It has been demonstrated that the surface reaction probability can be greatly enhanced by increasing reactant kinetic energy, which can be readily achieved by using supersonic molecular beams. The goal of this study is to obtain better understanding of collimated molecular beams and to provide accurate predictions of experiments being conducted in the School of Chemical Engineering at Cornell University. The ultimate goal of our work is to help to optimize the deposition process. Silicon film is deposited over the substrate surface. An adaptive unstructured triangular grid is used to capture the density drop in the expansion flow.
Models are under development for more accurate simulation.
Investigators Gang Chen , Graduate Research Assistant. This work is funded by the National Science Foundation. Return to Nonequilibrium Gas Dynamics Group Return to Computational Fluid Dynamics Laboratory Return to Sibley School Please direct any questions regarding this server to Haifang Telc.