In the course of successive crystallization a two-layer system is formed. At the surface a crystallized layer is created which extends into the film. The crystallinity of this top layer exhibits a strong depth dependence. Close to the substrate a resid-ual amorphous layer remains. The successive crystallization is accompanied by a dehydrogenation of the sam-ples.
Most grains possess a small dislocation density.
The texture formation is explained using a model previously developed for solid phase crystallization. According to Raman meas-urements a considerable amount of stress is incorporated in all the laser crystallized films originating from the glass substrates. Doping has a significant influence on the crystallization process. The influence of heavy doping on the two characteristic crystallization parameters is assumed to be mainly caused by a change of the thermal properties of the material. Strasse des 17.