The tungsten film varies from 20 nm to 60 nm in thickness, depending on the particular model. Measurements are made from leading edge to leading edge, etc. Width of individual bars and spaces not calibrated. SPM C al ibrator Improve the accuracy of your SPM measurements using SPM Calibrator, the new standard for image accuracy. Effective process controls depends on accurate dimensional measurements.
Quality assurance requires fast, thorough calibration checks.
SPM Calibrator is a new system for calibrating scanning probe microscopes. It can help you improve the accuracy of critical dimension measurements and makes QC testing of your SPM easier. This can make it hard to judge whether device dimensions actually meet specifications. SPM Calibrator consists of a reference standard and data analysis software. The output shows you how accurate your SPM is.