Provides a high performance means of reviewing defects off-line from the inspection system that found them. A microscope and video camera are provided for viewing defects on your wafers. The wafer stage can be controlled by the 861's computer or it can be remote controlled using a joystick. Accurately measure line width and interline distance of patterns on IC masks and reticles.
Operation is positive and easy, too, thanks to automatic addressing, focusing and alignment.
Magnification is 800X for mask and 400X for reticles. 1600 char. recognition unit. Watec WAT-902 Video Camera Dolan Jenner Fiber Optic Power Supply. Max. of 18 mm on a side. Now serviced and supported by Barnes Engineering.