The vacuum system is supplied with recipe programs to implement automatic electron beam control. The low voltage transformer is SCR controlled. The step-down transformer is located at the rear of the chamber frame to minimize cable run length. The vacuum system is supplied with recipe programs to implement automatic low voltage resistance source control. The current position of the shutter is displayed on the computer screen at all times.
Shutters are removable and keyed for easy installation.
The vacuum system is supplied with recipe programs to implement automatic shutter control. The upper and lower antenna prongs are removable with PTFE end-caps and discharge shielding. The system is furnished with a 25 mm bellows sealed, right angle valve to isolate the capacitance manometer from the chamber. The crystal sensor is mounted in the chamber through the center hub of the fixture rotation and is water cooled. This unit controls the deposition rate and the final thickness of the deposited layers.