This gives independent control over the spatial frequencies addressed on the surface, the removal rate, and the surface texture produced. Precessing of the tool's spin axis about an axis inclined to the local work-piece normal. Furthermore the precessing tool rubs the surface in every direction, optimising surface texture. Influence function of new spinning, precessing tool 3. Form control algorithm that can optimise for surface slope as well as surface height.
Sensors monitor the process variables that control removal-rate.
This is numerically integrated to give a prediction of the current surface form - displayed to the user by graphical maps. It can also be used to compensate for any process variability whilst polishing. No significant pits or directional properties in final surface. Eley Metrology Ltd. The first 200mm capacity machine is expected to be assembled in October 2000, with a 600mm machine to follow thereafter.