Robust water cooling, high purity dielectrics, and tight manufacturing tolerances ensure long, reliable life in demanding production environments. Radiant Substrate Heater System Denton's standard SCR controlled, proportional substrate heater system provides constant temperatures and ranging capability from ambient to 500 C. Power Supplies Denton's 600 watt RF power supply with automatch network allows sputtering of nonconductive materials. An additional 600 watt RF power supply with automatch network is available for CO-sputtering or RF bias applications. A control interface is also offered for external automation and data acquisition. Up to four mass flow controllers, each with a close-coupled shutoff valve can be integrated into the Discovery 18.
Auto ranging cold cathode high vacuum gauging is standard.
Hot filament vacuum gauging is available. For other customer configurations to meet your requirements - consult factory.