I was able to stretch the interval between cleans to 600 wafers with moderate success. View the New Thermal Products Catalog in PDF Format. Information Nor-Cal Products carries a full line of flexible heater jackets for heating exhaust lines, forelines, and gas lines. Custom heaters for valves and other components are available upon request. Our modular design allows maximum flexibility for last minute design modifications and simple installation.
Standard heaters are available in a wide variety of lengths.
They can be combine with standard heaters to perfectly match your line requirements. This helps to reduce particle generation and eliminates unscheduled maintenance downtime, improving the consistency of you process yields. Many processes can benefit from heated lines. Our experience coupled with a broad product offering allows us to integrate components, providing comprehensive solutions to semiconductor fabs and equipment manufacturers. To improve overall system performance and achieve customer defined goals, a thorough evaluation of the system is conducted.