At the same time, the 5000 Series takes advantage of the proven core technology that Cymer has had in production for more than a decade. The Cymer 5000 Series excimer laser offers enabling performance perfectly designed for the high volume wafer fab environment. The system incorporates Cymer's proven solid state pulsed power technology, which increases system reliability and ensures tight process control. B. System gas flow has been engineered for 1 kHz operation, and output power exceeds 10 Watts. E. Maintenance requirements are minimal since the 5000 Series offers a gas life of 100 million pulses - and a billion pulses between chamber window service.
Actual specifications vary depending on the exact configuration order.
All service access is on the front side of the laser allowing for greater flexibility in system layout.