Devices combine sputter-deposited SMA thin film with silicon substrate, using MEMS fabrication technology. Pneumatic valves are in limited production, finding applications in analytical instruments and medical instruments. Mass flow controllers and pressure regulators are at prototype stage. Advantages are low internal dead volume and compatibility with corrosive or sensitive liquids.
Applications exist in process control and drug discovery.
A microactuator for spacers in flat panel displays is being developed. This is a true microactuator mechanism, with components a few microns wide. These microdevices, which combine SMA with polysilicon, are fabricated using CMOS processes. In the last five years research and development at TiNi Alloy Company has become focused on microactuators employing sputtered titanium-nickel film combined with silicon substrates. Devices combining TiNi thin film with silicon substrates are fabricated by chemical milling using etchants of silicon, silicon oxide, and metals.