federal award (PURCHASE ORDER, fiscal year 2021)
Recipient: OXFORD INSTRUMENTS AMERICA, INC.
Awarding agency: Department of Commerce / National Institute of Standards and Technology
Funding agency: Department of Commerce / National Institute of Standards and Technology
Period of performance: 2022-09-08 to 2023-06-24
Current total value of award: $886260.54
Description: PURCHASE OF A PLAMA PRO 100 PECVD SYSTEM