유진테크 반기보고서 (2022.06)
4. 주요 지적재산권 보유현황 (상세)

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구분	권리	출원번호	등록일	등록번호	출원내용

국내	특허	10-2015-0064857	2017.02.08	10-1706747	비정질 박막의 형성방법

국내	특허	10-2015-0096978	2017.02.20	10-1710105	기판 처리 장치 및 기판처리방법

국내	특허	10-2015-0128970	2017.02.22	10-1710944	기판처리장치

국내	특허	10-2015-0102391	2017.03.06	10-1715193	기판처리장치

국내	특허	10-2015-0149573	2017.03.06	10-1715192	기판처리장치

국내	특허	10-2015-0055991	2017.03.22	10-1720620	기판처리장치 및 챔버 세정방법

국내	특허	10-2015-0149572	2017.04.24	10-1731488	기판처리장치 및 튜브 조립체 조립방법

국내	특허	10-2015-0187865	2017.05.31	10-1744201	기판처리장치

국내	특허	10-2015-0128971	2017.07.17	10-1760316	기판처리장치

국내	특허	10-2017-0035412	2018.10.01	10-1905822	기판처리장치

국내	특허	10-2017-0071633	2018.10.15	10-1910085	기판처리장치

국내	특허	10-2018-0051460	2018.12.12	10-1930456	기판처리시스템

국내	특허	10-2017-0129740	2018.12.17	10-1931692	배치식 플라즈마 기판처리장치

국내	특허	10-2016-0146049	2019.03.15	10-1960763	저온 에피택셜층 형성방법

국내	특허	10-2017-0133031	2019.04.22	10-1972783	ICP 안테나 및 이를 포함하는 플라즈마 처리장치

국내	특허	10-2017-0124725	2019.05.31	10-1986744	플라즈마 처리 장치 및 방법

국내	특허	10-2017-0125830	2019.06.25	10-1994700	샤워헤드 및 기판처리장치

국내	특허	10-2017-0121352	2019.08.05	10-2009348	배치식 플라즈마 기판처리장치

국내	특허	10-2018-0108446	2019.08.29	10-2018318	박막 형성 방법

국내	특허	10-2018-0042857	2019.10.15	10-2034766-00-00	기판 처리 장치 및 기판 처리 방법

국내	특허	10-2019-0057528	2020.02.20	10-2081686	플라즈마를 이용한 기판 처리 방법

국내	특허	10-2018-0042858	2020.04.06	10-2099824	기판처리장치

국내	특허	10-2019-0051754	2020.07.23	10-2139296	배치식 기판처리장치

국내	특허	10-2019-0086585	2020.12.03	10-2189337	플라즈마 처리장치

국내	특허	10-2019-0051753	2020.12.17	10-2194604	배치식 기판처리장치

국내	특허	10-2019-0085807	2021.03.09	10-2227909	배치식 기판처리장치 및 그 운용방법

국내	특허	10-2019-0006953	2021.05.13	10-2253808	기판 처리장치

국내	특허	10-2019-0150361	2021.09.30	10-2309660	기판 처리 장치

국내	특허	10-2019-0100882	2021.09.30	10-2310036	기판 지지 조립체 및 기판 처리 장치

국내	특허	10-2020-0097444	2022.01.19	10-2354879	배치식 기판처리장치

국내	특허	10-2020-0017833	2022.01.21	10-2355932	기판 처리 장치

국내	특허	10-2019-0124655	2022.02.03	10-2359908	박막 증착 장치 및 박막 증착 방법

해외	특허	2011800362952	2016.01.13	2011800362952	METHOD OF DEPOSITING CYCLIC THIN FILM

해외	특허	2014-548650	2016.02.25	5,879,447	SUBSTRATE PROCESSING APPARTUS INCLUDING PROCESSING UNIT

해외	특허	2014-548651	2016.02.12	5,882,499	SHOWERHEAD HAVING COOLING SYSTEM AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SHOWERHEAD

해외	특허	102104516	2016.02.21	I523135	HEATER MOVING TYPE SUBSTRATE PROCESSING APPARTUS

해외	특허	101126740	2016.03.21	I524455	EQUIPMEMT FOR MANUFACTURING SEMICONDUCTR FOR EPITAXIAL PROCESS

해외	특허	103116489	2016.03.01	I524508	METHOD AND APPARTUS FOR MANUFACTURING MEMORY DEVICE HAVING 3-DIMENSIONAL STRUCTURE

해외	특허	104103692	2016.03.11	I525209	METHOD FOR FORMING POLYCRYSTALLINE SILICON FILM

해외	특허	101146561	2016.03.11	I525736	SUBSTRATE PROCESSING APPARTUS INCLUDING PROCESSING UNIT

해외	특허	14/580,582	2016.04.12	9312125	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	2014-542244	2016.04.15	5919388	APPARTUS FOR PROCESSING SUBSTRATE FOR SUPPLYING REACTION GAS HAVING PHASE DIFFERENCE

해외	특허	103111418	2016.05.11	I532967	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	103144734	2016.05.11	I533390	APPARATUS FOR PROCESSING SUBSTRATE

해외	특허	103144733	2016.05.11	I532876	SUBSTRATE PROCESSING APPARTUS SUBSTRATE PROCESSING METHOD

해외	특허	103143088	2016.05.21	I534935	EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR

해외	특허	103112668	2016.05.21	I534900	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	2012800379553	2016.05.25	ZL2012800379553	EQUIPMEMT FOR MANUFACTURING SEMICONDUCTR FOR EPITAXIAL PROCESS

해외	특허	2012800378226	2016.05.25	ZL2012800378226	EQUIPMEMT FOR MANUFACTURING SEMICONDUCTR FOR EPITAXIAL PROCESS

해외	특허	13/823,131	2016.07.19	9,396,954	METHOD AND APPARTUS FOR MANUFACTURING MEMORY DEVICE HAVING 3-DIMENSIONAL STRUCTURE

해외	특허	2011800427425	2016.08.03	ZL2011800427425	METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

해외	특허	2014-523843	2016.07.29	제5978301호	EQUIPMEMT FOR MANUFACTURING SEMICONDUCTR FOR EPITAXIAL PROCESS

해외	특허	13/822,434	2016.08.16	제9,416,451	SUBSTRATE PROCESSING APPARATUS INCLUDING SEMICIRCLE-TYPE ANTENNA

해외	특허	13/822,416	2016.08.23	제9,425,057호	METHOD AND APPARTUS FOR MANUFACTURING THREE-DIMENSIONAL-STRUCTURE MEMORY DEVICE

해외	특허	2012800654851	2016.08.17	ZL2012800654851	SUBSTRATE PROCESSING APPARTUS INCLUDING PROCESSING UNIT

해외	특허	2015-500369	2016.09.02	제5,996,084호	HEATER MOVING TYPE SUBSTRATE PROCESSING APPARTUS

해외	특허	2015-513954	2016.09.09	제6,002,837호	HEATER MOVING TYPE SUBSTRATE PROCESSING APPARTUS

해외	특허	201280056768X	2016.09.07	ZL201280056786X	SUBSTRATE PROCESSING APPARTUS INCLUDING AUXILIARY GAS SUPPLY PORT

해외	특허	2015-531866	2016.09.23	제6,009,677호	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	2012800378989	2016.10.12	ZL2012800378989	EQUIPMEMT FOR MANUFACTURING SEMICONDUCTR FOR EPITAXIAL PROCESS

해외	특허	201280068840.0	2016.10.12	ZL201280068840.0	SUBSTRATE PROCESSING APPARTUS HAVING SIDE PUMPING TYPE

해외	특허	14/220,678	2016.11.15	9,493,875	SHOWER HEAD OF CHEMICAL VAPOR DEPOSITION APPARATUS

해외	특허	102122656	2016.12.01	I560310	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	2014-542245	2016.12.16	6,060,172	SUBSTRATE PROCESSING APPARTUS INCLUDING EXHAUST PORTS AND SUBSTRATE PROCESSING METHOD

해외	특허	201280039981X	2016.12.21	ZL201280039981X	SUBSTRATE SUPPORTING UNIT AND SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SUBSTRATE SUPPORTING UNIT

해외	특허	2015-561262	2016.12.22	6,602,075	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	2015-006410	2017.01.13	6073936	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	2015-545382	2017.02.10	6,088,659	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	2015-528403	2017.02.17	6,093,860	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	13/126,042	2017.02.07	9,564,294	PLASMA TREATMENT APPARATUS AND PLASMA ANTENNA

해외	특허	103101565	2017.02.01	I569346	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	103135787	2017.02.01	I568877	CYCLIC DEPOSITION METHOD OF THIN FLIM AND MANUFACTURING METHOD OF SEMICONDUCTOR, SEMICONDUCTOR DEVICE

해외	특허	2013800362133.0	2017.02.22	ZL201380032133.0	HEATER MOVING TYPE SUBSTRATE PROCESSING APPARTUS

해외	특허	2012800567660	2017.02.22	ZL2012800567660	SUBSTRATE PROCESSING APPARTUS INCLUDING HEAT-SHIELD PLATE

해외	특허	2012800565612	2017.02.22	ZL2012800565612	SUBSTRATE PROCESSING APPARTUS INCLUDING EXHAUST PORTS AND SUBSTRATE PROCESSING METHOD

해외	특허	2012800652697	2017.03.01	ZL2012800652697	SHOWERHEAD HAVING COOLING SYSTEM AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SHOWERHEAD

해외	특허	14/357,587	2017.03.14	9,593,415	SUBSTRATE PROCESSING APPARTUS INCLUDING AUXILIARY GAS SUPPLY PORT

해외	특허	201380048248.9	2017.03.08	ZL201380048248.9	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	14/361,329	2017.03.14	9,593,418	SHOWERHEAD HAVING COOLING SYSTEM AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SHOWERHEAD

해외	특허	201280063666.1	2017.03.08	ZL201280069666.1	SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING APPARTUS INCLUDING THE SAME

해외	특허	201480003769.7	2017.04.05	ZL201480003769.7	SUBSTRATE PROCESSING APPARTUS

해외	특허	14/357,628	2017.04.11	9,620,395	APPARTUS FOR PROCESSING SUBSTRATE FOR SUPPLYING REACTION GAS HAVING PHASE DIFFERENCE

해외	특허	201380045392.7	2017.04.26	ZL201380045392.7	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	201380066374.7	2017.04.26	ZL201380066374.7	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	104102446	2017.04.21	I579947	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	2016-521662	2017.06.16	제6,158,436호	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	2016-521666	2017.06.09	제6,155,389호	AMORPHOUS SILICON FILM FORMATION METHOD AND AMORPHOUS SILICON FILM FORMATION APPARTUS

해외	특허	201380045437.0	2017.06.06	ZL201380045437.0	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	103101391	2017.06.01	I585228	AMORPHOUS SILICON FILM FORMATION METHOD AND AMORPHOUS SILICON FILM FORMATION APPARTUS

해외	특허	2016-129195	2017.06.02	6,151,829	Substrate Processing Apparatus

해외	특허	2016-536239	2017.06.30	6,165,341	APPARATUS FOR PROCESSING SUBSTRATE

해외	특허	2016-521663	2017.06.30	6,165,333	CYCLIC DEPOSITION METHOD OF THIN FLIM AND MANUFACTURING METHOD OF SEMICONDUCTOR, SEMICONDUCTOR DEVICE

해외	특허	2016-129196	2017.07.28	6,182,646	Substrate Processing Apparatus

해외	특허	14/915,705	2017.08.01	9,721,798	AMORPHOUS SILICON FILM FORMATION METHOD AND AMORPHOUS SILICON FILM FORMATION APPARTUS

해외	특허	14/915,919	2017.08.22	9,741,574	CYCLIC DEPOSITION METHOD OF THIN FLIM AND MANUFACTURING METHOD OF SEMICONDUCTOR, SEMICONDUCTOR DEVICE

해외	특허	15/116,974	2017.08.22	9,741,562	METHOD FOR FORMING POLYCRYSTALLINE SILICON FILM

해외	특허	201380019312.0	2017.09.01	ZL201380019312.0	HEATER MOVING TYPE SUBSTRATE PROCESSING APPARTUS

해외	특허	14/646,079	2017.09.12	9,758,870	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	14/234,723	2017.09.12	9,761,473	SUBSTRATE SUPPORTING UNIT AND SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SUBSTRATE SUPPORTING UNIT

해외	특허	103135790	2017.10.11	I601842	AMORPHOUS SILICON FILM FORMATION METHOD AND AMORPHOUS SILICON FILM FORMATION APPARTUS

해외	특허	2015-026512	2017.09.22	6,212,063	SUBSTRATE TRANSFER ROBOT AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

해외	특허	ZL201510076200.X	2017.11.14	ZL201510076200.X	SUBSTRATE TRANSFER ROBOT AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

해외	특허	15/323,295	2017.11.14	9,818,604	METHOD FOR DEPOSITING ON DEEP TRENCH HAVING HIGH ASPECT RETIO

해외	특허	2016-125108	2017.10.27	6231167	Apparatus for processing substrate

해외	특허	2015-550337	2017.12.22	6262769	SUBSTRATE PROCESSING APPARTUS

해외	특허	105121514	2017.11.21	I606137	Substrate Processing Apparatus

해외	특허	14/361,329	2018.01.16	9,869,019	SUBSTRATE PROCESSING APPARTUS INCLUDING AUXILIARY GAS SUPPLY PORT

해외	특허	105131824	2018.01.11	I611529	APPARATUS FOR PROCESSING SUBSTRATE

해외	특허	14/357,592	2018.01.23	9,875,895	SUBSTRATE PROCESSING APPARTUS INCLUDING EXHAUST PORTS AND SUBSTRATE PROCESSING METHOD

해외	특허	105105399	2018.02.01	I613699	APPARTUS AND METHOD FOR HEATING SUBSTRATE

해외	특허	2016-196254	2018.02.23	6294930	APPARATUS FOR PROCESSING SUBSTRATE

해외	특허	105121504	2018.04.01	I620230	Apparatus for processing substrate

해외	특허	2016-196256	2018.04.13	6322678	Apparatus for processing substrate and method for processing substrate using the same

해외	특허	14/357,619	2018.04.24	9,953,850	SUBSTRATE PROCESSING APPARTUS INCLUDING HEAT-SHIELD PLATE

해외	특허	2016-536227	2018.05.11	6336079	SUBSTRATE PROCESSING APPARTUS SUBSTRATE PROCESSING METHOD

해외	특허	2015100075214	2018.06.15	ZL2015100075214	AN APPARATUS FOR MANUFACTURING A MEMORY DEVICE HAVING A THREE-DIMENSIONAL STRUCTURE

해외	특허	105131965	2018.07.11	I629713	Apparatus for processing substrate and method for processing substrate using the same

해외	특허	2017-500342	2018.07.20	6371462	METHOD FOR DEPOSITING INSULATING FILM ON RECESSED PORTION HAVING HIGH ASPECT RATIO

해외	특허	201480052654.7	2018.10.09	ZL201480052654.7	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	105109943	2018.10.11	I638382	SUBSTRATE PROCESSING APPARTUS

해외	특허	2017-549661	2018.11.09	6431620	SUBSTRATE PROCESSING APPARTUS

해외	특허	201580009505.7	2018.11.30	ZL201580009505.7	METHOD FOR FORMING POLYCRYSTALLINE SILICON FILM

해외	특허	15/038,672	2018.12.04	10,145,012	SUBSTRATE PROCESSING APPARTUS SUBSTRATE PROCESSING METHOD

해외	특허	104101684	2018.12.11	I644385	SUBSTRATE TRANSFER ROBOT AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

해외	특허	105121664	2018.12.21	I645455	Substrate Processing Apparatus

해외	특허	15/220,383	2018.12.25	10,161,036	Substrate Processing Apparatus

해외	특허	14/922,869	2019.01.29	10,192,760	SUBSTRATE SUPPORTING UNIT AND SUBSTRATE PROCESSING APPARATUS, AND METHOD OF THE MANUFACTURING SUBSTRATE SUPPORTING UNIT

해외	특허	15/566,695	2019.02.05	10,199,225	Substrate Processing Apparatus

해외	특허	2017-549489	2019.02.08	6475863	SUBSTRATE PROCESSING APPARTUS

해외	특허	201610600078.6	2019.02.15	ZL201610600078.6	Substrate Processing Apparatus

해외	특허	14/915,709	2019.03.12	10,229,845	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	2017-549781	2019.03.22	6499771	SUBSTRATE PROCESSING APPARTUS

해외	특허	15/568,536	2019.04.02	10,246,773	METHOD FOR FORMING AMORPHOUS THIN FILM

해외	특허	2017-558451	2019.04.26	6516871	METHOD FOR FORMING AMORPHOUS THIN FILM

해외	특허	201480052521.X	2019.05.03	ZL201480052521.X	AMORPHOUS SILICON FILM FORMATION METHOD AND AMORPHOUS SILICON FILM FORMATION APPARTUS

해외	특허	15/535,380	2019.05.07	10,283,391	METHOD FOR MULTI-SUPPLYING GAS AND APPARTUS FOR MULTI-SUPPLYING GAS

해외	특허	15/038,678	2019.05.14	10,287,687	APPARTUS AND METHOD FOR HEATING SUBSTRATE

해외	특허	106137952	2019.06.01	I661472	METHOD FOR FORMING EPITAXIAL LAYER LOW TEMPERATURE

해외	특허	201480070512	2019.07.05	ZL201480070511.9	APPARATUS FOR PROCESSING SUBSTRATE

해외	특허	201480053162.X	2019.07.12	ZL201480053162.X	CYCLIC DEPOSITION METHOD OF THIN FLIM AND MANUFACTURING METHOD OF SEMICONDUCTOR, SEMICONDUCTOR DEVICE

해외	특허	201480070510	2019.07.30	ZL201480070510.4	SUBSTRATE PROCESSING APPARTUS SUBSTRATE PROCESSING METHOD

해외	특허	201610915856.0	2019.10.11	ZL201610915856.0	SUBSTRATE PROCESSING APPARATUS

해외	특허	201680004480.6	2019.10.15	ZL201680004480.6	METHOD FOR MULTI-SUPPLYING GAS AND APPARATUS FOR MULTI-SUPPLYING GAS

해외	특허	2018-129720	2019.11.01	6609006	BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS

해외	특허	2018-519007	2019.11.15	6615336	SUBSTRATE PROCESSING APPARATUS AND METHOD FOR ASSEMBLING TUBE ASSEMBLY

해외	특허	106144449	2020.01.11	I682429	SUBSTRATE PROCESSING APPARATUS

해외	특허	2018-154764	2020.01.16	6647354	BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS

해외	특허	108108542	2020.03.01	I686892	SUBSTRATE PROCESSING SYSTEM

해외	특허	15/426,316	2020.03.17	10593545	APPARATUS AND METHOD FOR PROCESSING SUBSTRATE INCLUDING EXHAUST PORTS

해외	특허	15/394,477	2020.04.14	10622228	SUBSTRATE SUPPORTING UNIT AND SUBSTRATE PROCESSING APPARATUS, MANUFACTURING METHOD OF THE SUBSTRATE SUPPORTING UNIT

해외	특허	107102920	2020.04.21	I692033	METHOD FOR FORMING AMORPHOUS THIN FILM

해외	특허	15/566,694	2020.08.11	10741396	Substrate Processing Apparatus

해외	특허	201680023468.X	2020.10.02	ZL201680023468.X	METHOD FOR FORMING AMORPHOUS THIN FILM

해외	특허	15/289,903	2020.10.06	10793949	Apparatus for processing substrate and method for processing substrate using the same

해외	특허	16/346,683	2020.10.06	10796915	METHOD FOR FORMING EPITAXIAL LAYER IN LOW TEMPERATURE

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국내	상표	40-2014-0007796	2015.01.08	40-1080191	HARRIER

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국내	상표	40-2019-0174805	40-1652626	40-1652626	Bennu(제37류)