For obtain SRI a sharp conducting probe is used to contact a low-angle beveled surface to expose the distribution of dopants in a silicon sample.
Contact is made with considerable force in order to punch through the native surface oxide.
By using our UltraSharp silicon cantilevers with conductive coating you can simultaneously obtain two images - AFM and STM, or you can measure the local conductivity of your sample. This mode is usually done simultaneously with conventional AFM topographic imaging.