DOI: 10.20350/digitalcsic/17022
title: Lowering the activation temperature of Ti-Zr-V non-evaporable getter films by removing surface carbon contamination: an in situ XPS study

description: FIGURE 1: XPS raw data of the (a) C1s, (b) Ti2p, (c) Zr3d and (d) O1s-V2p lines, respectively, after an annealing and in situ oxygen plasma treatment (50 W for 15 min) and annealing at four different temperatures: 100 °C, 130 °C, 150 °C and 200 °C. FIGURE 2: XPS raw data of the (a) C1s, (b) Ti2p, (c) Zr3d and (d) O1s-V2p lines, respectively, of an as-received sample, after an in situ argon (80%)/oxygen (20%) plasma treatment (60 W for 2h) and after an annealing at 150 °C overnight. FIGURE 3: XPS raw data of the O1s-V2p lines corresponding to different sequential plasma and annealing cycles performed at 150 °C overnight in all cases. FIGURE 4: Normalized O1s area ratio as a function of annealing at 100, 130, 150 and 200 °C, respectively. FIGURE 5: XPS raw spectra corresponding to the O1s core level of Ti-Zr-V films undergoing plasma and 150 °C annealing cycles: (a) 50 W oxygen plasma for 15 min and (b) 60 W argon/oxygen plasma for 2 h. The intensity of the spectra corresponding after annealing have been multiplied by a factor of two. FIGURE 6: XPS raw data of the (a) C1s, (b) Ti2p, (c) Zr3d and (d) O1s-V2p lines, respectively, of a sample exposed to argon (80%)/oxygen (20%) plasma (60 W for 2 h) after an annealing at 150 °C overnight and the same sample stored in UHV (≈ 1×10-9 mbar) for 5 days. Spectra have been normalized to their maxima. FIGURE 7: XPS raw data of the Si2p lines corresponding to as-received samples and after different plasma treatments: oxygen plasma (50 W, 15 min), argon/oxygen (50 W, 2 h) and (60 W, 2 h). FIGURE S2: Experimental and simulated (using SESSA software) survey XPS spectra. FIGURE S3: XPS raw data of the C1s core level of an as-received Ti-Zr-V film, after an exposure to a first 50W oxygen plasma cycle for 15 min, after an overnight annealing at 150 °C and after a subsequent second 50W oxygen plasma cycle for 15 min. FIGURE S4: XPS raw data of the C1s core level of an as-received sample with the corresponding least-squares fits using the CasaXPS software after a Shirley-type background subtraction using a combination of Gaussian (70%) and Lorentzian (30%) functions under the constraint of identical full width at half maximum (FWHM) for all components. FIGURE S5: XPS raw data of the N1s core level of an as-received sample, after exposure to an argon/oxygen plasma (80%-20%) at 60 W for 2 and after annealing overnight at 150 °C. FIGURE S6: XPS raw data of the (a) C1s, (b) Ti2p, (c) Zr3d and (d) O1s-V2p lines, respectively, after an annealing at 130 °C for 24 h, oxygen plasma treatment (50 W for 15 min), annealing al 200 °C for 1 h and exposure at a base pressure of ≈ 5 × 10-7 mbar for 16 h.
description: [Description of methods used for collection/generation of data] Data acquired with a SPECS PHOIBOS150 hemispherical analyser with a monochromatic X-ray source (1486.6 eV) operated at 300W. The overall experimental resolution, including the contribution from the hemispherical analyser (energy and angle) and the monochromatic X-ray source, is better than 0.6 eV for a pass energy of 20 eV. The reported binding energies have been determined with an error of ±0.1 eV and are referred to the Fermi level of the analyser, which is periodically determined by measuring the photoelectron energies from an atomically clean reference Au(111) sample. No correction to the measured binding energies has been applied to the spectra.
description: [Methods for processing the data] CasaXPS software version 2.3.16 PR 1.6.
description: Original raw data of XPS spectra obtained in ORIGIN format. Columns (X) correspond to binding energies and columns Y to XPS intensity (Y). The different plasma and annealing conditions are indicated in the corresponding columns (“in Comments”). Labels in “Long name” files correspond to the original CasaXPS files names. Photon energy is 1486.6 eV.
description: ile List: figure_01.opju; figure_02.opju; figure_03.opju; figure_04.opju; figure_05.opju; figure_06.opju; figure_07.opju; figure_S2.opju, figure_S3.opju, figure_S4.opju, figure_S5.opju, figure_S6.xls