The laboratory for this course is the student-run factory. Lot tracking, data collection, lot history, cycle time, turns, and statistical process control are introduced to the student. An intermediate course in the study of integrated circuit processing. Topics include atomic models for diffusion, oxidation and ion implantation. Process integration for bipolar and MOS device fabrication is studied in detail.
Students learn how to design processes to realize a variety of device structures and properties.
Students participate in the design of experiments to characterize thin films and processes utilizing techniques such as emission spectroscopy, EDAX, ellipsometry, mass spectroscopy and interferometry. An advanced-level course on CMOS manufacturing and CMOS scaling. Integrated Circuits Processing Lab A laboratory course in which students manufacture and test CMOS integrated circuits. Topics include design of individual process operations and their integration into a complete manufacturing sequence. Analog and Digital CMOS devices are made and tested.