title: Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° ÑÐ²ÐµÑÐ´Ð¾ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ Ð¸ÑÑÐ¾ÑÐ½Ð¸ÐºÐ° Ð¿Ð¸ÑÐ°Ð½Ð¸Ñ Ð´Ð»Ñ ÐÐ§Ð Ð¿Ð»Ð°Ð·Ð¼Ñ Ð½Ð¸Ð·ÐºÐ¾Ð³Ð¾ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Development of a solid-state power supply for low-pressure RF induction plasma
Creators: name: ÐÐ°ÑÐ¸Ð³Ð¸Ð½, ÐÑÑÐµÐ¼
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2024
Subjects: Ð¢ÑÐ°Ð½ÑÑÐ¾ÑÐ¼Ð°ÑÐ¾ÑÑ
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ÑÐ²ÐµÑÐ´Ð¾ÑÐµÐ»ÑÐ½ÑÐ¹ Ð¸ÑÑÐ¾ÑÐ½Ð¸Ðº Ð¿Ð¸ÑÐ°Ð½Ð¸Ñ
solid-state power supply

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description: The object of the study is a transistor power supply for an RF plasma torch using argon as the plasma-forming gas at reduced pressure. The purpose of the work is to develop a transistor (solid-state) power supply for the operation of an RF plasma torch at a reduced pressure of 50 torr, with a plasma power of 10-20 kW and a frequency of 440 kHz. During the work, a model of the RF plasma torch was developed in COMSOL Multiphysics to obtain the equivalent parameters of the active and inductive resistance of the inductor with plasma at low pressure, i. e., the load parameters necessary for the development of the power supply. Additionally, a model of a planar transformer with windings on printed circuit boards was created in COMSOL Multiphysics, and its equivalent parameters were obtained for further use in the MATLAB Simulink software environment. As a result of the work on the development and research of the solid-state power supply, it was established that this setup can be effectively used as a power supply for low-pressure RF plasma, which is very promising, as it allows for more efficient use of plasma technologies to improve production processes, increase efficiency, and reduce harmful environmental impact. In the future, with the development of solid-state power supplies, plasma technologies will be able to find even more applications in various industrial sectors.