title: ÐÐ¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ ÐµÐ¼ÐºÐ¾ÑÑÐ½Ð¾Ð³Ð¾ ÐÐ­ÐÐ¡-Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ°
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Modeling a capacitive MEMS-accelerometer
Creators: name: Ð Ð°ÑÑÐ»Ð¾Ð², Ð¢Ð°Ð¼ÐµÑÐ»Ð°Ð½
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2020
Subjects: ÐµÐ¼ÐºÐ¾ÑÑÐ½Ð¾Ð¹ Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÐµÐºÑÑÐ¾Ð¼ÐµÑ Ð°Ð½Ð¸ÑÐµÑÐºÐ¸Ð¹ Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑ
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ÑÐ¿ÑÑÐ³Ð¸Ð¹ Ð¿Ð¾Ð´Ð²ÐµÑ
ÑÐ²ÐµÑÑ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑ
Ð¼Ð°ÑÐµÐ¼Ð°ÑÐ¸ÑÐµÑÐºÐ¾Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ
capacitive microelectromechanical accelerometer
mems
folded beam
ultra sensitivity
mathematical modeling

description: Ð¢ÐµÐ¼Ð° Ð²ÑÐ¿ÑÑÐºÐ½Ð¾Ð¹ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð¾Ð¹ ÑÐ°Ð±Ð¾ÑÑ: â ÐÐ¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ Ð¾ÑÐ½Ð¾Ð²Ð½ÑÑ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² ÐÐ­ÐÐ¡- Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ¾Ð²â ÐÐ°Ð´Ð°ÑÐ¸, ÐºÐ¾ÑÐ¾ÑÑÐµ ÑÐµÑÐ°Ð»Ð¸ÑÑ Ð² ÑÐ¾Ð´Ðµ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ: 1. ÐÑÐ¾Ð²ÐµÑÑÐ¸ Ð¾Ð±Ð·Ð¾Ñ ÑÑÑÐµÑÑÐ²ÑÑÑÐ¸Ñ Ð»Ð¸ÑÐµÑÐ°ÑÑÑÐ½ÑÑ Ð¸ÑÑÐ¾ÑÐ½Ð¸ÐºÐ¾Ð², Ð¾Ð¿Ð¸ÑÑÐ²Ð°ÑÑÐ¸Ñ ÐµÐ¼ÐºÐ¾ÑÑÐ½ÑÐµ ÐÐ­ÐÐ¡-Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÑ, Ð¸Ñ Ð²Ð¾Ð·Ð¼Ð¾Ð¶Ð½Ð¾ÑÑÐ¸, ÐºÐ¾Ð½ÑÑÑÑÐºÑÐ¸Ð²Ð½ÑÐµ ÑÐµÑÐµÐ½Ð¸Ñ. 2. ÐÐ¿ÑÐµÐ´ÐµÐ»Ð¸ÑÑ Ð¾ÑÐ½Ð¾Ð²Ð½ÑÐµ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÑ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ° ÐÐ­ÐÐ¡-Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ° Ñ ÑÐ»ÐµÐºÑÑÐ¾Ð´Ð½Ð¾Ð¹ ÑÑÑÑÐºÑÑÑÐ¾Ð¹ ÑÐ¸Ð¿Ð° gap-closing; 3.Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐ°ÑÑ Ð¼ÐµÑÐ¾Ð´Ð¸ÐºÑ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ Ð¾ÑÐ½Ð¾Ð²Ð½ÑÑ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² ÐÐ­ÐÐ¡-Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ°; 4.ÐÑÐ¾Ð²ÐµÑÑÐ¸ Ð¼Ð°ÑÐµÐ¼Ð°ÑÐ¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ°ÑÑÐµÑ Ð¾ÑÐ½Ð¾Ð²Ð½ÑÑ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² ÐÐ­ÐÐ¡-Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ° Ñ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¸ÐµÐ¼ Ð¿ÑÐ¾Ð³ÑÐ°Ð¼Ð¼Ð½Ð¾Ð³Ð¾ Ð¿ÑÐ¾Ð´ÑÐºÑÐ°MATLAB; 5. ÐÐ¾ÑÑÑÐ¾Ð¸ÑÑ 3DÐ¼Ð¾Ð´ÐµÐ»Ñ, Ð¿Ð¾Ð»ÑÑÐµÐ½Ð½Ð¾Ð³Ð¾ Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ° Ð² ÑÑÐµÐ´Ðµ ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐºÐµ COMSOL Multyphysics; 6. ÐÑÐ¾Ð²ÐµÑÑÐ¸ Ð°Ð½Ð°Ð»Ð¸Ð· Ð¿Ð¾Ð»ÑÑÐµÐ½Ð½ÑÑ ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐ¾Ð² Ð ÑÐ¾Ð´Ðµ ÑÐ°Ð±Ð¾ÑÑ Ð±ÑÐ»Ð¸ Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½Ñ ÑÐ°ÑÑÐµÑÑ, Ð¿Ð¾ÐºÐ°Ð·ÑÐ²Ð°ÑÑÐ¸Ðµ Ð½Ð°Ð³Ð»ÑÐ´Ð½Ð¾, ÐºÐ°ÐºÐ¸Ð¼ Ð¾Ð±ÑÐ°Ð·Ð¾Ð¼ ÐºÐ¾Ð½ÑÑÑÑÐºÑÐ¸Ð¾Ð½Ð½ÑÐµ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÑ ÑÐµÐ¼ Ð¸Ð»Ð¸ Ð¸Ð½ÑÐ¼ Ð¾Ð±ÑÐ°Ð·Ð¾Ð¼ Ð²Ð»Ð¸ÑÑÑ Ð½Ð° ÑÐ°Ð±Ð¾ÑÑ Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ°. ÐÐ½Ð°Ð»Ð¸Ð· Ð¿ÑÐ¾Ð²Ð¾Ð´Ð¸Ð»ÑÑ Ð¼ÐµÑÐ¾Ð´Ð¾Ð¼ Ð¼Ð°ÑÐµÐ¼Ð°ÑÐ¸ÑÐµÑÐºÐ¾Ð³Ð¾ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ Ñ Ð¿Ð¾Ð¼Ð¾ÑÑÑ Ð¿ÑÐ¾Ð³ÑÐ°Ð¼Ð¼Ð½Ð¾Ð³Ð¾ Ð¾Ð±ÐµÑÐ¿ÐµÑÐµÐ½Ð¸Ñ MATLAB, Ð° ÑÐ°ÐºÐ¶Ðµ Ð´Ð»Ñ Ð²Ð¸Ð·ÑÐ°Ð»Ð¸Ð·Ð°ÑÐ¸Ð¸ Ð½Ð°ÑÐµÐ¹ Ð¼Ð¾Ð´ÐµÐ»Ð¸ Ð±ÑÐ» Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½ COMSOL Multyphysics. Ð¢Ð°ÐºÐ¸Ð¼ Ð¾Ð±ÑÐ°Ð·Ð¾Ð¼ Ð½Ð°Ð¼Ð¸ Ð±ÑÐ»Ð° Ð¿Ð¾Ð»ÑÑÐµÐ½Ð° Ð¼Ð¾Ð´ÐµÐ»Ñ ÑÐ²ÐµÑÑÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÐÐ­ÐÐ¡- Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ°. Ð ÑÐ¾Ð´Ðµ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ Ð±ÑÐ» Ð¾ÑÑÑÐµÑÑÐ²Ð»ÐµÐ½ Ð¸ÑÐµÑÐ°ÑÐ¸Ð²Ð½ÑÐ¹ Ð¿Ð¾Ð´Ð±Ð¾Ñ Ð´Ð»Ð¸Ð½Ñ, ÑÐ¸ÑÐ¸Ð½Ñ Ð¸ ÑÐ°ÑÑÑÐ¾ÑÐ½Ð¸Ñ Ð¼ÐµÐ¶Ð´Ñ ÑÐ»ÐµÐºÑÑÐ¾Ð´Ð°Ð¼Ð¸ Ð² ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐµ ÑÐµÐ³Ð¾ Ð±ÑÐ»Ð° Ð¿Ð¾Ð»ÑÑÐµÐ½Ð° Ð½Ð¸Ð·ÐºÐ°Ñ Ð½ÐµÐ»Ð¸Ð½ÐµÐ¹Ð½Ð¾ÑÑÑ ÐÐ­ÐÐ¡-Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ° (Ð¿ÑÐ¸Ð¼ÐµÑÐ½Ð¾ 0.25%). Ð¢Ð°ÐºÐ¶Ðµ Ð¾Ð´Ð½Ð¸Ð¼ Ð¸Ð· Ð¾ÑÐ½Ð¾Ð²Ð½ÑÑ Ð¿ÑÐµÐ¸Ð¼ÑÑÐµÑÑÐ² ÑÐ¿ÑÐ¾ÐµÐºÑÐ¸ÑÐ¾Ð²Ð°Ð½Ð½Ð¾Ð¹ Ð½Ð°Ð¼Ð¸ Ð¼Ð¾Ð´ÐµÐ»Ð¸ ÑÐ²Ð»ÑÑÑÑÑ Ð¼Ð°Ð»ÑÐµ ÑÐ°Ð·Ð¼ÐµÑÑ (3*2) mm, Ñ ÑÑÐµÑÐ¾Ð¼ Ð°Ð½ÐºÐµÑÐ¾Ð² Ð¸ ÑÐ¿Ð¾Ñ, ÐºÐ¾ÑÐ¾ÑÑÐµ Ð¿ÑÐ¸ÐºÑÐµÐ¿Ð»ÑÑÑ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½ÑÐ¹ ÑÐ»ÐµÐ¼ÐµÐ½Ñ Ðº ÐºÐ¾ÑÐ¿ÑÑÑ. Ð Ð¸ÑÐ¾Ð³Ðµ Ð½Ð°Ð¼Ð¸ Ð±ÑÐ»Ð° Ð¿Ð¾Ð»ÑÑÐµÐ½Ð° Ð¼Ð¾Ð´ÐµÐ»Ñ ÐµÐ¼ÐºÐ¾ÑÑÐ½Ð¾Ð³Ð¾ ÑÐ²ÐµÑÑÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÐÐ­ÐÐ¡-Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ°, ÐºÐ¾ÑÐ¾ÑÐ°Ñ Ð¼Ð¾Ð¶ÐµÑ Ð¿ÑÐ¸Ð¼ÐµÐ½ÑÑÑÑÑ Ð² Ð´Ð¸Ð½Ð°Ð¼Ð¸ÑÐµÑÐºÐ¾Ð¼ ÑÐ¿ÑÐ°Ð²Ð»ÐµÐ½Ð¸Ð¸ ÑÑÐ°Ð½ÑÐ¿Ð¾ÑÑÐ½ÑÐ¼Ð¸ ÑÑÐµÐ´ÑÑÐ²Ð°Ð¼Ð¸ Ð¸ Ð² ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½Ð¾Ð¹ ÑÑÐ°Ð±Ð¸Ð»Ð¸Ð·Ð°ÑÐ¸Ð¸ Ð¿Ð¾Ð´Ð²ÐµÑÐºÐ¸. Ð¢Ð°ÐºÐ¶Ðµ Ð²Ð¾Ð·Ð¼Ð¾Ð¶Ð½Ð¾ ÐµÐµ Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ðµ Ð² ÐºÐ°ÑÐµÑÑÐ²Ðµ ÑÐ¾ÑÑÐ°Ð²Ð½Ð¾Ð¹ ÑÐ°ÑÑÐ¸ Ð±Ð¾Ð»ÐµÐµ ÑÐ»Ð¾Ð¶Ð½ÑÑ ÑÑÑÑÐ¾Ð¹ÑÑÐ², Ð½Ð°Ð¿ÑÐ¸Ð¼ÐµÑ, Ð² Ð¿ÑÐ¸Ð±Ð¾ÑÐ¾ÑÑÑÐ¾ÐµÐ½Ð¸Ð¸, Ð² ÑÐ°ÑÑÐ½Ð¾ÑÑÐ¸, Ð² Ð¸Ð½ÐºÐ»ÐµÐ½Ð¾Ð¼ÐµÑÑÐ°Ñ.
description: Theme of the graduate qualification work: âModeling of the main parameters of MEMS accelerometersâ Tasks that were solved during the study: 1. Conduct a review of existing literary sources describing capacitive MEMS accelerometers, their capabilities, design solutions. 1. To review the existing literature sources describing capacitive microelectromechanical accelerometer, their capabilities, design solutions. 2. Determine the main parameters of the sensitive element of the MEMS- accelerometer with an electrode structure of the gap-closing 3. To develop a methodology for modeling the main parameters of the MEMS accelerometer; 4. To carry out a mathematical calculation of the main parameters of the MEMS accelerometer using the MATLAB software product; 5. Build a 3D model of the obtained accelerometer in the software product COMSOL Multyphysics; 6. To analyze the results. In this work, calculations were made that clearly showed how the structural parameters in one way or another affect the operation of the accelerometer. The analysis was carried out by mathematical modeling using MATLAB software, and COMSOL Multyphysics was also used to visualize our model. Thus, we obtained a model of a supersensitive MEMS accelerometer. During the study, iterative selection of the length, width and distance between the electrodes was carried out, as a result of which the low nonlinearity of the MEMS accelerometer was obtained (approximately 0.25%). As a result, we obtained a model of a capacitive supersensitive MEMS accelerometer, which can be used in the dynamic control of vehicles and in electronic stabilization of the suspension. It is also possible to use it as an integral part of more complex devices, for example, in instrumentation, in particular, in inclenometers.