Central hexagonal polysilicon-rib stiffened area improves boost function. To make devices for step-up converters we optimized parallel plate resonator geometries for maximum power delivery. Results from the optimization indicated that a vertical mode resonator was most suitable. From a power density perspective, these are both desirable features, increasing its value. The power device, switch, and diode dies are visible.
Wire bonds provide local interconnect.
Probe contacts connect gate drive voltages, as well as input and load voltage contacts. Using this process we have built devices for up conversion. Oscilloscope traces of boost function. Note how the converter output voltage at resonance is almost 3V higher than what is obtained off resonance. Operating frequency is 240kHz.