Also make sure you are in the BIN file mode type. Insert the source chip into the programmer and flip the lever on the ZIF socket - If there are any empty holes they should be near the lever end of the socket. If you are trying to load a Hex file on an Atmel remember that those parts have an automatic erase cycle which will cause problems with Hex segments as they load. Save your object code as a binary file and try again. You might try filling the buffer with 00s.
Hex files can also give bad check sums if they over write the same address space.
Oh, this is a nasty chip - it comes with more than one suffix and has differing programming voltages. If you program it with too high of a voltage you ruin the chip - AND sometimes blow out the programming voltage supply. The new programmer should be better about this and not cook itself. This is used increase program pulse time. Sometimes needed for very fast computers.