In the theoretical part focus will be on kinetic and reaction-mechanistic modelling. This also will give an idea on the composition of the reaction products formed. As experimental tool an SMS-Primaxx reactor can be used. An analogous comparative study should be done in the liquid phase. The research encompasses simulation, device aspects, reliability issues and circuit design aspects.
Materials characterisation Basic studies leading to a fundamental insight in characterisation tools.
Device, process and materials characterisation of deep submicron structures Optimisation of the application of analysis tools and the interpretation of their results combined with a close interaction with process and device engineers. Solar cells Industrial crystalline silicon solar cell processing. This work is performed in a solar cell pilot line, simulating an industrial environment. New ideas are introduced here and developed towards industrial relevance and transferability, also using techniques such as Design of Experiments and Statistical Process Control. This work is performed in the cleanroom.