A set of real case studies, drawn from mechanical, chemical, and optical microsystem applications, including pressure sensors, accelerometers, microvalves and micropumps, chemical sensors, fluidic chemical analysis systems, and micromechanical optical devices are used to demonstrate the subject matter and the various interrelated constraints on technology and device design. Upon completion of the course, participants will be familiar with the state of the art in the MEMS field, and will be prepared to apply critical judgments about technology, packaging, and system issues to their own potential applications.
Participants receive complete lecture notes, selected reprints, and design examples.
Extensive use is made of video demonstrations. Tours of MIT fabrication and MEMS research facilities are included.