## 4 Conclusions and Outlook  
A parallel approach to the conventional, coolant-based Cryo-FIBID of W(CO)\({}_{6}\) carried out at \(-100\)\({}^{\circ}\)C is presented: a thermoelectric plate can be utilized to perform Cryo-FIBID  
Figure 3: (a) SEM image of a W–C Cryo-FIBID nanowire grown using an ion dose of 200 \(\upmu\)C/cm\({}^{2}\), joined to Ti pads by Pt-FIBID contacts. (b) Current–voltage characteristics of the nanowire. The dashed line indicates a linear fit that yields a resistance of 3.44 k\(\Omega\). at \(-60\)\({}^{\circ}\)C, maintaining the quality and properties of the W-C deposits. The deposition at this temperature requires a slightly higher ion dose and a reduced GIS-sample distance (\(200\)\(\mu\)C/cm\({}^{2}\) and \(7.5\) mm, compared to \(55\)\(\mu\)C/cm\({}^{2}\) and \(10\) mm, respectively), yet the processing speed is between two to three orders of magnitude above that of room-temperature FIBID. A resistivity around \(620\)\(\mu\Omega\)-cm is retrieved for the material deposited in these conditions, which is comparable to but lower than that obtained in \(-100\)\({}^{\circ}\)C Cryo-FIBID (\(800\)-\(900\)\(\mu\Omega\)-cm). The relatively unexplored nature of Cryo-FIBID makes this approach an equally appealing and unbeaten path, with an ample spectrum of experimental parameters to investigate and optimize, which are not only limited to the ion dose and GIS-sample distance presented here, but also include the ion beam current, dwell time, and precursor type. The lack of vibrations induced by a cooling agent can also be exploited to explore the resolution capabilities of this technique, which is expected to depend on the ion beam current and acceleration voltage. From a broader point of view, \(-60\)\({}^{\circ}\)C Cryo-FIBID W-C (and in principle, other materials, provided a growth optimization process is developed for the corresponding precursor) represents an appealing merging of the flexibility and targeting capability of conventional FIBID with the processing speeds and lack of sample damage of larger-scale lithography approaches. As such, it can be utilized to fabricate electrical contacts on nanowires and 2D materials without damaging them, as well as to grow deposits in sizes out of the adequate range of conventional FIBID, with applications in circuit editing and mask repair. In addition, installing a thermoelectric plate is faster, simpler, safer, and more affordable than setting up a liquid nitrogen-based cooling system, which facilitates the implementation of this technique by the industry and research communities. Overall, the possibility of approaching Cryo-FIBID without the hassle of a cooling agent flowing through the sample stage represents a highly promising step towards the fabrication of advanced devices using this technique, and a further reassurance of its latent potential. The following are available at [[https://www.mdpi.com/article/10.3390/app112110123/s1](https://www.mdpi.com/article/10.3390/app112110123/s1)]([https://www.mdpi.com/article/10.3390/app112110123/s1](https://www.mdpi.com/article/10.3390/app112110123/s1)), Figure S1: Estimated dependence of the composition with the ion dose. Table S1: EDX quantification of the studied interaction volume. Investigation, Visualization, Writing--original draft preparation, P.O. ; Conceptualization, Supervision, Project Administration, Funding acquisition, J.M.D.T. ; Writing--review and editing, P.O., F.S., S.S. and J.M.D.T. All authors have read and agreed to the published version of the manuscript. This research was funded by European Union's Horizon 2020 research and innovation program with grant number 892427. This project was supported by the Spanish Ministry of Science through grant numbers MAT2017-82970-C2-1-R, MAT2017-82970-C2-2-R and PID2020-112914 RB-100, including FEDER funding, from CSIC through project PIE202060E187, and by Gobierno de Aragon through the grant number E13_20R with European Social Fund (Construyendo Europa desde Aragon).