* For each wafer or chip a runcard (.xls, .xlsx) is maintained that documents all steps of processing. 

  

  * Images and micrographs documenting the processing (.gif, .jgp, .png), schematics and drawings (.ppt) for illustration and numerical data for quantitative understanding (Origin, Excel) are also collected to 

  

These data is stored within the internal computers and servers of the
individual partners-as described at the design stages (same procedure)

Certain process parameters which enable the commercial partners of the project
to protect certain data is kept by them on the internal servers.

#  1.3. Characterization, measurement, testing data and their storage

Spectroscopic ellipsometry, UV-VIS-NIR spectroscopy, Raman analysis, XRD,
vector network analysers, Labview and others are used for extracting the
desired data initially on the tools interface The data is then further
transferred on other computers and analysed using Matlab, Mathematica and
Cadence, Origin and other tools to extract the desired parameters.

  * Names of measurement files are linked to sample names given in run cards. Additional information about sample handling etc. are given in header data of the measurements 

  

  * The data is stored on the internal servers of each institution 

  

#  1.4. Reporting data, deliverables, meetings–data accessibility

Once the design steps, fabrication and measurement steps are over: reports
drafts and publication drafts are started.

Reports:

The drafts of the reports and deliverables are uploaded on the project
webpage:

  _https://phasechange-switch.org/_

and the members of the consortium continuously update them ( _Fig.2_ ). The
access to the files is given only to the consortium members by the managing
entity of the webpage contracted by EPFL.

These reports are continuously updated by the partners before the deliverables
submission.

Before the review meeting access is given to the reviewers to all the final
deliverables and work packages presentations directly on the webpage with a
special password.

_Fig. 2 Consortium data example-of a subfolder_

#  1.5. Publications data-data accessibility and open access

The publications drafts were updated by the leading authors in the internal
folders of their institution during their development.

The following the naming conventions were kept:

yyyy-mm-dd_institution_(title-NAME)_journal/confname_(VERSION-
NUMBER).(docx/latex). The leading author collected the necessary information
from the internal and external partners via institutional email.

Once, the article submitted and in the case of acceptance, an open access
version is uploaded on the institutional webpages of the authors. The open
access repository links are as follows: 
_https://infoscience.epfl.ch/?ln=en_ **EPFL Lausanne**

  * _https://www.repository.cam.ac.uk_ **UCAM**

  

  * _https://pure.mpg.de/_ **MPG**

  

  * _https://domino.research.ibm.com/library/cyberdig.nsf/index.html_ **IBM**

  

The final versions of the article with the title of the articles and journal
names are uploaded in pdf format. An example of an uploaded article can be
seen in _Fig.3_ . Additionally the data associated with the publications of
UCAM are uploaded on the University of Cambridge Repository.

_Fig.3 Example of an open access publication as stored on the EPFL files
repository_

It is worth pointing out that: MPG hosted the 14th Open Access Conference in
Berlin. As MPG scientists are encouraged to post their publications in the
open repository PuRe (  _https://pure.mpg.de/_ )  , and it also has its own
open access journals (e.g.  _http://edition-open-access.de/_ ,
_https://elifesciences.org/_ )

#  1.6. Financial data and time sheets

Mainly Excel sheets and proprietary data formats used for accounting and other
administrative purposes. As part of the project, documentation parts of the
data will be stored as physical printouts by each individual institution.

The data is used for project administration only, including financial
reporting and auditing by the financial departments.

A summary of the different types of data collected within the different stages
of the design/fabrication/characterization/reporting.

Table 1: Data formats used in Phase change Project  
  
<table>  
<tr>  
<th>

**Type of data**

</th>  
<th>

**Software/ test**

**tool**

</th>  
<th>

**Format**

</th>  
<th>

**Aprox.**

**Size**

</th>  
<th>

**Number**

</th>  
<th>

**Total Size**

</th> </tr>  
<tr>  
<td>

Presentations

</td>  
<td>

Power Point

</td>  
<td>

*.pptx 
</td>  
<td>

10 MB

</td>  
<td>

100

</td>  
<td>

~1 GB

</td> </tr>  
<tr>  
<td>

Project management

</td>  
<td>

Microsoft word

LaTeX

Excel

</td>  
<td>

*.doc 

*.docx 

*.tex 

</td>  
<td>

10 MB

</td>  
<td>

500

</td>  
<td>

~5 GB

</td> </tr>  
<tr>  
<td>

Images

</td>  
<td>

Optical microscope, SEM

images

</td>  
<td>

gif, .jgp, .png

</td>  
<td>

</td>  
<td>

</td>  
<td>

150 MB

</td> </tr>  
<tr>  
<td>

Designs, computations

</td>  
<td>

HFSS 3D FEM

Electromagnetic,

Mathematica,

Matlab,etc

</td>  
<td>

aedt

.m

</td>  
<td>

1MB-

5GB

</td>  
<td>

200

</td>  
<td>

900GB

</td> </tr>  
<tr>  
<td>

Mask Designs ( final output of the designs)

</td>  
<td>

L-edit

K-Layout, CLE Win

</td>  
<td>

*.gds 

*. tdb 

</td>  
<td>

1 MB-

10MB

</td>  
<td>

</td>  
<td>

200MB

</td> </tr>  
<tr>  
<td>

Data from

characterizations, testing,

measurements

</td>  
<td>

ALD and thermal

annealing, Spectroscopic ellipsometry, UVVIS-NIR

spectroscopy, Raman analysis, XRD).

PLD, sputtering

tool

Vector network analyser, SEM

</td>  
<td>

Raw data or csv/spreadshee

t, s2p,

JPG, tiff, xlx, opj

</td>  
<td>

<5MB

</td>  
<td>

2000

</td>  
<td>

10 GB

</td> </tr>  
<tr>  
<td>

Data treatment and plotting.

Mathematical models

</td>  
<td>

Excel

Origin

Matlab

Python

Mathematica

</td>  
<td>

*.xlsx 

*.OPJ 

*.m 

*.py 

*. mat 

</td>  
<td>

1MB

</td>  
<td>

150

</td>  
<td>

150MB

</td> </tr>  
<tr>  
<td>

Publication datasets

Open access

</td>  
<td>

EPFL;IBM,

UCAM and MPG have repository sites for open access articles listed above

</td>  
<td>

pdf

</td>  
<td>

3MB

</td>  
<td>

</td>  
<td>

18MB

</td> </tr> </table>

The publications are foreseen to be available as long as the institutions
exist on the open access servers mentioned before. In respect to the design
files, fabrication files& samples and measurement data collected the storage
procedures are described below:

##  2.1.1. Data lifetime of design, fabrication and characterization data

At AMO project-related scientific data (process data, device designs,
measurement data, log files, etc.) is stored for at least ten years, most data
is directly accessible for 15+ years.

At MPG data is supposed to be re-usable and accessible openly for at least ten
years for people with reasonable requests.

At Thales the data collected from the project is stored in a specific folder
on Thales network, according to the Thales’s quality management, data are kept
during few years in the dedicated storage system.

At EPFL data files are foreseen to be stored for around 10 years too on the
internal servers.

At UCAM: Policies such as the long-term preservation are already in place by
the University Library’s Office of Scholarly Communication team and data will
be stored for a lifetime established at the end of the project by it.

##  2.1.2. Data lifetime of open access articles/ allocation of resources

The lifetime of this data will be given by the lifetime of the institutions,
since these open access data are uploaded on the open access repository links
which are aimed to live as much as the institutions will exist.

  * _https://infoscience.epfl.ch/?ln=en_ **EPFL Lausanne**

  

  * _https://www.repository.cam.ac.uk_ **UCAM**

  

  * _https://pure.mpg.de/_ **MPG**

  

  * _https://domino.research.ibm.com/library/cyberdig.nsf/index.html_ **IBM**

  

There is a current one-off charge for long-term curated data storage at the
University of Cambridge data repository of £4/GB for datasets above 20GB. UCAM
uploads also additional files together with the publications.

Open access data-mining tools are recently promoted by OpenAIRE and CERN
through https://zenodo.org dataset and need to be further investigated to
evaluate the benefits for the partners of the consortium in the near future.

##  2.1.3. Data lifetime of shared reports drafts, work packages presentations
and foreseen files exchange directories

As mentioned the reports, deliverables, workpackages presentations are shares
within the partners within the projects webpage.

We foresee to add on this pages shared files of interest from now on too. The
lifetime of the webpage is foreseen to be up to 2025 and will be accessible to
the project partners.

#  2.2. Data security and recovery

**AMO:**

All project related data is included in AMO’s general data backup cycles.
Access to data from strand a) is limited to AMO’s administrative staff and the
local project coordinator, Dr.-Ing. Jens Bolten. Specific subsets, e.g. data
covering salary payments to individual employees working for the project are
further restricted as required by national law.

Access to data from strand b) is available to all members of AMO’s
nanostructuring group responsible for the project as well as to the heads of
AMO other research groups and AMO’s CEOs. All staff members with access to the
data sets have signed appropriate NDAs to ensure data security.

**IBM:**

All data generated, collected and used within the PCS is handled according
IBM’s strict data security rules (IBM Bigfix). Automated daily backups are
performed and stored on long-term repositories.

#  EPFL

The EPFL centralized file storage service follows the modern practices and
standards regarding storage, for instance high availability, multiple levels
of data protection, partnership with providers for support. The service is
managed centrally by the hosting department of the Vice Presidency for
Information Systems (VPSI) and ensures security, coherence, pertinence,
integrity and high-availability. Two distinct storage locations can be found
on the EPFL campus with replication between the two. Physical servers’ pairing
and clustering guarantees local redundancy of data. Moreover, volume mirroring
protects data in case of disaster on the primary site. The copy is
asynchronous and automatic and runs every two hours.

The file servers are virtualized for separation between logical data and
physical storage, RAID groups ensure physical storage protection: data is
split in chunks written on many disks with double parity.

Moreover, volume snapshots are used and can allow user restoration of previous
versions if need be. For specific needs, optional backup on tape can also be
done.

Access to the data is managed by the owner of the volumes through the identity
management system of EPFL. Any person who needs access to data has therefore
to be a registered and verified user in the identity management system.

**MPG:**

All servers with experimental data have proper backup and every important
experiment is instantly brought to the server. **Thales:**

All data generated, collected and used within the PCS is handled according
THALES’s strict data security rules.

#  Ethical aspects

There are no ethical issues or human participants in this research project so
no protocol apply in this case.

#  Future development

In the following time frame we plan to make on the  _https://phasechange-
switch.org/_ a repository of important files needed during the development of
the following the deliverables ( important design data and characterization
data) in order to ease the file-exchange. For the moment the site is used for
promotion of new publications and results as well as for the deliverables,
work packages presentationsreports done by the consortium.

The research data department of EPFL Library  1  will help in a closer contact
with Nanolab for the further development of this management plan.