I Covers the chemical aspects of microlithography and resist processes. Concentration is on single-layer resist materials and processing for optical lithography. Material characterization is studied through experimental design techniques. Microlithography I Lab Laboratory to be taken concurrently with 0305-563. Topics emphasize optical lithography and single-layer resist materials.
Material characterization is studied through experimental design techniques.
0305-599 Independent Study A supervised investigation within a microelectronic area of student interest. I A manufacturing course. Topics include scheduling, work in progress tracking, costing, inventory control, capital budgeting, productivity measures and personnel management. The laboratory for this course is the student-run factory. Lot tracking, data collection, lot history, cycle time, turns, and statistical process control are introduced to the student.