The newly designed, fully digital SPC-1 control panel has no exposed electrical contacts. A full opening access door is provided for ease of maintenance. The vacuum break valve is interlocked with the large poppet valve. Once the vacuum break valve is actuated, the poppet valve to the diffusion pump will be automatically closed before the chamber can be broken to atmosphere. This prevents contamination of the diffusion pump oil.
All internal wires terminate in numbered terminal strips in the control panel.
All interconnecting external wire is run in conduit. The workholding carriage and chamber have automatic engagement and disengagement for both the drive and electrical connections. No need to assemble or disassemble electrical leads to the filament assembly. The coater door is interlocked with the vacuum valve to prevent inadvertent opening of the valve while the door is open. Thus, oxidation of the diffusion pump oil is prevented.