## Reference
### Design of Wireless Interrogated MEMS Capacitive Intraocular Pressure Sensors
In this work, there are two different resonance frequency designs, namely a low resonance frequency at 5 kHz and high resonance frequency at 12.5 kHz. Figure 1: The step-by-step process flow for the capacitive MEMS AE sensors. The capacitive gap of 1.7 \(\upmu\)m is realized by a sacrificial material of either photoresist or SiO\({}_{2}\). A 10 \(\upmu\)m-thick electroplated nickel top electrode is designed by the FEM analysis. Figure 3: (**a**) The time-domain waveforms were detected by AE sensors based on both low resonance frequency (orange) and high resonance frequency (blue) designs that are measured with a 10V bias voltage and a trans-impedance amplifier with gain of 10E-6 A/V (1 M\(\Omega\)). The AE signal source is from pencil-lead breaks (**b**) The measured time-domain waveforms of AE sensors based on the HF design by changing the bias voltage from 10 V (blue) to 20 V (Orange), while retaining a trans-impedance amplifier gain of 10 E-6 A/V (1 M\(\Omega\)). The AE signal source is also from pencil-lead breaks. It is worthwhile mentioning that the time-domain AE sensor output amplitude doubles as the bias voltage is increased by two times. Figure 2: The sensor SEM images, including (**a**) the HF design; (**b**) the LF design. Frequency Tunable On-Chip Interdigital Variable Capacitors via Localized Laser Annealing of BST Thin-Films Using Direct Digital Manufacturing  
[PERSON] \({}^{1}\), [PERSON] \({}^{1}\) and [PERSON] \({}^{2}\)  
\({}^{1}\) University of South Florida, Tampa, FL 33620, USA  
\({}^{2}\) Oregon State University, Corvallis, OR 97331, USA  
Barium strontium titanate (BST) is a material that has garnered attention as a topic of research interest, especially in RF and Microwave device design, due to its dielectric constant being tunable when subjected to an external electric field. Research has shown that the dielectric constant of BST and its tunability are both highly dependent on the crystal structure of the BST thin film. To achieve the desired crystal structure and morphology, various forms of deposition conditions and post-deposition annealing have been previously studied in prior works. Most previous studies on post-deposition annealing of BST thin films have focused on varying the temperature profile during rapid thermal processing (RTP) or the use of an excimer laser to anneal the films directly on the surface of the substrate. This work exploits direct digital manufacturing (DDM) techniques to achieve localized annealing and greater control of the process and consequent crystal growth. BST thin films with a Ba\({}_{0.5}\)Sr\({}_{0.5}\)TiO\({}_{3}\) stoichiometry are deposited on sapphire substrates and then selectively and locally annealed using an Nd:YAG laser with a 355-um wavelength and beam size less than 10 um in diameter. The primary processing conditions studied are laser power, repetition rate, and consecutive exposure of an area (number of laser beam passes). An interdigital capacitor (IDC) device is then defined on top of the annealed thin film, followed by testing of the performance parameters, dielectric constant, and tunability. The IDC electrodes consist of either sputtered chrome gold (Cr-Au) or microdispensed conductive paste. Microfabrication and Assembly of a 3D Microelectrode Array (MEA) for Simultaneous Optical and Electrical Probing of an Electrogenic \"Organ-on-a-Chip\" Model  
[PERSON] \({}^{1,4}\), [PERSON] \({}^{3,5}\), [PERSON] \({}^{3,5}\), [PERSON] \({}^{2,3,5}\), [PERSON] \({}^{3,5}\) and [PERSON] \({}^{2,3,5}\)  
\({}^{1*}\) Biomedical Engineering Department  
\({}^{2}\) Department of Material Science and Engineering  
\({}^{3}\) NanoScience Technology Center  
\({}^{4}\) Polytechnic University of Puerto Rico, San Juan, PR 00918  
\({}^{5}\) University of Central Florida, Orlando, FL 32816  
We demonstrate the microfabrication and assembly of a three-dimensional microelectrode array (3D MEA) based on a glass-stainless steel platform.