System utilities are separated into three discrete compartments and comply with SEMI S2-93 and CE marking requirements. As such, the 5000 Series meets safety standards throughout the world. The system's modular design is ideally suited for high-volume production. Every aspect of the design was viewed from the perspective of the full production wafer fab. Ease of Service Modular construction means that 5000 Series lasers can be completely serviced from one side for floor space optimization.
Problems are easily diagnosed, and modules quickly replaced, so system downtime is minimal.
The Cymer 5000 Series excimer laser enables high photolithographic resolution accuracy and wafer throughput while providing superior dose control. Most notably, the system offers output power exceeding 10W and a repetition rate of 1kHz. The Cymer 5000 Series excimer laser established the industry standard by being the first to offer 1kHz repetition rate, which enables significantly reduced exposure times compared to i-line or other laser based systems. At the same time, the 5000 Series takes advantage of the proven core technology that Cymer has had in production for more than a decade. The Cymer 5000 Series excimer laser offers enabling performance perfectly designed for the high volume wafer fab environment.