Weibull statistics in combination with fracture mechanics is used to characterize the strength distribution for these films. This characterization yields the Weibull parameters for these MEMS materials. Knowing the Weibull parameters for a given material allow us to design MEMS devices using that material for a specific level of failure probability. Such a simulation and reliability prediction approach is important in order to reduce the development cycle time, maximize yield rates, and minimize the potential for costly failures in service. The fabricated micromirror serves as one reflective surface of the interferometer cavity, with the cleaved, coated end of the input optical fiber acting as the second surface.
Electrostatic actuators allow adjustment of the cavity width between the mirrored surfaces.
Employing surface and bulk micromachined processes, two different embodiments of the interferometer design, including integrated micromotors, have been achieved. Design, fabrication, and characterization of the micromotors will be discussed, and an analysis of micromotor behavior on the overall interferometer performance will be presented. Here we report an experimental study on the interaction force between two small thin floating plates on the surface of a liquid using MEMS force sensors. In an earlier theoretical study we reported that there is an interaction force between solids forming meniscii with a liquid. In order to verify the theoretical predictions, we fabricate a MEMS force sensor which consists of a SCS micro mechanical beam fixed at both ends anchored on a SCS substrate.