Robust water cooling, high purity dielectrics, and tight manufacturing tolerances ensure long, reliable life in demanding production environments. Power Supplies Denton's solid state 600 watt RF power supply with automatch network allows sputtering of nonconductive materials. An additional 600 watt RF power supply with automatch network is available for Co-sputtering or RF bias application. A control interface is also offered for external automation and data acquisition. A heated capacitance manometer with 45 psia overpressure capability is provided.
Auto ranging cold cathode high vacuum gauging is standard.
Hot filament vacuum gauging is available.