Thin Film Resistors Thin film resistors are fabricated by Sarnoff Corporation in the Microwave Thin Film Laboratory that includes an 1800 square foot clean room. This state of the art facility is equipped with the latest photolithography, evaporation, sputter deposition, plasma cleaning, ion beam milling, plating, dicing and computerized test equipment for fabricating thin film hybrid circuits. Thin film resistors are fabricated by first depositing the resistor material, then the conductor metal. This differs from typical thick film resistor fabrication for which the conductor is deposited first, followed by the resistor material.
Ceramic substrates blanket coated with resistor material and metal are also available.
Cermet films exhibit excellent thermal stability. For applications where superior power handling capability is required AlN substrates and cermet resistors make an excellent combination.