Nanoimprint lithography of chirped grating in polymethyl methacrylate (PMMA). The chirped grating pattern is indented by protrusions that are 300 nm high, 950 µm long and between 5 µm and 100 µm wide. The different imprints were performed by application of 12 kN for 20 minutes at temperatures between 130 C and 150°C. The series illustrates the development of capillary resist bridges, seen as finger-print-like structures in addition to the desired pattern.