45 conical lens. 5 axis motorized stage. Accelerating voltage 0 to 25 kV in 100 V steps. Digital Image Storage with frame buffer. Controls include slow scan, buffer, freeze, partial field, line scan and spot mode.
System also includes a videoprocessor, signal monitor and particle measurement system.
Turbo pumped vacuum system with 2 roughing pumps and three ion pumps on column and gun section. Console for spare FE source. Microprocessor controlled digital kV, digital magnification, and linewidth measurement. 25X to 300 KX digital magnification. Digital image storage and video processing.