# Microheater Topology for Advanced Gas Sensor Applications with Carbyne-Enriched Nanomaterials
## 4 Conclusions  
Based on the results achieved, it can be concluded that the carbyne-enriched sensing layer, in conjunction with varying microheater topologies, demonstrates distinct behavior in response to the desorption and subsequent sorption of gas molecules. The investigation revealed that the contact resistance showed minimal deviation after heating, suggesting excellent thermal stability in the carbyne-enriched layer without any accompanying change \begin{table}
\begin{tabular}{c c c c} \hline \hline
**Microheater Topology** & \begin{tabular}{c} **Voltage Sensitivity** \\ **Change \(\Delta\mathbf{S_{v}}\), \%** \\ \end{tabular} & \begin{tabular}{c} **Measurement Accuracy** \\ **Change \(\Delta\epsilon\), \%** \\ \end{tabular} \\ \hline Small meander & \begin{tabular}{c} 22 mV before heating \\ 14 mV after heating \\ \(\Delta\mathbf{S_{v}}=-\mathbf{36\%}\) \\ \end{tabular} & \(\Delta\epsilon\) = 2.7\% (hysteresis 2.5\%) \\ \hline Large meander & \
\begin{tabular}{c} 330 mV before heating \\ 255 mV after heating \\ \(\Delta\mathbf{S_{v}}=-\mathbf{22\%}\) \\ \end{tabular} & \(\Delta\epsilon\) = 25\% (hysteresis 23.3\%) \\ \hline Dense rectangular &
\begin{tabular}{c} 370 mV before heating \\ \(\Delta\mathbf{S_{v}}=-\mathbf{10.8\%}\) \\ \end{tabular} & \(\Delta\epsilon\) = 21\% (hysteresis 19\%) \\ \hline \hline \end{tabular}
\end{table} 
Table 1: Effect of the microheater topology on the sensor performance for the middle of the detecting range of ethanol vapors (430 ppm). \begin{table}
\begin{tabular}{c c c c c c c} \hline \hline
**Microheater** & \begin{tabular}{c} **Microheater** \\ **Geometry/** \\ **Dimensions** \\ \end{tabular} & \begin{tabular}{c} **Material and** \\ **Thickness** \\ \end{tabular} & \begin{tabular}{c} **Operational** \\ **Temperature** \\ \end{tabular} & \begin{tabular}{c} **Power** \\ **Consumption** \\ \end{tabular} & \
\begin{tabular}{c} **Transient** \\ **Response** \\ \end{tabular} &
\begin{tabular}{c} **Sensor** \\ **Hysteresis** \\ \end{tabular} & **Reference** \\ \hline Spiral/ & & & & & & & \\
10 μm & PolySi/ 1 μm & 300 \({}^{\circ}\)C & 12.63 mW & 11.5 ms & 4.8\% & [27] \\ Spiral square/ & & & & & & \\
1.5 mm \(\times\) 1.5 mm & NiCr-Pt/10 μm & 100 \({}^{\circ}\)C & 6.5 mW & 7 ms & 3.4\% & [28] \\ Meander/ & PolySi-Au/500 & & & & & & \\
1 mm \(\times\) 400 μm & nm & & & & & \\ Interiditated/ & & & & & & \\
1.2 mm \(\times\) 1 mm & Invar/400 nm & 100 \({}^{\circ}\)C & 90 mW & N/A & N/A & [29] \\ Interdigitated/ & & & & & & \\
6 mm \(\times\) 6 mm & Pt/200 nm & 140 \({}^{\circ}\)C & N/A & N/A & 10.3\% & [30] \\ Small meander/ & & & & & & \\
1.2 mm \(\times\) 300 μm & Pt/280 nm & 80 \({}^{\circ}\)C & 1.92 mW & 0.33 ms & 2.7\% & This work \\ \hline \hline \end{tabular}
\end{table} 
Table 2: Comparison of the basic parameters of gas sensor microheaters. in microstructure. However, the interface capacitance did vary with the size and strength of the microheaters, potentially indicating the presence of thermally stimulated charges and additional charges from the piezoelectric substrate, resulting in higher capacitance. The analysis of sensors with different microheater topologies revealed distinct response characteristics. The small meander microheater presented efficient recovery properties, indicated by a low deviation in time delay at low and high concentrations, ultimately leading to a narrow hysteresis and linear sensor response. In contrast, the large meander and dense rectangular microheaters demonstrated a greater difference in time delay compared to the small meander with a broader hysteresis, potentially indicating non-reversible changes in the sensing structure. The significant increase in output voltage attenuation after desorption could be linked to alterations in the viscoelastic properties of the materials due to the broader thermal field spot.