The type of acquisition is dependent on the experiment. Spectra can be run either spectroscopic by using the monochromator or real time multiwavelength. On-line modification of all system parameters during continuous measurement. This acquisition type is mainly used for system alignment. This window allows the user to define complex multilayer stacks as a model of his sample.
Fit improvement is shown by a graphic fit evolution display.
As fitting result the user will get the final values of the parameters with error bars, the remaining fitting error c 2 and a correlation matrix. Principle Ellipsometry is a non-destructive optical technique, which deals with the measurement and interpretation state of polarized light undergoing oblique reflection from a sample surface. Because the reflection coefficients are determined by the optical properties and composition of the substrate and over layers, by their thicknesses and morphology, and by surface roughness, ellipsometry is exploited as a non-invasive probe of thin films and interfaces. These additional ellipsometric measurement provide much more information about the samples that can be obtained from a single wavelength and angle measurements. In order to deduce unknown parameters of the sample under investigation, a model for the sample structure is first constructed with initial estimates of the parameters.