There are many reasons to put text into your layout, including annotation of the dose of each pattern, labelling each pattern or group, putting the date and time on the substrate, and making it easier to find your patterns on the substrate. Typically 0.1024 mm field size with VRU of 1 is used. VRU has no impact on text, however, it is necessary to choose an appropriate VRU to get an adequate beam current. In general, the dose for text can be very high. This makes the text larger than the exposed area, and therefore easier to see during inspection.
All text is placed within quotes.
If using a field size of 0.8192 mm, this pattern would be placed right above a pattern at 3.0, -5.0, with 0.21 mm distance between the top of the text and the top of the pattern.