The Process Chemicals Volume includes specifications and guidelines that reflect different chemical purity levels appropriate to various technology nodes.
Specifications describe chemicals that can be obtained commercially.
Purity levels in specifications can be validated by commonly accepted analytical quality control methods. Guidelines reflect future chemical-purity needs for which a complete set of test methods is not generally available when the guideline is being developed. Products meeting the purity requirements of guidelines are not necessarily commercially available. These guidelines also describe a chemical purity level appropriate to produce semiconductor devices with geometries between 0.8 and 1.2 m. Single copies may be downloaded from the viewing page.