We have a couple of extra copies. Patent on large area nozzle. 3 - R. Sherman and W. Whitlock, Journal of Vacuum Science and Technology, Vol. B8, pages 563- 568, 1990. Paper discusses XPS data on cleaning contaminated Si wafers.
Copies are available.
B9, pages 1970-1977, 1991. Many cleaning examples on different materials. Copies are available. Paper on mechanisms and recontamination for low velocity method. 2 - R. Sherman, D. Hirt, R. Vane, Journal of Vacuum Science and Technology, Vol.