Applied says it has integrated throughput design concepts from both its Endura and Producer platforms that ensure low contamination. To minimize copper contamination, the Millennia has separate wet and dry process areas serviced by dedicated robots. To ensure process reliability, the tool manufacturer developed what it calls SmartDose. Initiated with the first Sabre tool, the feature bases its bath chemical dose on production volume and the plating process. They know who is out there now and see that Applied has entered the market.
People know that a major competitor has come.
Both introductions come as the demand for copper process tools continues to climb. Carl credits IBM with shaking up the semiconductor world when it became the first chipmaker to commit to copper. Customers say, 'I want the battery life to double,' and you can't get that unless you use low-k dielectrics or use copper as a conductor. Fissel says he has even seen nibbles for the Novellus tool from some of the Asian foundries. A lot of the foundries are starting to get interested in copper earlier than anticipated.