An 8110 Applied Materials etcher is used for RIE oxide etch. The March etcher, a versatile laboratory wafer etcher, is used for etching with many gasses, including RIE etching of aluminum with chlorine. A Nanometrics micropectrophotometer is available for thin film measurement. The Yellow Room, 312C, is a typical university photoresist room. The contact aligner is by Cobilt.
Most students do manual exposure to avoid the training time associated with the alignment tool.
A beaker is used for develop. The Evap room is also an evaluation room. Benches are available to set up other measurement equipment as needed. The Service chase, room 309, is an aisle around the other rooms, with pumps, DI water, gas cabinets, and storage. Several chemical work stations, and laminar flow HEPA work stations, are located throughout the IC Labs.