The good news is that color correction is practically trivial for UV optics. UV microscopes cover the same illumination bands that steppers use for exposing photoresists, as shown in Table 1. In comparison, the table also shows the wavelength range for a VIS microscope. Note that all the UV bands are less than 20 nm wide, which is more than an order of magnitude narrower than the visible band. Maximum specified bandwidth.
Measured bandwidths are narrower.
Figure 1 shows how the narrowness of UV illumination bands affects the color correction needed for a UV microscope optical system. In VIS optics, red light focuses closer to an uncorrected lens than blue light. This effect is called chromatic aberration. To overcome the focusing problem, the lenses use color-corrected optics. The much narrower UV illumination bands make color correction much easier.