## 2 Materials and Methods
Figure 1: Configuration of a 193-nm DUV microscope system based on the reflection mode. (**a**) Full configuration; (**b**) beam control stage; (**c**) microscope body tube; (**d**) four-axis controllable (x, y, z, and rotational stage) sample stage to control the large optical elements and microscope body tube. Figure 2 shows the full experimental configuration of the 193-nm DUV microscope based on the reflection imaging mode. The 193-nm excimer laser light is incident on the microscope body tube that is installed in the z-axis stage of the sample stage, after propagation through the beam attenuator, beam guide, fiber coupler, and optical fiber. After the light propagation in the microscope body tube, the light reflected from the sample is propagated into the UV-CCD. Independently, the feasibility setup using a flipper to switch beam direction is configured on the optical table to test the DUV microscope imaging before the full-scale application of the microscope system. This enables identification of the technical problems of the experimental configuration within a short time. Figure 3 shows a side view of the structure of the sample pattern prepared for the evaluation of the spatial resolution of the 193-nm DUV microscope system. A 50-nm thick Au film was deposited on a 4-inch silicon substrate, and a 225-nm line-width 1D grating pattern and a 400-nm line-width alphabet pattern were fabricated using E-beam lithography. Such 1D grating patterns with a fill factor of 50% are designed for the evaluation of the spatial resolution of periodic structures, and the alphabet patterns are designed for the evaluation of the spatial resolution of defects or cracks. \begin{table}
\begin{tabular}{c c c c c c c c} \hline \hline
**Axis** & **X** & & **Y** & & **Z** & & **R** \\ \hline
**Type** & **Spec.** & **Meas.** & **Spec.** & **Meas.** & **Spec.** & **Meas.** & **Spec.** & **Meas.** \\ \hline Actuator & Linear motor & \multicolumn{3}{c}{Linear motor} & \multicolumn{3}{c}{Linear motor + counterbalance} & \multicolumn{3}{c}{Direct drive motor} \\ \hline Max. travel length & 600 & 600 & 600 & 600 & 300 & 290 & 360\({}^{\circ}\) & 360\({}^{\circ}\) \\ (mm) & 600 & 600 & 600 & 300 & 290 & 360\({}^{\circ}\) & 360\({}^{\circ}\) \\ \hline Max. velocity & 100 & 100 & 100 & 100 & 100 & 100 & 30\({}^{\circ}\)/s & 30\({}^{\circ}\)/s \\ (mm) & 100 & 100 & 100 & 100 & 100 & 100 & 30\({}^{\circ}\)/s & 30\({}^{\circ}\)/s \\ \hline Resolution & \(\leq 5\) & 4.88 & \(\leq 5\) & 4.88 & \(\leq 5\) & 4.88 & \(\leq 0.01^{\circ}\) & \(\leq 0.01^{\circ}\) \\ (mm) & 100 & 100 & 100 & 100 & 100 & 100 & 100 & 100 \\ \hline Bi-dir. repeatability & \(\pm\) 0.5 & \(\pm\) 0.2 & \(\pm\) 0.5 & \(\pm\) 0.25 & \(\pm\) 0.3 & \(\pm\) 0.3 & \(\leq 0.05^{\circ}\) & \(\leq 0.05^{\circ}\) \\ (mm) & 100 & 100 & 100 & 100 & 100 & 100 & 100 & 100 & 100 \\ (mm) & 100 & 100 & 100 & 100 & 100 & 100 & 100 & 100 & 100 \\ \hline \hline \end{tabular}  
* Spec.: specification, Meas.: measurement, Max.: maximum, Dir.: directional.  
\end{table} 
Table 1: Performance indices for each axis of the sample stage. Specification and measurement results are compared. Figure 2: Full experimental configuration of the 193-nm DUV microscope system with the reflection imaging mode and the feasibility setup for test DUV microscope imaging.