Micromanufacturing: International research and development

Foreword Table of Contents List of Figures List of Tables Executive Summary 1. Introduction: Richard E. DeVor and Kornel F. Ehmann: Background and Scope Methodology Overview of the Report Format for this Report Acknowledgements 2. Design: Martin L. Culpepper and Thomas R. Kurfess Abstract The Approach Taken to Assess the State-of-the-Art in NLBMM Design Unique Requirements for the Design of NLBMM Parts, Processes and Equipment The Design Process and the Important Elements ofDesign of Y for NLBMM Products The State-of-the-Art and Gaps between Existing and Required Capabilities Summary and Conclusions References 3. Materials: David Bourell and Kamlakar Rajurkar: Abstract Materials for Micromanufacturing Materials Issues in Micromanufacturing Summary and Conclusions References 4. Processes: Kamlakar Rajurkar and Marc Madou: Abstract Micromanufacturing Processes and Equipment Micromanufacturing Issues Summary and Conclusions References 5. Metrology, Sensors and Control: Thomas R. Kurfess and Thom J. Hodgson: Abstract Introduction Summary and Conclusions References 6. Non-lithography Applications: Marc Madou: Abstract Applications ofNon-lithography Machining Flexible Manufacturing and Desktop Manufacturing MEMS Foundry Summary References 7. Business, Education, the Environment, and Other Issues: Thom J. Hodgson: Abstract Business Education Environment Government Policies APPENDICES : A. Panelist Biographies B. Questionnaire for Site Visits C. Site Reports-Asia: National Institute ofAdvanced Industrial Science and Technology (AIST) Asia Pacific Microsystems, Inc. (APM) FANUC, FA Hitachi Chemical R&D Center in Tsukuba ITRI - Mechanical Industry Research Laboratories (MIRL) ITRI - Nano Technology Research Center (NTRC) Instrument Technology Research Center (ITRC) Korean Advanced Institute of Science and Technology (KAIST) Korean Institute ofMachinery and Materials (KJMM) Kyocera Corporation Kyoto University Matsuura Machinery Corporation Metal Industries Research and Development Centre (MTRDC) Mitsubishi Electric Corporation (MEC) Nagoya University - Center for Cooperative Research in Advanced Science Nagoya University - Laboratory of Structure and Morphology Control Nagoya University - Department of Micro System Engineering National Cheng Kung University National Science Council National Taiwan University Olympus Corporate R&D Center RIKEN (The Institute of Physical & Chemical Research) Samsung Electro Mechanics Corp., R&D Center Sankyo Seiki Sansyu Finetool Co., Ltd Seiko Instruments Inc. (511) Seoul National University University of Electro Communications University of Tokyo I. I. S., The University of Tokyo Yonsei University D. Site Reports-Europe: BASELWORLD Robert Bosch, GmbH Ecole Polytechnique Federale De Lausanne (EPFL) Fraunhofer Institute - Manufacturing Engineering and Automation (IPA) Fraunhofer Institute - Production Systems and Design Technology (IPK) Fraunhofer Institute - Production and Laser Technology (IPT)/(ILT) Fraunhofer Institute - Reliability and Microintegration (IZM) Karlsruhe Research Center Kiocke Nanotechnik Kugler GmbH Laser Zentrum Hamiover e.V Institut fur Mikrotechnik Mainz GmbH (1MM) Philips Center for Industrial Technology (CFT) Swiss Federal Institute ofTechnology - Zurich (ETHZ) Technical University of Eindhoven Carl Zeiss Industrielle Messtechnik, GmbH Zumtobel E. Glossary.