Sentence:  CVD[Chemical Vapor Deposition] is generally more <WSD>conformal</WSD> than physical vapor deposition, meaning that it covers a rough surface relatively uniformly, tracking the morphology rather than resulting in thin, low-quality coatings on vertical walls of the substrate, as is the case for physical vapor deposition methods. 
Meaning of the word marked with <WSD> tags:  That conforms, especially to the shape of something.