## 6 Conclusions and Perspectives
\begin{table}
\begin{tabular}{c c c c c c c c c c} \hline \hline
**Ref.** & **Contact** & **Array** & **DoF** & **A.P** & **Control** & **Surface (mm)** & **Object (mm)** & **Speed** & **Resolution** & **Precision** \\  & & & & & & & & (mm) & (\(\upmu\)m) \\ \hline \hline
[6] & Yes & Yes & 2 & Analog & Open & 264 \(\times\) 264 & 132 \(\times\) 132, 11 g & 354 & 400 & - \\ \hline  & & & & & & & Electrothermal conveyors & & & \\ \hline
[20] & Yes & Yes & 3 & Digital & Both & 40 \(\times\) 40 & 5 \(\times\) 7, 24 mg & 0.67 & 2 & 2 \\
[21] & Yes & Yes & 3 & Digital & Both & 16 \(\times\) 16 & 0.8 \(\times\) 0.8, 78 ug & 0.057 & 0.28 & 1 \\ \hline  & & & & & & Piezoelectric conveyors & & & & \\ \hline
[9] & No & Yes & 2 & Analog & Closed & 10 \(\times\) 10 & 300, 129 g & 0.3 & 2 & 0.07 \\ \hline  & & & & & & & & & \\ \hline
[10] & No & Yes & 3 & Analog & Closed & 75 \(\times\) 75 & 150 & 300 & - & 93 \\
[11] & No & No & 3 & Analog & Closed & 228 \(\times\) 204 & - & 80 & 200 & - \\
[12] & Yes & Yes & 16 & Analog & Closed & 110 \(\times\) 93 & - & 70 & - & - \\ \hline  & & & & & & & & & \\ \hline  & & & & & & & & & & \\ \hline  & & & & & & & & & \\ \hline  & & & & & & & & & \\ \hline
[7] & No & No & 3 & Analog & Closed & 8 \(\times\) 8 & - & 2.3 & 100 & 10 \\ \hline  & & & & & & & & & \\ \hline  & & & & & & & & & \\ \hline  & & & & & & & & & \\ \hline \hline
**Present** & Yes & Yes & 3 & Digital & Open & 100 \(\times\) 100 & 8.9 g & 2 & 8 & 5 \\ \hline \hline  & & & & & & & & & \\ \hline \end{tabular}
\end{table} 
Table 2: Literature comparison. **Supplementary Materials:** The following are available online at [[https://www.mdpi.com/article/10.3390/app112411980/s1](https://www.mdpi.com/article/10.3390/app112411980/s1)]([https://www.mdpi.com/article/10.3390/app112411980/s1](https://www.mdpi.com/article/10.3390/app112411980/s1)), Video S1: MPM switching (driving current of 3.5 A) and the plate displacement (two steps) along \(x\)-axis. **Author Contributions:** Conceptualization, S.D.T., L.P. and C.P. ; methodology, S.D.T. ; software, S.D.T. and A.T.; formal analysis, S.D.T. ; investigation, S.D.T. and A.T.; writing--original draft preparation, S.D.T. and A.T.; writing--review and editing, S.D.T., L.P. and C.P. ; visualization, S.D.T. and A.T.; supervision, L.P.; project administration, S.D.T., L.P. and C.P. ; funding acquisition, L.P. All authors have read and agreed to the published version of the manuscript. **Funding:** This work was funded by a public grant overseen by the French National Research Agency (ANR) as part of the \"Tridimensional micro-conveyance systems for micro-factory\" program (ANR-15-CE10-0002-01). **Institutional Review Board Statement:** Not applicable. **Informed Consent Statement:** Not applicable. **Conflicts of Interest:** The authors declare no conflict of interest. The funders had no role in the design of the study; in the collection, analyses, or interpretation of data; in the writing of the manuscript, or in the decision to publish the results. **Abbreviations**  
The following abbreviations are used in this manuscript:  
EDA elementary digital actuator  
DAA digital actuator array  
DoF degree of freedom  
FPM fixed permanent magnet  
MAE mean-absolute error  
MPM mobile permanent magnet  
RMSE root-mean-square error