Question: When was the first scanning tunneling microscope developed and by whom?
About the article "Microscope", section "Scanning probe microscopy".

Candidate passages:
The 1980s saw the development of the first scanning probe microscopes.
The first was the scanning tunneling microscope in 1981, developed by Gerd Binnig and Heinrich Rohrer.
This was closely followed in 1986 with Gerd Binnig, Quate, and Gerber's invention of the atomic force microscope.
The scanning tunneling microscope, an instrument for imaging surfaces at the atomic level, was developed in 1981 by Gerd Binnig and Heinrich Rohrer at IBM Zurich Research Laboratory, for which they were awarded the Nobel Prize in Physics in 1986.
Binnig, Calvin Quate and Christoph Gerber invented the first atomic force microscope in 1986.
The first commercially available atomic force microscope was introduced in 1989.IBM researcher Don Eigler was the first to manipulate atoms using a scanning tunneling microscope in 1989.
He used 35 Xenon atoms to spell out the IBM logo.
He shared the 2010 Kavli Prize in Nanoscience for this work. 
 Electron microscope *Transmission electron microscope Optical microscope uses reflectiveness or refractiveness of light to produce an image.
Scanning acoustic microscope Scanning probe microscope *Atomic force microscope (AFM) *Scanning electron microscope *Scanning tunneling microscope (STM)  Focus variation X-ray microscope Sub-microstructural properties of condensed matter, gas.
Imaging technology, Microscope.
See also the article on spectroscopy and the list of materials analysis methods. 
The emergence of ultramicroelectrodes (UMEs) around 1980 was pivotal to the development of sensitive electroanalytical techniques like SECM.
UMEs employed as probes enabled the study of quick or localized electrochemical reactions.
The first SECM-like experiment was performed in 1986 by Engstrom to yield direct observation of reaction profiles and short-lived intermediates.
Simultaneous experiments by Allen J. Bard using an Electrochemical Scanning Tunneling Microscope (ESTM) demonstrated current at large tip-to-sample distances that was inconsistent with electron tunneling.
This phenomenon was attributed to Faradaic current, compelling a more thorough analysis of electrochemical microscopy.
The theoretical basis was presented in 1989 by Bard, where he also coined the term Scanning Electrochemical Microscopy.
In addition to the simple collection modes used at the time, Bard illustrated the widespread utility of SECM through the implementation of various feedback modes.
As the theoretical foundation developed, annual SECM-related publications steadily rose from 10 to around 80 in 1999, when the first commercial SECM became available.
SECM continues to increase in popularity due to theoretical and technological advances that expand experimental modes while broadening substrate scope and enhancing sensitivity. 
  AFM, atomic force microscopy  BEEM, ballistic electron emission microscopy  EFM, electrostatic force microscope  ESTM electrochemical scanning tunneling microscope  FMM, force modulation microscopy  KPFM, kelvin probe force microscopy  MFM, magnetic force microscopy  MRFM, magnetic resonance force microscopy  NSOM, near-field scanning optical microscopy (or SNOM, scanning near-field optical microscopy)  PFM, piezo force microscopy  PSTM, photon scanning tunneling microscopy  PTMS, photothermal microspectroscopy/microscopy  SAP, scanning atom probe  SCM, scanning capacitance microscopy  SECM, scanning electrochemical microscopy  SGM, scanning gate microscopy  SICM, scanning ion-conductance microscopy  SPSM spin polarized scanning tunneling microscopy  SThM, scanning thermal microscopy  STM, scanning tunneling microscopy  SVM, scanning voltage microscopy  SHPM, scanning Hall probe microscopy  SSM, Scanning SQUID microscope  RTM, Recurrence tracking microscope Scanning probe.
Of these techniques AFM and STM are the most commonly used.