Fundamental studies of mixed-gas inductively coupled plasmas

Abstract The effects of adding foreign gases to the central-gas flow or the intermediate-gas flow of an argon inductively coupled plasma are presented. In particular, the influence of up to 16.7% added helium, nitrogen or hydrogen on radially-resolved electron number density, electron temperature, gas-kinetic temperature and calcium ion emission profiles is examined. It is shown that these gases affect not only the fundamental parameters and bulk properties of the plasma, but also how energy is coupled and transported through the discharge and how that energy interacts with the sample. For example, added helium causes an increase in the gas-kinetic temperature, most likely due to the higher thermal conductivity of helium compared to argon but, in general, does not appear to affect significantly either the electron temperature or electron concentration. The shift in the calcium ion emission profile towards lower regions in the discharge with added helium may be attributable to higher droplet desolvation and particle vaporization rates. In contrast, the addition of nitrogen or hydrogen to an Inductively Coupled Argon Plasma (Ar ICP) results in dramatic changes in all three fundamental plasma parameters: electron number density, electron temperature, and gas-kinetic temperature. The net effect of these molecular gases (N2 or H2) on calcium ion emission and on the fundamental plasma parameters is shown to be dependent on the amount of gas added to the plasma and whether the gas is introduced as part of the central- or intermediate-gas flow. In general, nitrogen added to the central-gas flow causes a significant reduction in the number of electrons throughout most of the discharge (over an order of magnitude in certain regions), mainly in the central and upper zones of the ICP. A drop of 3000–5000 K in the central channel electron temperature and a smaller drop in the gas-kinetic temperature are also observed when N2 is added to the central-gas flow. In contrast, the introduction of nitrogen in the intermediate flow causes about a 1 × 1015 electrons cm−3 increase in the electron concentration in the low, toroidal regions of the plasma and an increase in the gas-kinetic temperature of around 1000 K throughout most of the discharge. As seen with the addition of nitrogen to the central-gas flow, the electron temperature is found to increase in the toroidal zones of the plasma when N2 is added to the intermediate flow. These combined effects cause a 20-fold depression in the calcium ion emission intensity only a 1.7-fold depression when N2 is added to the central- or intermediate-gas flows, respectively. On the other hand, hydrogen causes a depression in the electron concentration in the upper areas of the plasma when this gas is added to the central flow but increases the number of electrons in the same region when added to the intermediate flow. Hydrogen also causes a dramatic effect on the electron and gas-kinetic temperatures, significantly increasing both of these parameters throughout the discharge. An increase in the calcium ion emission intensity, accompanied by a downward shift, elongation and broadening of the calcium ion emission profile is also observed with H2 addition.