Simulation results for various integrated capacitor configurations.
The length of the track was de-embedded before plotting S11. The plotted results are therefore the correct S11 values for the capacitor under study. The thickness of the dielectric was 0.5 microns, and the relative permittivity value used was 5.0. Frequency sweep was carried out from 75 GHz to 100 GHz. As a check, the 0.5 micron dielectric was removed and the simulation carried out again.