ADE Corporation ADE Corporation is the worldwide leader in the design, manufacture, marketing and service of metrology and inspection systems for the semiconductor wafer manufacturing industry. For the third consecutive year, ADE has been named to the top 10 best list of semiconductor companies according to the VLSI customer satisfaction survey. 200mm and 300mm wafer. Series 700 Provides flexible means of automatically characterizing, inspecting and sorting silicon wafers. Wafers from 100mm to 200mm in diameter can be measured up to 40 sort classes.
All systems feature optional resistivity measurements, laser marking and mark reading.
Series 800 Measure thickness global and site flatness, bow, warp, conductivity type, secondary fiducial measurements and sorting. Offers higher resolution means of more precise characterization of wafer thickness, site and global flatness, resulting in tighter specifications during incoming inspection. Series 900 Used to inspect wafers that undergo final test for flatness, thickness, resistivity and type. Designed for state of the art cleanrooms. For inspection of polished wafers measures particles, scratched defects and haze of silicon wafers.