# Research on High-Speed Vibration and Structure Optimization of Multiwire Sawing Machine
## 1 Introduction  
A multi-wire sawing machine is a high-precision machine that cuts materials via friction using the sawing edge attached to the steel wire moving at a high speed [1]. Compared with a traditional inner circle slicer, the multi-wire sawing machine has high efficiency, high capacity, and high precision for slicing semiconductor materials and is the most widely used wafer sawing technology at present [2; 3]. With the rapid development of the photovoltaic and semiconductor industries, the existing sawing efficiency does not meet the production needs of enterprises; to improve the sawing speed and efficiency of the material, it is necessary to improve its alignment speed, so that it will be able to withstand high speeds [4; 5]. Increasing the alignment speed can reduce the sawing time, material consumption, production costs, etc., but with the increasing speed of the alignment the operational stability requirements are also increasingly high [6; 7].  
After research, although some manufacturers launched a multi-wire sawing machine with a 1800 m/min line speed, the actual sawing stability of the machine tool is limited; when it runs at a line speed of 1800 m/min, the violent vibrations of the machine tool reduce the slicing quality, indicating that its existing structure does not meet the requirements of the use of a high line speed. Therefore, the study of the dynamic characteristics and operational stability of multi-wire sawing machines at high wire speeds is of great importance to the slicing industry [8; 9]. Similarly, by optimizing the structural configuration of the machine tool, the material is more rationally distributed and effectively utilized to improve its performance, which is also an important goal pursued by the designer [10; 11].  
There are minimal published results on high-wire-speed multi-wire sawing machine research, but there are many research results on the dynamic and static characteristics and optimal design of multi-wire sawing machines. [PERSON] [12] performed finite element modeling and static mechanical analysis of a multi-wire sawing machine. [PERSON] et al. [13] performed a dynamic mechanical analysis of a multi-wire sawing machine and compared the modalities of each order. [PERSON] [14] and [PERSON] [15] studied and analyzed the static and dynamic characteristics of a machine tool and optimized its structure. [PERSON] et al. [16] used a genetic algorithm for the topology optimization of the machine structure. [PERSON] et al. [17], and [PERSON] et al. [18] designed a lightweight machine column and spindle system using topology optimization, respectively. [PERSON] et al. [19] improved the dynamic and static performance by optimizing the spindle support tripod, while reducing the mass. However, most of the above static and dynamic analyses are based on the modal analysis of only a certain part of the structural optimization, and not for the comprehensive dynamic simulation and optimization of the whole machine, which would facilitate our understanding of the operating stability of multi-wire sawing machines at high wire speeds.  
In this paper, the finite element dynamics simulation of a model of a multi-wire sawing machine is carried out to obtain its vibration characteristics, and the validity and accuracy of the simulation are verified through experimental measurements. The results of the dynamics calculation are then used as the basis for the multi-objective structural optimization design of the machine using the response surface method, and the optimization effect is evaluated using dynamics verification calculations. Finally, the structural design of the machine is proposed to be improved for the development of a multi-wire sawing machine with a high wire speed.