DOI: 10.5061/dryad.d2547d87k
title: Characterization of Ta/TaN multi-graded thin film coating synthesized by HiPIMS technique

description: This research aims to synthesize and characterize the multi-graded Ta/TaN
 thin film coatings on AISI 52100 steel, employing the High Power Impulse
 Magnetron Sputtering technique. The investigation includes the
 microstructure, coating thickness, elemental composition, microhardness,
 and tribological performance using SEM, EDS, XRD, microhardness tester,
 and pin-on-disc tester, respectively.
description: In this article, the authors synthesised Ta/TaN multilayer
 coatings using CFUBMS-HiPIMS coating system and applied mechanical and
 tribological tests to these synthesised coatings. The data obtained from
 these tests were processed with drawing programmes and
 presented.
description: This Readme.txt file was generated on 21.09.2023 by Maleque GENERAL
 INFORMATION 1. Title of Dataset: Characterization of Ta/TaN Multi-graded
 Thin Film Coating Synthesized by HiPIMS Technique 2. Author Information 1.
 ``` Name: Muhammed Alperen POLAT ``` Institution: Atatürk University Mail:
 muhammedalperen.polat11@ogr.atauni.edu.tr 2. ``` Name: Ihsan Efeoglu ```
 Institution: Atatürk University Mail: iefeoglu@atauni.edu.tr 3. ``` Name:
 Md Abdul Maleque ``` Institution: International Islamic University
 Malaysia Mail: : maleque@iium.edu.my 4. ``` Name: Gokhan GULTEN ```
 Institution: Atatürk University Mail: gokhan.gulten@atauni.edu.tr 5. ```
 Name: Yasar Totik ``` Institution: Atatürk University Mail:
 ytotik@atauni.edu.tr 6. ``` Name: Masjuki Haji Hassan ``` Institution:
 International Islamic University Malaysia Mail: masjuki@iium.edu.my 7. ```
 Name: Nurin Wahidah Zulkifli ``` Institution: University of Malaya
 Mail:nurinmz@um.edu.my 3. Date of data collection: 06-2022 4. This
 manuscript does not receive external funding. DATA & FILE OVERVIEW
 1. TABLE 1- EDS RESULTS FOR R1 The SEM was employed to investigate the
 elemental compositions of the coatings (R1) 2- TABLE 1- EDS RESULTS FOR R2
 The SEM was employed to investigate the elemental compositions of the
 coatings (R2) 3- TABLE 1- EDS RESULTS FOR R3 The SEM was employed to
 investigate the elemental compositions of the coatings (R3) 4-Figure 3.
 XRD reflection of AISI 52100 and TaTaN multilayer thin film coatings
 (52100, R1, R2, R3) In this data presents the XRD reflection peak results
 of the multi-graded Ta/TaN coatings, with the application of varying N2
 concentrations using HiPIMS, on AISI 52100 steel. The Rigaku DMax-2200
 X-ray diffraction (XRD) system was used for phase identification with a
 wavelength of 1.5405 and a diffraction angle of 20-80°. And these data
 obtained were visualized with the help of Origin 2022 drawing program.
 5-Figure 4. Critical load values and failure modes of TaTaN multilayer
 thin films. In this data presents the scratch test results for TaTaN
 multilayer thin film (R1, R2 and R3). The CSM Instruments scratch tester,
 equipped with a Rockwell C diamond indenter with a 200-tip radius, was
 used to examine the adhesion property (critical load value) of coating
 with a progressive loading rate of 100 N/min. 6-Figure 5. The coefficient
 of friction of AISI 52100 steel and TaTaN coatings for R1, R2, and R3
 samples. In this data presents the pin-on-disk test results for 52100 and
 TaTaN multilayer thin film (R1, R2 and R3). The coefficients of friction
 of the Ta/TaN coatings and 52100 were assessed under specific conditions,
 including a 1 N load, 10 cm/s velocity, and a 6.25 mm diameter Al2O3
 counterpart, using the CSM tribotester system. These parameters allowed
 for a comprehensive understanding of the coatings' frictional
 properties and their potential applications in the tribological field. And
 these data obtained were visualized with the help of Origin 2022 drawing
 program.