The laboratories described below illustrate two such NISTs activities. The Semiconductor Processing Laboratory provides a quality physical environment for a variety of research projects in semiconductor microelectronics as well as in other areas of physics, chemistry, and materials research. The laboratory facilities are used for control and metrology, materials characterization, and the use of integrated circuit materials and processes for novel applications. Rather, the laboratory emphasizes breadth and flexibility to support a wide variety of projects. Laboratory staff welcome collaborative research projects consistent with the research goals of the NIST semiconductor program.
Work is performed in cooperation with the technical staff of the laboratory.
The NIST Wafer Probing Laboratory provides the capability for automated dc probing of test devices on up to 200-millimeter wafers. Additional equipment in the Wafer Probing Laboratory includes a 125-millimeter manual wafer probe station and inspection microscopes. The P802.16 Working Group will concentrate on the standardization of fixed BWA systems, focussing on those operating in the licensed spectrum near 30 GHz, but intended to be broadly applicable from 10 to 66 GHz. Developed by a study group involving 97 people from over 70 companies, the P802.16 Working Group objectives include both a coexistence specification and an air interface enabling the transport of data, voice, and video services. The result is expected to bring numerous manufacturing advantages to an industry with the potential to compete successfully by providing alternatives to wired access links that utilize fiber, cable or telephone lines.