Many popular etch and CVD systems may now be run automatically in conjunction with VDS testing via an RS232 link. Please call for details. Off-line testing of components can also be run automatically. The Lucas Lab Vacuum Diagnostic System provides highly automated, integrated and easy to use package for the rapid characterization of vacuum based semiconductor manufacturing equipment. Torr to 100 Torr.
Enhanced accuracy is available with optional equipment.
This special manifold allows the system to reach base pressure faster and provides a basis for adding such option as leak detectors or simple RGAs.