The optical switch is based on an NxN array of cantilever actuators that move micromirrors perpendicular to the substrate to redirect an optical beam to any output. The optical beams are transmitted through free space with low loss via collimating optical fibers. The relay switch is based on an actuated plate that is moved off-chip to separate two electrical contacts. Progress in development of these devices follows an incremental approach. At each design iteration, the team performs modeling and layout of the fabrication mask design using two software packages tailored to MEMS design.
Fabrication is performed at an external foundry.
Parts release, device test, and evaluation are performed using Institute facilities. In the first design iteration, a variety of basic MEMS actuators were produced to establish an understanding of their operational characteristics. The team developed methods for part release through wet chemical etching, electrical and mechanical testing with a microscope probe station, optical analysis, and microassembly. The RSC is fixed at one end and has an initial upwardly flexed position due to residual stress between layers, whereas the SDA is mounted freely on rails and incorporates a bushing on the front that causes it to step forward in small increments, producing smooth linear motion. The VTA and HTA operate by current-generated, resistive heating along two arms, causing a thermal expansion.