This joint development agreement matches ATMI's semiconductor materials expertise and experience with SC Fluids, Inc's supercritical fluid creativity. Together, we believe we can introduce a new, more effective, environmentally safe and inexpensive method of wafer cleaning to the semiconductor industry. These relationships have enabled SC Fluids to combine its expertise with the capabilities of other industry and research leaders in the development of the super critical CO2 process. Their absence of surface tension means that the nooks and crannies on a wafer can be effectively cleaned in a manner superior to techniques available today. Because of their properties, we can see our joint development as the enabling technology which changes the way photoresist is removed, how particles are reduced, and how abilities are enhanced to work within the difficult process conditions of low-k technology.
Supercritical fluids act with the properties of a liquid and a gas.
SC Fluids is working with naturally occurring carbon dioxide gas, which in its supercritical state, acts as a powerful solvent that can penetrate just about everywhere. Carbon dioxide gas is inexpensive, recyclable, and is environmentally benign. Privately held SC Fluids, Inc ., based in Nashua, New Hampshire was formed in April 2000, as a subsidiary of GT Equipment Technologies Inc. , a leading supplier in crystal growth equipment for the semiconductor and photovoltaic industries. ATMI provides specialty materials, and related equipment systems and services for the worldwide semiconductor industry. Related equipment includes delivery, treatment, monitoring, and analytical process monitoring systems.