Optomechanical Coupling Active Control for Improving Beam Pointing Accuracy of the Spatial Filter in PW Laser Facility  
[PERSON]  
1 Joint Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; [EMAIL_ADDRESS] (J.Z. ); [EMAIL_ADDRESS] (Z.L. ); [EMAIL_ADDRESS] (Q.F. ); [EMAIL_ADDRESS] (Z.J. ); [EMAIL_ADDRESS] (J.Z. ); [EMAIL_ADDRESS] (W.L. ); [EMAIL_ADDRESS] (Z.D.) [PERSON]  
1 Joint Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; [EMAIL_ADDRESS] (J.Z. ); [EMAIL_ADDRESS] (Z.L. ); [PERSON]L_ADDRESS] (Q.F. ); [EMAIL_ADDRESS] (Z.J. ); [EMAIL_ADDRESS] (J.Z. ); [EMAIL_ADDRESS] (W.L. ); [EMAIL_ADDRESS] (Z.D.) [PERSON]  
1 Joint Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; [EMAIL_ADDRESS] (J.Z. ); [EMAIL_ADDRESS] (Z.L. ); [EMAIL_ADDRESS] (Q.F. ); [EMAIL_ADDRESS] (Z.J. ); [EMAIL_ADDRESS] (J.Z. ); [EMAIL_ADDRESS] (W.L. ); [EMAIL_ADDRESS] (Z.D.) Quantang Fan  
1 Joint Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; [EMAIL_ADDRESS] (J.Z. ); [EMAIL_ADDRESS] (Z.L. ); [EMAIL_ADDRESS] (Q.F. ); [EMAIL_ADDRESS] (Z.J. ); [EMAIL_ADDRESS] (J.Z. ); [EMAIL_ADDRESS] (W.L. ); [EMAIL_ADDRESS] (Z.D.) [PERSON]  
1 Joint Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; [EMAIL_ADDRESS] (J.Z. ); [EMAIL_ADDRESS] (Z.L. ); [PERSON]L_ADDRESS] (Q.F. ); [EMAIL_ADDRESS] (Z.J. ); [EMAIL_ADDRESS] (J.Z. ); [EMAIL_ADDRESS] (W.L. ); [EMAIL_ADDRESS] (Z.D.) [PERSON]  
1 Joint Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; [EMAIL_ADDRESS] (J.Z. ); [EMAIL_ADDRESS] (Z.L. ); [EMAIL_ADDRESS] (Q.F. ); [EMAIL_ADDRESS] (Z.J. ); [EMAIL_ADDRESS] (J.Z. ); [EMAIL_ADDRESS] (W.L. ); [EMAIL_ADDRESS] (Z.D.) [PERSON]  
1 Joint Laboratory on High  
beam pointing stability and beam focusing performance. The error of beam pointing stability can be divided into static error and dynamic error. The static error, such as assembly error, collimation error, and beam pointing error caused by slow drift, is relatively easier to adjust and control, while the dynamic error, such as structural vibration and thermal disturbance, is random disturbance and difficult to control. In recent years, the problem of beam jitter suppression of optical facilities has attracted more and more attention from scientific research teams, and the vibration of the optical system has become frontier research. [PERSON] [14] and [PERSON] [15] have studied the influence of the optical system misalignment on beam quality under vibration. [PERSON] [16], and others proposed a beam correction principle by calibrating the beam pointing path and beam position path, which uses the relationship between the rotation angle and the PSDs signal to correct the beam drift. [PERSON] [17] proposed an interference classification method based on LSTM and GRU to select appropriate control parameters to achieve the purpose of beam pointing stability control. Recently, a cavity free Optomechanical coupling scheme has been experimentally implemented in III-V semiconductor micromachining system, which provides enlightenment for the development of functional integrated Optomechanical devices [18]. In order to suppress the beam jitter, we need to start from the dynamics, control theory, and optical field, to find the law and reason of the optical system maladjustment, and design the appropriate controller. There are three kinds of beam pointing control methods: Precision design of the optical structure, vibration control of the optical mechanical structure, and beam stabilization technology.