## 3 Discussion
Each deposit formed at N\({}_{2}\) or air environment does not show any similarities in the spectra. Both Raman spectra in Figure 5a,b show a broad baseline band in the range of 1800-3500 cm\({}^{-1}\), which was not found in either CS\({}_{2}\) or Si substrate, and shows the characteristic of a polymeric layer or multi-element composites. Among them, the continuum peak in the range of 2300 cm\({}^{-1}\) to 2700 cm\({}^{-1}\) and another peak at 2883 cm\({}^{-1}\) are related to the carbon related vibrations and CH stretching vibration of the deposited films, respectively [18; 19; 20; 21]. In these cases, the existence of such a broad peak in the Raman spectra could be assumably attributed to a morphology of the polymeric layer or electronic Raman scattering [22]. The peak at 3390 cm\({}^{-1}\) indicate the synthesis of the amorphous status of carbon. The broad ones at 1550 cm\({}^{-1}\) correspond to C-O vibrations [23]. The sharp transition at -2336 cm\({}^{-1}\) arises from ambient nitrogen (molecular) gas (Q-branch) [24; 25] and the peak at 1586 cm\({}^{-1}\) is  
Figure 4: EDS analysis for the deposited layers. The numerical analysis results are listed at tables: (**a**) VUV photo-dissociation in N\({}_{2}\), (**b**) in atmospheric air. The white square marks (in the left hand side images) in the SEM microscope images indicate the analysis area in the sample. assigned as ambient O\({}_{2}\) scattering. Both peaks are found due to the atomospheric scattering by the collimated probing laser beam at the substrate, as notated in Figure 5c [26]. The chemical bondings formed in the deposited films after VUV irradiation were investigated by XPS. Representative C 1s and S 2p XPS spectra of a deposited film including deconvoluated peak assignments are illustrated in Figure 6. Figure 6a,b show the C 1s and S 2p core level spectra of the sample after VUV irradiation with air environment, respectively. The deconvolution of C 1s spectrum is composed of two curves which correspond to the carbon bonding (sp3) and C-O bonding [27; 28; 29; 30]. S 2p peak can be deconvoluted into three species, corresponding to the C-S and S-O bond [30; 31; 32]. As shown in Figure 6c, the 288 eV component is tentatively assigned to amide C (N-C=O), carboxyl C (O-C=O) and carbonyl C (C=O) [30; 33]. While XPS measurements of samples with VUV irradiation in N\({}_{2}\) environment shows completely different spectra in Figure 6c,d. The spectrum of sp3 C shows relatively higher intensity than C-O bond in Figure 6c which was the opposite to the spectrum shown in Figure 6a. This is because larger fluence of VUV photons from the microplasma lamp reached to CS\({}_{2}\) precursor in N\({}_{2}\) environment, resulting in a higher C-C bond than C-O bond spectra. However, the high absorption of VUV photons by oxygen in the air environment will prevent delivering photons to the substrate than in the N\({}_{2}\) environment. Therefore, we expect that O\({}_{3}\) or active oxygen species will involve more than VUV photons in this specific process, which resulted in a higher C-O bond than C-C bond  
Figure 5: Raman spectrum analysis of the micro-deposit on a Si substrate formed by VUV illumination under (**a**) N\({}_{2}\) environment (**b**) atmospheric air, (**c**) Si substrate (for comparison), respectively. spectra in Figure 6a. Besides, the intensity of C-S peaks in air (Figure 6b) was higher than that of Figure 6d by the factor of 10. It shows that the VUV photodissociation of C=S (in CS\({}_{2}\)) leads the reaction pathways preferably toward C-C polymerization after the complete dissociation of C=S double bonds rather than forming C-S bond based polymeric bonds. The C-S-O bond formation is related to the partial oxidation with the C-S fragments, mainly obtained by direct photodissociation of a C=S bond of CS\({}_{2}\)[10]. In the air environment (Figure 6a,b), the formation of the C-O component is preferred over than C-S-O formation due to the oxidative dissociation process of C=S bonds as described above.