The correction factors for the instrument's coordinate system and for the artifact's grid-point measurements may be solved simultaneously. Or the problem may be so formulated that improved artifact measurements are deduced first, then these are used to improve the coordinate system of the measuring instrument. In 1985 Raugh published the first statement of necessary and sufficient conditions for stage self-calibration. The seminar will cover basic theory and approaches to two-dimensional stages, and the workshop sessions will encourage discussion among the participants. The task force provides a forum for discussing standardization of stage accuracy measurements.
Technologies offers consulting services to help companies apply self-calibration.
Interconnect has consulting with Japanese, Swedish and US companies. By A Perfect Self-Calibration System, SPIE vol. MC-515, Mar. 1996, pp. Interconnect Technologies Corporation . All rights reserved.