B8, pages 563- 568, 1990. Paper discusses XPS data on cleaning contaminated Si wafers. Copies are available. B9, pages 1970-1977, 1991. Many cleaning examples on different materials.
Copies are available.
Paper on mechanisms and recontamination for low velocity method. 2 - R. Sherman, D. Hirt, R. Vane, Journal of Vacuum Science and Technology, Vol. 12A, pages 1876-1881, 1994. Paper on various applications, cleaning procedures and role of gas purity. Copies are available.