The Eclipse Mark IV is the latest generation PVD tool to evolve from the highly successful Eclipse family. The Eclipse Mark IV is a unique PVD system. It achieves high throughput in a high vacuum environment through the use of serial wafer handling.
Wafers enter the high vacuum region and are clamped only once.
Five assemblies are then simultaneously rotated between isolated vacuum chambers in one transfer motion. Non-productive transfer time is shared between the five wafers. This ensures the highest productivity for a given process time. The Eclipse Mark IV footprint is 44 square feet. Wafers are horizontal in the front half of the system where they are optically aligned and centered before being transferred to a vertical orientation.