## 2 Materials and Methods  
Figure 1 shows the experimental configuration of a 193-nm DUV microscope system based on the reflection mode. As shown in Figure 1a, this consists of a light source, beam control device (Figure 1b), microscope body tube (Figure 1c), sample stage (Figure 1d), and data processing computer. An ArF excimer laser (Coherent, COMpex110) with a wavelength of 193 nm was used as the light source of the reflective DUV microscope. As shown in Figure 1b, the beam attenuator (Coherent, 2910218) was used to control the excimer laser output energy. Because the beam shape of the 193-nm excimer laser is rectangular type (24 mm (h) \(\times\) 10 mm (w)), the first iris diaphragm was used to form an 8-mm diameter circular beam. Moreover, the fringe pattern that could be formed around the circular beam during the beam propagation along the beam guide is truncated by the second iris diaphragm. Then, the attenuated circular-shaped beam is entered into a fiber coupler to transfer it through the optical fiber to the microscope body tube that is one the most crucial components in the DUV microscope system. The optical fiber is specially manufactured for the 193-nm wavelength with a 1-mm core diameter and is designed for high energy transfer at up to 10 mJ/pulse. Figure 1c shows the structure of the microscope body tube. The 193-nm laser beam propagated through the special optical fiber is enlarged to a size suitable for optical imaging through the beam expander. Because the numerical aperture (NA) of the optical fiber is 0.22, the beam with a diameter of 1 mm at the output of the optical fiber increases to 7.7 mm in diameter at the entrance of the beam expander, which is 21.8 mm in distance from the optical fiber output. The beam expander then forms an 18.5-mm diameter collimated beam at a distance of 200 mm from the beam expander output. The optical component cartridges are installed to control the beam energy additionally by using an neutral density filter. The beam reflected by the 45\({}^{\circ}\) reflective mirror is propagated into the 193-nm objective lens (Beck Optronic Solutions, Cassegrain-type reflecting objective) after passing through the beam splitter. The light reflected from the sample is propagated backwards; after reflection from the beam splitter, the beam is propagated into the UV-CCD (PCO, pco.ultraviolet) for high-resolution DUV microscope imaging. Figure 1d shows a designed configuration of the stage system for the installation of the microscope body tube and the large optical surfaces, of the order of one meter in size. This system consists of several stages that move along the x, y, and rotational axes for the large optical sample and a stage that moves along the z axis for the microscope body tube. All components combined form a DUV microscope system capable of measuring up to a one-meter scale, of which each axis consists of a motion controller with a position accuracy of \(\pm 1\)\(\upmu\)m and a maximum movement speed of 100 mm/s. The microscope body tube creates a heavy load on the z-axis stage and the depth of focus of the objective lens is very short; thus, a counterbalance valve for precise z-axis adjustment was installed. Counterbalance valves are used in hydraulic systems working with overriding (running-away) or suspended loads. They are designed to create backpressure at the return line of the actuator to prevent losing control over the load. The detailed specifications for each stage are listed in Table 1. The uncertainty of the motion stage was verified through the experiment on the accuracy of the motion stage. Experimental verification of the stage was done with the displacement sensor in picoscale interferometers (Picoscale, Michelson interferometer). In Table 1, the specifications are presented, and the measurements obtained are compared for each stge. The differences in the measured movements of the motion stage presented in the Table 1 are small enough to have little influence on the imaging results obtained using the DUV microscope.