But because the factor of 0.7 is used to determine technology scaling, some critics of the current nomenclature point out that the product of 0.13 micron and the 0.7 scaling factor is not 0.10 micron but 0.091 micron. That camp is therefore urging that the technology nodes be renamed accordingly. If it seems as if the ITRS is getting more complicated, that reflects reality. 248-nm steppers based on KrF lasers, combined with optical proximity correction, phase shift masks and improved resists, have adapted more easily than had been thought to the shifts in line widths. The technology is maturing slowly, and there's an insufficient supply of the basic lens building block, calcium fluoride, for some of the lens elements.
People are pretty comfortable with the nitrided oxides, even though it is a difficult process.
The good news is that the oxynitrides have taken a little bit of the heat off. The next road map meeting will be held in Grenoble, France, to coincide with Semicon Europa this spring. Directory Top Comp Supp DIST Directory Salary Survey Salary Calc. All rights reserved.