After the copper technique, another promising technique to boost the semiconductor industry is the low-k technique.
Polymer materials are very promising candidates for the low-k technique.
One very important growth technique for polymer films is vapor deposition polymerization. Although the thin film growth dynamics for inorganic materials such as Si, GaAs, etc. have been investigated in detail for decades, and well-known knowledge has been accumulated, so far the growth mechanism for VDP processes is still not clear. Therefore the study of VDP processes of linear polymer films not only can provide a microscopic picture of the polymerization process, but also has a great technological impact on the control of film depositions. Our goals are to study experimentally and theoretically the vapor deposition polymerization mechanism in a polymer film. The system chosen is Parylene-N where only linear polymer chains are formed in a vapor deposited film.