We perform research on photoelectric and thermal phenomena in MEMS and NEMS semiconductor. We study the changes in electric and electronic properties as a function of physical size, mechanical stress and material. Our studies include the interaction of molecules, photons, electric and magnetic fields, and with micromechanical and nanomechanical systems. We investigate phenomena that manifest themselves in short time scales and small physical dimensions. Applications of this kind our work include chemical sensors, nanoelectronics, radiation detectors, infrared detection and imaging, high speed optical switching, and optical transistors.
Nanomechanical transistors rely on nanometer size devices that exhibit quantum behavior.
We fabricate nanomechanical devices from different materials and study their electric and electronic behavior as a function of size, applied electric fields, and mechanical stress. We fabricate micromechanical and nanomechanical waveguides that allow us to spatially control photons and mechanically redirect a photon beam in submicroseconds. Such devices can find applications in optical computers. We develop novel chemical microsensors based on the interaction of molecules with microsurfaces. We microfabricate arrays of MEMS devices and apply different polymeric coatings to each member of the array.