The Problem Effective process control depends on accurate dimensional measurements.
Quality assurance requires fast, thorough calibration checks.
The Solution SPM Calibrator is a new system for calibrating scanning probe microscopes. It can help you improve the accuracy of critical dimension measurements and it makes QC testing of your SPM easier. This can make it hard to judge whether device dimensions actually meet specifications. This costs money when the production tolerance is tightened to compensate for the loose measurement tolerance. SPM Calibrator consists of a reference standard and data analysis software.