The output flange is 15 cm in diameter. The torch has been developed for semiconductor applications where high purity, neutral gas flows are required. It is designed to operate in vacuum or air. The torch can be supplied as a turn-key system including the torch head, microwave power supply and controller, or alone for use in an existing microwave system. No user adjustments are required during operation.
Operation is continuous.
Materials subject to contact with the microwave discharge are 6061 aluminum, 0.995 alumina and aluminum nitride. Input Power 15.5 A at 230 VAC Mechancial Microwave Power Head and Torch See attached figure HV Power Supply 19 in. Specifications subject to change. The system can be reconfigured by eliminating the elbow, moving it between the microwave head and the isolator, or by adding either rigid or flexible waveguide between any of the rectangular waveguide components. The high voltage power supply and the control panel are rack-mounted.