The Ball Semiconductor lithography process involved such unique technologies as sphere alignment, mask design, and mirror design. The company developed an algorithm to transfer 2D mask patterns onto the surface of the 3D sphere. Through this system, Ball Semiconductor also validated its resist coating and development, etching and chemical vapor deposition processes.
Spherical lithography is one of five critical components needed to produce spherical semiconductors.
Since our inception 18 months ago, our team of engineers have continually proved what was thought impossible and each day they take us closer to spherical IC technology that will forever change the semiconductor industry. Nearing prototype production, the silicon spheres could reduce the cost of integrated circuit manufacturing by up to 90 percent through the use of hermetically sealed tubes in place of clean rooms, and processing cycle times of days instead of months. The announcement was made at Ball Semiconductor's inaugural Technology Conference, currently being held at the Museum of Modern Art of San Francisco. The conference concludes Sunday, July 12, 1998. Ball Semiconductor, Inc., based in Allen, Texas, researches, designs and intends to manufacture and sell spherical silicon semiconductors.