For advanced microlithography systems, Cymer has long been the industry's excimer laser light source of choice, having already progressed through many product generations. The 5010 is specifically designed to meet the requirements of the next generation of steppers and scanners. The end result is increased yields, increased wafer throughput and reduced cost of consumables. Built to maximize uptime Cymer's fundamental system design is engineered to maximize uptime and make servicing easier. This has been demonstrated in high-volume production at hundreds of installations all around the globe.
Cymer construction is modular, with all modules accessible from the front.
Also, form follows function. This ensures stable optical alignment and allows chamber exchange without disturbance to the optical path. In addition to its advanced design, the 5010 offers a lower cost of consumables to chipmakers with its significantly improved lifetimes compared to the 5000. Cymer and the 5010 thus allow the industry to position itself for higher utilization rates, improved wafer yields and lower operating costs. There is no need to settle for less.