Full computer based system and process control is achieved through the use of an in-situ quartz crystal monitor and a computer interfaced optical monitor. In-line sputter deposition provides unparalleled throughput, specially for coating planer substrates.
Applications range from coating for photovoltaic to architectural components.
The choice of plasma generation will depend on the specific application as well as the form and nature of the substrate and type of plasma species required. High speed pumping, the use of power efficient motors and power supplies coupled with innovative fixturing are the hallmark of these systems. These systems can be configured for clean room installation and can also feature either single or dual high speed pumping packages. In addition, we provide several options for beam extraction and formation optics that provide alternatives for focused as well as low energy beams.