## 1 Introduction
This article is outlined as follows: In Section 2, the used fluid model for the ICP source and chemical reactions for Ar/O\({}_{2}\) and Ar/SF\({}_{6}\) plasmas are given. In Section 3.1, the first simulated phenomenon is given, i.e., the comet-shaped structure found in the Ar/O\({}_{2}\) ICP source, which is characterized by the free diffusion and negative chemical source (recombination loss of anions). The dimensional analysis shows that the recombination can be transferred into drift flux and then balance the free diffusion. This forms a static and mechanical balance between the physics and chemistry. Furthermore, in the related discussion of Section 4.1, the self-coagulation theory is built via the free diffusion andnegative chemical source, which explains mathematically the formations of both the comet- and semi-circle-shaped coagulated structures (see Section 3.2). In Section 3.2, the second simulated phenomenon is given, i.e., the blue sheaths found in Ar/O\({}_{2}\) and Ar/SF\({}_{6}\) ICP sources. In the Ar/O\({}_{2}\) plasma, the coagulated structure is comet-shaped, and a blue sheath surrounds it. In the Ar/SF\({}_{6}\) plasma, the coagulated structure is semi-circle-shaped, and the blue sheath still surrounds it. In both cases, the plasmas surrounded by the blue sheaths are both electrically neutral. For explaining the blue sheath, in the related discussion of Section 4.2, firstly, the advective type of self-coagulation that causes blue sheath is introduced. It is noticed that the comet-shaped coagulated structure is utilized to illustrate the advective self-coagulation, but it also applies to the semi-circle-shaped coagulated structure. Secondly, the ambipolar type of self-coagulation is introduced to explain the electrically neutral plasma core surrounded by a blue sheath. Similarly, the semi-circle-shaped coagulated structure is utilized to illustrate the ambipolar self-coagulation, but it also applies to the comet-shaped coagulated structure. Moreover, at the high electronegativity of Ar/SF\({}_{6}\) plasma, the decoupling of electron dynamics from the ambipolar self-coagulation of anion and cation pairs is also mentioned. In addition, in the process of introducing the ambipolar type of self-coagulation, the physical coagulation of anions that is driven by potential barrel and the chemical coagulation of anions that is self-happened by the chemistry are compared in the Ar/SF\({}_{6}\) plasma. It is seen from the simulation that the physical coagulation creates a cliffy border of anion density beneath the coil while the chemical coagulation creates a soft border of anion density therein, which implies the external physical factor is more robust than the internal chemical factor at coagulating the plasma anions. In the Ar/SF\({}_{6}\) plasma, given by the ambipolar self-coagulation, each anion and cation species generated through discharge can have their respective coagulated structures. In Section 3.3, the third simulated phenomenon is given, i.e., the collapse of individual semi-circle-shaped coagulated structure. Concretely, for the anions, the coagulated peak of the sum of heavy SF\({}_{5}\)\({}^{-}\) and SF\({}_{6}\)\({}^{-}\) densities is dispersed by the light and coagulated F\({}^{-}\). For the cations, the coagulated peak of heavy SF\({}_{3}\)\({}^{+}\) is collapsed by the light and coagulated Ar\({}^{+}\). It is seen that the lighter the species is, the easier it self-coagulates and the more difficult its coagulation is dispersed, which is determined by the inertia effect of density quantity. In addition, the destruction of coagulated cations by the expelling effect is more severe than the anions because the cations are coagulated by the ambipolar self-coagulation, which represents the collective interaction of electronegative plasma. It is essentially the electrically abstracting force of anions that are coagulated to the cations and weaker than the chemical self-coagulation force.