# Numerical Analysis of the Breakdown Process of CF\({}_{3}\)I at Low Pressure
In addition, the breakdown characteristics of CF\({}_{3}\)I under low-pressure conditions have been a significant focus in various applications. Within the realms of pulse discharge, thin film deposition, etching, and chemical catalysis, investigating the breakdown of CF\({}_{3}\)I under low-voltage discharge conditions has substantial practical significance [17]. For example, [PERSON] et al. investigated the pulse discharge characteristics of helium and CF\({}_{3}\)I gas mixtures in a chemical oxygen iodine laser by numerical simulation with a one-dimensional fluid model. The density of iodine atoms produced by the discharge was shown to increase when the pulse width and pulse voltage amplitude increased. And there exists an optimal mixing ratio between helium and CF\({}_{3}\)I, at which the concentration of iodine atoms can be reached to reach the maximum value after discharge [18]. In a related study, [PERSON] et al. explored the application of CF\({}_{3}\)I in the realm of high-aspect-ratio low-temperature dielectric etching. Their findings suggested a minimal risk of arc and posited that the research experience with CF\({}_{3}\)I could be extrapolated to other gases containing halogens [19]. Therefore, it is clear that the study of CF\({}_{3}\)I, both under high- and low-pressure conditions, has considerable research value. In general, a large number of experimentally based studies have been conducted in the field of CF\({}_{3}\)I, providing valuable information. However, obtaining sufficient information on particle kinematics through purely experimental methods is challenging. In particular, CF\({}_{3}\)I, as a polyatomic gas, undergoes many reactions during the discharge process, producing a large number of particles and thus changingthe distribution of the space charge and the electric field. This makes it difficult to obtain microscopic information, such as the spatial distribution of the particle density, by purely experimental means. This problem can be avoided by studying CF3I by simulation. In recent years, studies on electronegative gases have focused mainly on the steady state. Few studies have been conducted on the process of gas breakdown under low-pressure conditions. The breakdown process under low-pressure conditions is closely related to practical applications such as pulse discharges and semiconductor processing and is of great research value. Therefore, in order to better understand the physical process of breakdown under low-pressure conditions, further research in this area is necessary. Some researchers have already realized this problem and launched studies. For example, [PERSON] recently used the PIC/MCC program to successfully investigate the double frequency breakdown process of Ar [20], offering a potential avenue to study the low-voltage breakdown process of other gases. [PERSON] further used the PIC/MCC method to explore the low voltage DC breakdown process of SF6 [21]. However, few studies have explored the breakdown characteristics of CF3I under DC low-pressure conditions. Since the PIC/MCC method facilitates the analysis of variations in various particle parameters throughout the breakdown process, this paper will employ this model to examine CF3I, an alternative gas to SF6. The objective is to thoroughly investigate the breakdown process of CF3I under low-pressure conditions. This article is divided into five parts, as follows: In Section 2, the physical model and numerical method are presented and the principle of the research method utilized in this paper is elucidated. In Section 3, the simulation results are presented, and the changes in parameters (including particle density, current density, particle energy, and heating power) of electrons, positive ions, and negative ions over 150 \(\upmu\)s are analyzed in depth. In Section 4, the particle equilibria, the power equilibria, and the Paschen curves are given. Section 5 provides the conclusion of this paper.