Parameters of these gas discharges are studied in the two frequency ranges where propagation of the ASW is possible and also are compared. The value of plasma density that can be achieved by this producer is calculated. The spatial distribution of the wave electromagnetic fields, dependencies of their penetration depth into plasma and angular discharge length on the discharge parameters are studied analytically and numerically. Advantages of the operation in the both frequency ranges are indicated. Possibility of resonant absorption of the ASW energy due to their conversion into the bulk upper hybrid mode is examined as well.
Torr is investigated.
Both the time evolution and the steady-state CO 2 decomposition are studied by means of time resolved optical emission spectroscopy. A decrease of the time to reach steady-state values of particles concentrations in the discharge system with decreasing pressure and increasing discharge current is observed. The degree of CO 2 decomposition rapidly decreases with increasing pressure and exhibits only a small increase with increasing discharge current. Also the influence of the balast volume is discussed in this work.