MKS applications engineering process experts are available to help users determine the best upgrade for their application. Capacitance Manometers have been cut in half relative to the older models, which means that processes can start earlier following each maintenance cycle. Higher temperature operation of the manometer can prevent contamination during chemical vapor deposition and plasma etching processes. This improves both reliability and up time.
Measurements are accurate and repeatable, resulting in increased throughput.
Correct temperature control eliminates deposition and contamination, resulting in more accurate pressure control and higher yield. MKS Instruments, Inc. is a global supplier of the broadest range of instruments, components and subsystems for vacuum and gas-based manufacturing processes. Products manufactures reactive gas generators and ozone generators, as well as microwave, DC and RF power sources.