Send us your feedback . In a move aimed directly at archcompetitor Applied Materials, Novellus Systems introduced its Damascus copper damascene production system at a press conference here in early June. The announcement followed news of a multicompany strategic alliance for copper processing, which links Novellus with CMP toolmaker IPEC and etch equipment manufacturer Lam Research and its cleaning tool division, OnTrak Systems. A key enabling technology in the Sabre package is a proprietary bath chemistry and automatic chemistry control, which allows copper fills in deep, narrow trenches without any gaps or voids. The linchpin of the Novellus copper system is the Sabre electrofill deposition tool.
Copper is inevitable.
Hanley said Novellus has already shipped several Sabres to customers in the United States, with volume shipments expected to begin in the fourth quarter of this year. The company's Wilsonville, OR, facility is the development site for the Damascus venture. He said his company is open to expanding the coalition, pointing out the presence of an executive from KLA-Tencor at the press conference. You can't partner with someone who covets your business. When questioned whether he believes chipmakers will initially segregate copper process modules from the rest of their fabs, as was the case when CMP was introduced to production areas, Hanley opined they would have to be isolated.