Pressure Set the pressure to the process pressure you want for both process steps. If you are operating the RIE at lower pressures you will need to set the pump to the turbo pump. Otherwise use the mechanical pump. Gas Flow Set the flow rate for each gas here. The flow rates should be the same for both process steps.
Power Leave the power set to zero in the first step.
Set it to the power you want for your process in the second process step. All recipes have an end step that evacuates the chamber. Set the pressure to 1.0 x 10 -2 torr and set the time to 30 seconds. When you modify a process, you only change the copy on the disk. If the process is already loaded, you will need to reload it for your changes to be reflected.