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title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: Development of a solid-state source for low-pressure RF plasma
Creators: name: ÐÐ°ÑÐ¸Ð³Ð¸Ð½, ÐÑÑÐµÐ¼
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2022
Subjects: Ð²ÑÑÐ¾ÐºÐ¾ÑÐ°ÑÑÐ¾ÑÐ½ÑÐ¹ Ð¿Ð»Ð°Ð·Ð¼Ð¾ÑÑÐ¾Ð½
ÑÐ²ÐµÑÐ´Ð¾ÑÐµÐ»ÑÐ½ÑÐ¹ Ð¸ÑÑÐ¾ÑÐ½Ð¸Ðº Ð¿Ð¸ÑÐ°Ð½Ð¸Ñ
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matlab
simulink
comsol multiphysics
rf plasma torch
solid-state power source
rectifier
invertor
transformator

description: Ð¢ÐµÐ¼Ð° Ð²ÑÐ¿ÑÑÐºÐ½Ð¾Ð¹ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð¾Ð¹ ÑÐ°Ð±Ð¾ÑÑ: Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° ÑÐ²ÐµÑÐ´Ð¾ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ Ð¸ÑÑÐ¾ÑÐ½Ð¸ÐºÐ° Ð¿Ð¸ÑÐ°Ð½Ð¸Ñ Ð´Ð»Ñ ÐÐ§Ð Ð¿Ð»Ð°Ð·Ð¼Ñ Ð½Ð¸Ð·ÐºÐ¾Ð³Ð¾ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ. ÐÐ°Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¿Ð¾ÑÐ²ÑÑÐµÐ½Ð° ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐºÐµ ÑÐ²ÐµÑÐ´Ð¾ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ Ð¸ÑÑÐ¾ÑÐ½Ð¸ÐºÐ° Ð¿Ð¸ÑÐ°Ð½Ð¸Ñ, ÐºÐ¾ÑÐ¾ÑÑÐ¹ Ð¼Ð¾Ð¶ÐµÑ Ð±ÑÑÑ Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½ Ð´Ð»Ñ ÑÐ»ÐµÐºÑÑÐ¾ÑÐ½Ð°Ð±Ð¶ÐµÐ½Ð¸Ñ ÐÐ§Ð Ð¿Ð»Ð°Ð·Ð¼Ñ Ð½Ð¸Ð·ÐºÐ¾Ð³Ð¾ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ. ÐÑÐ¸ Ð¿ÑÐ¾ÐµÐºÑÐ¸ÑÐ¾Ð²Ð°Ð½Ð¸Ð¸ Ð´Ð°Ð½Ð½Ð¾Ð³Ð¾ Ð¸ÑÑÐ¾ÑÐ½Ð¸ÐºÐ° Ð¿Ð¸ÑÐ°Ð½Ð¸Ñ Ð±ÑÐ»Ð° Ð¿ÑÐ¾Ð¸Ð·Ð²ÐµÐ´ÐµÐ½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ°, Ð²ÐºÐ»ÑÑÐ°ÑÑÐ°Ñ Ð² ÑÐµÐ±Ñ ÑÐ»ÐµÐ´ÑÑÑÐ¸Ðµ Ð·Ð°Ð´Ð°ÑÐ¸:1) ÐÐ±Ð·Ð¾Ñ ÑÑÑÐµÑÑÐ²ÑÑÑÐ¸Ñ Ð²ÑÑÐ¾ÐºÐ¾ÑÐ°ÑÑÐ¾ÑÐ½ÑÑ Ð¿Ð»Ð°Ð·Ð¼ÐµÐ½Ð½ÑÑ ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸Ð¹ Ð¸ Ð¸ÑÑÐ¾ÑÐ½Ð¸ÐºÐ¾Ð² Ð¿Ð¸ÑÐ°Ð½Ð¸Ñ 2) Ð Ð°ÑÑÐµÑ ÐÐ§Ð Ð¿Ð»Ð°Ð·Ð¼Ð¾ÑÑÐ¾Ð½Ð° Ñ Ð¿Ð¾Ð¼Ð¾ÑÑÑ Ð¼Ð¾Ð´ÐµÐ»Ð¸ ComsolMultiphysics 3) ÐÑÐ¸Ð±Ð»Ð¸Ð¶ÐµÐ½Ð½ÑÐ¹ ÑÐ°ÑÑÐµÑ Ð²ÑÑÐ¾ÐºÐ¾ÑÐ°ÑÑÐ¾ÑÐ½Ð¾Ð³Ð¾ ÑÑÐ°Ð½ÑÑÐ¾ÑÐ¼Ð°ÑÐ¾ÑÐ°Â 4) Ð¡Ð¾Ð·Ð´Ð°Ð½Ð¸Ðµ ÑÐ¸ÑÑÐ¾Ð²Ð¾Ð³Ð¾ Ð´Ð²Ð¾Ð¹Ð½Ð¸ÐºÐ° ÑÐ¸Ð»Ð¾Ð²Ð¾Ð³Ð¾ Ð²ÑÑÐ¾ÐºÐ¾ÑÐ°ÑÑÐ¾ÑÐ½Ð¾Ð³Ð¾ ÑÑÐ°Ð½ÑÑÐ¾ÑÐ¼Ð°ÑÐ¾ÑÐ° Ð² ÑÑÐµÐ´Ðµ Comsol Multiphysics Ð´Ð»Ñ Ð½Ð°ÑÐ¾Ð¶Ð´ÐµÐ½Ð¸Ñ ÐµÐ³Ð¾ Ð¾ÑÐ½Ð¾Ð²Ð½ÑÑ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² Ð¸ ÑÐ°ÑÑÐµÑÐ° Ð¢-Ð¾Ð±ÑÐ°Ð·Ð½Ð¾Ð¹ ÑÑÐµÐ¼Ñ Ð·Ð°Ð¼ÐµÑÐµÐ½Ð¸Ñ 5) Ð¡Ð¾Ð·Ð´Ð°Ð½Ð¸Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ ÑÐ²ÐµÑÐ´Ð¾ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ Ð¸ÑÑÐ¾ÑÐ½Ð¸ÐºÐ° Ð¿Ð¸ÑÐ°Ð½Ð¸Ñ Ð² Ð¿ÑÐ¾Ð³ÑÐ°Ð¼Ð¼Ðµ Matlab/SimulinkÂ ÐÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð¸Ðµ Ð¸ Ð°Ð½Ð°Ð»Ð¸Ð· ÑÐµÑÐ¸Ð¸ ÑÐ°ÑÑÑÑÐ¾Ð².
description: Â The topic of final qualification work: Development of a solid-statesourcefor low-pressure RF plasma.Â This work focuses on the development of a solid-state power supply, which can be used to power a low-pressure RF plasma. In the design of this power supply the following tasks were carried out:1)Â  Overview of existing RF plasma technologies and power supplies 2)Â  Calculation of RF plasma torch using model in the Comsol Multiphysics 3)Â  Approximate calculation of a high-frequency transformer 4)Â  Development the digital twin of a power high-frequency transformer in the Comsol Multiphysics environment to find its main parameters and calculate the T-shape substitution diagram 5)Â  Creation of solid-state power supply model in Matlab/Simulink softwareMaking and analysis of a series of calculations.