title: Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° Ð¼Ð°Ð½Ð¸Ð¿ÑÐ»ÑÑÐ¾ÑÐ° Ð´Ð»Ñ Ð¾ÑÐ¸ÑÑÐºÐ¸ ÐºÑÐµÐ¼Ð½Ð¸ÐµÐ²ÑÑ Ð¿Ð»Ð°ÑÑÐ¸Ð½ Ð¿ÑÐ¸ Ð¿Ð¾Ð½Ð¸Ð¶ÐµÐ½Ð½Ð¾Ð¼ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ð¸
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Development of a manipulator for operation at reduced pressure
Creators: name: ÐÐ°Ð¿ÑÑÑÐ¸Ð½, ÐÐ°Ð½Ð¸Ð¸Ð»
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2023
Subjects: Ð¼Ð°Ð½Ð¸Ð¿ÑÐ»ÑÑÐ¾Ñ
Ð²Ð°ÐºÑÑÐ¼
ÐºÑÐµÐ¼Ð½Ð¸ÐµÐ²Ð°Ñ Ð¿Ð¾Ð´Ð»Ð¾Ð¶ÐºÐ°
Ð¾ÑÐ¸ÑÑÐºÐ° ÐºÑÐµÐ¼Ð½Ð¸ÐµÐ²ÑÑ Ð¿Ð¾Ð´Ð»Ð¾Ð¶ÐµÐº
manipulator
vacuum
silicon substrate
cleaning of silicon substrates

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description: The theme of the final qualification work: "development of a manipulator for operation reduced pressureâ. In this work, the development of a prototype of a manipulator capable of operating in a vacuum environment and performing the process of manipulating silicon wafers was carried out. An analysis of existing solutions in the field of manipulators for working in a vacuum environment with silicon wafers is made. The task that the prototype of the developed manipulator should perform was set and its block diagram was completed. The kinematic scheme is made and its DH parameters are calculated. A power calculation was performed and electric drives were selected from it. The design of the mechanical part of the manipulator is completed and their drawings are given. An electrical control circuit of the developed prototype has been developed. The program code for controlling the manipulator has been written and a graphical interface has been developed to control the manipulator from a personal computer. The conducted experiments with the manufactured prototype of the manipulator are described.