Semiconductors Semiconductor Applications Ellipsometry is the tool of choice for many thin film metrology requirements in the semiconductor industry. The most powerful research ellipsometer available.
Short wavelengths increase sensitivity to ultrathin films.
Muller Matrix Scatterometry Phase Retardance VASE Premier research ellipsometer capable of measuring over a spectral range from 193nm to 1700nm. All measurements listed above are possible with the VASE . IR-VASE Infrared ellipsometry. Measure semiconductor doping profiles and resistivity non-destructively. Epitaxial layer thickness.