This JDP will target next generation substrate clamping requirements for improved heat transfer, plasma resistance, and increased holding force. BW Consulting is the focal point for customer to factory interface with Dorsey Gage. We work as team to make your clamping requirements a reality. We have full material characterization capabilities at both companies. Our automated test stations and state of the art test programs assure the most reliable ESC on the market.
Custom clamping configurations and customer specific requirements are also available.
ESC system level issues can be analyzed and rectified. A Dorsey Gage alternative part is our first choice in your system if the ESC is defective. We will recommend improvements, and corrective action for the defective component, assembly, or system. Our engineers can implement the recommended corrective action on site. Dorsey Gage produces a complete line of Electro Static Chucks for semiconductor manufacturing.