In, Ga sources, As valved cracker source, Sb cracker source.
System is computer software controlled.
Vacuum Barrier two phase separator is used for the liquid nitrogen transfer to the MBE cryopanel. A remote plasma deposition system for amorphous silicon and SiN thin films. Rudolph Research AutoEL ellipsometer, He-Ne laser source. Leitz interference microscope for film thickness measurement. Ion beam sputtering system, Commonwealth Scientific.