DOI: 10.5061/dryad.7d7wm3877
title: Data from: Polymer sequence alters sensitivity and resolution in chemically amplified polypeptoid photoresists

description: This dataset accompanies the article "Polymer sequence alters
 sensitivity and resolution in chemically amplified polypeptoid
 photoresists" by Cameron P. Adams, Carolyn Henein, Xiangxi Meng,
 Javier Read de Alaniz, Christopher K. Ober, and Rachel A. Segalman. The
 abstract for the full manuscript is: Continuous progress in semiconductor
 technology relies on the ability to pattern transistors at sub-10 nm
 dimensions, necessitating the development of high-resolution photoresists
 for extreme ultraviolet (EUV) lithography. Chemically amplified resists,
 traditionally composed of multicomponent polymer systems, face increasing
 challenges at such patterning wavelengths due to nanoscale heterogeneity
 and stochastic defects. To address these limitations, this study explores
 polypeptoids—monodisperse, sequence-defined polymers—as a new class of
 photoresists with precise molecular control. Systematic variation of
 polypeptoid chain length reveals a critical threshold necessary for
 successful pattern formation. Additionally, variations in monomer sequence
 strongly impact both photoresist sensitivity and feature fidelity,
 challenging conventional models that assume sequence effects should
 average out across polymer chains. Finally, processing conditions such as
 post-exposure bake temperature can be optimized to mitigate
 sequence-dependent variability. These results highlight polymer sequence
 as a powerful yet underexplored tool for tuning resist performance,
 offering a promising pathway towards improved nanoscale lithography.
description: This README.txt file was generated on 2025-06-30 by CAMERON ADAMS GENERAL
 INFORMATION 1. Title of Dataset: Polymer sequence alters sensitivity and
 resolution in chemically amplified polypeptoid photoresists. 2. Author
 Information A. Principal Investigator Contact Information Name: Rachel A.
 Segalman Institution: University of California, Santa Barbara Address:
 Materials Research Laboratory, University of California, Santa Barbara,
 California 93106 Email: [segalman@ucsb.edu](mailto:segalman@ucsb.edu) B.
 Principal Investigator Contact Information Name: Christopher K. Ober
 Institution: Cornell University Address: Department of Materials Science
 and Engineering, Cornell University, Ithaca, New York 14853 Email:
 [cko3@cornell.edu](mailto:cko3@cornell.edu) C. Principal Investigator
 Contact Information Name: Javier Read de Alaniz Institution: University of
 California, Santa Barbara Address: Department of Chemistry &
 Biochemistry, University of California, Santa Barbara, California 93106
 Email: [javier@chem.ucsb.edu](mailto:javier@chem.ucsb.edu) D. Associate or
 Co-investigator Contact Information Name: Cameron P. Adams Institution:
 University of California, Santa Barbara Address: Department of Chemical
 Engineering, University of California, Santa Barbara, California 93106
 Email: [cameronadams@ucsb.edu](mailto:cameronadams@ucsb.edu) E. Associate
 or Co-investigator Contact Information Name: Carolyn Henein Institution:
 University of California, Santa Barbara Address: Department of Chemistry
 & Biochemistry, University of California, Santa Barbara, California
 93106 Email: [chenein@ucsb.edu](mailto:chenein@ucsb.edu) F. Associate or
 Co-investigator Contact Information Name: Xiangxi Meng Institution:
 University of California, Santa Barbara Address: Department of Chemical
 Engineering, University of California, Santa Barbara, California 93106
 Email: [xiangximeng@ucsb.edu](mailto:xiangximeng@ucsb.edu) G. Associate or
 Co-investigator Contact Information Name: Chenyun Yuan Institution:
 Cornell University Address: Department of Materials Science and
 Engineering, Cornell University, Ithaca, New York 14853 Email:
 [cy479@cornell.edu](mailto:cy479@cornell.edu) 3. Date of data collection
 (single date, range, approximate date): April 2024 - May 2025 4.
 Geographic location of data collection: Santa Barbara, CA, USA 5. This
 work was supported as part of the Center for High Precision Patterning
 Science (CHiPPS), an Energy Frontier Research Center funded by the U.S.
 Department of Energy, Office of Science, Basic Energy Sciences at Lawrence
 Berkeley National Laboratory under Contract No. DE-AC02-05CH11231. X.M.
 also acknowledges support from Intel Corporation’s CINEMA program during
 the early development of polypeptoid photoresists. Polymer synthetic
 development was supported by the BioPACIFIC Materials Innovation Platform
 of the National Science Foundation under Award No. DMR-1933487. SEM, AFM,
 and 248 nm KrF lithography were performed in the UCSB Nanofabrication
 Facility, an open access laboratory. SHARING/ACCESS INFORMATION 1.
 Licenses/restrictions placed on the data: N/A 2. Links to publications
 that cite or use the data: 3. Links to other publicly accessible locations
 of the data: N/A 4. Links/relationships to ancillary data sets: N/A 5. Was
 data derived from another source? No 6. Recommended citation for this
 dataset: DATA & FILE OVERVIEW 1. File List: Files are organized into
 folders based on figure number from the corresponding manuscript and
 supporting information. Files are named as "Figure #.csv". ```
 A. Figure 2: AFM height profiles of 400nm half-pitch patterns to accompany
 SEM images found in the manuscript. a. Figure 2c.csv and Figure 2d.csv 1.
 Variables: Horizontal Distance [um], Film thickness [nm] 2. Column names:
 Horizontal Distance, X (um); Film Thickness, Z (nm) B. Figure 3d: Deep
 Ultraviolet (248nm) contrast curves for alternating, intermediate, and
 blocky 20-mer polypeptoid sequences. a. Figure 3d.csv 1. Variables:
 Exposure Dose [mJ/cm2], Film thickness [nm], Normalized film thickness 2.
 Column names: Dose (mJ/cm2), Alt. Film Thickness (nm), Alt. Normalized
 Thickness, Blocky Film Thickness (nm), Blocky Normalized Thickness, Int.
 Film Thickness (nm), Int. Normalized Thickness C. Figure S1-S5:
 High-Performance Liquid Chromatography + Mass Spectrometry (HPLC-MS)
 spectra of synthesized polypeptoids. a. Figure S1.csv 1. Variables:
 Retention Time [min], Intensity [arb. units], Mass/charge (m/z) 2. Column
 names: Chromatogram: Ret. Time (min), Chromatogram: Intensity, MS: m/z,
 MS: Absolute Intensity, MS: Relative Intensity b. Figure S2.csv 1.
 Variables: Retention Time [min], Intensity [arb. units], Mass/charge (m/z)
 2. Column names: Chromatogram: Ret. Time (min), Chromatogram: Intensity,
 MS: m/z, MS: Absolute Intensity, MS: Relative Intensity c. Figure S3.csv
 1. Variables: Retention Time [min], Intensity [arb. units], Mass/charge
 (m/z) 2. Column names: Chromatogram: Ret. Time (min), Chromatogram:
 Intensity, MS: m/z, MS: Absolute Intensity, MS: Relative Intensity d.
 Figure S4.csv 1. Variables: Retention Time [min], Intensity [arb. units],
 Mass/charge (m/z) 2. Column names: Chromatogram: Ret. Time (min),
 Chromatogram: Intensity, MS: m/z, MS: Absolute Intensity, MS: Relative
 Intensity e. Figure S5.csv 1. Variables: Retention Time [min], Intensity
 [arb. units], Mass/charge (m/z) 2. Column names: Chromatogram: Ret. Time
 (min), Chromatogram: Intensity, MS: m/z, MS: Absolute Intensity, MS:
 Relative Intensity D. Figure S6-S7: Differential scanning calorimetry
 (DSC) traces of synthesized polypeptoids for determining glass transition
 temperature. a. Figure S6.csv 1. Variables: Temperature [°C], Normalized
 Heat Flow [W/g] 2. Column names: Alt. 10-mer: Temperature (°C), Alt.
 10-mer: Heat Flow (Normalized) (W/g), Alt. 20-mer: Temperature (°C), Alt.
 20-mer: Heat Flow (Normalized) (W/g), Alt. 30-mer: Temperature (°C), Alt.
 30-mer: Heat Flow (Normalized) (W/g) b. Figure S7.csv 1. Variables:
 Temperature [°C], Normalized Heat Flow [W/g] 2. Column names: Alt. 20-mer:
 Temperature (°C), Alt. 20-mer: Heat Flow (Normalized) (W/g), Int. 20-mer:
 Temperature (°C), Int. 20-mer: Heat Flow (Normalized) (W/g), Blocky
 20-mer: Temperature (°C), Blocky 20-mer: Heat Flow (Normalized) (W/g) ```
 2. Relationship between files, if important: N/A 3. Additional related
 data collected that was not included in the current data package: N/A 4.
 Are there multiple versions of the dataset? No METHODOLOGICAL INFORMATION
 1. Description of methods used for collection/generation of data: Please
 refer to supporting information document for methodology of data
 generation and collection. 2. Methods for processing the data: Please
 refer to supporting information document for methodology of data
 processing. 3. Instrument- or software-specific information needed to
 interpret the data: All figure plots in the manuscript and the supporting
 information were plotted using Python Code in Spyder 6. 4. Standards and
 calibration information, if appropriate: N/A 5. Environmental/experimental
 conditions: N/A 6. Describe any quality-assurance procedures performed on
 the data: N/A 7. People involved with sample collection, processing,
 analysis and/or submission: Cameron P. Adams, Carolyn Henein, Xiangxi
 Meng, Chenyun Yuan, Javier Read de Alaniz, Christopher K. Ober, Rachel A.
 Segalman