A study of vacuum principles and RF plasma systems in the semiconductor manufacturing industry. Vacuum topics include principles, components, systems, leak detection, and safety practices. RF plasma topics include plasma physics, RF power amplification and oscillators, transmission line, impedance matching, and safety. Three hours lecture and three hours lab per week. I covering the processes, materials, and equipment used in the manufacturing of semiconductors.
Topics address process-yield analysis and process troubleshooting.
This is the capstone course for the AAS degree program in which students integrate their knowledge from previous courses and apply it to learning the operation, maintenance and repair of the semiconductor manufacturing tools and equipment used in the fab. Students will actually use and service many typical fab tools during lab sessions.