Always turn off the RF power before disassembling or repairing RF components. Do not operate the RF generator with the match cover removed, or the match removed from the mainframe. Contact with RF-energized parts could cause severe burns or shock. Do not bypass interlocks and always use Power Lockout Devices. Dispose of pump oil according to hazardous waste regulations.
High Temperature Allow the wafer chuck to cool down before servicing.
Do not use solvents such as IPA to clean the chuck when it is still hot. Nitrogen will come into the equipment without warning if the compressed air system fails.