Sequential, random and programmed transfer with batch counting is possible, and further optional control modes can be catered for. The carriers are tilted at the start of operation and then registered to detect wafer location and cross-slotting. Our unique 'common pick-up point' design reduces the risk of damage to wafers caused by accidental misconfiguration. Wafer security is further enhanced by monitoring the vacuum supply and advanced axis control. This method of control also leads to reduced stress to axis mechanisms, which enhances the life of the machine.
High throughput is achieved through the use of a double-ended wafer transfer arm.
Self-diagnostics monitor all elements of the machine control system and any alarms are reported via graphic and text messages on the operator interface. Basic production data are recorded and an alarm history is stored for maintenance purposes.