A Wrong markush form B Does not further limit. Introduced in the CIP, thus not part of benefit of prior application. This part is heavy on method claims. An ordinary claim used nouns to describe the invention. C Almost OK .
Vapor deposition is old art.
D Improper markush. Not descriptive of process E OK Method of deposition does not add to invention. Therefore left out. The others are utility type claims. Another method claim question A Water decomposition is unsupported.