Yield Dynamics Releases Genesis 2.1, the Most Comprehensive Yield Management Tool Available on the Market. MAPA gathers data automatically from multiple metrology sources. Raw, modeled and simulation data are stored in a relational database. Systematic and random error modeling for overlay and registration information is provided. Using tool and layer-dependant models and simulations, MAPA extends sparse sample production data to adequately describe lot distributions.
Models provide a base estimate for the systematic and random components of the errors.
The components are then simulated into field, wafer and lot-projected array distributions to obtain production performance statistics that are more accurate than any previously available. The accuracy of the technique results in lower rework rates and higher capacity utilization and improves WIP by removing the need to use dedicated exposure tools. Copyright 1997-2001, Yield Dynamics, Inc.