## 5 Results and Discussion
Similar to Figure 12, it can be seen that the electron density distribution on the XZ plane follows the axial field component and not the radial field component. In Figure 16b,d, the spatial distribution characteristics of the power dissipation deposited in the plasma can be seen along each component of the electric field. In the figures, the maximum strength of the radial field is 3 \(\times\) 10\({}^{4}\) V/m and has a value greater than 4 \(\times\) 10\({}^{3}\) V/m of the axial field, while the maximum value of the power dissipation along the radial field near the surface region is 1 \(\times\) 10\({}^{5}\) W/m\({}^{3}\), which is lower than 4 \(\times\) 10\({}^{5}\) W/m\({}^{3}\) of the axial field. When the power dissipation value deposited in the plasma discharge in the plasma chamber was volume-integrated according to the radial and axial fields, in the quasi-coaxial TEM MWP, the power dissipation value by the axial field \(\approx\) 400 W, and the power consumption by the radial field \(\approx\) 200 W. In this simulation model, the power application method that inputted 600 W was fully deposited to the conductive material, and the plasma was applied. The power consumed by the conductive material, including the inner copper antenna, was less than 0.1 W. Therefore, when the total power of 600 W was applied to generate the plasma, power dissipation by the axial field was doubled compared to the radial field. Thus, in the quasi-coaxial TEM MWP sources, it was observed that axial field components in a horizontal form on the window surface compared to radial field components in a perpendicular form on the window surface (electron losses occur at the wall boundary) dominantly affected the electron heating in the plasma discharge. In Figure 13, normalized norm \(|E|\) on the cut surface of the cylindrical waveguiding structure (green line) and window surface (purple line) in the circular TE\({}_{11}\) wave MWP source are set to compare with the electron density distribution along the axial direction (Z-axis) in the XZ plane. Unlike the result of Figure 12, Figure 13 shows that electron  
Figure 8:1 Electron density and power dissipation \(Q_{h,z}\) (=Re \((\frac{1}{2}\sigma\cdot E_{z}\cdot E_{z}^{*})\)) distributions according to the \(|E_{z}|\) profile, electron density and power dissipation \(Q_{h,x}\) (=Re \((\frac{1}{2}\sigma\cdot E_{x}\cdot E_{x}^{*})\)) distributions according to the \(|E_{x}|\) profile in the XZ plane of quasi co-axial line TEM waveguiding structure. (**a**) Electron density distribution according to the profile of \(|E_{z}|\), (**b**) the distribution of power dissipation value \(Q_{h,z}\) according to the profile of \(|E_{z}|\), (**c**) electron density distribution according to the profile of \(|E_{x}|\), and (**d**) the distribution of power dissipation value \(Q_{h,x}\) according to the \(|E_{x}|\) profile. density distribution along the axial direction in the XZ plane simultaneously follows the norm \(|E|\) profile in the cut surface of the cylindrical waveguiding structure and also in the window surface. This was because the axial field had a small effect on the electron generation in the spatial distribution. It represented that electron generation was mainly affected by the distribution of the radial direction the electric field component. When the volume-integrated power dissipation value deposited on the plasma discharge in the plasma chamber was expressed as components of the radial and axial fields, in the circular TE\({}_{11}\) wave MWP, the power dissipation value by the axial field \(\approx\) 40 W, and the power dissipation by the radial field \(\approx\) 560 W. In this numerical model, the power application method in the circular TE\({}_{11}\) source was applied in the same way as in the quasi-coaxial TEM source, and the power consumed by the conductive material was also less than 0.1 W. Therefore, it can be seen that when a total of 600 W was applied to generate the plasma, the dissipation of power by the radial field was more dominant than that of the axial field component.