The MEMS Exchange has deployed fully automated and remotely controllable semiconductor inspection microscopes, letting MEMS designers view their wafers after critical processing steps from any location having an Internet connection. We currently have 5 Remote Microscopes deployed, one at each of our 3 fab sites, and two in our cleanroom, located at the MEMS Exchange's offices in Reston, Virginia. The software is freely available, and we encourage other groups to use and improve it. The servlet produces HTML for display in any Web browser. For information on the browsers and systems where we've been able to run the client, consult the System Requirements .
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