# Resonant Power Supply for Plasma Cleaning Based on Fuzzy Logic Power Tracking
## 5 Conclusions  
In this section, based on the previous sections, a resonant power prototype for plasma cleaning is developed, and an experimental platform is set up to carry out relevant verification experiments:  
1. By comparing and analyzing the advantages and disadvantages of traditional control methods, the control strategy of the PSPWM-PFM hybrid modulation is developed according to the closed-loop program control diagram of the system. The control \begin{table}
\begin{tabular}{c c c} \hline \hline \multirow{2}{*}{**Setting Power (W)**} & \multicolumn{2}{c}{**Contact Angle Change Angle (\({}^{\circ}\))**} \\ \cline{2-3}  & **Glass** & **Aluminum** \\ \hline
500 & 72.38 & 32.66 \\
600 & 78.68 & 41.84 \\
700 & 83.83 & 53.37 \\
800 & 91.55 & 60.44 \\
900 & 94.37 & 67.51 \\
1000 & 95.35 & 71.17 \\ \hline \hline \end{tabular}
\end{table} 
Table 6: Data sheet of glass and aluminum materials for plasma cleaning. Figure 26: Contact angle curves of glass and aluminum. Figure 25: Contact angle curve of the mobile phone cover. method not only has the advantages of PSPWM quick tuning and a wide tuning range, but also has the advantages of PFM to adjust the frequency, prevent the system from deviating from the resonant frequency point, and maintain a high efficiency. 2. In order to prevent the system from deviating from the resonant frequency and keep the active power output near the maximum value under the current duty ratio, a maximum power tracking algorithm based on fuzzy PFM was developed, and the membership function and fuzzy rules in the fuzzy controller were designed. A simulation model is built to verify the hybrid modulation algorithm and the maximum power tracking algorithm based on fuzzy PFM. Simulation results show that the hybrid modulation algorithm has a fast response speed and a high control precision. The fuzzy PFM maximum power tracking algorithm has a strong anti-perturbation performance and a good tracking performance. 3. The power adjustment experiment of the hybrid modulation algorithm is carried out to verify the relationship between the output active power, phase shift angle, and the frequency mentioned above. The hybrid modulation, PWM modulation, and PFM modulation algorithms are compared from three aspects of efficiency, power tuning range, and power matching accuracy. It is proved that the hybrid modulation algorithm is feasible and efficient. Its output efficiency is 83.0-95.7%, the power tuning range is 500 W\(\sim\)1000 W, and the output power accuracy is 90-94%. 4. A plasma cleaning prototype is developed and tested on the experimental platform. The test results meet the design requirements. Among them, the key circuit waveform and control signal precision test results are consistent with the expected. The efficiency of the whole machine ranges from 83% to 95.7%. It performs better at high power above 850 W, and the efficiency is above 90%. The power range is 500 W\(\sim\)1000 W, which solves the problem of arc starting difficulty at low power and overload protection easily triggered at high power. The output power matching accuracy is 90-94%, has an excellent performance, and is suitable for a variety of applications. X.C. : methodology, formal analysis, writing--original draft; Z.F. : supervision; H.X. : writing--review and editing, supervision; J.X. : project administration, funding acquisition; D.D. and N.O. : investigation; G.Z. : data curation. All authors have read and agreed to the published version of the manuscript. This project is supported by the Fujian Educational and Scientific Research Project of Young and Middle-aged Teachers (No. JAT190749), by the DongGuan Innovative Research Team Program (No. 2017360004004), by the National Natural Science Foundation of China (No. 51875213), by the LongYan Qimai Science and Technology Innovation Fund (No. 2019 LYF10003), by the Shanghang Qimai Science and Technology Innovation Fund (No. 2020 SHQM10), by the Dongguan Science and technology equipment mobilization project (No. KZ2019-6, KZ2020-01). Not applicable.