α-FeSi2 nanocrystals synthesized on (100) silicon substrate by reactive deposition epitaxy (RDE) with Au catalyst are represented in here. α-FeSi2 nanocrystals appeared to be inclined trapezoid and rectangular nanoplates, polyhedral nanobars and pyramid-like ones, aligned along <011> directions on (100) silicon substrate with the length up to 1.5 µm, width ranging between 80 and 500 nm and thickness from 30 to 170 nm.