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title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: Technique for detecting technological defects of micromechanical accelerometers on a plate based on measuring the hysteresis of the capacitanceâvoltage characteristic
Creators: name: ÐÐ¾Ð·Ð¼Ð¸ÑÐµÐ², Ð¡ÑÐ°Ð½Ð¸ÑÐ»Ð°Ð²
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2024
Subjects: Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑ
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accelerometer
static tests
characteristic capacitance-voltage
hysteresis
technique
algorithm
software
data processing

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description: The aim is to develop a technique for detecting technological defects of micromechanical accelerometers on a plate based on measuring the hysteresis of the capacitanceâvoltage characteristic. As a result of the study, a hypothesis was formulated about the presence of defects associated with the hysteresis of the capacitance-voltage characteristic, which are not determined by the existing methodology. An algorithm for measuring and analyzing characteristics has been formulated, which makes it possible to detect and characterize such phenomena based on three parameters. Single tests were carried out, confirming the hypothesis of the presence of hysteresis. An algorithm for conducting and analyzing the results for group tests was formulated. Group tests of the chips on the plate were carried out. The introduction of this technique can potentially increase the yield of usable sensors.