This feature provides the ability to generate process recipes off line from the process tool. Recipes include all process variables and the associated wafer loading parameters required for the automated diffusion equipment. Recipes are stored in access controlled libraries within APEX and are downloaded to the process equipment for execution. The report system module of APEX provides the process engineer with the ability to interactively review process data associated with the past process runs. A high-level of report flexibility is achieved by leveraging off of the integrated relational database system that is used to store and retrieve data as it is collected from the equipment control system.
APEX provides the following reports for screen presentation or in hard copy form.
As the wafers are processed in the reactor, related events including cycle start and stop events, manual operator interaction and system alarm conditions are generated by the equipment controller and transmitted to APEX for storage. Each event is time stamped and stored in the database allowing the user to retrieve the data using flexible database queries. Data Capture Reports APEX is capable of collecting and storing process variables for all process cycles executed in reactors which are interfaced to the system. This feature provides full visibility to all processing conditions as seen by the wafers during the time they are under the control of the processing equipment. The sampling frequency is defined by the process engineer in order to optimize the process and system performance.