## 1 Introduction  
Metamaterials (MM) have been known about since the mid-twentieth century, but their rapid development has been observed in the last decade. A metamaterial is an artificial, man-made structure consisting of periodic or quasi-periodic arrays of sub-wavelength size unit elements that can take on the properties of non-naturally occurring materials, for example, a negative refractive index or both negative permittivity and permeability, referred to as double-negative structures (DNG) [1; 2; 3; 4; 5]. This allows for new opportunities to interact with the electromagnetic waves. Various field transformations of arbitrary incident fields can be achieved [6]. Metamaterials and their planar versions (metasurfaces (MS)) can potentially find applications in telecommunications [7; 8], measuring systems [9; 10], selective absorbing structures [11; 12; 13; 14], polarizers [6; 15; 16], surface wave control devices [6], and imaging systems (for lensing electromagnetic waves) [17; 18; 19], or in many others that we do not know yet. Unit elements can be conductive or dielectric. The geometry and size of the unit element, as well as the distance between the elements in the array and the properties of the dielectric substrate can affect the way of interaction with an electromagnetic wave. In the literature, one can find a lot of works on the analysis of the operation, design, and synthesis of various meta-surface structures, where individual unit cells are analyzed, and for which frequency characteristics, formulas for resonance frequencies or equivalent schemes are determined [8; 16]. An evaluation of the selected metasurface's sensitivity to the distortion of its geometry caused, for example, by improper production processes or services, is an important task. Metasurfaces that are less sensitive to deformation or other changes in geometry can be used in existing applications (filters, polarizers, or absorbers), especially where various types of deformation may occur. In contrast, metasurfaces that are more sensitive to deformation or other changes in geometry can be used in sensory applications, where there is a need for wireless measurement of various types of deformation, for example, occurring as a result of the stretching, compression, and bending of mechanical structures. In the literature, there are many studies on the properties of various metasurfaces, and on the impact of geometry parameters on their behavior [12; 20; 21; 22; 23; 24; 25]. However, there are a lack of papers related to the analysis of the impact of the structure defects or deformations of the metasurface structure on their properties, and related to the comparison of the various structures designed for the same operating conditions. In this work, the influence of the planar geometry distortions of the following three commonly utilized complementary metasurface structures will be evaluated: cross (CR), Jerusalem-cross (JCR), and split ring resonator (SRR) arrays. The geometries of the selected metasurface cells are presented in Figure 1. All of the considered structures were designed for the same working conditions (the same resonant frequency). Next, the numerical models calculated using the finite element method (Comsol Multiphysics software) were developed and described. Those models were verified using measurements of fabricated metasurface structures. After that, an evaluation of various planar geometry distortions was performed. Finally, the influence of the evaluated parameters on the behavior of the MS structure was discussed and conclusions concerning the potential applications of the considered structures were given. Figure 1: Evaluated metasurface unit elements with the following geometric parameters: (**a**) complementary cross, (**b**) complementary Jerusalem cross, (**c**) complementary split-ring resonator, and (**d**) designed metasurfaces (dimensions in mm; the gray color is the copper cladding, the white color is the lack of copper cladding).