System accuracy for relative testing is dependent on the quality of the reference optic. 2 Precision is the residual rms error of the difference of two consecutive measurements, each with 16 phase averages. This specification is derived from 100 measurements and represents the mean value plus 2 sigma. 3 Repeatability of the quoted statistic is for 100 measurements of the same part, with 16 phase averages per data set. The specification represents the mean value plus 2 sigma.
Specifications are subject to change without notice.
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