Series 45 heater jackets are designed for use on stainless steel tubing and components. The cleanroom-compatible, CE marked jackets are made with a unique molded design for proper fit and easy installation, from materials that heat the piping inside, but the outside of the jackets are warm to the touch. Snap-on flange insulators keep the flanges hot, eliminating cold spots. This solidification causes clogging and particle contamination in processes. The valves include choices of seals, solenoids and limit switches.
Traps are highly-efficient, compact traps.
Each is designed for specific processes in semiconductor manufacturing. Byproducts are trapped inside, away from the process, pumps, gauging or anything else that can be damaged or clogged by hardened byproducts. When used in conjunction with an Effluent Management Subsystem, the results can include increased uptime, longer pump life, safer cleaning and byproduct disposal, and higher yields. Models are currently available for forelines and exhaust lines. When used as part of an Effluent Management Subsystem in the vacuum foreline, the results can include increased uptime, reduced particles, increased uptime, increased throughput and higher yields.