title: Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° ÑÑÐµÐ½Ð´Ð° Ð´Ð»Ñ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ ÐµÐ¼ÐºÐ¾ÑÑÐ½ÑÑ Ð¸ Ð¿ÑÐµÐ·Ð¾ÑÐµÐ·Ð¸ÑÑÐ¸Ð²Ð½ÑÑ Ð´Ð°ÑÑÐ¸ÐºÐ¾Ð² Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: Development of a stand for the study of capacitive and piezoresistive pressure sensors
Creators: name: ÐÑÑÐ°ÐºÐ¾Ð², ÐÐ»ÐµÐºÑÐµÐ¹
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2022
Subjects: Ð¿ÑÐµÐ·Ð¾ÑÐµÐ·Ð¸ÑÑÐ¸Ð²Ð½ÑÐ¹ Ð´Ð°ÑÑÐ¸Ðº Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ
ÐµÐ¼ÐºÐ¾ÑÐ½Ð¾Ð¹ Ð´Ð°ÑÑÐ¸Ðº Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ
Ð¼Ð¾ÑÑ Ð£Ð¸ÑÑÑÐ¾Ð½Ð°
ÑÑÑÑ Ð·Ð°Ð¶Ð¸Ð¼Ð½Ð°Ñ ÑÑ ÐµÐ¼Ð°
Mathcad
piezoresistive pressure sensor
capacitive pressure sensor
Wheatston bridge
three-clamp circuit

description: ÐÐ°Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¿Ð¾ÑÐ²ÑÑÐµÐ½Ð° ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐºÐµ ÑÑÐµÐ½Ð´Ð° Ð¸ Ð¼ÐµÑÐ¾Ð´Ð¸ÑÐµÑÐºÐ¸Ñ ÑÐºÐ°Ð·Ð°Ð½Ð¸Ð¹ Ð¿Ð¾ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ Ð¸ ÑÑÐ°Ð²Ð½ÐµÐ½Ð¸Ñ ÐµÐ¼ÐºÐ¾ÑÑÐ½Ð¾Ð³Ð¾ Ð¸ Ð¿ÑÐµÐ·Ð¾ÑÐµÐ·Ð¸ÑÑÐ¸Ð²Ð½Ð¾Ð³Ð¾ Ð´Ð°ÑÑÐ¸ÐºÐ¾Ð² Ð¸Ð·Ð±ÑÑÐ¾ÑÐ½Ð¾Ð³Ð¾ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ. ÐÐ° Ð¿ÐµÑÐ²Ð¾Ð¼ ÑÑÐ°Ð¿Ðµ Ð²ÑÐ¿Ð¾Ð»Ð½ÐµÐ½ Ð¾Ð±Ð·Ð¾Ñ ÑÐ¸Ð¿Ð¸ÑÐ½ÑÑ ÐºÐ¾Ð½ÑÑÑÑÐºÑÐ¸Ð¹ Ð°ÐºÑÐ¸Ð²Ð½ÑÑ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ¾Ð² ÐµÐ¼ÐºÐ¾ÑÑÐ½ÑÑ Ð¸ Ð¿ÑÐµÐ·Ð¾ÑÐµÐ·Ð¸ÑÑÐ¸Ð²Ð½ÑÑ Ð¿ÑÐµÐ¾Ð±ÑÐ°Ð·Ð¾Ð²Ð°ÑÐµÐ»ÐµÐ¹ Ð¸Ð·Ð±ÑÑÐ¾ÑÐ½Ð¾Ð³Ð¾ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ. ÐÑÐ»Ð¾ Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð¾ ÑÑÐ°Ð²Ð½ÐµÐ½Ð¸Ðµ Ð±Ð°Ð·Ð¾Ð²ÑÑ ÑÑÐµÐ¼ Ð¿Ð¾Ð´ÐºÐ»ÑÑÐµÐ½Ð¸Ñ Ð²ÑÐ±ÑÐ°Ð½Ð½ÑÑ ÑÐ¸Ð¿Ð¾Ð² Ð´Ð°ÑÑÐ¸ÐºÐ¾Ð², Ð²ÑÑÐ²Ð»ÐµÐ½Ñ Ð¸Ñ Ð¿Ð¾Ð»Ð¾Ð¶Ð¸ÑÐµÐ»ÑÐ½ÑÐµ Ð¸ Ð¾ÑÑÐ¸ÑÐ°ÑÐµÐ»ÑÐ½ÑÐµ ÑÑÐ¾ÑÐ¾Ð½Ñ. ÐÐ° Ð²ÑÐ¾ÑÐ¾Ð¼ ÑÑÐ°Ð¿Ðµ ÑÐ¾Ð±ÑÐ°Ð½ ÑÑÐµÐ½Ð´ Ð´Ð»Ñ Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð¸Ñ ÑÐºÑÐ¿ÐµÑÐ¸Ð¼ÐµÐ½ÑÐ°, Ð¿Ð¾Ð´ÐºÐ»ÑÑÐµÐ½Ñ ÐºÐ¾Ð¼Ð¿Ð¾Ð½ÐµÐ½ÑÑ Ð¸ Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð° ÐºÐ°Ð»Ð¸Ð±ÑÐ¾Ð²ÐºÐ° Ð¿ÑÐ¸Ð±Ð¾ÑÐ¾Ð². ÐÐ° ÑÑÐµÑÑÐµÐ¼ ÑÑÐ°Ð¿Ðµ Ð¿Ð¾Ð»ÑÑÐµÐ½Ñ ÑÐºÑÐ¿ÐµÑÐ¸Ð¼ÐµÐ½ÑÐ°Ð»ÑÐ½ÑÐµ Ð´Ð°Ð½Ð½ÑÐµ, Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð° Ð¸Ñ Ð¾Ð±ÑÐ°Ð±Ð¾ÑÐºÐ° Ð² Ð¡ÐÐÐ  Mathcad. ÐÑÐ»Ð¸ Ð¾Ð¿ÑÐµÐ´ÐµÐ»ÐµÐ½Ñ Ð¿Ð¾Ð³ÑÐµÑÐ½Ð¾ÑÑÐ¸ Ð»Ð¸Ð½ÐµÐ¹Ð½Ð¾ÑÑÐ¸ Ð¸ Ð½ÐµÐ¾Ð¿ÑÐµÐ´ÐµÐ»ÑÐ½Ð½Ð¾ÑÑÐ¸ ÑÑÐ°Ð²Ð½ÐµÐ½Ð¸Ñ Ð¿ÑÐµÐ¾Ð±ÑÐ°Ð·Ð¾Ð²Ð°Ð½Ð¸Ñ, Ð¸, ÐºÐ°Ðº ÑÐ»ÐµÐ´ÑÑÐ²Ð¸Ðµ, Ð¾ÑÐµÐ½ÐµÐ½Ñ Ð¿Ð¾Ð³ÑÐµÑÐ½Ð¾ÑÑÐ¸ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÐ¸ Ð´Ð°ÑÑÐ¸ÐºÐ¾Ð². Ð ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐµ ÑÐ°Ð±Ð¾ÑÑ ÑÐ¾Ð·Ð´Ð°Ð½Ð¾ Ð¼ÐµÑÐ¾Ð´Ð¸ÑÐµÑÐºÐ¾Ðµ ÑÐºÐ°Ð·Ð°Ð½Ð¸Ðµ Ð¿Ð¾ Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð¸Ñ ÑÐºÑÐ¿ÐµÑÐ¸Ð¼ÐµÐ½ÑÐ°Ð»ÑÐ½Ð¾Ð³Ð¾ ÑÑÐ°Ð²Ð½ÐµÐ½Ð¸Ñ ÐµÐ¼ÐºÐ¾ÑÑÐ½Ð¾Ð³Ð¾ Ð¸ Ð¿ÑÐµÐ·Ð¾ÑÐµÐ·Ð¸ÑÑÐ¸Ð²Ð½Ð¾Ð³Ð¾ Ð¿ÑÐµÐ¾Ð±ÑÐ°Ð·Ð¾Ð²Ð°ÑÐµÐ»ÐµÐ¹ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ.
description: The given work is devoted to the development of a stand and guidelines for the study and comparison of capacitive and piezoresistive overpressure sensors. At the first stage, a review of typical designs of active elements of capacitive and piezoresistive overpressure transducers was performed. A comparison of the basic wiring diagrams of the selected types of sensors was carried out, their positive and negative sides were revealed. At the second stage, a test bench was assembled, components were connected and instruments were calibrated. At the third stage, experimental data were obtained, their processing was carried out in Mathcad CAD. Linearity errors and uncertainties of the transformation equation were determined, and, as a result, sensor sensitivity errors were estimated. As a result of the work, a methodological instruction was created for conducting an experimental comparison of capacitive and piezoresistive pressure transducers.