Copies are available. Paper on mechanisms and recontamination for low velocity method. 2 - R. Sherman, D. Hirt, R. Vane, Journal of Vacuum Science and Technology, Vol. 12A, pages 1876-1881, 1994. Paper on various applications, cleaning procedures and role of gas purity.
Copies are available.
Thirty pages, everything you wanted to know but was afraid to ask. A shorter version of this was published in the 1996 Proceedings. Copies are available. 2 - M. Hills, Journal of Vacuum Science and Technology, Vol.13A, p. 30, 1995. Organic removal cleaning mechanisms and cleaning procedures.