Digital architecture with computer control. Dual Viewing CRTs. Auto Data Display. The S-6000 is an instrument for measurement of submicron dimensions which are becoming new design standards for process and quality control in recent VLSI or ULSI semiconductor devices. Computer-controlled, fully digitized S.E.M. Frame buffer digitized image storage.
Stage is motorized and chamber is turbo pumped.
LAB6 compatible ion pumped column. 45 conical lens. 5 axis motorized stage. Accelerating voltage 0 to 25 kV in 100 V steps. Digital Image Storage with frame buffer.