As a part of an initial study, an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. The micro-modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies. A schematic diagram of the aerodynamic flow control using fluidic actuators.
Upper figure shows flow separation and loss of lift at high angle attck.
While, bottom figure shows apparent surface modification of the flow leading flow reattachment and recovery of lift. A schematic diagram which shows how the micromodulator works. A photomicrograph of a top view of a micromodulator. A photomicrograph of an etch profile of Kapton film. When the valves have been fabricated, the silicon die is mounted in an epoxy plate for testing.