# High-Precision Manufacture and Alignment of Image Slicer Based on Thin Glass Bonding
## 5 Fabrication of Image Slicers  
The image slicer is fabricated from 0.25 mm SCHOTT D263 thin glass, glued by LOCTITE GLUE 417. As shown in Figure 13a, the thin glass stacking fixture consists of a 6061-aluminum \begin{table}
\begin{tabular}{c c c c} \hline \hline
**Slice Parameter** & **Error** & **Influence** & **Influence Quantity** \\ \hline \(X_{1}\) & \(\Delta X_{1}\) & X eccentricity & \(\Delta X_{1}\) \\ \(Y_{1}\) & \(\Delta Y_{1}\) & Y eccentricity & \(\Delta Y_{1}\) \\ \(Z_{1}\) & \(\Delta Z_{1}\) & Z eccentricity & \(\Delta Z_{1}\) \\ \(A_{8}\) & \(A\)\(A_{8}\) & Y eccentricity & \(\Delta A_{8}R\) \\ \(A_{9}\) & \(\Delta A_{9}\) & X eccentricity & \(\Delta A_{9}R\) \\ \(A_{10}\) & \(\Delta A_{10}\) & Y eccentricity & \(nH\Delta A_{10}\) \\ \(Y_{2}\) & \(\Delta Y_{2}\) & Y eccentricity & \(\Delta Y_{2}\) \\ \hline \hline \end{tabular}
\end{table} 
Table 6: A summary of stack error. \begin{table}
\begin{tabular}{c c c c c c} \hline \hline
**Error** & **Error** & **Error** & **Error** & **Error** & **Cumulative** \\
**Influence** & **Influence Item** & **Requirement** & **Quality** & **Error** \\ \hline \multirow{8}{*}{Eccentricity error} & & \(\Delta L_{1}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & \\  & & \(\Delta A_{1}\) & 22.9\({}^{\prime\prime}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & \\  & & \(\Delta A_{2}\) & 22.9\({}^{\prime\prime}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & \\  & & \(\Delta A_{3}\) & 13.7\({}^{\prime}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & \\  & X eccentricity & \(\Delta A_{4}\) & 13.7\({}^{\prime}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & 20 \(\mathrm{\SIUnitSymbolMicro m}\) \\  & & \(p_{\mathrm{V2}}\) & 0.5 \(\mathrm{\SIUnitSymbolMicro m}\) & 0.5 \(\mathrm{\SIUnitSymbolMicro m}\) & \\  & & \(\Delta A_{5}\) & 13.7\({}^{\prime}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & \\  & & \(\Delta X_{1}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & \\  & & \(\Delta A_{9}\) & 7.5\({}^{\prime\prime}\) & 12.5 \(\mathrm{\SIUnitSymbolMicro m}\) & \\ \hline \multirow{8}{*}{Y eccentricity} & & \(\Delta Y_{1}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & \\  & & \(\Delta A_{8}\) & 10.6\({}^{\prime\prime}\) & 17.5 \(\mathrm{\SIUnitSymbolMicro m}\) & 20 \(\mathrm{\SIUnitSymbolMicro m}\) \\  & & \(\Delta A_{10}\) & 8.6\({}^{\prime}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & \\  & & \(\Delta Y_{2}\) & 0.5 \(\mathrm{\SIUnitSymbolMicro m}\) & 0.5 \(\mathrm{\SIUnitSymbolMicro m}\) & \\ \hline \multirow{8}{*}{Z eccentricity} & & \(p_{\mathrm{V1}}\) & 0.5 \(\mathrm{\SIUnitSymbolMicro m}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & \\  & & \(p_{\mathrm{V3}}\) & 0.5 \(\mathrm{\SIUnitSymbolMicro m}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & \\ \cline{1-1}  & & \(\Delta A_{7}\) & 13.7\({}^{\prime}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & 4 \(\mathrm{\SIUnitSymbolMicro m}\) \\ \cline{1-1}  & & \(\Delta Z_{1}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & 1 \(\mathrm{\SIUnitSymbolMicro m}\) & \\ \hline \multirow{2}{*}{Surface error} & RMS & 40 nm & 40 nm & 40 nm \\  & \(\mathrm{R_{a}}\) & 2 nm & 2 nm & 2 nm \\ \hline \hline \end{tabular}
\end{table} 
Table 7: Summary of error in image slices fabrication. plate and two prisms. K9 glass plate surface precision \(PV<1/10\lambda\) (\(\lambda=632.8\) nm). Every angle of prism is under 10\({}^{\prime\prime}\), which means the actual precision can meet the precision requirement of the stack fixture. Different length thin glass slicers are shown in Figure 13b. The alignment process of the thin glasses with stack fixtures is shown in Figure 13c, which is the stack process before sphere production. The sphere has been fabricated on the surface of a stack block, which is shown in Figure 13d. Every channel has been stripped from the stack block after heating, which is shown in Figure 13e. Finally, as shown in Figure 13f, all channels of image slicers are aligned on the left in order, which must obey the same order as the original stacking.