The process pressure is measured in millitorr. Gas Flow Set the flow rate for each gas here. The flow rates should be the same for both process steps. Power Leave the power set to zero in the first step. Set it to the power you want for your process in the second process step.
All recipes have an end step that evacuates the chamber.
Set the pressure to 50 millitorr and set the time to ten seconds. The automatic vent feature does not work properly and should not be used. When you modify a process, you only change the copy on the disk. If the process is already loaded, you will need to reload it for your changes to be reflected. Using Manual Mode Manual Mode Manual mode allows one to directly control the system parameters without creating a recipe.