To study these effects, parametric simulations were performed. The velocity distributions for 2,5,10 multiple channel configurations are shown below. Sensor Most of the flow sensors for MEMS devices operate on the principle of thermal conduction. The schematic of a typical flow sensor is shown in the figure below. Three resistors are located in the middle of the channel.
Heat is dissipated in the middle channel.
The resulting temperature distribution in the fluid is sensed by an upstream and a downstream temperature sensitive resistors. The flow rate in the channel is directly proportional to the temperature difference at the upstream and downstream locations. The temperature distributions for two flow rate conditions are shown below Top of the page Microplumes Another type of mixing principle that is used in MEMS is the microplume concept. The device has a flat thin mixing area containing large number of micronozzles at the bottom. During operation, the mixing area is filled with the first liquid.