Lock the planetary removal tool into place. Remove the planetary locking bolt and remove the planetary from the system. Place the planetary on a flat clean surface. Be sure that the clip spring is positioned in such a way that it points directly toward the center of the wafer. Material level in the crucible must be at one half to three quarters of the volume of the crucible.
Loose flake can contaminate the deposition material.
If flakes are present, clean and place the shutter back into the system. Close the shutter. Remove the planetary tool. During pump down check all process parameters to insure they are correct. Forward direction and local.