DOI: 10.57760/sciencedb.06717
title: Design and Simulation of the Illumination Uniformity Unit in Lithography Illumination Systems-Wang Gang
title: 光刻机照明系统匀光单元光学设计与仿真-王刚

description: The Annular_uni-A-MATLAB file is the illuminance distribution data (unit: W/mm^2, row label: y-direction coordinate (unit: mm), column label: X-direction coordinate (unit: mm)) after smooth filtering in the ring lighting mode of group A, and the calculation results of lighting integral non-uniformity.Conventional_uni-A-MATLAB files are entered into A group of illumination distribution data (unit: W/mm^2, row label is y-direction coordinates (unit: mm), column label is X-direction coordinates (unit: mm)) after smooth filtering processing under the traditional lighting model, and the calculation results of lighting integral non-uniformity.The origin file _illum_multi_profile. opju is the normalized integral illuminance data of group A after smoothing and filtering for traditional lighting and ring lighting modes.Cl_u-a.xt is the U value of the optimization result of group A concentrator group (text document exported by CODE V);CL_RMS_U-B is the U value of the optimization result of group B condenser group (text document exported by CODE V).ROE_CL_优化结果评价.xlsx is optimization result evaluation data, in which the ROE in table A is the ROE direction cosine distribution and its absolute deviation data of group A and group B, CL-A is the direction cosine distribution and its absolute deviation data under the 6 fields of view of the condenser group of group A. CL-AB is the direction cosine distribution and its absolute deviation data under the three fields of view of the condenser group A and B.Roe_d0p6_f1p60_u-a.xt is the U value of the optimization result of group A ROE (text document exported by CODE V);ROE_d0p6_f1p6_RMS_U-B.txt is the U value of the ROE optimization result of Group B (text document exported by CODE V).Roe_d0p6_f1p6_spot-a.ng is the dispersion spot size of ROE in Group A (unit: mm).Roe_d0p6_f1p6_rms_spot-b.ng is the dispersion spot size of ROE in Group B (unit: mm).仿真数据记录-A.xlsx is the simulation data (not smoothed) of illuminance distribution of output light field in A group of traditional and ring lighting modes (unit: W/mm^2, row label as y-direction coordinate (unit: mm), column label as X-direction coordinate (unit: mm));仿真数据记录-B.xlsx is the simulation data of the illuminance distribution of the output light field in group B under traditional and ring lighting modes (not smoothed) (unit: W/mm^2, row label as y-direction coordinate (unit: mm), column label as X-direction coordinate (unit: mm));仿真数据记录_smooth-B.xlsx is the simulation data of illuminance distribution of output light field in group B in traditional and ring lighting modes (after smoothing) (unit: W/mm^2, row label as y-direction coordinate (unit: mm), column label as X-direction coordinate (unit: mm)); In the names of the sub-sheets in these three files, "C" represents the traditional lighting mode, "A" represents the traditional lighting mode, and the number after the letter represents the partial coherence factor (for example, 88 and 52 represent the partial coherence factor of 0.88 and 0.52, respectively).积分棒输入光场宽度的影响.xlsx is the illuminance distribution data of the output optical field when the input optical field width of the integrating rod is 45mm and 11mm respectively (unit: W/mm^2, row label as y-direction coordinate (unit: mm), column label as X-direction coordinate (unit: mm)).入射端照度分布.xlsx is the simulation result data of illuminance distribution of incident end of group A and group B (unit: W/mm^2, row label as y-direction coordinate (unit: mm), column label as X-direction coordinate (unit: mm)).
description: The Annular_uni-A-MATLAB file is the illuminance distribution data (unit: W/mm^2, row label: y-direction coordinate (unit: mm), column label: X-direction coordinate (unit: mm)) after smooth filtering in the ring lighting mode of group A, and the calculation results of lighting integral non-uniformity.Conventional_uni-A-MATLAB files are entered into A group of illumination distribution data (unit: W/mm^2, row label is y-direction coordinates (unit: mm), column label is X-direction coordinates (unit: mm)) after smooth filtering processing under the traditional lighting model, and the calculation results of lighting integral non-uniformity.The origin file _illum_multi_profile. opju is the normalized integral illuminance data of group A after smoothing and filtering for traditional lighting and ring lighting modes.Cl_u-a.xt is the U value of the optimization result of group A concentrator group (text document exported by CODE V);CL_RMS_U-B is the U value of the optimization result of group B condenser group (text document exported by CODE V).ROE_CL_优化结果评价.xlsx is optimization result evaluation data, in which the ROE in table A is the ROE direction cosine distribution and its absolute deviation data of group A and group B, CL-A is the direction cosine distribution and its absolute deviation data under the 6 fields of view of the condenser group of group A. CL-AB is the direction cosine distribution and its absolute deviation data under the three fields of view of the condenser group A and B.Roe_d0p6_f1p60_u-a.xt is the U value of the optimization result of group A ROE (text document exported by CODE V);ROE_d0p6_f1p6_RMS_U-B.txt is the U value of the ROE optimization result of Group B (text document exported by CODE V).Roe_d0p6_f1p6_spot-a.ng is the dispersion spot size of ROE in Group A (unit: mm).Roe_d0p6_f1p6_rms_spot-b.ng is the dispersion spot size of ROE in Group B (unit: mm).仿真数据记录-A.xlsx is the simulation data (not smoothed) of illuminance distribution of output light field in A group of traditional and ring lighting modes (unit: W/mm^2, row label as y-direction coordinate (unit: mm), column label as X-direction coordinate (unit: mm));仿真数据记录-B.xlsx is the simulation data of the illuminance distribution of the output light field in group B under traditional and ring lighting modes (not smoothed) (unit: W/mm^2, row label as y-direction coordinate (unit: mm), column label as X-direction coordinate (unit: mm));仿真数据记录_smooth-B.xlsx is the simulation data of illuminance distribution of output light field in group B in traditional and ring lighting modes (after smoothing) (unit: W/mm^2, row label as y-direction coordinate (unit: mm), column label as X-direction coordinate (unit: mm)); In the names of the sub-sheets in these three files, "C" represents the traditional lighting mode, "A" represents the traditional lighting mode, and the number after the letter represents the partial coherence factor (for example, 88 and 52 represent the partial coherence factor of 0.88 and 0.52, respectively).积分棒输入光场宽度的影响.xlsx is the illuminance distribution data of the output optical field when the input optical field width of the integrating rod is 45mm and 11mm respectively (unit: W/mm^2, row label as y-direction coordinate (unit: mm), column label as X-direction coordinate (unit: mm)).入射端照度分布.xlsx is the simulation result data of illuminance distribution of incident end of group A and group B (unit: W/mm^2, row label as y-direction coordinate (unit: mm), column label as X-direction coordinate (unit: mm)).