The emitted secondary ions are analyzed by mass spectrometry. Applications exploiting the strengths of the technique, such as the ability to detect every element in the periodic table and detection limits extending to the 10 ppb limit, will be discussed. Use of the instrument as an ion microscope with similar detection limits and a spatial resolution of the order of l micron will be demonstrated. The method is capable of highly accurate quantitative elemental analysis. Used for high-resolution imaging capabilities together with advanced analytical performance.
Elemental mapping is extended by the provision of an electron energy-filtered imaging system.
Examples will be given of applications to studies of various materials. Participation is limited to 25 persons. Attendees will receive a Certificate of Attendance.