The valves include choices of seals, solenoids and limit switches. Traps are highly-efficient, compact traps. Each is designed for specific processes in semiconductor manufacturing. Byproducts are trapped inside, away from the process, pumps, gauging or anything else that can be damaged or clogged by hardened byproducts. When used in conjunction with an Effluent Management Subsystem, the results can include increased uptime, longer pump life, safer cleaning and byproduct disposal, and higher yields.
Models are currently available for forelines and exhaust lines.
When used as part of an Effluent Management Subsystem in the vacuum foreline, the results can include increased uptime, reduced particles, increased uptime, increased throughput and higher yields. When used as part of a Scrubber Inlet Transition Kit in the exhaust line, the results can include increased uptime, reduced maintenance, safer cleaning and byproduct disposal, and improved throughput.