The compact, tabletop analyzer incorporates the spectrophotometer measurement head from the company's 8000X-series products. The head contains no moving parts and provides fast, accurate film thickness measurement. A computer- controlled stage permits discrete measurement at preprogrammed locations as well as the creation of film uniformity maps. By ensuring precise and safe delivery of process gases, the units help reduce costs. The option offers fast strip rates and diagnostic features that maximize uptime.
Additional features are damage-free resist removal, corrosion control, and complete polymer removal.
Tip evaluation software from Digital Instruments allows users of NanoScope AE Dimension and MultiMode TM microscopes to get maximum use out of their tips without the risk of gathering bad data with a dull tip. The software was previously available only for Digital Instruments' large, automated AFMs. The program evaluates whether the tip meets a selected tip sharpness criterion or should be replaced. The package includes the proprietary evaluation software and a roughness standard, which is scanned as part of the evaluation. Based on the analysis, the evaluation software presents worst-case tip sharpness in numerical and graphical form, as well as an image of the tip itself.