It is the first book to examine all aspects of the attempt to build functional devices at a molecular size. Written by an internationally recognized expert on sensors and sensor instrumentation and a leading authority on nanotechnology and microfabrication, this book will function as both an valuable textbook and handy reference. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering.
Numerous appendices offer valuable information in an easily accessible format.