Thus, the first active step in its effort was setting yield expectations, or, more simply, establishing a specific goal for each technology targeted for improvement. This graph is shown in Figure 2. Entitlement in this application is defined as the best sustainable yield for a given technology. Once the plant entitlement was set, it was easy to determine each technology's goal. The real challenge was how to achieve better defect densities than the entitlement.
Design rules are on-reticle active poly line or space widths.
Learning Rate . When the fab had established defect density goals for each technology, the next step was to determine the pace at which the goals would be met. This model was later verified to be realistic. Baseline Process Defect Levels and Goals . Translating the technology defect density goals to lower-level goals was done in the following manner.