The second process step performs the process. Instructions From the Process menu, choose Chamber , New to create a new recipe or Edit to edit an existing one. A list of the recipe steps will be displayed on the right side of the screen. To edit a step, double click on it. To create a new step, select the step that will go after the new step and click the appropriate button for the type of step you want at the bottom of the screen.
All recipes start with an initial step.
This step will evacuate the chamber and bring the chamber to the desired operating temperature. Set the pressure to 1.0 x 10 -2 Torr and set the time to 30 seconds. This will cause the system to evacuate as much air from the chamber as possible before starting the process. Do not attempt to use pressure setpoints below 1.0 x 10 -2 torr. The chamber will be evacuated as much as possible regardless of the setpoint.