Silicon carbide can be provided in thin section shapes for microelectronic substrates or hard datadisks. SiC CVD coated parts and can also be supplied for special applications, such as thermocouple protection tubes. These applications take advantage silicon carbide's thermal expansion match to silicon, high elastic modulus, chemical inertness allowing economic benefits of maintenance and reuse, and high thermal conductivity for even, rapid heating of the silicon wafer. Silicon carbide is well suited as a structural material for low mass wafer carrier components and rigid, dimensionally stable platforms with exceptional flatness for wafer lapping and polishing. Materials Pallet carrier materials are available in two grades to meet your needs.
All grades are lightweight, and offer advantages over aluminum, titanium and composite materials.
Dimensional stability, flatness, thermal shock resistance and chemical resistance make these products ideal for the hostile environments presented in super high temperature applications. We offer the industry's widest variety of pallet.