During the measurement, piezoelectric transducers mechanically displace one of the diffraction gratings, effecting a phase shift in the measurement beam which modulates the interference pattern. An electronic camera captures a sequence of phase-shifted interference patterns which the computer analyzes to obtain an accurate map of the shape and topography of the surface. Other U.S. and foreign patents pending. 1X and 2X standard Max. For 100 measurements where each sample consists of an average of 16 sets of data of a flat, mounted tooling reference.
Specifications are subject to change without notice.
For complete specifications for the Horizontal MESA, click on the appropriate links below to obtain a pdf file of the specification sheet. Adobe Acrobat Reader software is required to view and print pdf files. You can download it now by clicking the pdf icon at left.