Toxicity data limited. Not considered a serious hazard although ammonia and hydrous silica compounds may be formed by hydrolysis in the digestive system. Gastrointestinal upset may follow the ingestion of appreciable amounts. Vomiting can present the additional hazard of getting HMDS into the lungs. Moderate irritant, especially to sensitive areas.
Alkaline reaction can cause soreness with inflammation in acute cases.
May be absorbed through skin. If not breathing, give artificial respiration. If breathing is difficult, give oxygen. Call a physician immediately. Give large quantities of water.