Fabrication and Characterization of 2-Port Surface Acoustic Wave (SAW) Resonators for Strain Sensing
Creators: name: Kelly, Liam
Publisher: name: Université d'Ottawa / University of Ottawa
Year: 2022
Subjects: Surface Acoustic Wave
Strain Sensing
Photolithography
Fabry-Perot
Velocity
Attenuation
High-resolution
High frequency

description: This thesis focuses on the theory, fabrication, and characterization of 2-port surface acoustic wave (SAW) resonators, as well as the application of their Fabry-Pérot resonance modes for strain sensing. The thesis includes three articles. In the first article, a fabrication method for high frequency SAW devices using traditional UV photolithography equipment is developed. It is well known that SAW sensors become more sensitive at higher frequencies but realizing high frequency devices requires small features which challenge existing photolithography methods. The proposed process is a modified version of a previously reported tri-layer lift-off photolithography process intended for Si or SiO2 substrates which allows for compatibility with materials that are piezoelectric and pyroelectric, often used as the substrate in SAW devices. The process uses a lithographic tri-layer consisting of layers of lift-off resist (LOR) on the bottom, back anti-reflection coating (BARC) in the middle, and photoresist (PR) on top, improving resolution by a factor of two over traditional lift-off photolithography techniques. We demonstrate the fabrication of a SAW device with an interdigital transducer (IDT) pitch of 4 μm (minimum feature size of 1 μm) on 128o Y-X cut lithium niobate, whose operating frequency is measured as 994.5 MHz. The 2-Port SAW devices that are used in subsequent chapters are fabricated using this process. The second article proposes a method of analyzing acoustic Fabry-Pérot spectra, by analogy with optical cavities, to determine key SAW parameters. In our experiment, 2-port SAW resonators, consisting of two interdigital transducers (IDTs) laterally separated by a free surface cavity length, are used to generate SAWs on 128o Y-X lithium niobate that are trapped between the two IDTs which also act as Bragg reflectors. Fabry-Pérot cavity peaks can be observed through the electrical S11 (reflection) spectrum measured on one IDT, hence a 2-Port resonator is equivalent to an acoustic Fabry-Pérot cavity/resonator. Measurements of the free spectral range and linewidths are then fitted to linear models to obtain the free surface velocity and attenuation of SAW waves, as well as the reflection of interdigital transducers (IDTs), all of which are crucial design parameters. Our method of analyzing Fabry-Pérot spectra provides a convenient method for determining key characteristics of SAW waves and cavities. In the third article, a surface acoustic wave (SAW) strain sensor based on measuring acoustic Fabry-Pérot resonance peaks from a 2-port SAW resonator is demonstrated. A theoretical analysis is proposed to estimate the frequency sensitivity to strain of IDT and cavity resonances and to predict strain distributions in both the cavity and IDT regions of a 2-port SAW resonator bonded to a tapered cantilever beam. The frequency stability of cavity resonance peaks for fabricated 2-port SAW resonators of different cavity length are measured and analyzed to determine the cavity length which exhibits maximum frequency stability. A cross-correlation analysis technique is then introduced to improve the detection of the frequency shift of SAW resonances and enable multimode frequency shift detection. The measured frequency sensitivity to strain of the cavity resonances of a resonator 10 mm in length (operating frequency = 97.7 MHz) was found to be -103.2 ± 0.2 Hz/με while demonstrating excellent linearity (R2 = 0.9999). By considering a minimum signal to noise ratio (SNR) of 3 dB, the device exhibits a minimum strain resolution of only 234 nε.