The sample is placed on the xyz scanning stage in air. The vacuum enclosure is less than 1' tall. The Si substrate of the IC is in the middle of the picture. The magnetic image is overlayed on the picture of the sample. In our microscope, we detect the normal component of the magnetic field.
White trace is the current path.
The current is applied to the two wires shown on the right of the package carrier. The exact location is unknown. Maximum amplitude of magnetic field in this image is about 50 nT. The white path is roughly a zero field representing current path. This is because the current carrying layer is buried under many layers of metals and insulators. Surprisingly, the inverse technique clearly show a meander pattern in the middle, in which it is not obvious in the magnetic image.