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This group has significantly reduced the level of metallic contamination by using pipes coated with chromium oxide. The oxide passivates the pipes. The reproducibility and reliability of RIE of oxides and nitrides has been improved by increasing the chamber wall temperature to 150 C and by use of a new hot gate valve. This reduced the adhesion of RIE by-products to the chamber. The use of KrF and ArF excimer lasers for ULSI fabrication is being studied, the reactivity of fluorine with pipes could present problems.