In semiconductor manufacturing processes, as the performance of electronic devices becomes higher, the evaluation methods are required to have much higher sensitivity, accuracy and give more information. J. Mass Spectrom. The electron tunneling model can apply to the non-localized materials such as metals. The alkali metals are typical examples which can be applied this electron tunneling model. The bond breaking model can be applied to ionic and covalent bond materials.
Oxidized materials are typical examples.
Here, the outline of the electron tunneling and the bond breaking model will be explained and some typical experimental results will be shown. This might be due to the localized potential effect which was already studied in the filed of low energy ion scattering. J. Mass Spectrom. The accuracy and precision of quantitative values are examined through three round-robin studies using uniformly doped GaAs specimens. J. Mass Spectrom.