## 1 Introduction
(**a,b**) Typical SAW devices, which will be introduced in Section 3.1. (**c**) Ultrasonic acoustic beam actuator using bulk acoustic wave (BAW). (**d**) One-dimensional (1D) ultrasonic acoustic transducers array manipulator. (**c,d**) Typical SAW devices, which will be introduced in Section 3.2. (**e**) Vibrated needle manipulation; (**f**) vibrated geometric substrate manipulation systems [10]. (**g**) Manipulation by vibrated microbubble induced microflow. trapping, localization, and orientation. VSF is less constrained by particle volume and shape, and system design is relatively easier. Many of these systems can perform different tasks without making changes, as exemplified by [PERSON] et al. [28; 29], [PERSON] et al. [30], and [PERSON] et al. [31]. Vibrated needle driven micromanipulators, which are the most widely used in this kind of solution, use the vibration of probes or needles to directly generate acoustic and fluid flow. Substrates with a variety of geometric units are also a popular scheme. In particular, particle patterning by the vibration of the substrate and micromanipulation using vibrated microbubbles or microrobots can be considered geometric structure manipulation. The manipulation of geometric structures generally has several advantages over direct manipulation of acoustic waves. Firstly, the vibration frequency of the geometric structure is generally much lower than the vibration frequency of acoustic waves (\(>\)100 kHz). Some needle-driven micromanipulators can even operate with vibration frequencies lower than ultrasound. Secondly, many geometries, especially the needle-driven and substrate devices, can avoid microfabrication [32], thereby considerably reducing the manufacturing cost. This method is also easy to control. Microrobots may be an exception. Although their production and control are relatively cumbersome, this method has strong compatibility and expansibility, which guide the development of vibroacoustic micromanipulation methods as well. The study of microbubbles also needs emphasis. Microbubbles are important in the micromanipulation of vibration acoustics. With flexibility and scalability similar to microrobots, their cost is much lower. Microbubbles have complex fluid and vibration models [33], especially for the Bjerknes force generated by the interaction of multiple bubbles [34; 35], and the control method means that it is also one of the objects of micromanipulation [36]. The study of microbubbles has its own field. VSF devices will be introduced in Section 4. In this paper, we outline the latest progress of various VAW and VSF micromanipulation schemes and classify them according to the principle of the device. We mainly focus on the application effects and characteristics of various schemes on the particle or cell at the micron and submicron scales, including operation accuracy, system complexity, application scenarios, and future development directions. Representative or forward-looking advanced solutions with high precision, outstanding operation effects, and complete systems are favored in this paper. Finally, we summarize all the vibration-induced micromanipulation methods in Sections 5 and 6 and propose several future development directions.