Because of the miniaturisation and the use of various thin films, the micromechanical properties and interface effects of MEMS are different from their bulk mechanical counterparts. The choice of the best appropriate one is not evident because of a lack of standardisation. Many technical solutions are often only available in unreliable form at research institutes. A forum will be offer to exchange information and building a bridge between both MEMS and Optical Metrology communities. The first topic of the Conference will be focused on the using of MEMS micromachining to provide both passive and active devices with optical elements,microsensors, and other microcomponents.
Placement is subject to chairs' direction.
Key Words List a maximum of five words. The abstract should be divided into background, materials and method, results and discussion. Emphasize the main contribution with respect to the state of the art, and include references to related papers from the same authors. Report your results in detail. Approximately 50 to 100 words.