There are risks associated with making a decision this early in the game, but it is necessary to help the industry move ahead. Without a clear direction now, we won't be ready in time. To assure a consistent pellicle solution worldwide, the Japanese consortium Selete attended so that its Asian client companies could participate in the decision. It is another instance in which collaboration between our two consortia in the area of masks is producing benefits to both sides.
Pellicles are membrane materials that protect the reticle or mask from defects.
The 20 participating companies included integrated circuit manufacturers, reticle manufacturers, pellicle mask manufacturers, equipment suppliers, and other related organizations. Approximately 45 industry experts from around the world attended.