If possible, the generator of ozone form. Waiting your fast reply. Well, the materials that are resistant to ozone gas specifically are things like Teflon and there are certain things sold by lab safety supply houses, this sort of thing. The medical supply, they all list what materials, what tubing, that sort of things are resistant to ozone.
Stainless steel is used in Europe in the construction of medical ozone generators.
In the United States, many of the generators use a double glass dielectric, in other words, generating tubes made out of only glass because they prefer the action of having the ozone come in contact only with the special ozone resistant glass, not touching metal at all. However, for the sake of the Europeans that do make their machines with one half of the tube being glass, the other half being a stainless steel electrode. They've used that method for fifty years and no one's ever had a problem with it. So, take your pick but you're going to have to do a lot of research. There's ozone generators for use in medicine, specifically must only be made with ozone resistant materials.