Here, deep impurities and similar techniques enhance sensitivity, and smallness allows microsecond times responses. These devices have medical, industrial, and microfluidic uses. Also numerous types of pressure sensors, both piezoresistive and capacitive, have been built. Also some research has been done toward realization of micro-refrigerators on a chip.
Frequency is adjustable remotely in seven bands for custom adaptation to hearing loss.
Device replaces need for ossicular chain. 100 um thick microstructures, such as micro gears and nozzles, can be easily fabricated with a high aspect ratio of 10, allowing its easy replications. Also, arrays of microtransformers have been developed for metal crack detection as well as multi-level coils for tactile sensing. Furthermore, the characterization of an electroplated magnetic permalloy and its electroplating system has also been well developed. To regulate a micro flow rate of a fluid, a silicon micro flow sensor was developed and is being integrated with microvalves or micropumps to construct a microfluidic system.