If you are operating the RIE at lower pressures you will need to set the pump to the turbo pump. Otherwise use the mechanical pump. The process pressure is measured in millitorr. Gas Flow Set the flow rate for each gas here. The flow rates should be the same for both process steps.
Power Leave the power set to zero in the first step.
Set it to the power you want for your process in the second process step. All recipes have an end step that evacuates the chamber. Set the pressure to 50 millitorr and set the time to ten seconds. The automatic vent feature does not work properly and should not be used. When you modify a process, you only change the copy on the disk.