Seminar on MEMS, the Next Revolution for Chemistry, Biology, and the Computer by H.T. Henderson from the University of Cincinnati. Introduction of first MicroFab course at U of L. Students fabricate a micromachined flow sensor. MicroFab course offered for the second time.
Students fabricate a piezoresistive bulk-micromachined silicon pressure sensor.
Wet Etch Rates for Micromachining table added to website. Dry Etch Rates for Micromachining table added to website. RF Sputtering Deposition Rates Table and DC Sputtering Deposition Rates Table added to the website.