## 5 Conclusions and Outlook  
The demand for nanostructuring on large areas with the highest possible throughput is constantly increasing. Velocity also plays a major role in how fast as many nanostructures as possible can be produced on wafer sizes. Tip-based technology specifically has its limits in terms of velocity in the millimetre per second range. However, there are some techniques, such as laser-based direct writing and autofocus sensors, that can easily keep up with these velocities. It is of great importance to be able to perform sub-nanometre positioning at high speeds in order to be able to make precise measurements of surface topographies.  
This paper presented a newly developed positioning machine and its motion precision in the higher speed range. First, the static condition was considered and then the dynamic positioning properties were examined in more detail. Both linear and circular movements were performed and analysed in relation to the set trajectory. In addition, the maximum movement of the table in the \(z\) direction was checked with the existing tip-based system. It was thus possible to find out that the noise of the slider and/or the machine setup is clearly below 1 nm.  
Future contributions will focus on nanofabrication. It is indeed already possible to carry out spiral movements, which could be of importance in the future for production by lithography. The ability to easily switch between the measuring mode and the writing mode  
Figure 14: Comparison of the line profiles (taken from AFM images in Figure 13) with the NFM-100 switched on in closed-loop control and switched off.  
Figure 13: Non-contact AFM images of a 6H-SiC [28] sample with a step height of 0.75 nm with the machine table of the NFM-100 switched off (**left**) and the table switched on in closed-loop control (**right**). The scanning speed for this measurement was 5 μm/s.  
of the tip-based system [29; 30; 31] will demonstrate patterning with line widths below 100 nm over a large range of motion. Due to the low noise of the stage in all three dimensions, it can be guaranteed that the structuring as well as measurements of the surface are not significantly influenced by the movement of the stage. The comparison of the two AFM images with structure heights of 0.75 nm with the table switched on and off has shown that the noise of the table in the \(z\) direction has a minor influence on the AFM measurements. Nevertheless, this can be optimised in the future by additional adaptive control [32] with the use of a third axis [33].  
Conceptualisation, D.D., E.L., S.H., I.R. and E.M.; methodology, J.S. and I.O.; validation, J.S. and J.B.; investigation, J.S.; writing--original draft preparation, J.S.; writing--machine control, J.B., J.S. and S.H.; writing--review and editing, J.S., I.O., J.B. and E.M.; visualisation, J.S.; supervision, E.M. and I.O.; project administration, E.M. and I.O. All authors have read and agreed to the published version of the manuscript.  
This research was funded by the state Thuringia and the European Regional Development Fund (ERDF) in the scope of the program \"Promotion of research, technology and innovation\", under contract 2018 VF0008 and 2018 FE9020, and the Deutsche Forschungsgemeinschaft (DFG) in the scope of the program \"Forschungsgrogerite\", under contract INST 273/75-1 FUGG.  
Not applicable.  
This research was supported by the Deutsche Forschungsgemeinschaft (DFG) in the scope of the Research Training Group \"Tip- and laser-based 3D-Nanofabrication in extended macroscopic working areas\" (GRK 2182) at Technische Universitat Ilmenau. The authors also thank [PERSON] for the fruitful discussions regarding the control of the machine.  
The authors declare no conflict of interest.