Surface layers of insulating materials, including minerals, polymers, organic, and biological materials, can be analyzed readily. The technique has a capacity to carry out ultra-shallow depth profiling to measure the near surface composition of electronic materials, reacted minerals, and corrosion films. High sensitivity mass spectra can be reconstructed for any location. All ion images can be recorded in parallel, and mass spectra can be reconstructed from any image area. This mass spectrometer provides the capabilities to investigate an unlimited mass range with high sensitivity and a quasi-simultaneous detection of all secondary ions collected by the mass spectrometer.
Crater defect on automotive paint surface.
Motorized sample stage that allows for automated analysis of preselected areas. Recent addition of SF 6 for high resolution detection in ultra shallow depth profiling.