These motors require only electrical feedthroughs for truly remote operation. These motors have been operated successfully in vacuum systems with base pressures of 10-11 torr, attesting to their extremely low outgassing characteristics. Though the resolution is similar to other Inchworm Motors, the motion profile is somewhat different. This prevents contacting an object that is being approached in extremely fine increments. UHV Motors are available with wide range of motion lengths.
Stages are available for mounting large loads or for multi-dimensional motion.
The UHVM Series MicroInchworm Motors are almost half the size of the UHVL Motors but provide nominally lower push force.