Graduate standing in CIT or Robotics or permission from the instructor. The student is assumed to have a basic understanding of circuits and mechanics, and the willingness to cross engineering disciplines. MEMS technology has broad applications such as inertial navigation, data storage, biochemical analysis, micromanipulation, optical displays, and microfluidic jet systems. This course is an introduction to MEMS, intended for first and second-year graduate students in ECE and Robotics who desire the engineering background necessary for research in MEMS at Carnegie Mellon. Homework and an exam reinforce the engineering material taught in class.
Students choose a research topic to work on as part of the final project.
The project will take the form of a conference-quality paper accompanied by an oral presentation to the class. The final project will detail your independent design of a MEMS device or system, your extension of theory, or your extensions in modeling or simulating a mixed-technology device. A maximum of eight pages is allowed. In general, overhead transparencies should be used in the presentations. This course will provide an overview of the techniques, applications, and research in microelectromechanical systems.