Response time is typically 100 milliseconds. Supply pressure can be set to a subatmospheric level to reduce pressure drop and remove the possibility of external leakage. The small, sensitive monitors work with either built-in or optional remote antennas for monitoring events inside semiconductor tools. The tube-facing device includes a patented chip shield that prevents metal chips generated by the procedure from curling back inside the tube. The bonded design minimizes abrasion in the gland and thus decreases particulation.
Installation is a matter of removing and replacing a few bolts.
They feature a luminous infrared diode as a light source, a photodiode as the sensing element, and leakproof electronics that are encapsulated and housed within a rugged polycarbonate package. A control unit contains the sensitivity setting and LED status indicator. A single-wire automation package can connect process tools and their peripherals to a fab's manufacturing execution system. The small-footprint hardware and embedded software of the SilverBox facilitate configuration and deployment within new or existing facility automation architecture. The MFC features autodiagnostics, multiple gas calibration, and data collection and PC software.