The suppression electrode reduces X-ray radiation caused by back streaming secondary electrons that get accelerated and collide with the source. Top of Page The Power supplies Output voltages and currents are precisely controlled from the front panel or by remote programming. Digital displays on the front panel directly monitor the voltage and current outputs. The Magnet A mass analyzing magnet positioned along the beam path between the source and the process chamber filters ions from the beam while allowing certain other ions to enter the process chamber. One or more current carrying coils set up dipole magnetic fields in the deflection region near the pole pieces.
Additional coils help set up a quadruple field in deflection region.
A group of electrodes establish a non-linear voltage gradient along the beam axis for accelerating and then decelerating the beam to the selected final energy level with focusing. Focusing of the Ion Beam is also provided by the construction and shape of the electrodes. The suppression electrode produces a inner zero electrostatic field, and an outer electrostatic on a field such that ions entering this outer field are deflected by an amount that is a function of their distance from the edge of the inner field. The result is a focused beam having a uniform intensity over a given target area and at a given distance from the lens.