# Temperature Drift Compensation for High-G MEMS Accelerometer Based on RBF NN Improved Method
## 1 Introduction  
A high-range, impact-resistant, high-G micro electro mechanical system (MEMS) accelerometer (HGMA) has important applications in navigation, defense, and impact measurement [1]. Temperature is the main reason for limiting the accuracy of a high-G MEMS accelerometer. A large body of research has been dedicated to improving the temperature characteristics of a high-G MEMS accelerometer. In general, there are two main methods for temperature compensation: hardware compensation methods, and software compensation methods. The hardware methods include optimizing the MEMS accelerometer structure or controlling the MEMS accelerometer operating temperature. For example: [PERSON] proposed a high-precision capacitiveMEMS accelerometer temperature compensation method, which is based on parasitic resistance [2]. [PERSON] designed a new differential silicon substrate, which can significantly reduce the temperature drift of the accelerometer [3]. [PERSON] developed a complementary metal-oxide-semiconductor (CMOS) micro-electromechanical system (MEMS) accelerometer. The accelerometer has higher sensitivity and suppresses temperature drift significantly [4]. [PERSON] proposed an INS/uwb integrated system based on uffb to effectively reduce the drift error of the sensor [5]. [PERSON] proposed that architecture use an on-chip temperature sensor to achieve on-chip temperature compensation, and a micro-heater to realize on-chip temperature control of the sensor [6]. [PERSON] analyzed the noise and temperature compensation method of the MEMS gyroscope and studied the circuit interface structure and bandwidth of the MEMS sensor, effectively suppressing the noise of the MEMS sensor [7; 8; 9; 10]. To a certain extent, the hardware compensation method does not only increase the volume and power consumption of the accelerometer, but also increases costs, so the hardware method is not applicable in applications that require low cost and low power consumption. The second compensation method is the software method, which studies the law between the temperature and the output signal of the MEMS accelerometer, and then establishes a temperature drift model to compensate the effects of temperature drift. For example: [PERSON] proposed that the impact of temperature changes on accelerometers can be reduced by accurately predicting and compensating for the temperature sensitivity of resonant frequency [11]. [PERSON] studied the static temperature mathematic model of quartz flexible accelerometer to then obtain temperature compensation of the accelerometer by DSP operation [12]. [PERSON] combines the experimental method with the numerical simulation method to provide ceramic acceleration with good accuracy in high temperature environments [13]. [PERSON] proposed a new, simple mathematical model that makes the sensor output more robust at high temperatures, which was successfully applied to two low-cost quartz accelerometers [14]. He established an analytical model for the temperature drift of bias (TDB) and temperature drift of scale factor (TDSF), which is based on the analysis results of thermal deformation and stiffness temperature dependence. This model can effectively improve the accuracy of a silicon MEMS capacitive accelerometer [15]. [PERSON] proposed to use multiple fading factors for a strong tracking Kalman filter (STKF), which can better adapt to the uncertainty of the accelerometer error model [16]. [PERSON] obtained original data through the temperature test and established a low-order polynomial equation, combined it with the measurement error caused by thermal drift, and then used them in the temperature drift compensation of the accelerometer [17]. [PERSON] proposed a parallel processing algorithm of the temperature error based on variational mode decomposition (VMD) and an augmented nonlinear differentiator (AND), which can increase the efficiency of temperature error processing [18].