Process Integration and Process Modules. Even though an individual process may give good results as an isolated tool, successful integration means that all of the manufacturing equipment is synchronized to work at an optimal level for highest performance.
Integration is incredibly important to a fab's operation.
Chipmakers customarily spend many months on this task before their fabs start volume production. How fast integration is achieved determines how fast the fab can be started up, and whether the products of the factory meet their market window. Process Modules integrate process equipment with a high level of automated process control that enables continuous monitoring and adjustment of processes for optimum performance and longer operating runs before needing maintenance. If the browser does not support stylesheets then the rest is put in an incomplete table.