Silicon Heterostructure Handbook : Materials, Fabrication, Devices, Circuits and Applications of SiGe and Si Strained-Layer Epitaxy

Foreword B.S. Meyerson INTRODUCTION The Big Picture J.D. Cressler A Brief History of the Field J.D. Cressler SiGe AND Si STRAINED-LAYER EPITAXY Overview: SiGe and Si Strained-Layer Epitaxy J.D. Cressler Strained SiGe and Si Epitaxy B. Tillack and P. Zaumseil Si/SiGe(C) Eptiaxy by RTCVD D. Dutartre, F. Deleglise, C. Fellous, L. Rubaldo, and A. Talbot MBE Growth Techniques M. Oehme and E. Kasper UHV/CVD Growth Techniques T.N. Adam Defects and Diffusion in SiGe and Strained Si A.R. Peaker and V. Markevich Stability Constraints in SiGe Epitaxy A. Fischer Electronic Properties of Strained Si/SiGe and Si1-yCy Alloys J.L. Hoyt Carbon Doping of SiGe H.J. Osten Contact Metallization on Silicon-Germanium C.K. Maiti Selective Etching Techniques for SiGe/Si S. Monfray, S. Borel, and T. Skotnicki FABRICATION OF SiGe HBT BiCMOS TECHNOLOGY Overview: Fabrication of SiGe HBT BiCMOS Technology J.D. Cressler Device Structures and BiCMOS Integration D.L. Harame SiGe HBTs on CMOS-Compatible SOI J. Cai and T.H. Ning Passive Components J.N. Burghartz Industry Examples at State-of-the-Art: IBM A.J. Joseph and J.S. Dunn Industry Examples at State-of-the-Art: Jazz P.H.G. Kempf Industry Examples at State-of-the-Art: Hitachi K. Washio Industry Examples at State-of-the-Art: Infineon T.F. Meister, H. Schafer, W. Perndl, and J. Bock Industry Examples at State-of-the-Art: IHP D. Knoll Industry Examples at State-of-the-Art: ST A. Chantre, M. Laurens, B. Szelag, H. Baudry, P. Chevalier, J. Mourier, G. Troillard, B. Martinet, M. Marty, and A. Monroy Industry Examples at State-of-the-Art: Texas Instruments B. El-Kareh, S. Balster, P. Steinmann, and H. Yasuda Industry Examples at State-of-the-Art: Philips R. Colclaser and P. Deixler SiGe HBTs Overview: SiGe HBTs J.D. Cressler Device Physics J.D. Cressler Second-Order Effects J.D. Cressler Low-Frequency Noise G. Niu Broadband Noise D.R. Greenberg Microscopic Noise Simulation G. Niu Linearity G. Niu pnp SiGe HBTs J.D. Cressler Temperature Effects J.D. Cressler Radiation Effects J.D. Cressler Reliability Issues J.D. Cressler Self-Heating and Thermal Effects J-S. Rieh Device-Level Simulation G. Niu SiGe HBT Performance Limits G. Freeman, A. Stricker, J-S. Rieh, and D.R. Greenberg HETEROSTRUCTURE FETs Overview: Heterostructure FETs J.D. Cressler Biaxial Strained Si CMOS K. Rim Uniaxial Stressed Si MOSFET S.E. Thompson SiGe-Channel HFETs S. Banerjee Industry Examples at State-of-the-Art: Intel's 90 nm Logic Technologies S.E. Thompson OTHER HETEROSTRUCTURE DEVICES Overview: Other Heterostructure Devices J.D. Cressler Resonant Tunneling Devices S. Tsujino, D. Grutzmacher, and U. Gennser IMPATT Diodes E. Kasper and M. Oehme Engineered Substrates for Electronic and Optoelectronic Systems E.A. Fitzgerald Self-Assembling Nanostructures in Ge(Si)-Si Heteroepitaxy R. Hull OPTOELECTRONIC COMPONENTS Overview: Optoelectronic Components J.D. Cressler Si-SiGe LEDs K.L. Wang, S. Tong, and H.J. Kim Near-Infrared Detectors L. Colace, G. Masini, and G. Assanto Si-Based Photonic Transistors for Integrated Optoelectronics W.X. Ni and A. Elfving Si-SiGe Quantum Cascade Emitters D.J. Paul MEASUREMENT AND MODELING Overview: Measurement and Modeling J.D. Cressler Best-Practice AC Measurement Techniques R.A. Groves Industrial Application of TCAD for SiGe Development D.C. Sheridan, J.B. Johnson, and R. Krishnasamy Compact Modeling of SiGe HBTs: HICUM M. Schroter Compact Modeling of SiGe HBTs: MEXTRAM S. Mijalkovic CAD Tools and Design Kits S.E. Strang Parasitic Modeling and Noise Mitigation Approaches in Silicon Germanium RF Designs R. Singh Transmission Lines on Si Y.V. Tretiakov Improved De-Embedding Techniques Q. Liang CIRCUITS AND APPLICATIONS Overview: Circuits and Applications J.D. Cressler SiGe as an Enabler for Wireless Communications Systems L.E. Larson and D.Y.C. Lie LNA Optimization Strategies Q. Liang Linearization Techniques L.C.N. de Vreede and M.P. van der Heijden SiGe MMICs H. Schumacher SiGe Millimeter-Wave ICs J-F. Luy Wireless Building Blocks Using SiGe HBTs J.R. Long Direct Conversion Architectures for SiGe Radios S. Chakraborty and J. Laskar RF MEMS Techniques in Si/SiGe J. Papapolymerou Wideband Antennas on Silicon M.M. Tentzeris and R.L. Li Packaging Issues for SiGe Circuits K. Lim, S. Pinel, and J. Laskar Industry Examples at State-of-the-Art: IBM D.J. Friedman and M. Meghelli Industry Examples at State-of-the-Art: Hitachi K. Washio Industry Examples at State-of-the-Art: ST D. Belot APPENDICES Properties of Silicon and Germanium J.D. Cressler The Generalized Moll-Ross Relations J.D. Cressler Integral Charge-Control Relations M. Schroter Sample SiGe HBT Compact Model Parameters R.M. Malladi INDEX