The steady-state algorithm determines the response due to small signal excitations by linearizing the system of ODEs about a point of stable equilibrium. Transient analysis uses Matlab ODE solvers to solve stiff problems using an implicit multi-step integration method of varying order for problems requiring high accuracy. A simple Euler algorithm is also available. Sensitivity analysis predicts the performance of MEMS due to small variations in geometry by both probabilistic and deterministic techniques. Subnets provide the user the ability to prototype complex systems quickly.
MEMS are often subject to the effects of residual strains.
3 shows a simplified ADXL05 with a magnified strain gradient to show the doming up of the backbone and curving down of the electrodes. Fig.5 shows compressive stress applied to a residual stress gauge. On Circuits and Sys. D. Teegarden, G. Lorenz, and R. Neul, IEEE Spectrum 1998, pp. J.V. Clark, N. Zhou, and K.S.J. Pister, Mod.