Options include ultrasonic rinse, spray rinse, conductivity metering system, surface oil removal, and automated parts handling. The nonflammable chemical has a high vapor pressure and can be delivered using vapor-draw technology. Existing water scrubbers can remove any unreacted chemical from exhaust streams. Cost of ownership is the same as for C 2 F 6 when used with a burn box. The AD-series vapor dryer is designed for use with IPA and other solvents that have low flashpoints.
Parts leaving the superheated vapor contain no liquid solvent, thereby abating vapor emissions.
The dryer also contains a temperature-controlled condensate tray to reduce reflashing of solvent back into vapor. Standard features include a 50-lb capacity and a secondary containment tray. France A vertical multiple-transfer sorter integrates four functions in one machine. The system offers batch notch finding in two cassettes, batch noncontact wafer ID reading with software, single wafer sorting, and batch wafer transfers. A cleanroom table is a standard feature of the user-friendly system.