DOI: 10.5281/zenodo.15658828
title: Raw Data for Article: Ion-beam channeling in a single-surface modified Si membrane

description: This dataset contains both experimental and simulation data for ions transmitted through a thin silicon crystal, along with the ion time-of-flight or energy. The crystal is 200 nm thick and has been amorphized on one side by Ga ion implantation and subsequent annealing. The sample was imaged using 50 keV He+ ions and 280 keV 22Ne+ ions. The sample was imaged with both the crystalline side as well as the amorphous side facing the ion beam. This has been designated as AC for where the amorpohous side is facing the ion beam and CA for where the crystalline side is facing the ion beam. This dataset is published alongside a paper in Applied Surface Science, where full details regarding the sample processing, as well as the experimental and simulation configuration can be found (https://doi.org/10.1016/j.apsusc.2025.163734).

 

The dataset is divided into 3 types:



Experimental Raw Data



Experimental_50keV_He_AC_200nm_Si

Experimental_50keV_He_CA_200nm_Si

Experimental_280keV_Ne22_AC_200nm_Si

Experimental_280keV_Ne22_CA_200nm_Si



Simulation Raw Data



Simulation_50keV_He_AC_200nm_Si

Simulation_50keV_He_CA_200nm_Si

Simulation_280keV_Ne22_AC_200nm_Si

Simulation_280keV_Ne22_CA_200nm_Si



Full-Trajectory Simulation Videos



These are high-quality versions of the videos published with the online version of the paper




The experimental data consists of ion counts recorded at the detector plane (i.e. X [mm], Y [mm], time-of-flight [ns]). The data is presented in the form of "events", where an "event" can have up to 4 counts. The total time since the start of the collection is also recorded in seconds.

The simulation data consists of full ion trajectories through the sample (i.e. X [Å], Y [Å], Z [Å], DirX, DirY, DirZ, Energy [eV]). The simulation data has 10 columns. Columns 8 and 9 are not used for our work. The value of column 10 indicates the status of the particle trajectory:



Start of trajectory

Along the trajectory

Stopped inside the target

Backscattered

Transmitted


A full description of the simulator and file format for the .tra files can be found in the IMSIL manual, which can be retrieved from: https://www.tuwien.at/en/etit/fke/research/process-simulation

The videos in this dataset are high-quality versions of the videos shown in the online version of the paper. Their labeling and descriptions can be found in Appendix C of the paper.

 

Uppsala Example Data:




Event #
Total Time (s)
# of Counts
X1
Y1
ToF1
X2
Y2
ToF2
X3
Y3
ToF3
X4
Y4
ToF4


1
0
1
-28.75
12.74
956.03
0
0
0
0
0
0
0
0
0


2
8.44599E-06
0
0
0
0
0
0
0
0
0
0
0
0
0


3
0.000592048
2
-20.59
-13.20
959.43
-18.06
-3.73
1404.04
0
0
0
0
0
0


4
0.000608955
0
0
0
0
0
0
0
0
0
0
0
0
0


5
0.000617407
1
9.93
-8.82
945.47
0
0
0
0
0
0
0
0
0




 

IMSIL Example Data:




X
Y
Z
DirX
DirY
DirZ
Energy
I1
IG
Trajectory


1.621
-0.224
-1752.335
0.0000
0.0000
1.0000
280000.00
1
1
1


1.621
-0.224
-1748.794
0.0001
0.0000
1.0000
279992.02
1
1
2


1.621
-0.224
-1747.377
0.0001
-0.0001
1.0000
279983.32
1
1
2


1.622
-0.224
-1746.031
-0.0001
-0.0001
1.0000
279957.96
1
1
2


1.621
-0.225
-1744.701
0.0000
0.0001
1.0000
279927.18
1
1
2