Downstream pressure control provides high dynamic range, works with all types of pumps, provides fast response, and is tolerant to most effluent gases. The MKS Type 683 contains an integral digital valve controller. The second generation control algorithm drives the system to set point faster than conventional controllers, and ensures repeatable process recipes without operator involvement. The loop tuning parameters are completely adjustable to accommodate variations in system parameters such as time constants, transfer functions of the valve and plumbing, valve gain, and other variables. This product information is being updated regularly.
Specifications are subject to change without notice.