The complexity of performing accurate small-field dosimetry also arises from the detectors available commercially. Standard fabrication technologies for solid-state detectors adopted for small-field dosimetry are still very limited due to their dimensions in relation to the radiation field and their large angular dependence [16; 17]. The currently available detectors do not meet all the critical requirements of a dosimeter for SRS, such as minimal dose rate and angular dependence, requiring several different detectors to be utilized for different type of measurements or in combination by using the technique named daisy-chaining [12; 18]. Gafchromic films such as EBT3 are recommended for patient-specific QA in CyberKnife(r) since it is directionally independent with a high spatial resolution and tissue equivalent response in MV photon irradiation [19; 20; 21]. However, it does not have a linear response and its reproducibility is limited for doses ranging from 0.01 Gy to 30 Gy, which is insufficient for measuring doses used in treating brain functional diseases as the detector is required to measure doses up to 100 Gy. Films also involve extensive time for development after exposure (approx. 24 h). In addition, the establishment of a consistent method for interpreting dose readings is critical [19; 20]. Recent advancements in commercial solid-state dosimeters, such as SRS MapCHECK [22], Octavius 1600 SRS [23], and IBA myQA SRS [24], offer detector arrays which provide a consistent response in megavoltage photon beams regardless of energy, small sensitivity, and small sensitive volumes. Compared to Gafchromic films, they are more sensitive to ionizing radiation and have a wider dynamic range, as well as the ability to provide real-time measurements. However, for accurate dose measurements, several correction factors are needed. They exhibit angular dependence and are influenced by dose rates [25]. Since they are usually fabricated on silicon substrates, their responses are subject to depth and field-size dependencies, which stem from the perturbations introduced to electron and photon fluences by their sensitive volumes and extra-cameral materials used for packaging [26; 27]. The angular dependency of commercial solid-state detectors can affect the response by up to 25% in a range of angles from 0 to 90 degrees [28], and correction factors are needed to compensate for the angular dependency of the sensor. However, this has proven ineffective in robotic SRS or for non-coplanar arc deliveries [29]. Accurate correction factors to mitigate energy, dose rate, and angular dependence of a detector rely on multiple factors such as detector design, LINAC head design, beam quality, field size, and type of collimation, which often can be evaluated only by Monte Carlo simulations. This task can be laborious and also involves the use of information from the machine manufacturers often not available to the public [12]. Therefore, developing a technology that is correction-free is desirable as this would simplify the QA procedures and improve reliability and accuracy of the measurements. A new technology was subjected to experiments by CERN in 2015 for manufacturing detectors with 3D PIN junctions for high energy physics ionizing radiation. The methodology proposed has been investigated by the Centre of Medical Radiation Physics (CMRP) as a potential solution to overcome the intrinsic angular dependence of planar silicon diodes when used as dosimeters. The new technological platform is named \"edgeless silicon diodes\" and utilizes thin floating-zone silicon substrates to manufacture single diodes with three-dimensional junctions. Individual diodes are separated from the wafer through an ion-coupled plasma etching method, and the 3D junction is created by an innovative lateral ion implantation technique [30; 31]. The effectiveness of the single edgeless diodes was confirmed for QA of CyberKnife(r) robotic stereotactic radiosurgery.