# Experimental Study on Femtosecond Laser Processing Performance of Single-Crystal Silicon Carbide
## 4 Conclusions  
This study aims to investigate the significance and analyze the variance of different factors that can influence femtosecond laser processing of single-crystal SiC, through experimental methods. The findings indicate that laser fluence and numerical aperture have a significant impact on the size of groove and the HAZ during femtosecond laser processing of single-crystal SiC. The study findings suggest that repetition rate and multipass scanning have a considerable influence on groove depth, MRR, HAZ and sidewall inclination angle during the femtosecond laser processing of single-crystal SiC. Additionally, they also moderately affect the groove width. The scan speed has a significant effect on the groove depth, groove width, HAZ and side wall inclination angle but has insignificant effect on the MRR. Increasing the laser energy injected into the workpiece, such as increasing the fluence, reducing the scan speed, increasing the repetition rate, increasing the multipass scanning and increasing the numerical aperture, can increase the material removal and HAZ.  
The effects of process parameters on the aspect ratio and the HAZ of grooves were experimentally studied. The results show that the aspect ratio and the HAZ can be increased by increasing the multipass scanning, increasing the laser fluence, decreasing the scan speed and decreasing the z-layer feed step. Increasing the laser polarization angle will slightly increase the HAZ width on the surface of single-crystal SiC but has little effect on the size of the groove. With an increase in the number of scans, the aspect ratio of the groove also increases. However, due to the spot diameter limitation, the HAZ remains relatively unchanged when the number of scans is 10, 30 and 60. Furthermore, the aspect ratio obtained through the z-layer feeding method is greater compared to that obtained through the same scanning time.  
Conceptualization, R.Z. and Q.W.; methodology, R.Z. and Q.W.; validation, Q.C. and A.T.; investigation, R.Z. and Q.W.; data curation, R.Z. and Q.W.; writing--original draft preparation, R.Z.; writing--review and editing, Q.W., Q.C., A.T. and W.Z.; visualization, R.Z.; supervision, R.Z.; project administration, Q.C., Q.W. and A.T. All authors have read and agreed to the published version of the manuscript.  
This research was funded by Jinan City School Integration Development Strategy Engineering Project: Intelligent Manufacturing \"VR+\" Online Education Technology Innovation Research Institute, funder grant number JNSX2021050; Construction of Case Library for the Course of Intelligent Manufacturing Technology Based on VR Technology, funder grant number ALK202108; and the High Quality Curriculum Construction Project of Shandong Jianzhu University Graduate Education, funder grant number YZKC202210.  
Not applicable.  
The manuscript is approved by all authors for publication.  
The data that support the findings of this study are available from the corresponding author upon reasonable request.  
The authors declare no conflict of interest. The manuscript is approved by all authors for publication, and it is not under consideration for publication elsewhere, in whole or in part.