Federal award (PURCHASE ORDER, fiscal year 2021)
Recipient: HEIDELBERG INSTRUMENTS INC.
Awarding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Funding agency: National Aeronautics and Space Administration / National Aeronautics and Space Administration
Period of performance: 2022-09-30 to 2023-05-31
Current total value of award: $399290
Description: DWL (DIRECT WRITE LITHOGRAPHY) 66+MASKLESS LITHOGRAPHY SYSTEM