This cooling also protects the antenna chamber mount. The hard coating prevents unwanted sputtering, ensuring a life span at least ten times as long as standard ion sources. Its non-reactive properties also make it ideal for ion implantation applications with corrosive gases and for continuous operation applications. Due to its sturdy construction it can survive mechanical impacts, heat stress and a hot plasma environment. Wellbore logging applications.
Benefits RF power coupling produces cleaner plasmas and ion implants.
RF power sources available commercially, is easily controlled, and does not need expensive electronics. Even implant of ions on irregularly-shaped objects allows plasma processing of complex objects such as engine blocks. Works with a wide variety of corrosive gases, including O2 and corrosive BF3. Coating is non-reactive and lasts at least ten times as long as filament sources. Coating is much more cost-effective.