SensArray improves thermal measurement SensArray Corporation today introduced Process Probe 1535 designed to provide customers with greater thermal measurement accuracy during high temperature hot wall applications. Increased accuracy measurements help customers tighten control parameters in oxidizing gas environments and better analyse results to optimise fabrication processes. Deg .C to 1,100 Deg.
C are typically achievable in hot wall applications.
Designed for collecting and analyzing thermal data critical to the manufacturing of semiconductor and LCD display processes, SensArray products help customers achieve the best possible reproducibility, process optimisation and uptime associated with fabrication equipment. SensArray's products range from wafers instrumented with arrays of temperature sensors, to complete integrated measurement systems.