Behaviors of capacitive and Pirani vacuum gauges Case study on time effect
Creators: name: Shafiekhani, Azizollah
name: Arman, Ali
name: Zavarian, Ali Asghar
name: S. M. Jamal Ghotbi
name: Alireza Grayeli Korpi
name: Salehi, Maryam
name: Mardani, Mohsen
name: Hafezi, Fatemeh
name: Ştefan Ţălu
name: Ashkan Sepehr Afghan
Publisher: name: figshare
Year: 2020
Subjects: subject: 20301 Acoustics and Acoustical Devices; Waves
subject: FOS: Physical sciences
subject: FOS: Physical sciences
subject: Applied Physics
subject: Atomic Physics
subject: 20201 Atomic and Molecular Physics
subject: 20299 Atomic, Molecular, Nuclear, Particle and Plasma Physics not elsewhere classified
subject: 29901 Biological Physics
subject: FOS: Biological sciences
subject: FOS: Biological sciences
subject: 20399 Classical Physics not elsewhere classified
subject: 20501 Classical and Physical Optics
subject: 29902 Complex Physical Systems
subject: Computational Physics
subject: 20401 Condensed Matter Characterisation Technique Development
subject: 20402 Condensed Matter Imaging
subject: 20403 Condensed Matter Modelling and Density Functional Theory
subject: Condensed Matter Physics
subject: 20499 Condensed Matter Physics not elsewhere classified
subject: 20601 Degenerate Quantum Gases and Atom Optics
subject: 20404 Electronic and Magnetic Properties of Condensed Matter; Superconductivity
subject: 20302 Electrostatics and Electrodynamics
subject: Entropy
subject: 20602 Field Theory and String Theory
subject: 20303 Fluid Physics
subject: General Relativity
subject: 20502 Lasers and Quantum Electronics
subject: Mechanics
subject: 29903 Medical Physics
subject: 20503 Nonlinear Optics and Spectroscopy
subject: 20202 Nuclear Physics
subject: 20599 Optical Physics not elsewhere classified
subject: 20203 Particle Physics
subject: 20504 Photonics, Optoelectronics and Optical Communications
subject: 29999 Physical Sciences not elsewhere classified
subject: 20405 Soft Condensed Matter
subject: Special Relativity
subject: 20406 Surfaces and Structural Properties of Condensed Matter
subject: 29904 Synchrotrons; Accelerators; Instruments and Techniques
subject: Thermodynamics
subject: 20304 Thermodynamics and Statistical Physics
subject: FOS: Mechanical engineering
subject: FOS: Mechanical engineering

description: Knowing the exact pressure of the process has a great impact on the validity of the results, product quality, energy efficiency, and in some processes, on the security of work with the system. Hence, the calibration of the barometers and the accuracy of the readings should be taken seriously. Choosing the appropriate time interval for re-calibration is done according to the extent and conditions of use, uncertainty, and the inaccuracy allowed in measurement, constructive suggestion, and some other things. Failure to pay attention to the importance of periodic calibration in vacuum gauges leads to some irreparable losses in the research project and the vacuum generator system. In this study, using McLeod's barometer, the deviation of capacitive and Pirani vacuum gauges is investigated at different time intervals in the middle vacuum range, and it is determined that the vacuum gauge faces a serious deviation from the actual calibrated amount for upper and lower ranges of middle vacuum in the same working pressure range over time. <br>