The instrument reduces the time for matrix reduction and can manage large or small sample volumes. Its autodetect software determines dryness and prevents samples from burning. Each of the analyzer's vessels has its own vacuum line and HEPA-filtered or pure nitrogen air inlet. The company providing this services uses custom equipment to strip and clean the wafers it receives and then sorts them for light point defect detection. Wafers with no more than 100 light point defects are accepted for the RPC process, which offers quick cycle times and no loss of wafer thickness.
Turnaround time is one week.
The recycling process can be repeated often before the wafer must be reclaimed because of haze, scratches, or similar damage. The narrow-band laser has a chamber life expectancy of 10 billion pulses. The compact, high-speed system is suited for monitoring both continuous and pulsed plasma at repetition rates above 500 kHz. Pyropel HD is available from stock as 12 x 12-in. Semiconductor processing applications include exhaust and clamp rings and wafer combs.