title: ÐÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ðµ Ð¾ÐºÑÐ¸Ð´Ð½ÑÑ Ð¿Ð¾Ð»ÑÐ¿ÑÐ¾Ð²Ð¾Ð´Ð½Ð¸ÐºÐ¾Ð² Ð² ÐÐ­ÐÐ¡ Ð´Ð°ÑÑÐ¸ÐºÐµ ÑÐµÑÐ¾Ð²Ð¾Ð´Ð¾ÑÐ¾Ð´Ð°
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Application of oxide semiconductors in aMEMS hydrogen sulfide sensor
Creators: name: ÐÐ°Ð·Ð´Ð¸Ð½, ÐÐ»ÑÑ
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2024
Subjects: Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÐµÐºÑÑÐ¾Ð¼ÐµÑ Ð°Ð½Ð¸ÑÐµÑÐºÐ¸Ðµ ÑÐ¸ÑÑÐµÐ¼Ñ
Ð³Ð°Ð·Ð¾Ð²ÑÐµ Ð´Ð°ÑÑÐ¸ÐºÐ¸
Ð¼ÐµÑÐ°Ð»Ð¾Ð¾ÐºÑÐ¸Ð´Ð½ÑÐµ Ð¿Ð»ÐµÐ½ÐºÐ¸
Ð¾ÐºÑÐ¸Ð´ Ð½Ð¸ÐºÐµÐ»Ñ
Ð·Ð¾Ð»Ð¾ÑÑÐµ Ð½Ð°Ð½Ð¾ÑÐ°ÑÑÐ¸ÑÑ
ÑÐ¾Ð½ÐºÐ¸Ðµ Ð¿Ð»ÐµÐ½ÐºÐ¸
Ð¼Ð°Ð³Ð½ÐµÑÑÐ¾Ð½Ð½Ð¾Ðµ ÑÐ°ÑÐ¿ÑÐ»ÐµÐ½Ð¸Ðµ
Ð¿Ð¾Ð»ÑÐ¿ÑÐ¾Ð²Ð¾Ð´Ð½Ð¸ÐºÐ¾Ð²ÑÐµ ÑÐµÐ½ÑÐ¾ÑÑ
microelectromechanical systems
gas sensors
metal oxide films
nickel oxide
gold nanoparticles
thin films
magnetron spraying
semiconductor sensors

description: ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ñ ÑÐ²Ð¾Ð¹ÑÑÐ²Ð° ÑÐ¾Ð½ÐºÐ¸Ñ Ð¿Ð»ÐµÐ½Ð¾Ðº Ð¾ÐºÑÐ¸Ð´Ð° Ð½Ð¸ÐºÐµÐ»Ñ Ð¸ Ð¸Ñ Ð¸Ð·Ð¼ÐµÐ½ÐµÐ½Ð¸Ðµ Ð¿ÑÐ¸ ÑÐµÑÐ¼Ð¸ÑÐµÑÐºÐ¾Ð¼ Ð¾ÑÐ¶Ð¸Ð³Ðµ. ÐÐ¾ÐºÐ°Ð·Ð°Ð½Ð¾ Ð¿Ð¾Ð»Ð¾Ð¶Ð¸ÑÐµÐ»ÑÐ½Ð¾Ðµ Ð²Ð»Ð¸ÑÐ½Ð¸Ðµ ÑÐµÑÐ¼Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ Ð¾ÑÐ¶Ð¸Ð³Ð° Ð½Ð° ÐºÑÐ¸ÑÑÐ°Ð»Ð»Ð¸ÑÐµÑÐºÑÑ ÑÑÑÑÐºÑÑÑÑ Ð¿Ð¾Ð»ÑÐ¿ÑÐ¾Ð²Ð¾Ð´Ð½Ð¸ÐºÐ¾Ð²ÑÑ ÑÐ¾Ð½ÐºÐ¸Ñ Ð¿Ð»ÐµÐ½Ð¾Ðº Ð¾ÐºÑÐ¸Ð´Ð° Ð½Ð¸ÐºÐµÐ»Ñ, Ð¿Ð¾Ð»ÑÑÐµÐ½Ð½ÑÑ Ð¼ÐµÑÐ¾Ð´Ð¾Ð¼ Ð¼Ð°Ð³Ð½ÐµÑÑÐ¾Ð½Ð½Ð¾Ð³Ð¾ ÑÐ°ÑÐ¿ÑÐ»ÐµÐ½Ð¸Ñ. ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¾ Ð²Ð»Ð¸ÑÐ½Ð¸Ðµ Ð²ÐºÐ»ÑÑÐµÐ½Ð¸Ñ Ð·Ð¾Ð»Ð¾ÑÑÑ Ð½Ð°Ð½Ð¾ÑÐ°ÑÑÐ¸Ñ Ð½Ð° ÑÐ¾Ð½ÐºÑÑ Ð¿Ð»ÐµÐ½ÐºÑ NiO, Ð¸ Ð²Ð»Ð¸ÑÐ½Ð¸Ðµ Ð¸Ñ Ð½Ð° ÑÐ¿Ð¾ÑÐ¾Ð±Ð½Ð¾ÑÑÑ Ðº Ð³Ð°Ð·Ð¾Ð²Ð¾Ð¹ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÐ¸ Ð¾ÐºÑÐ¸Ð´Ð° Ð½Ð¸ÐºÐµÐ»Ñ. ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ðµ ÑÐ¾Ð½ÐºÐ¸Ñ Ð¿Ð»ÐµÐ½Ð¾Ðº Ð¾ÐºÑÐ¸Ð´Ð° Ð½Ð¸ÐºÐµÐ»Ñ Ð½Ð° Ð²Ð¾Ð·Ð¼Ð¾Ð¶Ð½Ð¾ÑÑÑ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¸Ñ Ð² ÐºÐ°ÑÐµÑÑÐ²Ðµ Ð°ÐºÑÐ¸Ð²Ð½Ð¾Ð³Ð¾ ÑÐ»Ð¾Ñ Ñ Ð¿Ð¾Ð»ÑÐ¿ÑÐ¾Ð²Ð¾Ð´Ð½Ð¸ÐºÐ¾Ð²Ð¾Ð³Ð¾ Ð³Ð°Ð·Ð¾Ð²Ð¾Ð³Ð¾ Ð´Ð°ÑÑÐ¸ÐºÐ° ÑÐµÐ·Ð¸ÑÑÐ¸Ð²Ð½Ð¾Ð³Ð¾ ÑÐ¸Ð¿Ð° Ð´Ð»Ñ Ð´ÐµÑÐµÐºÑÐ¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ ÑÐµÑÐ¾Ð²Ð¾Ð´Ð¾ÑÐ¾Ð´Ð° Ð¿Ð¾ÐºÐ°Ð·Ð°Ð»Ð¾ Ð¿Ð¾Ð»Ð¾Ð¶Ð¸ÑÐµÐ»ÑÐ½ÑÐµ ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÑ. Ð ÑÐ°Ð±Ð¾ÑÐµ Ð¿ÑÐµÐ´ÑÑÐ°Ð²Ð»ÐµÐ½ ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸ÑÐµÑÐºÐ¸Ð¹ Ð¼Ð°ÑÑÑÑÑ Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð¸Ñ ÐÐ­ÐÐ¡ Ð³Ð°Ð·Ð¾Ð²Ð¾Ð³Ð¾ Ð´Ð°ÑÑÐ¸ÐºÐ° Ñ Ð¿Ð¾Ð»ÑÐ¿ÑÐ¾Ð²Ð¾Ð´Ð½Ð¸ÐºÐ¾Ð²ÑÐ¼ Ð°ÐºÑÐ¸Ð²Ð½ÑÐ¼ ÑÐ»Ð¾ÐµÐ¼. ÐÐºÑÐ¸Ð´ Ð½Ð¸ÐºÐµÐ»Ñ Ð¿Ð¾ÐºÐ°Ð·Ð°Ð» ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑ Ð¿Ð¾Ð²ÐµÑÑÐ½Ð¾ÑÑÐ½Ð¾Ð³Ð¾ ÑÐ¾Ð¿ÑÐ¾ÑÐ¸Ð²Ð»ÐµÐ½Ð¸Ñ Ðº Ð¿ÑÐ¸ÑÑÑÑÑÐ²Ð¸Ñ Ð¿Ð°ÑÐ¾Ð² ÑÐµÑÐ¾Ð²Ð¾Ð´Ð¾ÑÐ¾Ð´Ð° Ð² ÐºÐ¾Ð½ÑÐµÐ½ÑÑÐ°ÑÐ¸ÑÑ Ð¾Ñ 1 Ð´Ð¾ 100 ppm Ð² Ð¿Ð¾ÑÐ¾ÐºÐµ, Ð¿ÑÐ¸ ÑÐ°Ð±Ð¾ÑÐ¸Ñ ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÐ°Ñ Ð°ÐºÑÐ¸Ð²Ð½Ð¾Ð³Ð¾ ÑÐ»Ð¾Ñ Ð´Ð°ÑÑÐ¸ÐºÐ° Ð² 170 â 205 Ð¡Â°.
description: The properties of thin films of nickel oxide and their changes during thermal annealing were studied. The positive effect of thermal combustion on the crystal structure of semiconductor thin films of nickel oxide caused by magnetron sputtering is shown. The effect of the inclusion of gold nanoparticles on a thin film of NiO, and their influence on the gas sensitivity ability of nickel oxide, was studied. A study of the possibility of using thin films of nickel oxide as an active layer in a semiconductor resistive gas sensor for detecting hydrogen sulfide showed positive results. The paper presents a technological route for manufacturing a MEMS gas sensor with a semiconductor active layer. Nickel oxide showed sensitivity to hydrogen sulfide in concentrations from 1 to 100 ppm, at an operating temperature of the active layer sensor of 170 â 205 CÂ°.