These side actuators are similar in concept to the thermal actuators. The side actuators have the poly1 and metal1 side by side on a cantilever beam. When current is passed through the line, the poly1 silicon will expand faster than the metal1 causing the cantilever to bend toward the metal1 side of the beam. Lines spaced at five microns are placed on the adjacent side of the opening to allow for measurements of the movement. Various types of side actuators are used to determine the best resultant design.
Specific materials react to certain gases.
Such metals like tin oxide and palladium are placed on top of the gas sensor pr oduced to finish the sensor design. It too is also heated from below and will react with specific gases if present. The mirror structure is made of a multi-layered square with metal three on top. This allows for a rigid structure and a clearly reflective surface through a layer of silicon dioxide. The mirror is attached to the chip via two springs.