The upper right window refers to the position of the sockets on the printed circuit boards, whereas the lower right window refers to the device positions on each chip. The chip in the figure has four microengines. Our environmental chamber is shown in Figure 5. Each box has a bubbler to regulate the humidity inside the chamber. We have observed that microengines can be sensitive to the amount of humidity in the air.
Humidity leads to both static and in-use stiction problems.
To mitigate this complication, we flow nitrogen through the boxes with no water in the bubblers, which keeps our parts very dry. Content is not to be used in publications, presentations, or commercial endeavors without permission. All Rights Reserved.