The material handling inside the equipment can be either asynchronous or based on a pre-calculation of each transport operation which allows to ensure critical process times. Nevertheless, manual control of substrate movement, vacuum system and process execution is supported by comfortable user interface. This allows the collection of substrate specific history data, which can be processed for Web access over Intranet in the Fab. And Processing The material processing inside the equipment is based on recipes which can by easily created and modified by an integrated recipe editor. The selection, activation and execution of the process recipes is directed by a recipe management system.
Special views provide information about analogous and binary data.
Sending commands to the equipment, setting and storing of equipment parameters and manual handling functions are accessible via additional dialogs. The diagnostic functions are blocked during automatic process. The Soft-PLC performs the control of hardware components. This automation system offers DLL and OCX interfaces for the external access to the PLC data, like the exchange of recipe specification and process data between PLC and Equipment Controller or parallel visualisation of status data. This allows the use of all Beckhoff hardware components as well as the integration of parts from third-party suppliers.