Introduces seniors and new graduate students to the fabrication, analysis and properties of thin film materials through a combination of lectures and experiments. Methods to optimize the film microstructure and engineering properties via growth techniques are emphasized.
Students also undertake an independent project.
Deposition Principles and processes Formation from the vapor state Evaporation Sputtering PA-CVD 4 3. Thermal Reactions Annealing Oxidation 4. To teach students the relationship between microstructure and electronic properties. To demonstrate the role of mechanical stress in the reliability issues for microelectronics thin film systems. To teach students the advantages of the use of correct experimental design in order to circumvent inaccuracies introduced by typical real instrumentation including correction of offsets and thermal voltages.