Finding a new chemistry to replace PFCs, developing methods to reduce the chemical use and advanced abatements methods are options being explored in this SRC-funded project. This research looks for more effective ways to use process chemicals and optimize tools and processes. The cost of chemicals and water and the maintenance of the delivery systems and waste processing add significantly to the overall cost of manufacturing. Industry will benefit from new technology that will enable reduction of chemical use through new surface preparation steps. This SRC-funded project also explores other techniques, such as recovery and reuse of selected chemicals and development of new metrology, or measurement techniques, for online control of the feed and waste for optimal use and reuse of chemicals.
Some impurities are difficult to remove and new purification methods are required.
Technology to reduce water use and develop risk-free recycling is an economic and environmental necessity.