Holograms can serve as precise rulers for verifying shapes and dimensions.
In addition, digital holograms can be compared with each other to identify changes. Using a laboratory instrument, digital holographic measurements have been made of tiny artifacts using a 633-nm laser. In the ATP project, the researchers will develop a system including a pulsed ultraviolet laser, UV array detectors, new UV optics, and high-speed image processing and analysis software. Challenges include design and integration of an appropriate laser, prevention of damage to the optics and wafer structure, and elimination of unwanted lens-surface reflections. The ATP funding enabled formation of the joint venture and will accelerate UV laser development and diverse applications of the new technology by two years.