The sample need not be conductive or insulating. For quantitative analysis the samples should be homogeneous with a flat smooth surface. Depends on the element and on the sample matrix, can vary from seconds to hours. Upper limits for all elements is weight percent. Unique Capabilities of Technique Fast, nondestructive qualitative analysis for all elements in a sample.
Special applications are thickness and composition of single and multilayer thin metal films.
Variable analysis area can provide small area analysis.