These ultrathin oxide layers possess significantly different properties than thicker oxides. Additionally, these materials are now often doped with various elements in an attempt to change the properties of the oxide. This frequently introduces new material parameters that in the past have not been important. This course discusses the critical physical properties associated with each of these new materials or properties, as well as details test structure designs and test techniques required to measure these new properties. It also discusses the impact of these properties on the performance, reliability, and yield of semiconductor products.
Enrollment is limited and advance enrollment is required.
He has more than 25 years of experience in semiconductor process control and reliability with a number of semiconductor manufacturing companies. He has published more than 30 technical articles in the field of semiconductor process control and reliability measurements and owns several patents on semiconductor processing techniques and circuit element designs.