The Porta 300 is an advanced load port for 300 mm wafer carriers. Uniquely designed, yet with accordance to all applicable SEMI standards and I300I guidelines, the Porta 300 sets a new benchmark in cleanliness, reliability, performance and functionality for the equipment in this category. It features unique Integrated Pre-Aligner option providing space saving and cost effective wafer alignment solution.
All major motions are servo controlled, providing fast and precise carrier loading.
The operation of the opener is controlled by full set of safety interlocks protecting both the operator and the equipment. A dedicated set of through-beam sensors avoids collision with robotic arm or wafer. The E84 connector is a standard feature along with the visual indicators provided in compliance with the latest revision of the E87 standard. The software support, integrated in the Gencobot Toolbox, provides simple yet comprehensive diagnostic features and user-friendly operator interface. Basic Features and Benefits Outstanding performance based on servo controlled mechanisms.