## 1 Introduction  
The semiconductor field is considered a very important technical industrial field in modern industries. Accordingly, the supply and demand of semiconductors are in-creasing rapidly with an increase in its market size. In line with the rapid changes in the market, numerous companies globally are conducting various studies to develop semiconductor technology, and several technical studies have been conducted on related equipment for semiconductor manufacturing and production [1, 2, 3, 4]. Among them, the scrubber, which is regarded as an essential structure for the post-processing of semiconductors, is an important structure that plays a role in refining gases and com-pounds generated inside semiconductor production equipment [5, 6]. Typically, this cleaning is performed using a liquid, and the liquid used for cleaning is water. Scrubber structures are installed on the upper part of buildings and are designed for various types of facilities inside the factory. The structure of the scrubber investigated in this study is shown in Figure 1. A water tank where the cleaning liquid is stored is located at the bottom, and two circulation pumps are connected to the water tank. The maximum flow rate of one pump was 600 m\({}^{3}\)/h, and the cleaning solution was pulled into the pump by the rotation of the pump impeller located inside the water tank. Subsequently, the cleaning solution was pulled up to the upper part of the scrubber structure through a pipe connected to each pump, and the liquid was sprayed. In addition, the spray liquid purifies the contaminated gas that enters into the scrubber through the main tower installed on the rear of the structure into clean gas, which is then discharged. Scrubber structures, ranging from as few as dozens to as many as a hundred, are installed and operated in the upper part of semi-conductor processing factories. Therefore, if several equipment is operated simultaneously, the pump in the scrubber can cause vibration problems in the building itself. Particularly, owing to the nature of the pump, even if it is firmly designed, the generation of vibrations when it interacts with liquid is inevitable; thus, it is essential to design the structure around the pump, such that vibrations can be efficiently absorbed. However, it is impossible to completely modify the design of a scrubber if the vibration problem occurs when the scrubber is already installed and operating. Therefore, to solve the vibration problem, it is essential to determine the cause of vibration through vibration measurement and analyze it. Various methods have been employed to analyze the vibration characteristics of scrubbers [7; 8; 9]. The scrubber investigated in this study is installed in a building with various installed and operating semiconductor-related equipment; thus it is impossible to consistently measure vibration data of the scrubber in operation owing to surrounding problems. Therefore, to analyze the vibration, the force transfer rate between the building and the scrubber should be calculated. In this research, a two-way fluid structure interaction (FSI) analysis was conducted using a CAE program to calculate the driving force of the pump and simultaneously secure the vibration data transmitted to the scrubber. Based on the data obtained through analysis, the cause of vibration of the scrubber was identified and various design parameters were analyzed to propose an efficient scrubber design for vibration reduction. This enables the examination of the vibration characteristics of a structure using an analysis program without actual measurement, and the examination of the impact of changes in the design. This study focused on the possibility of obtaining data through interpretation in situations where experiments and measurements are impossible or difficult to perform. Particularly, if a structure needs to be analyzed based on both structure and fluid, such as a scrubber, the structure and fluid interacting with each other should be analyzed.