Tests performed at each flow rate include average flow rate, maximum flow, flow stability and time to controlled flow. Based on the MFC running more than three flow rates, the testing checks the overall linearity and accuracy of the MFC performance. The user may define the acceptable tolerance level for their needs creating a viable pass or fail parameter. Again the user has the option to set the control parameters. The time to control test shows how long the MFC required from start to attaining controlled flow at the set flow rate.
Maximum flow displays the overshoot flow rate before coming into control.
Flow stability shows the deviations from the set flow rate after coming into control. All are factors key to maintaining process stability.