Almost all of the research topics are vitally connected to these facilities, where technological limits lie in submicron dimensions. This research has two directions right now. One of them aimed at since its beginnings to make ellipsometry capable to analyse defected structures produced e.g., by ion implantation. Here, high resolution RBS and channelling was used as a cross-check in determination of optical constants of the damaged silicon. The other optical work was done together with MEMC Company and a small Hungarian enterprise, Semilab.
Programs enable even tomographic studies of the defects.
Here, atomic migration on two-dimensional surfaces are analysed, when an electric field is also present. Diagnostic image processing, bioengineering topics run in cooperation with different groups of researchers in medicine and, again, cover two directions. The software package used in image processing of the Scanning Infrared Microscope, is capable to handle, e.g., in vitro cell recognition under microscope. The other topic in medical research is full-body observation of electric potential and its application to diagnostics of heart conditions and diseases. To date, the data bank includes results of measurements made on some three thousand patients.