CMOS-MEMS mesh structures. Corner of chip, showing small meshes and part of large central mesh. SEM photo of unit cell which is also complete membrane skeleton, fixed at the edges. Ledge between metal3 chip surface and metal1 mesh surface is about 4 microns. Part of central membrane is visible on bottom.
Colors correspond to out-of plane displacement caused by bimorph stresses.
Optical microscope closeup of one of the small meshes. Note the large curl creating out of focus parts of structure. The amount of curl is proportional to the square of the length of the structure. Lower magnification view of same. View of the ledge between central membrane and chip surface.