## 5 Results and Discussion
At a distance of 5 mm, 15 mm, and 25 mm from the quartz window surface along the X-axis, in the case of quasi-coaxial line TEM mode, whose wavelength was longer than that of the circular TE\({}_{11}\), the tendency of oscillation was higher than that of the circular TE\({}_{11}\).The short wavelength of circular TE\({}_{11}\) mode was less affected and showed a relatively uniform electron density spatial distribution at 25 mm away from the window surface (with smoothing effect) [46]. Figure 12: Attenuation of electron density along the axial direction (Z-axis) in the XZ plane (quasi-coaxial TEM mode), distance (5 mm, 15 mm, and 25 mm for black, red, and blue lines, respectively) from the window surface along the X-axis, normalized norm \(|E|\) on the inner conductor (green line), and the window surface (purple line) are to compare the electron density distribution along the E-field. Figure 13: Attenuation of electron density along the axial direction (Z-axis) in the XZ plane (circular TE\({}_{11}\) waveguiding structure), distance (5 mm, 15 mm, 25 mm for black, red, and blue lines, respectively) from the window surface along the X-axis, normalized norm \(|E|\) on the cut-surface of the cylindrical waveguiding structure (surface of the inner dielectric rod shown by the green line), and the window surface (purple line) are to compare the electron density distribution along the E-field. Although the generation of electrons in the circular TE\({}_{11}\) mode was concentrated at the initial 100 mm of wave propagation, the electron density (X = 5, 15, and 25 mm) at Z > 100 mm was 1.5 to 2 times higher than the quasi-coaxial TEM. In the TE\({}_{11}\) mode, the electron density spatial distribution was formed close to the planar type. The waveguiding structure and the emitted field direction affected the attenuation of the electron density along the radial distance, the ratio of the electron density of 5-25 mm in the X-axis (at Z = 0) was 20% in the quasi-coaxial TEM mode and 33% in the circular TE\({}_{11}\) mode. When the same power per unit volume was applied to the plasma generation in the simulation, the number of electrons generated in the total volume was 2.8 \(\times\) 10\({}^{15}\) m\({}^{-3}\) in the quasi-coaxial line TEM mode and 2.3 \(\times\) 10\({}^{15}\) m\({}^{-3}\) in the circular TE\({}_{11}\) mode. Although the number of electrons produced in the entire volume was 20% higher in the quasi-coaxial line TEM mode than that in the circular TE\({}_{11}\), the number of electrons generated in the actual deposition region was 50% higher in the circular TE\({}_{11}\) mode than that in the quasi-coaxial TEM mode. In Figure 10, the spatial profiles of the electron temperature for each source are represented in the axial and radial directions. For the axial direction (XZ plane, Y = 0), the electron temperature was nearly constant along the axial distance. For radial distances in the XZ plane (Y = 0), near the window surface, the electron temperature was relatively high with a value of 3.5 eV while in the case of radial distances > 10 mm from the quartz window surface, the electron temperature with the value of 0.8-1.3 eV weakly depended on the radial distance. In Figure 10, the electron temperature distribution of the XY plane in each source varied depending on the shape of the emitted field profile such as the electron density distribution. The electron density and the electron temperature near the substrate surface (z = 20 and 25 mm) measured by a single LP are compared with the simulation results in Figures 14 and 15. The results of the experimental diagnosis show that the tendency is consistent with the simulation results. The experimental results in Figure 14a shows that the tendency of the electron density distribution along the Z-axis is consistent with the simulation result in Figure 14b. The electron density decreased along the wave propagation direction, and the attenuation ratio was higher in the circular TE\({}_{11}\) mode.