It is most commonly used to accurately measure film thickness and optical properties. However, there are many other material properties that can be studied due to their influence on the optical response of the material. The most powerful research ellipsometer available.
Short wavelengths increase sensitivity to ultrathin films.
Muller Matrix Scatterometry Phase Retardance VASE Premier research ellipsometer capable of measuring over a spectral range from 193nm to 1700nm. All measurements listed above are possible with the VASE . IR-VASE Infrared ellipsometry. Accurate Infrared optical constants. Measure semiconductor doping profiles and resistivity non-destructively.