The analyzers are in a bulkhead mount configuration and, for use in hazardous areas, a split-architecture version. They can be used separately or as components of a larger analytical system. They operate dry or with specially made lubricants. Three models are available. All versions mix and dispense liquid slurries used in the CMP process.
Mix ratios vary with each model.
The units can combine up to three liquid slurry concentrates with ultrapure water to dilute the solutions. The dilution maintains solution assay values, and the solutions are dispensed under vacuum pressure to the point of use. The vacuum generator uses clean dry air or gaseous nitrogen-driven eductor with no moving parts. An optional on-line metrology package is available. Relay contacts are rated for up to 3 A at 220 V ac noninductive.