title: ÐÑÐ¾ÑÐµÑÑÑ ÑÐ¾ÑÐ¼Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ Ð½Ð°Ð½Ð¾ÑÐ°ÑÑÐ¸Ñ Ð¾ÐºÑÐ¸Ð´Ð° Ð¶ÐµÐ»ÐµÐ·Ð° Ð¼ÐµÑÐ¾Ð´Ð¾Ð¼ Ð¸Ð¼Ð¿ÑÐ»ÑÑÐ½Ð¾Ð¹ Ð¼Ð¾Ð´ÑÐ»ÑÑÐ¸Ð¸ ÐÐ§-ÑÐ°Ð·ÑÑÐ´Ð° Ð¿ÑÐ¸ Ð°ÑÐ¼Ð¾ÑÑÐµÑÐ½Ð¾Ð¼ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ð¸
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Processes of formation of iron oxide nanoparticles by pulse modulation of RF discharge at atmospheric pressure
Creators: name: ÐÐ°Ð»ÑÐ½Ð¾Ð², ÐÐ¸ÑÐ°Ð¸Ð»
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2022
Subjects: ÐÐµÐ»ÐµÐ·Ð¾, Ð¾ÐºÐ¸ÑÐ»Ñ
ÐÐ»Ð°Ð·Ð¼Ð° (ÑÐ¸Ð·.)
Ð¸Ð¼Ð¿ÑÐ»ÑÑÐ½ÑÐ¹ ÑÐµÐ¶Ð¸Ð¼
Ð¿Ð»Ð°Ð·Ð¼Ð¾Ð°ÐºÑÐ¸Ð²Ð¸ÑÑÐµÐ¼Ð¾Ðµ Ñ Ð¸Ð¼Ð¸ÑÐµÑÐºÐ¾Ðµ Ð¾ÑÐ°Ð¶Ð´ÐµÐ½Ð¸Ðµ Ð¸Ð· Ð³Ð°Ð·Ð¾Ð²Ð¾Ð¹ ÑÐ°Ð·Ñ
pulsed mode
plasma-assisted chemical vapor deposition

description: Ð£Ð½Ð¸ÐºÐ°Ð»ÑÐ½ÑÐµ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ¸ Ð½Ð°Ð½Ð¾ÑÐ°ÑÑÐ¸Ñ Ð¾ÐºÑÐ¸Ð´Ð° Ð¶ÐµÐ»ÐµÐ·Ð° Ð´ÐµÐ»Ð°ÑÑ Ð¸Ñ Ð¿ÑÐ¸Ð²Ð»ÐµÐºÐ°ÑÐµÐ»ÑÐ½ÑÐ¼Ð¸ Ð´Ð»Ñ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ð¹ Ð² ÑÐ°Ð·Ð»Ð¸ÑÐ½ÑÑ Ð¾Ð±Ð»Ð°ÑÑÑÑ, ÑÐ°ÐºÐ¸Ñ ÐºÐ°Ðº Ð±Ð¸Ð¾Ð¼ÐµÐ´Ð¸ÑÐ¸Ð½Ð°, ÑÐ»ÐµÐºÑÑÐ¾ÑÐµÑÐ½Ð¸ÐºÐ°, ÑÐ²ÑÐ·Ñ Ð¸ Ð´Ñ. ÐÐ»Ð°Ð·Ð¼Ð¾ÑÐ¸Ð¼Ð¸ÑÐµÑÐºÐ¾Ðµ Ð¾ÑÐ°Ð¶Ð´ÐµÐ½Ð¸Ðµ Ð¸Ð· Ð³Ð°Ð·Ð¾Ð²Ð¾Ð¹ ÑÐ°Ð·Ñ Ð¾Ð´Ð¸Ð½ Ð¸Ð· Ð²ÑÑÐ¾ÐºÐ¾ÑÑÑÐµÐºÑÐ¸Ð²Ð½ÑÑ ÑÐ¿Ð¾ÑÐ¾Ð±Ð¾Ð² ÑÐ¸Ð½ÑÐµÐ·Ð° Ð½Ð°Ð½Ð¾ÑÐ°ÑÑÐ¸Ñ, Ð¿Ð¾Ð·Ð²Ð¾Ð»ÑÑÑÐ¸Ð¹ Ð½Ð° Ð½ÐµÐ´Ð¾ÑÐ¾Ð³Ð¾Ð¼ Ð¾Ð±Ð¾ÑÑÐ´Ð¾Ð²Ð°Ð½Ð¸Ð¸ Ð¿Ð¾Ð»ÑÑÐ°ÑÑ ÑÐ°ÑÑÐ¸ÑÑ Ð·Ð°Ð´Ð°Ð½Ð½Ð¾Ð³Ð¾ ÑÐ°Ð·Ð¼ÐµÑÐ° ÐºÐ°Ðº Ð² Ð»Ð°Ð±Ð¾ÑÐ°ÑÐ¾ÑÐ½ÑÑ ÑÑÐ»Ð¾Ð²Ð¸ÑÑ, ÑÐ°Ðº Ð¸ Ð² Ð¿ÑÐ¾Ð¼ÑÑÐ»ÐµÐ½Ð½ÑÑ Ð¼Ð°ÑÑÑÐ°Ð±Ð°Ñ Ñ Ð²ÑÑÐ¾ÐºÐ¾Ð¹ ÑÐºÐ¾ÑÐ¾ÑÑÑÑ Ð¾ÑÐ°Ð¶Ð´ÐµÐ½Ð¸Ñ Ð¼Ð°ÑÐµÑÐ¸Ð°Ð»Ð°. Ð ÑÐ°Ð±Ð¾ÑÐµ Ð±ÑÐ»Ð¸ Ð¿Ð¾Ð»ÑÑÐµÐ½Ñ Ð½Ð°Ð½Ð¾ÑÐ°ÑÑÐ¸ÑÑ Ð² ÑÐ°Ð·Ð»Ð¸ÑÐ½ÑÑ ÑÐµÐ¶Ð¸Ð¼Ð°Ñ ÑÐ°Ð±Ð¾ÑÑ ÑÐºÑÐ¿ÐµÑÐ¸Ð¼ÐµÐ½ÑÐ°Ð»ÑÐ½Ð¾Ð¹ ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ¸ Ð¼ÐµÑÐ¾Ð´Ð¾Ð¼ Ð¿Ð»Ð°Ð·Ð¼Ð¾ÑÐ¸Ð¼Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ Ð¾ÑÐ°Ð¶Ð´ÐµÐ½Ð¸Ñ Ð¸Ð· Ð³Ð°Ð·Ð¾Ð²Ð¾Ð¹ ÑÐ°Ð·Ñ. ÐÑÐ¾Ð°Ð½Ð°Ð»Ð¸Ð·Ð¸ÑÐ¾Ð²Ð°Ð½ ÑÐ¾ÑÑÐ°Ð² ÑÐ°ÑÑÐ¸Ñ Ð¼ÐµÑÐ¾Ð´Ð¾Ð¼ ÐÐ Ð¤ÑÑÑÐµ-ÑÐ¿ÐµÐºÑÑÐ¾ÑÐºÐ¾Ð¿Ð¸Ð¸, Ð¿Ð¾Ð´ÑÐ²ÐµÑÐ´Ð¸Ð»Ð¾ÑÑ Ð½Ð°Ð»Ð¸ÑÐ¸Ðµ Ð¾ÐºÑÐ¸Ð´Ð¾Ð² Ð¶ÐµÐ»ÐµÐ·Ð° (FeO, Fe2O3 Ð¸ Fe3O4). ÐÑÐ» Ð¿ÑÐ¾Ð²ÐµÐ´ÑÐ½ ÑÐµÐ½ÑÐ³ÐµÐ½Ð¾ÑÑÑÑÐºÑÑÑÐ½ÑÐ¹ Ð°Ð½Ð°Ð»Ð¸Ð· Ð²ÑÑÐ²Ð¸Ð²ÑÐ¸Ð¹ Ð½Ð°Ð»Ð¸ÑÐ¸Ðµ Ð² Ð¾Ð±ÑÐ°Ð·ÑÐ°Ñ Ð¿ÑÐ¸Ð¼ÐµÑÐµÐ¹, Ð² Ð¿ÐµÑÐ²ÑÑ Ð¾ÑÐµÑÐµÐ´Ñ ÑÐ³Ð»ÐµÑÐ¾Ð´Ð° Ð¸ ÐµÐ³Ð¾ Ð¾ÐºÑÐ¸Ð´Ð¾Ð².ÐÑÐ¾Ð¸Ð·Ð²ÐµÐ´ÑÐ½ Ð°Ð½Ð°Ð»Ð¸Ð· ÑÑÐµÑÐ¸Ð¾Ð¼ÐµÑÑÐ¸ÑÐµÑÐºÐ¾Ð³Ð¾ ÑÐ¾ÑÑÐ°Ð²Ð°, Ð° ÑÐ°ÐºÐ¶Ðµ Ð¾ÑÐµÐ½ÐºÐ° ÑÐ°ÑÐ¿ÑÐµÐ´ÐµÐ»ÐµÐ½Ð¸Ñ ÑÐ°Ð·Ð¼ÐµÑÐ¾Ð² Ð½Ð°Ð½Ð¾ÑÐ°ÑÑÐ¸Ñ Ð¿Ð¾ ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐ°Ð¼ Ð°Ð½Ð°Ð»Ð¸Ð·Ð° Ð¸Ð·Ð¾Ð±ÑÐ°Ð¶ÐµÐ½Ð¸Ð¹ ÑÐºÐ°Ð½Ð¸ÑÑÑÑÐµÐ¹ ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½Ð¾Ð¹ Ð¼Ð¸ÐºÑÐ¾ÑÐºÐ¾Ð¿Ð¸Ð¸. Ð ÐµÐ·ÑÐ»ÑÑÐ°ÑÑ Ð¿Ð¾Ð·Ð²Ð¾Ð»ÑÑÑ ÑÐ¾Ð¾ÑÐ½ÐµÑÑÐ¸ Ð²Ð»Ð¸ÑÐ½Ð¸Ðµ ÑÐµÐ¶Ð¸Ð¼Ð¾Ð² Ð¾ÑÐ°Ð¶Ð´ÐµÐ½Ð¸Ñ Ð½Ð° ÑÐºÐ¾ÑÐ¾ÑÑÑ ÑÐ¾ÑÑÐ° Ð¸ ÑÑÐ°ÑÐ¸ÑÑÐ¸ÑÐµÑÐºÐ¾Ðµ ÑÐ°ÑÐ¿ÑÐµÐ´ÐµÐ»ÐµÐ½Ð¸Ðµ Ð¿Ð¾ ÑÐ°Ð·Ð¼ÐµÑÐ°Ð¼ Ð½Ð°Ð½Ð¾ÑÐ°ÑÑÐ¸Ñ Ð¾ÐºÑÐ¸Ð´Ð¾Ð² Ð¶ÐµÐ»ÐµÐ·Ð°.
description: The unique characteristics of iron oxide nanoparticles make them attractive for research in various fields, such as biomedicine, electrical engineering, communications, and others. Plasma-enhanced chemical vapor deposition is one of the highly efficient methods for the synthesis of nanoparticles, which makes it possible to obtain particles of a given size on inexpensive equipment both in laboratory conditions and on an industrial scale with a high material deposition rate.In the work, nanoparticles were obtained in various modes of operation of the experimental setup by plasma-enhanced chemical vapor deposition from the gas phase. The composition of the particles was analyzed by FTIR spectroscopy, and the presence of iron oxides (FeO, Fe2O3 and Fe3O4) was confirmed. X-ray diffraction analysis was carried out, which revealed the presence of impurities in the samples, primarily carbon and its oxides. In this work, an analysis of the stoichiometric composition was made, as well as an assessment of the size distribution of nanoparticles based on the results of the analysis of images of scanning electron microscopy. The results allow us to correlate the effect of deposition modes on the growth rate and the statistical size distribution of iron oxide nanoparticles.