Avoid contact with alkali and acid. Avoid exposure to heat, sparks or other source of ignition. Maintain nitrogen blanket and tightly closed container. Protect from moisture. Protect from heat, direct sunlight, and source of ignition.
Containers require grounding during use.
Store away from alkaline, acidic and oxidising materials. Provide adequate ventilation. HMDS is known to have an exceptional tendency to accumulate static charges. The user must take extreme care to dissipate static charge by careful bonding and grounding of all equipment involved in fluid transfer, with continuity checks to prove effectiveness. Spills and Disposal Absorb spills with chemical binder and shovel absorbent into suitable container.