###### Abstract  
Total factor productivity (TFP) is considered a source of economic growth, and as the constraints of climate change and energy security gradually increase, green total factor productivity (GTFP) is also included in the meaning of the topic. In this study, we combine the super-SBM model with the GML index and include undesirable outputs to measure the GTFP of 26 manufacturing sub-sectors in China from 2004 to 2017. The results show that in the sample period, the GTFP growth rate of China's manufacturing continues to accelerate, and the driving force is mainly from green technological progress change (GTC), while the green technical efficiency change (GEC) generally declines. After entering the 13 th Five-Year Plan period, GEC also began to show a growth trend. The acceleration of green technological progress and the improvement of green technical efficiency jointly drove the CTFP of China's manufacturing industry to enter a rapid upward trajectory during the 13 th Five-Year Plan period, with an average annual growth rate of 5.16%. In addition, different categories of China's manufacturing industry have begun to develop in a different manner in recent years, which is mainly caused by the difference in the growth rate of green technological progress in the manufacturing industry. Specifically, the GTFP growth rate of equipment and high-tech manufacturing is the highest, followed by consumer goods manufacturing and energy-intensive manufacturing. Accordingly, this paper suggests that the manufacturing industry should further increase investment in R&D, optimize resource allocation, and formulate differentiated policies for different industries, so as to improve the GTFP of the manufacturing industry and promote the  
in GDP declines, showing a premature de-industrialization trend. [PERSON] [3] believed that after China enters the upper-middle income stage, manufacturing will an important driver of economic growth, and the decline in its share of added value will increase the risk of China falling into the \"middle-income trap\". China's 14 th Five-Year Plan also calls for keeping the share of manufacturing value added in GDP basically stable. Total factor productivity (TFP) is an important driving force for the sustainable development of the manufacturing industry. As the constraints of climate change and energy security gradually increase, green total factor productivity (GTFP) is also included in the meaning of the topic [4; 5], that is, to take a green and low-carbon transformation road to achieve a win-win situation for industrial development and environmental protection. Therefore, it is necessary to measure green total factor productivity in China's manufacturing industry and provide a basis for the relevant departments to understand the development status of the manufacturing industry. At present, scholars mainly use data envelopment analysis (DEA) to measure green total factor productivity in China's manufacturing industry, and the research mainly focuses on two aspects. First, one can measure green total factor productivity of the manufacturing industry in each province by using provincial panel data [6; 7; 8; 9; 10; 11; 12; 13; 14]. Second, one can measure green total factor productivity of the manufacturing sub-sectors by using manufacturing panel data [15; 16; 17; 18; 19]. In the research on green total factor productivity of the manufacturing sub-sectors, most scholars use labor, capital stock and energy consumption as input indicators, industrial output as desirable output, and pollutant emissions as undesirable output. As the industrial output data of China's manufacturing sub-sectors have not been released since 2012, most studies could only measure green total factor productivity of the industrial sectors before 2013. This study uses the industrial added value rate (industrial added value/industrial output) to estimate the industrial output of China's manufacturing sub-sectors, thus expanding the time range of the industrial output data.