유진테크 분기보고서 (2023.03)
4. 주요 지적재산권 보유현황 (상세)

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구분	권리	출원번호	등록일	등록번호	출원내용

국내	특허	10-2017-0035412	2018.10.01	10-1905822	기판처리장치

국내	특허	10-2017-0071633	2018.10.15	10-1910085	기판처리장치

국내	특허	10-2018-0051460	2018.12.12	10-1930456	기판처리시스템

국내	특허	10-2017-0129740	2018.12.17	10-1931692	배치식 플라즈마 기판처리장치

국내	특허	10-2016-0146049	2019.03.15	10-1960763	저온 에피택셜층 형성방법

국내	특허	10-2017-0133031	2019.04.22	10-1972783	ICP 안테나 및 이를 포함하는 플라즈마 처리장치

국내	특허	10-2017-0124725	2019.05.31	10-1986744	플라즈마 처리 장치 및 방법

국내	특허	10-2017-0125830	2019.06.25	10-1994700	샤워헤드 및 기판처리장치

국내	특허	10-2017-0121352	2019.08.05	10-2009348	배치식 플라즈마 기판처리장치

국내	특허	10-2018-0108446	2019.08.29	10-2018318	박막 형성 방법

국내	특허	10-2018-0042857	2019.10.15	10-2034766-00-00	기판 처리 장치 및 기판 처리 방법

국내	특허	10-2019-0057528	2020.02.20	10-2081686	플라즈마를 이용한 기판 처리 방법

국내	특허	10-2018-0042858	2020.04.06	10-2099824	기판처리장치

국내	특허	10-2019-0051754	2020.07.23	10-2139296	배치식 기판처리장치

국내	특허	10-2019-0086585	2020.12.03	10-2189337	플라즈마 처리장치

국내	특허	10-2019-0051753	2020.12.17	10-2194604	배치식 기판처리장치

국내	특허	10-2019-0085807	2021.03.09	10-2227909	배치식 기판처리장치 및 그 운용방법

국내	특허	10-2019-0006953	2021.05.13	10-2253808	기판 처리장치

국내	특허	10-2019-0150361	2021.09.30	10-2309660	기판 처리 장치

국내	특허	10-2019-0100882	2021.09.30	10-2310036	기판 지지 조립체 및 기판 처리 장치

국내	특허	10-2020-0097444	2022.01.19	10-2354879	배치식 기판처리장치

국내	특허	10-2020-0017833	2022.01.21	10-2355932	기판 처리 장치

국내	특허	10-2019-0124655	2022.02.03	10-2359908	박막 증착 장치 및 박막 증착 방법

국내	특허	10-2020-0139301	2022.07.05	10-2418947	배치식 기판처리장치

국내	특허	10-2020-0159061	2022.07.05	10-2418948	기판처리시스템

국내	특허	10-2020-0153985	2023.01.04	10-2486362	기판 처리 장치

국내	특허	10-2020-0114927	2023.03.28	10-2516340	기판 처리 장치 및 기판 처리 장치의 운용 방법

해외	특허	14/361,329	2018.01.16	9,869,019	SUBSTRATE PROCESSING APPARTUS INCLUDING AUXILIARY GAS SUPPLY PORT

해외	특허	105131824	2018.01.11	I611529	APPARATUS FOR PROCESSING SUBSTRATE

해외	특허	14/357,592	2018.01.23	9,875,895	SUBSTRATE PROCESSING APPARTUS INCLUDING EXHAUST PORTS AND SUBSTRATE PROCESSING METHOD

해외	특허	105105399	2018.02.01	I613699	APPARTUS AND METHOD FOR HEATING SUBSTRATE

해외	특허	2016-196254	2018.02.23	6294930	APPARATUS FOR PROCESSING SUBSTRATE

해외	특허	105121504	2018.04.01	I620230	Apparatus for processing substrate

해외	특허	2016-196256	2018.04.13	6322678	Apparatus for processing substrate and method for processing substrate using the same

해외	특허	14/357,619	2018.04.24	9,953,850	SUBSTRATE PROCESSING APPARTUS INCLUDING HEAT-SHIELD PLATE

해외	특허	2016-536227	2018.05.11	6336079	SUBSTRATE PROCESSING APPARTUS SUBSTRATE PROCESSING METHOD

해외	특허	2015100075214	2018.06.15	ZL2015100075214	AN APPARATUS FOR MANUFACTURING A MEMORY DEVICE HAVING A THREE-DIMENSIONAL STRUCTURE

해외	특허	105131965	2018.07.11	I629713	Apparatus for processing substrate and method for processing substrate using the same

해외	특허	2017-500342	2018.07.20	6371462	METHOD FOR DEPOSITING INSULATING FILM ON RECESSED PORTION HAVING HIGH ASPECT RATIO

해외	특허	201480052654.7	2018.10.09	ZL201480052654.7	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	105109943	2018.10.11	I638382	SUBSTRATE PROCESSING APPARTUS

해외	특허	2017-549661	2018.11.09	6431620	SUBSTRATE PROCESSING APPARTUS

해외	특허	201580009505.7	2018.11.30	ZL201580009505.7	METHOD FOR FORMING POLYCRYSTALLINE SILICON FILM

해외	특허	15/038,672	2018.12.04	10,145,012	SUBSTRATE PROCESSING APPARTUS SUBSTRATE PROCESSING METHOD

해외	특허	104101684	2018.12.11	I644385	SUBSTRATE TRANSFER ROBOT AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

해외	특허	105121664	2018.12.21	I645455	Substrate Processing Apparatus

해외	특허	15/220,383	2018.12.25	10,161,036	Substrate Processing Apparatus

해외	특허	14/922,869	2019.01.29	10,192,760	SUBSTRATE SUPPORTING UNIT AND SUBSTRATE PROCESSING APPARATUS, AND METHOD OF THE MANUFACTURING SUBSTRATE SUPPORTING UNIT

해외	특허	15/566,695	2019.02.05	10,199,225	Substrate Processing Apparatus

해외	특허	2017-549489	2019.02.08	6475863	SUBSTRATE PROCESSING APPARTUS

해외	특허	201610600078.6	2019.02.15	ZL201610600078.6	Substrate Processing Apparatus

해외	특허	14/915,709	2019.03.12	10,229,845	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	2017-549781	2019.03.22	6499771	SUBSTRATE PROCESSING APPARTUS

해외	특허	15/568,536	2019.04.02	10,246,773	METHOD FOR FORMING AMORPHOUS THIN FILM

해외	특허	2017-558451	2019.04.26	6516871	METHOD FOR FORMING AMORPHOUS THIN FILM

해외	특허	201480052521.X	2019.05.03	ZL201480052521.X	AMORPHOUS SILICON FILM FORMATION METHOD AND AMORPHOUS SILICON FILM FORMATION APPARTUS

해외	특허	15/535,380	2019.05.07	10,283,391	METHOD FOR MULTI-SUPPLYING GAS AND APPARTUS FOR MULTI-SUPPLYING GAS

해외	특허	15/038,678	2019.05.14	10,287,687	APPARTUS AND METHOD FOR HEATING SUBSTRATE

해외	특허	106137952	2019.06.01	I661472	METHOD FOR FORMING EPITAXIAL LAYER LOW TEMPERATURE

해외	특허	201480070512	2019.07.05	ZL201480070511.9	APPARATUS FOR PROCESSING SUBSTRATE

해외	특허	201480053162.X	2019.07.12	ZL201480053162.X	CYCLIC DEPOSITION METHOD OF THIN FLIM AND MANUFACTURING METHOD OF SEMICONDUCTOR, SEMICONDUCTOR DEVICE

해외	특허	201480070510	2019.07.30	ZL201480070510.4	SUBSTRATE PROCESSING APPARTUS SUBSTRATE PROCESSING METHOD

해외	특허	201610915856.0	2019.10.11	ZL201610915856.0	SUBSTRATE PROCESSING APPARATUS

해외	특허	201680004480.6	2019.10.15	ZL201680004480.6	METHOD FOR MULTI-SUPPLYING GAS AND APPARATUS FOR MULTI-SUPPLYING GAS

해외	특허	2018-129720	2019.11.01	6609006	BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS

해외	특허	2018-519007	2019.11.15	6615336	SUBSTRATE PROCESSING APPARATUS AND METHOD FOR ASSEMBLING TUBE ASSEMBLY

해외	특허	106144449	2020.01.11	I682429	SUBSTRATE PROCESSING APPARATUS

해외	특허	2018-154764	2020.01.16	6647354	BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS

해외	특허	108108542	2020.03.01	I686892	SUBSTRATE PROCESSING SYSTEM

해외	특허	15/426,316	2020.03.17	10593545	APPARATUS AND METHOD FOR PROCESSING SUBSTRATE INCLUDING EXHAUST PORTS

해외	특허	15/394,477	2020.04.14	10622228	SUBSTRATE SUPPORTING UNIT AND SUBSTRATE PROCESSING APPARATUS, MANUFACTURING METHOD OF THE SUBSTRATE SUPPORTING UNIT

해외	특허	107102920	2020.04.21	I692033	METHOD FOR FORMING AMORPHOUS THIN FILM

해외	특허	15/566,694	2020.08.11	10741396	Substrate Processing Apparatus

해외	특허	201680023468.X	2020.10.02	ZL201680023468.X	METHOD FOR FORMING AMORPHOUS THIN FILM

해외	특허	15/289,903	2020.10.06	10793949	Apparatus for processing substrate and method for processing substrate using the same

해외	특허	16/346,683	2020.10.06	10796915	METHOD FOR FORMING EPITAXIAL LAYER IN LOW TEMPERATURE

해외	특허	15/772,040	2020.11.17	10840118	Substrate Processing Apparatus and Assembling Method for Tube Assembly

해외	특허	2019-522277	2021.01.06	6829495	METHOD FOR FORMING EPITAXIAL LAYER IN LOW TEMPERATURE

해외	특허	16/480,355	2021.01.12	10,892,139	ICP ANTENNA AND SUBSTRATE PROCESSING DEVICE INCLUDING THE SAME

해외	특허	16/025,970	2021.03.30	10,961,626	BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS

해외	특허	201810811958.7	2021.03.23	ZL201810811958.7	BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS

해외	특허	201811062609.6	2021.03.16	ZL201811062609.6	BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS

해외	특허	16/842,737	2021.06.08	11,031,214	BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS

해외	특허	2020-075191	2021.06.11	6896912	BATCH TYPE SUSBSTRATE PROCESSING APPARATUS

해외	특허	2020-075190	2021.06.11	6896911	BATCH TYPE SUSBSTRATE PROCESSING APPARATUS

해외	특허	15/973,241	2021.09.07	11111580	APPARTUS FOR PROCESSING SUBSTATE

해외	특허	109111893	2021.09.11	I739380	BATCH TYPE SUSBSTRATE PROCESSING APPARATUS

해외	특허	107134433	2021.09.28	I7412220	SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAM

해외	특허	2020-107729	2021.10.26	6967118	BATCH-TYPE SUBSTRATE PROCESSING APPARATUS AND POERATION METHOD THEREOF

해외	특허	2020-538510	2021.11.09	6974884	SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

해외	특허	109120047	2021.11.21	I747329	BATCH-TYPE SUBSTRATE PROCESSING APPARATUS AND POERATION METHOD THEREOF

해외	특허	16/124,151	2021.11.23	11183372	BATCH TYPE PLASMA SUBSTRATE PROCESSING APPARATUS

해외	특허	16/652,027	2022.02.08	11,242,601	SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

해외	특허	16/351,385	2022.02.15	11,251,056	SUBSTRATE PROCESSING SYSTEM

해외	특허	109124317	2022.04.01	I759800	APPARTUS FOR PROCESSING SUBSTRATE WITH PLASMA

해외	특허	201810423887.3	2022.04.19	ZL201810423887.3	APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	109128289	2022.04.21	I761916	ASSEEMBLY FOR SUPPORTING SUBSTRATE AND APPARTUS FOR PROCESSING SUBSTRATE

해외	특허	201680061569.6	2022.06.04	ZL201680061569.6	SUBSTRATE PROCESSING APPARTUS

해외	특허	ZL201680061926.9	2022.07.19	ZL201680061926.9	SUBSTRATE PROCESSING APPARTUS AND ASSEMBLING METHOD FOR TUBE ASSEMBLY

해외	특허	109140765	2022.08.11	I774132	APPARATUS FOR PROCESSING SUBSTRATE

해외	특허	201780068005.X	2022.11.08	ZL201780068005.X	METHOD FOR FORMING EPITAXIAL LAYER IN LOW TEMPERATURE

해외	특허	15/767,995	2022.11.01	11488845	Substrate Processing Apparatus

해외	특허	16/842,755	2022.11.01	11495442	BATCH TYPE SUSBSTRATE PROCESSING APPARATUS

해외	특허	201810007884.1	2023.01.24	Zl201810007884.1	Substrate Processing Appartus

국내	상표	40-2011-0034458	2013.03.25	40-0960185	CARDINAL

국내	상표	40-2013-0000506	2013.10.30	41-0282053	FALCON

국내	서비스표	41-2013-0000285	2013.10.28	40-1003599	FALCON

국내	서비스표	41-2014-004121	2015.03.06	41-0315167	PHOENIX

국내	상표	40-2014-0007796	2015.01.08	40-1080191	HARRIER

국내	서비스표	41-2014-0004122	2015.01.05	41-0308868	HARRIER

국내	서비스표	41-2014-0004121	2015.03.06	41-0315167	HAWK

국내	상표	40-2019-0174804	2020.10.15	40-1652625	Bennu

국내	서비스표	40-2019-0174805	2020.10.15	40-1652626	Bennu

국내	상표	40-2020-0224880	2022.06.02	40-1873726	BlueJay Plus

국내	서비스표	40-2020-0224881	2022.07.08	40-1887570	BlueJay Plus

국내	상표	40-2020-0224882	2022.06.02	40-1873727	BlueJay Prime

국내	서비스표	40-2020-0224884	2022.07.08	40-1887571	BlueJay Prime