Also see haze . A sequence of processing steps in a semiconductor fabrication facility that is a subset of the steps required to produce an integrated circuit product. A short flow processing sequence is usually an experiment to evaluate the performance of new or modified processes or equipments. It includes any procedures necessary to reach a safe condition.
Shutdown is included only in nonscheduled time.
Usually excluded are self-actuated valves, such as check valves, pressure regulators, flow controllers, and other devices that are not intended to provide positive shutoff for safety isolation. Semiconductor Industry Association . If a service connection such as a drain or an exhaust is brought out through a side, the boundary is defined by the nonservice portions of the equipment. A sign provides safety precautions, evasive actions, or other directions to eliminate or reduce the hazard to an acceptable level. It also is used for growth of amorphous silicon films.