DOI: 10.5061/dryad.n8pk0p384
title: Data from: 17 GHz lossless InP-membrane active metasurface

description: High-speed active metasurfaces enable spatiotemporal light control within
 an ultra-thin device layer, offering new possibilities for optical
 communication, sensing, and computing. However, a tradeoff between
 electrical conductivity and optical loss has hindered the realization of a
 high-speed, low-loss device. Here, we experimentally demonstrate an active
 metasurface operating at 1.5-μm wavelength range that achieves a
 record-high 17.5 GHz modulation bandwidth while maintaining a high quality
 (Q) factor of 102 and ultra-low optical loss of 0.56 dB. This is enabled
 by the indium phosphide (InP) membrane platform, where n-InP offers high
 electron mobility and low free-carrier absorption simultaneously. A high-Q
 Friedrich-Wintgen quasi-bound-state-in-the-continuum mode within the
 InP-membrane high-contrast grating (InP HCG) traps light in the organic
 electro-optic material for efficient modulation. The InP HCG also
 functions as an ultralow-resistance interdigitated electrode, enabling
 50-fold faster modulation than silicon-based counterparts. Our work paves
 the way towards active metasurfaces for high-speed spatiotemporal light
 control beyond the
description: # Data underlying the article: "17 GHz Lossless InP-Membrane Active
 Metasurface". The data set consists of csv data required to reproduce
 the figures in the manuscript and supplementary information. The data set
 is structured as follows. Folder Fig1: * Fig1d: Electric field intensity
 distribution of the resonating mode of InP HCG. * fig1d_E2.csv : 2D data
 of electric field intensity distribution in Fig. 1D. * fig1d_x.csv :
 x-axis of 2D map in Fig. 1D. * fig1d_y.csv : y-axis of 2D map in Fig. 1D.
 * Fig1e: Doping concentration dependent electron mobility of n-InP and
 n-Si. * fig1e_InP_line.csv : Data for InP in Fig. 1E. * Column 1: Doping
 concentration (cm^-3^); Column 2: Mobility (cm^2^/Vs) * fig1e_Si_line.csv
 : Data for Si in Fig. 1E. * Column 1: Doping concentration (cm^-3^);
 Column 2: Mobility (cm^2^/Vs) * Fig1f: Doping concentration dependent
 absorption coefficient of n-InP and n-Si. * fig1f_InP_line.csv : Data for
 InP (line plot, fit result) in Fig. 1f. * Column 1: Doping concentration
 (cm^-3^); Column 2: Absorption coefficient (/cm) * fig1f_Si_line.csv :
 Data for Si (line plot, fit result) in Fig. 1f. * Column 1: Doping
 concentration (cm^-3^); Column 2: Absorption coefficient (/cm) *
 fig1f_InP_scatter.csv : Data for InP (scatter plot, from literature) in
 Fig. 1f. * Column 1: Doping concentration (cm^-3^); Column 2: Absorption
 coefficient (/cm) * fig1f_Si_scatter.csv : Data for Si (scatter plot, from
 literature) in Fig. 1f. * Column 1: Doping concentration (cm^-3^); Column
 2: Absorption coefficient (/cm) * Fig1g: Absorption coefficient vs
 resistivity plot for n-InP and n-Si. * fig1g_InP_line.csv : Data for InP
 (line plot, fit result) in Fig. 1g. * Column 1: Absorption coefficient
 (/cm); Column 2: Resistivity (ohm cm) * fig1g_Si_line.csv : Data for Si
 (line plot, fit result) in Fig. 1g. * Column 1: Absorption coefficient
 (/cm); Column 2: Resistivity (ohm cm) * fig1g_InP_scatter.csv : Data for
 InP (scatter plot, from literature) in Fig. 1g. * Column 1: Absorption
 coefficient (/cm); Column 2: Resistivity (ohm cm) * fig1g_Si_scatter.csv :
 Data for Si (scatter plot, from literature) in Fig. 1g. * Column 1:
 Absorption coefficient (/cm); Column 2: Resistivity (ohm cm) Folder Fig2:
 * Fig2a: Numerically simulated reflectance spectrum of InP HCG with
 different doping concentration. * fig2a_1E17.csv : Data for ND=1e17cm^-3^
 in Fig. 2a. * Column 1: Wavelength (nm); Column 2: Reflectivity *
 fig2a_2E17.csv : Data for ND=2e17cm^-3^ in Fig. 2a. * Column 1: Wavelength
 (nm); Column 2: Reflectivity * fig2a_5E17.csv : Data for ND=5e17cm^-3^ in
 Fig. 2a. * Column 1: Wavelength (nm); Column 2: Reflectivity *
 fig2a_1E18.csv : Data for ND=1e18cm^-3^ in Fig. 2a. * Column 1: Wavelength
 (nm); Column 2: Reflectivity * fig2a_2E18.csv : Data for ND=2e18cm^-3^ in
 Fig. 2a. * Column 1: Wavelength (nm); Column 2: Reflectivity *
 fig2a_5E18.csv : Data for ND=5e18cm^-3^ in Fig. 2a. * Column 1: Wavelength
 (nm); Column 2: Reflectivity * fig2a_1E19.csv : Data for ND=1e19cm^-3^ in
 Fig. 2a. * Column 1: Wavelength (nm); Column 2: Reflectivity *
 fig2a_2E19.csv : Data for ND=2e19cm^-3^ in Fig. 2a. * Column 1: Wavelength
 (nm); Column 2: Reflectivity * Fig2b: Numerically simulated reflectance
 spectrum of Si HCG with different doping concentration. * fig2b_1E17.csv :
 Data for ND=1e17cm^-3^ in Fig. 2b. * Column 1: Wavelength (nm); Column 2:
 Reflectivity * fig2b_2E17.csv : Data for ND=2e17cm^-3^ in Fig. 2b. *
 Column 1: Wavelength (nm); Column 2: Reflectivity * fig2b_5E17.csv : Data
 for ND=5e17cm^-3^ in Fig. 2b. * Column 1: Wavelength (nm); Column 2:
 Reflectivity * fig2b_1E18.csv : Data for ND=1e18cm^-3^ in Fig. 2b. *
 Column 1: Wavelength (nm); Column 2: Reflectivity * fig2b_2E18.csv : Data
 for ND=2e18cm^-3^ in Fig. 2b. * Column 1: Wavelength (nm); Column 2:
 Reflectivity * fig2b_5E18.csv : Data for ND=5e18cm^-3^ in Fig. 2b. *
 Column 1: Wavelength (nm); Column 2: Reflectivity * fig2b_1E19.csv : Data
 for ND=1e19cm^-3^ in Fig. 2b. * Column 1: Wavelength (nm); Column 2:
 Reflectivity * fig2b_2E19.csv : Data for ND=2e19cm^-3^ in Fig. 2b. *
 Column 1: Wavelength (nm); Column 2: Reflectivity * Fig2c: Numerically
 simulated Q factor and optical loss of InP and Si HCGs under various
 doping concentrations. * fig2c_InP_Loss.csv : Data for optical loss of InP
 in Fig. 2c. * Column 1: Doping concentration (cm^-3^); Column 2: Optical
 loss (dB) * fig2c_Si_Loss.csv : Data for optical loss of Si in Fig. 2c. *
 Column 1: Doping concentration (cm^-3^); Column 2: Optical loss (dB) *
 fig2c_InP_Q.csv : Data for Q factor of InP in Fig. 2c. * Column 1: Doping
 concentration (cm^-3^); Column 2: Q factor * fig2c_Si_Q.csv : Data for Q
 factor of Si in Fig. 2c. * Column 1: Doping concentration (cm^-3^); Column
 2: Q factor * Fig2d: Numerically simulated reflectance spectrum of InP HCG
 (doping oncentration: 1E19/cm^3^) while varying the refractive index nEO
 of OEO material. * fig2d_nEO1648.csv : Data for nEO = 1.648 in Fig. 2d. *
 Column 1: Wavelength (nm); Column 2: Reflectivity * fig2d_nEO1649.csv :
 Data for nEO = 1.649 in Fig. 2d. * Column 1: Wavelength (nm); Column 2:
 Reflectivity * fig2d_nEO1650.csv : Data for nEO = 1.650 in Fig. 2d. *
 Column 1: Wavelength (nm); Column 2: Reflectivity * fig2d_nEO1651.csv :
 Data for nEO = 1.651 in Fig. 2d. * Column 1: Wavelength (nm); Column 2:
 Reflectivity * fig2d_nEO1652.csv : Data for nEO = 1.652 in Fig. 2d. *
 Column 1: Wavelength (nm); Column 2: Reflectivity * Fig2e: Numerically
 simulated reflectance spectrum of Si HCG (doping oncentration: 1E19/cm^3^)
 while varying the refractive index nEO of OEO material. *
 fig2e_nEO1648.csv : Data for nEO = 1.648 in Fig. 2e. * Column 1:
 Wavelength (nm); Column 2: Reflectivity * fig2e_nEO1649.csv : Data for nEO
 = 1.649 in Fig. 2e. * Column 1: Wavelength (nm); Column 2: Reflectivity *
 fig2e_nEO1650.csv : Data for nEO = 1.650 in Fig. 2e. * Column 1:
 Wavelength (nm); Column 2: Reflectivity * fig2e_nEO1651.csv : Data for nEO
 = 1.651 in Fig. 2e. * Column 1: Wavelength (nm); Column 2: Reflectivity *
 fig2e_nEO1652.csv : Data for nEO = 1.652 in Fig. 2e. * Column 1:
 Wavelength (nm); Column 2: Reflectivity * Fig2f: Numerically simulated
 reflectance of InP and Si HCGs (doping oncentration: 1E19/cm^3^) at a
 fixed wavelength while varying the refractive index nEO of OEO material. *
 fig2f_InP.csv : Data for InP in Fig. 2f. * Column 1: Refractive index nEO;
 Column 2: Reflectance (dB) * fig2f_Si.csv : Data for Si in Fig. 2f. *
 Column 1: Refractive index nEO; Column 2: Reflectance (dB) * Fig2g:
 Numerically simulated doping concentration dependent 3dB bandwidth of InP
 and Si HCGs for various device sizes. * fig2g_InP_40um.csv : Data for InP
 with 40um*40um size device in Fig. 2g. * Column 1: Doping concentration
 (cm^-3^); Column 2: 3-dB bandwidth (Hz) * fig2g_InP_60um.csv : Data for
 InP with 60um*60um size device in Fig. 2g. * Column 1: Doping
 concentration (cm^-3^); Column 2: 3-dB bandwidth (Hz) * fig2g_InP_80um.csv
 : Data for InP with 80um*80um size device in Fig. 2g. * Column 1: Doping
 concentration (cm^-3^); Column 2: 3-dB bandwidth (Hz) * fig2g_Si_40um.csv
 : Data for Si with 40um*40um size device in Fig. 2g. * Column 1: Doping
 concentration (cm^-3^); Column 2: 3-dB bandwidth (Hz) * fig2g_Si_60um.csv
 : Data for Si with 60um*60um size device in Fig. 2g. * Column 1: Doping
 concentration (cm^-3^); Column 2: 3-dB bandwidth (Hz) * fig2g_Si_80um.csv
 : Data for Si with 80um*80um size device in Fig. 2g. * Column 1: Doping
 concentration (cm^-3^); Column 2: 3-dB bandwidth (Hz) * fig2g_exp.csv :
 Data for experiment result in Fig. 2g. * Column 1: Doping concentration
 (cm^-3^); Column 2: 3-dB bandwidth (Hz) Folder Fig3: * Fig3f:
 Experimentally obtained doping concentration and resistivity of n-InP
 compared with the Caughey-Thomas-like model. * fig3f_line.csv : Data for
 line plot in Fig. 3f. * Column 1: Doping concentration (cm^-3^); Column 2:
 Resistivity (ohm*cm) * fig3f_scatter.csv : Data for scattered point in
 Fig. 3f. * Column 1: Doping concentration (cm^-3^); Column 2: Resistivity
 (ohm*cm) * Fig3g: Experimentally obtained device capacitance for two
 device sizes compared with the numerical simulation result. *
 fig3g_scatter.csv : Data for scattered points in Fig. 3g. * Column 1:
 Device size (um); Column 2: Capacitance (fF) * fig3g_sim.csv : Data for
 simulation result in Fig. 3g. * Column 1: Device size (um); Column 2:
 Capacitance (fF) * fig3g_L2.csv : Data for L^2 reference line in Fig. 3g.
 * Column 1: Device size (um); Column 2: Capacitance (fF) Folder Fig4: *
 Fig4a: Experimentally obtained reflectance and transmission spectra of InP
 HCG under various bias voltages. * fig4a_Ref_+30V.csv : Data for
 reflectance for +30V in Fig. 4a. * Column 1: Wavelength (nm); Column 2:
 Reflectance * fig4a_Ref_0V.csv : Data for reflectance for 0V in Fig. 4a. *
 Column 1: Wavelength (nm); Column 2: Reflectance * fig4a_Ref_-30V.csv :
 Data for reflectance for -30V in Fig. 4a. * Column 1: Wavelength (nm);
 Column 2: Reflectance * fig4a_Ref+Tran_+30V.csv : Data for sum of
 reflectance and transmittance for +30V in Fig. 4a. * Column 1: Wavelength
 (nm); Column 2: Reflectance + Transmittance * fig4a_Ref+Tran_0V.csv : Data
 for sum of reflectance and transmittance for 0V in Fig. 4a. * Column 1:
 Wavelength (nm); Column 2: Reflectance + Transmittance *
 fig4a_Ref+Tran_-30V.csv : Data for sum of reflectance and transmittance
 for -30V in Fig. 4a. * Column 1: Wavelength (nm); Column 2: Reflectance +
 Transmittance * fig4a_Tran_+30V.csv : Data for transmittance for +30V in
 Fig. 4a. * Column 1: Wavelength (nm); Column 2: Reflectance +
 Transmittance * fig4a_Tran_0V.csv : Data for transmittance for 0V in Fig.
 4a. * Column 1: Wavelength (nm); Column 2: Reflectance + Transmittance *
 fig4a_Tran_-30V.csv : Data for transmittance for -30V in Fig. 4a. * Column
 1: Wavelength (nm); Column 2: Reflectance + Transmittance *
 fig4c_Ref_data.csv : Experimental data for reflected optical power in Fig.
 4c. * Column 1: Time (sec); Column 2: Reflected optical power (a.u.) *
 Fig4c: Reflected and transmitted optical power when sinusoidal voltage is
 applied to the device. * fig4c_Tran_data.csv : Experimental data for
 transmitted optical power in Fig. 4c. * Column 1: Time (sec); Column 2:
 Transmitted optical power (a.u.) * fig4c_Ref_fit.csv : Fitting result for
 reflected optical power in Fig. 4c. * Column 1: Time (sec); Column 2:
 Reflected optical power (a.u.) * fig4c_Tran_fit.csv : Fitting result for
 transmitted optical power in Fig. 4c. * Column 1: Time (sec); Column 2:
 Transmitted optical power (a.u.) Folder Fig5: * Fig5a: Frequency response
 of the device. * fig5a_raw.csv: Raw data for Fig. 5a. * Column 1:
 Frequency (Hz); Column 2: Electro-optic S21 (dB) * fig5a_ave.csv: Moving
 average result for Fig. 5a. * Column 1: Frequency (Hz); Column 2:
 Electro-optic S21 (dB) * fig5a_fit.csv: Fitted result for Fig. 5a. *
 Column 1: Frequency (Hz); Column 2: Electro-optic S21 (dB) Folder FigS1: *
 FigS1: Reflectance contour map of InP HCG as function of wavelength and
 grating thickness. * figS1_Reflectance.csv: Reflectance value (2d map) for
 Fig. S1. * figS1_thickness.csv: Normalized thickness (2d map) for Fig. S1.
 * figS1_wavelength.csv: Normalized wavelength (2d map) for Fig. S1. *
 figS1_inset_Reflectance.csv: Reflectance value (2d map) for inset of Fig.
 S1. * figS1_inset_thickness.csv: Normalized thickness (2d map) for inset
 of Fig. S1. * figS1_inset_wavelength.csv: Normalized wavelength (2d map)
 for inset of Fig. S1. Folder FigS2: * FigS2a: Electric field intensity
 profile of resonating mode of InP HCG. * figS2a_E2.csv : 2D data of
 electric field intensity distribution in Fig. S2A. * figS2a_x.csv : x-axis
 of 2D map in Fig. S2A. * figS2a_y.csv : y-axis of 2D map in Fig. S2A. *
 FigS2b: Electric field intensity profile of resonating mode of Si HCG. *
 figS2b_E2.csv : 2D data of electric field intensity distribution in Fig.
 S2B. * figS2b_x.csv : x-axis of 2D map in Fig. S2B. * figS2b_y.csv :
 y-axis of 2D map in Fig. S2B. Folder FigS3: * FigS3b: Measured electrical
 resistance of TLM test patterns with various gap length. *
 FigS3b_scatter.csv : Data for scatter plot of Fig. S3. * Column 1: Gap
 (um); Column 2: Resistance (ohm) * FigS3b_line.csv : Data for line plot of
 Fig. S3. * Column 1: Gap (um); Column 2: Resistance (ohm) Folder FigS4: *
 FigS4b: Measured Hall voltage while varying applied magnetic flux. *
 FigS4b_scatter.csv : Data for scatter plot of Fig. S4. * Column 1:
 Magnetic flux (T); Column 2: Hall voltage (mV) * FigS4b_line.csv : Data
 for line plot of Fig. S4. * Column 1: Magnetic flux (T); Column 2: Hall
 voltage (mV) Folder FigS5: * FigS5a: Measured electrical capacitance of
 the InP HCG devices with two different sizes. * FigS5a_40um.csv : Data for
 40um*40um size device in Fig. S5a. * Column 1: Bias voltage (V); Column 2:
 Capacitance (F) * FigS5a_80um.csv : Data for 80um*80um size device in Fig.
 S5a. * Column 1: Bias voltage (V); Column 2: Capacitance (F) * FigS5b:
 Numerically simulated frequency dependence of the impedance of the device
 compared with the experimentally obtained device capacitance. *
 FigS5b_40um.csv : Data for line plot of 40um*40um size device in Fig. S5b.
 * Column 1: Frequency (Hz); Column 2: Impedance (ohm) * FigS5b_80um.csv :
 Data for line plot of 80um*80um size device in Fig. S5b. * Column 1:
 Frequency (Hz); Column 2: Impedance (ohm) * FigS5b_227fF.csv : Data for
 line plot of 227fF in Fig. S5b. * Column 1: Frequency (Hz); Column 2:
 Impedance (ohm) * FigS5b_951fF.csv : Data for line plot of 951fF in Fig.
 S5b. * Column 1: Frequency (Hz); Column 2: Impedance (ohm) Folder FigS6: *
 FigS6a: Q factor of InP HCG as a function of grating thickness and bar
 width. * FigS6a_Q.csv : Data of Q factor (2D map) for Fig. S6. *
 FigS6a_thickness.csv : Data of thickness (nm; 2D map) for Fig. S6. *
 FigS6a_width.csv : Data of width (nm; 2D map) for Fig. S6. * FigS6b: Q
 factor of InP HCG as a function of grating thickness for a fixed bar
 width. * FigS6b.csv : Data for Fig. S6. * Column 1: Thickness (nm); Column
 2: Q factor Folder FigS7: * FigS7b: Q factor of InP HCG as a function of
 etching angle. * FigS7b.csv : Data for Fig. S7b. * Column 1: Etching angle
 (deg); Column 2: Q factor Folder FigS8: * FigS8: 3dB bandwidth of InP HCG
 as a function of device size. * FigS8_red-solid.csv : Data for red solid
 line of Fig. S8. * Column 1: Device size (um); Column 2: 3-dB Bandwidth
 (GHz) * FigS8_black-dotted.csv : Data for black-dotted line of Fig. S8. *
 Column 1: Device size (um); Column 2: 3-dB Bandwidth (GHz) Folder FigS9: *
 FigS9a: Wavelength dependence of the reflectance and the phase of the
 complex reflectance of InP HCG. * FigS9a_ref.csv : Data for reflectance of
 Fig. S9a. * Column 1: Wavelength (nm); Column 2: Reflectance *
 FigS9a_angle.csv : Data for angle of Fig. S9a. * Column 1: Wavelength
 (nm); Column 2: Angle/2pi * FigS9b: The trajectory of complex reflectance
 of InP HCG while sweeping the wavelength. * FigS9b.csv : Data for Fig.
 S9b. * Column 1: Re(r); Column 2: Im(r); Column 3: Wavelength (nm) Folder
 FigS10: * FigS10a: Wavelength dependence of the phase of the complex
 reflectance of InP HCG for various refractive index nEO of OEO material. *
 FigS10a_nEO_1p64.csv : Data for nEO=1.64 of Fig. S10a. * Column 1:
 Wavelength (nm); Column 2: Angle/2pi * FigS10a_nEO_1p642.csv : Data for
 nEO=1.642 of Fig. S10a. * Column 1: Wavelength (nm); Column 2: Angle/2pi *
 FigS10a_nEO_1p644.csv : Data for nEO=1.644 of Fig. S10a. * Column 1:
 Wavelength (nm); Column 2: Angle/2pi * FigS10a_nEO_1p646.csv : Data for
 nEO=1.646 of Fig. S10a. * Column 1: Wavelength (nm); Column 2: Angle/2pi *
 FigS10a_nEO_1p648.csv : Data for nEO=1.648 of Fig. S10a. * Column 1:
 Wavelength (nm); Column 2: Angle/2pi * FigS10a_nEO_1p65.csv : Data for
 nEO=1.65 of Fig. S10a. * Column 1: Wavelength (nm); Column 2: Angle/2pi *
 FigS10a_nEO_1p652.csv : Data for nEO=1.652 of Fig. S10a. * Column 1:
 Wavelength (nm); Column 2: Angle/2pi * FigS10a_nEO_1p654.csv : Data for
 nEO=1.654 of Fig. S10a. * Column 1: Wavelength (nm); Column 2: Angle/2pi *
 FigS10a_nEO_1p656.csv : Data for nEO=1.656 of Fig. S10a. * Column 1:
 Wavelength (nm); Column 2: Angle/2pi * FigS10a_nEO_1p658.csv : Data for
 nEO=1.658 of Fig. S10a. * Column 1: Wavelength (nm); Column 2: Angle/2pi *
 FigS10a_nEO_1p66.csv : Data for nEO=1.66 of Fig. S10a. * Column 1:
 Wavelength (nm); Column 2: Angle/2pi * FigS10b: The trajectory of complex
 reflectance of InP HCG while sweeping the refractive index nEO of OEO
 material. * FigS10b.csv : Data for Fig. S10b. * Column 1: Re(r); Column 2:
 Im(r); Column 3: Refractive index nEO Folder SigS11 * FigS11b: Electric
 field intensity profile of the resonating mode of InP HCG with feedback
 mirror. * figS11b_E2.csv : 2D data of electric field intensity
 distribution in Fig. S11B. * figS11b_x.csv : x-axis of 2D map in Fig.
 S11B. * figS11b_y.csv : y-axis of 2D map in Fig. S11B. Folder SigS12 *
 FigS12a: Wavelength dependence of the reflectance and the phase of the
 complex reflectance of InP HCG with feedback mirror. * FigS12a_ref.csv :
 Data for reflectance of Fig. S12a. * Column 1: Wavelength (nm); Column 2:
 Reflectance * FigS12a_angle.csv : Data for angle of Fig. S12a. * Column 1:
 Wavelength (nm); Column 2: Angle/2pi * FigS12b: The trajectory of complex
 reflectance of InP HCG with feedback mirror while sweeping the wavelength.
 * FigS12b.csv : Data for Fig. S12b. * Column 1: Re(r); Column 2: Im(r);
 Column 3: Wavelength (nm) Folder Fig S13 * FigS13a: Wavelength dependence
 of the phase of the complex reflectance of InP HCG with feedback mirror
 for various refractive index nEO of OEO material. * FigS13a_nEO_1p64.csv :
 Data for nEO=1.64 of Fig. S13a. * Column 1: Wavelength (nm); Column 2:
 Angle/2pi * FigS13a_nEO_1p642.csv : Data for nEO=1.642 of Fig. S13a. *
 Column 1: Wavelength (nm); Column 2: Angle/2pi * FigS13a_nEO_1p644.csv :
 Data for nEO=1.644 of Fig. S13a. * Column 1: Wavelength (nm); Column 2:
 Angle/2pi * FigS13a_nEO_1p646.csv : Data for nEO=1.646 of Fig. S13a. *
 Column 1: Wavelength (nm); Column 2: Angle/2pi * FigS13a_nEO_1p648.csv :
 Data for nEO=1.648 of Fig. S13a. * Column 1: Wavelength (nm); Column 2:
 Angle/2pi * FigS13a_nEO_1p65.csv : Data for nEO=1.65 of Fig. S13a. *
 Column 1: Wavelength (nm); Column 2: Angle/2pi * FigS13a_nEO_1p652.csv :
 Data for nEO=1.652 of Fig. S13a. * Column 1: Wavelength (nm); Column 2:
 Angle/2pi * FigS13a_nEO_1p654.csv : Data for nEO=1.654 of Fig. S13a. *
 Column 1: Wavelength (nm); Column 2: Angle/2pi * FigS13a_nEO_1p656.csv :
 Data for nEO=1.656 of Fig. S13a. * Column 1: Wavelength (nm); Column 2:
 Angle/2pi * FigS13a_nEO_1p658.csv : Data for nEO=1.658 of Fig. S13a. *
 Column 1: Wavelength (nm); Column 2: Angle/2pi * FigS13a_nEO_1p66.csv :
 Data for nEO=1.66 of Fig. S13a. * Column 1: Wavelength (nm); Column 2:
 Angle/2pi * FigS13b: The trajectory of complex reflectance of InP HCG with
 feedback mirror while sweeping the refractive index nEO of OEO material. *
 FigS13b.csv : Data for Fig. S13b. * Column 1: Re(r); Column 2: Im(r);
 Column 3: Refractive index nEO Folder Fig S14: * FigS14: Doping
 concentration dependence of the electron mobility of n-InP calculated by
 Caughey-Thomas-like model compared with experimentally obtained value. *
 FigS14_exp.csv : Experiment data point for Fig. S14. * Column 1: Doping
 concentration (cm^-3^); Column 2: Mobility (cm^2^/Vs) * FigS14_line.csv :
 Data for line plot of Fig. S14. * Column 1: Doping concentration (cm^-3^);
 Column 2: Mobility (cm^2^/Vs) Folder Fig S16: * FigS16a: Experimentally
 obtained reflectance spectrum of InP HCG fitted to the Fano resonance
 spectrum. * FigS16a_data.csv : Experiment data for Fig. S16a. * Column 1:
 Wavelength (nm); Column 2: Reflectance * FigS16a_fit.csv : Fitting result
 for Fig. S16a. * Column 1: Wavelength (nm); Column 2: Reflectance *
 FigS16b: Experimentally obtained Q factor of InP HCG under various bias
 voltages. * FigS16b.csv : Data for Fig. S16b. * Column 1: Bias voltage
 (V); Column 2: Q factor * FigS16c: Experimentally obtained resonance
 wavelength of InP HCG under various bias voltages. * FigS16c_scatter.csv :
 Data for scatter plot in Fig. S16c. * Column 1: Bias voltage (V); Column
 2: Resonance wavelength (nm) * FigS16c_line.csv : Data for line plot in
 Fig. S16c. * Column 1: Bias voltage (V); Column 2: Resonance wavelength
 (nm)