The schematic provides a critical link between the physical and behavioral views. The designer is freed from doing detailed layout and 3D numerical simulation in the initial iterative design phase and can explore different design concepts quickly. In the MEMS schematic view, micromechanical devices are designed by assembling iconic representations of microelectromechanical lumped-parameter elements. Reusable elements, such as beam springs, plate masses, electrostatic actuators, and capacitive sensors, are backed by models of varying sophistication. The designer has freedom to experiment with new micromechanical architectures and then size elements appropriately.
Efficient simulation is critical to the iterative design process.
Many groups are already exploring behavioral MEMS simulation using device macro-models extracted from numerical analysis. I will re-emphasize that efforts must be made to link MEMS CAD tools together, including process simulation, numerical analysis, 3D rendering, layout, schematic design, and system simulation. 16 Upton Dr., Wilmington, MA 01887.