This conference will be held in Munich 14-8 June 1999 on occasion of the International Symposium on Industrial Lasers and Inspection. Even if the understanding of material problems in MEMS technologies has advanced considerably in recent years, many open questions need to be solved. Thus, micromechanical characteristics of structures fabricated by MEMS technology critically depends on the microfabrication process. Because of the miniaturisation and the use of various thin films, the micromechanical properties and interface effects of MEMS are different from their bulk mechanical counterparts. The choice of the best appropriate one is not evident because of a lack of standardisation.
Many technical solutions are often only available in unreliable form at research institutes.
A forum will be offer to exchange information and building a bridge between both MEMS and Optical Metrology communities. The first topic of the Conference will be focused on the using of MEMS micromachining to provide both passive and active devices with optical elements,microsensors, and other microcomponents. Placement is subject to chairs' direction. Key Words List a maximum of five words. The abstract should be divided into background, materials and method, results and discussion.