M echanical S ystems or MEMS represent one of the most creative and important technological innovations made in recent years. MEMS are complex engineering systems built on a microscopic scale that contain mechanical elements such as motors, pumps, relays, and actuators.
MEMS make possible controlled physical movement of parts in miniature devices.
MEMS integrated circuits combine logic circuitry with actual moving parts to enable interaction with the physical world. Existing MEMS programs typically emphasize development of the technology necessary to fabricate devices that meet these three goals. Unfortunately, the issues of providing power and managing energy have been largely ignored. The overall goals of many applications will not be met unless an appropriate power source solution is developed. This is particularly true for MEMS devices that are intended to be autonomous. .