# SiMFlex Micromanipulation Cell with Modular Structure
## 1 Introduction  
There has been an increased interest in reducing macro to micro systems and then to nano systems over the recent years. Therefore, the mechanical devices which use classical mechanisms are heading to a new level of development--the compliant mechanisms. No matter what kind of devices you see every day, they have some underlying mechanisms that govern the motion that produces the desired output. Mechanisms are used to transform and transfer motion, force, or energy. Traditional rigid body mechanisms consist of rigid links interconnected by joints [1]. In response to the specific requirements imposed by the miniaturization process, new types of mechanisms, inspired by nature, have been developed, which are compliant mechanisms [2; 3; 4]. Compliant mechanisms have been used for decades in different fields and industries. Unlike rigid-link mechanisms and movable joints, the compliant mechanisms gain at least some of their mobility from the deflection of the flexible members. There are very stable and reliable mechanical structures with flexible hinges and rigid or flexible elements that can be considered fully or partially compliant mechanisms [1]. There has been a huge interest in the topic of compliant mechanisms worldwide and some of the main representative works are the ones that will be presented hereinafter. First, we mention the patents [5; 6] where universal clamping devices are proposed. This device has a movable arm. We consider this invention as representative for our field of interest since it is the classic version, where there is the possibility to change arms. This movable arm is locked in a gripping position by gripping against a movable locking element. A pair of swivel arms are held in the grip positions by a linear sliding locking element between the ends of the arms. The variable configurations of the movable arms can be easily changed between them and it can be mounted on a body by means of a single fixed pivot. The opening angle of a clamping arm can be mechanically limited to different positions by the selective positioning of an adjusting element. There is also the work of [PERSON] et al. [7] who developed a dexterous micro-manipulation system for applications such as micro machine assembly, cell manipulation and microsurgery. He proposed a concept of a two-fingered micro-hand and designed and built a prototype. Basic micro-manipulations were performed, including grasping, releasing and rotating a microscopic object [7]. In [8], a new design of the mobile micro-manipulation system for the robotic micro assembly is presented. This is a design where a piezoelectric actuator-based clamping device is developed for handling miniature parts with a compensation of the misalignment during the peg-in-hole assembly is done because the piezoelectric actuator can produce micron shift and generate high force instantly [8]. Inventor [PERSON] [9] creates a micromanipulator that comprises a pair of hand modules each. They include a circular base plate with three connection points, a final effector consisting of a moving circular plate and a finger attached to the mobile plate. The solution of the invention relates to a micromanipulator adapted for the use that requires precise positioning in the \(\upmu\)m range, in particular for use in the integrated circuit (IC) industry (for precise chip positioning), in bioengineering, medicine (microsurgery), satellite communications (precise positioning antenna), etc. [10]. [PERSON], [PERSON], and [PERSON] [11] have developed a new method for designing micro-business systems. This method based on modularity combines a top-down approach related to production systems with a bottom-up approach to consider the specific constraints of microworld technologies and know-how. In order to perform an assembly task, we need operating devices and scenarios adapted to the manipulation.