Ultrasonic Microfluidic Devices Ultrasonic Microfluidic Devices Photograph showing a wafer of FPW devices, a single FPW die mounted in a zero insertion force package, and an oscillator board. To establish capabilities of micromachined ultrasonic devices to perform fluidic functions such as pumping, stirring, filtering, and manipulation of gases and liquids, cells, bacteria, and other biological substances. Flow channel with distributed acoustic pumping.
Result shows ability to manipulate and move cell-sized objects.
Ultrasonically driven micromachined silicon needle. Originally designed for surgery, when its tip is immersed in a liquid and the needle is driven ultrasonically, the hollow shaft acts as a pump. It can also be used as an ultrasonic source for lysing cells. Micromachined silicon horns for ultrasonic longitudinal drivers. Slide showing FPW fabrication sequence.