Therefore, caution should be exercised in comparing MEMS design with VLSI designs. Nevertheless, we see opportunities in MEMS for structured design, provided that the design domain is suitably restricted. In contrast to macro systems, MEMS devices use fewer rigid link mechanisms and more intrinsically compliant components. MEMS devices fabricated with planar lithographic processes share many features with VLSI devices. Hence, the mask design within a given process sequence may be a fruitful area for structured design.
Analysis is an important step in the design process.
Unlike the integrated circuits field, which can draw on extensive sets of design rules and programs which automatically test for design-rule violations, the MEMS field lacks design verification tools at this time. One way to verify a design, prior to fabrication, is through numerical simulation. The strong coupling between different energy domains makes it extremely difficult, at present, to analyze a MEMS device using the existing simulation tools. Kinematics plays a big role Same as macro systems, but kinematic issues are not as complex at present. Wide range of manufacturing techniques including 3-D machining Same as VLSI systems Table 1.