Measurement ranges from 760 torr to 100 psig are available. Wetted surfaces are electropolished to 5 Ra. A local status LED display indicates switch output, while an LCD enables process variables to be monitored continuously. The displays facilitate installation, calibration, and troubleshooting. Certified for use in Class 10 cleanrooms, the robots come with forced exhaust.
Motion profiling facilitates smooth substrate transfer.
It classifies random and systematic defects as killer or nonkiller and bins them into defect types automatically. Resulting defect maps can be sent to an external defect-management system for additional analysis and archiving. A single tool can provide both defect location and classification when the Viscon ADC is mounted on the system. Units are designed to operate at slight positive or negative pressure, depending on whether in-leakage or operator hazard is the concern. Glovebox end plates may be bolted to welded studs, attached via ring clamps, or made part of a completely welded unit.