The Kinetics system is redundant, so if a pump, filter, or valve fails, another will automatically take over, dramatically reducing downtime. The RSView32 and RSMessenger control an alarm system that notifies users if an event occurs. If a primary pump fails, for example, the SLC immediately recognizes the failure and switches to the backup pump while triggering an alarm, alerting the user that a pump must be replaced. Meanwhile, the manufacturing process has not missed a beat because of the automated redundancy. RSView32 gives the user a graphical, real-time representation of the system and alarm functions.
Users can access the system remotely without inspecting the entire system manually.
The automated system can also predict system failure. The user sets operating ranges in the program, based on preset indicators of pressure, flow, and other parameters, which are used to diagnose the beginning of system failure. If the SLC detects fluctuation in the system's readings, it warns the operating engineer of a potential problem. The engineer can address and rectify the situation before wafers are damaged or the system shuts down. This automated process can also operate with other instruments to maintain consistent concentrations of the chemicals used throughout the polishing process.