Introduction to dielectric and optical properties. The three laws of thermodynamics are introduced as a basis for understanding phase equilibria, heterogeneous reactions, solutions, electrochemical processes, surfaces, and defects. Statistical mechanics is introduced and applied to the calculation of entropy and specific heat of ideal gases and solids. Examples of design and control of processes. Onethird of course involves examples of design and control of processes.
Emphasis is on silicon devices, with mention of gallium arsenide.
All steps in fabrication of circuits are considered, starting with purification of silicon, single crystal growth, zone-refining, and wafer slicing. Thinfilm growth by epitaxy, by chemical or physical vapor deposition, or by thermal oxidation of silicon to SiO2. Doping of layers by diffusion and by ion implantation. Wet and dry etching. Characterization and testing, yield.