## 1 Introduction
[9] established a motor control model based on fuzzy PID control and simulated the control model to prove that the control method was successful. [PERSON] et al. [10] designed the simulation experiment of PID control and fuzzy PID control for the change of bed pressure rate. The analysis showed that the fuzzy PID controller has better effects in dynamic response. [PERSON] et al. [11] designed a fuzzy PID controller for a disturbance observer of ball mill grinding, which can ensure the anti-interference movement of a ball mill. In terms of a micro-machining control system, [PERSON] [12] designed the control system of an integrated circuit parallel seam welder, combined with machine vision, and constructed the control interface with the C# programming language. [PERSON] [13] used the motion control card to realize the motion control of the servo motor, used LabVIEW and MATLAB to construct the software control system and used the control idea of \"trajectory discretization + interpolation motion + real-time feedback\" to complete the control program of each functional module. [PERSON] et al. [14] used LabVIEW to design a set of laser fine machining/monitoring system, used a micro-motion program and a position data acquisition program to compensate for errors and used machine vision technology to determine the processing defect area to improve the accuracy of laser processing. [PERSON] et al. [15] proposed the laser etching method of a micro-heat pipe composite groove, designed an orthogonal experiment to explore the influence of laser parameters on groove etching effect and optimized the laser etching process parameters of a micro-heat pipe composite groove. [PERSON] et al. [16] analyzed the temperature change in the process of continuous laser metal cutting by establishing a simulation model and studied the metal plate processing efficiency of different wavelengths of laser by process test. Aiming at the problem of laser etching of aluminum alloy sheet, [PERSON] et al. [17] analyzed the effects of laser power, laser cutting speed and gas pressure on laser etching mass, established an orthogonal experiment based on a single-factor experiment and obtained the process parameter combination with the best etching effect. According to the engineering application of a carbon dioxide laser in thick plate cutting, [PERSON] et al. [18] analyzed the quality evaluation index of thick plate laser cutting. [PERSON] et al. [19] analyzed the laser cutting process of an Al-Li alloy, designed the orthogonal experiment based on the single-factor experimental results and optimized the process parameters by means of analysis of variance and signal-to-noise ratio analysis. The MCR is a device made by using the resonance principle. When the frequency of the external electrical signal is equal to the natural frequency of the MCR, the MCR will resonate and realize the conversion between electrical energy and mechanical energy [20]. MCRs are mostly frequency-modulated individually, which makes them difficult to produce in large quantities. Few studies have been performed on large-range and high-precision carrier platforms and laser processing control systems for frequency modulation. Laser micro-machining experiments are mostly carried out through laser cutting and laser welding. There are few experimental studies on the processing of micro-electronic products such as MCRs. The selection of laser control parameters in laser etching lacks theory. The laser processing control system for MCR frequency modulation realizes multi-objective MCR frequency modulation control and provides a reference for multi-objective micro-machining control of other electronic products. Optimization of process parameters for MCR frequency modulation provides a reference for laser micro-machining experiments and parameter selection of other electronic components.