The Yellow Room, 312C, is a typical university photoresist room. The contact aligner is by Cobilt. Most students do manual exposure to avoid the training time associated with the alignment tool. A beaker is used for develop. The Evap room is also an evaluation room.
Benches are available to set up other measurement equipment as needed.
The Service chase, room 309, is an aisle around the other rooms, with pumps, DI water, gas cabinets, and storage. Several chemical work stations, and laminar flow HEPA work stations, are located throughout the IC Labs. See the Equipment List , which is used by the Microfabrication Laboratory Short Course. The museum is always unlocked. The IC Labs are locked when not in use.