Imposing high frequency voltage, electricity would be discharged between the electrode and the base. Dissociated argon ions crash onto the target and make atoms split out so that a film will be generated on the base. Because base temperature is critical in the process of film generation, temperature control becomes very important. Figure 1 shows the system diagram of a fuzzy temperature controller used in this kind of reactor. Inputs to the controller are desired base temperature, measured base temperature, measured pressure in the reactor.
Pressure is used because it has a large influence on base temperature to be controlled.
High pressure results in high temperature. Output signals of the controller adjust the heater and the electromagnetic valve for the cooling water in the reactor. Figure 1 System Diagram of Reactor Temperature Control Figure 2 shows the fuzzy controller that has three input variables and two output variables. Inputs can be prepared from feedback signals from sensors. Fuzzy Controller A conventional single loop control system adjusts controlled output temperature only by the feedback signal from a temperature sensor.