TDMAGe (English, noun)
expansion: TDMAGe
Senses:
topics: chemistry
natural-sciences
organic-chemistry
physical-sciences
glosses: Tetrakis(dimethylamino)germanium, a metalorganic source for germanium nitride (GeN) in MOCVD of semiconductors. It grows GeN instead of Ge, and is used at either high temperatures (600-800 C) or with plasma because of its very low vapor pressure and higher decomposition temperature.
Forms: