Federal award (DEFINITIVE CONTRACT, fiscal year 2021)
Recipient: MULTIBEAM CORPORATION
Awarding agency: Department of Defense / Department of the Air Force
Funding agency: Department of Defense / Department of the Air Force
Period of performance: 2020-08-20 to 2023-06-15
Current total value of award: $18593023
Description: FULL WAFER PATTERNING WITH MULTICOLUMN E-BEAM LITHOGRAPHY (MEBL) OF ALL INTERCONNECT LAYERS ENVELOPING STATE-OF-PRACTICE (SOP) NODES