title: ÐÐ­ÐÐ¡-Ð¼Ð¸ÐºÑÐ¾ÑÐ¾Ð½ Ð¼ÐµÐ´Ð¸ÑÐ¸Ð½ÑÐºÐ¾Ð³Ð¾ Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ñ
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: MEMS microphone
Creators: name: ÐÑÐ´Ð¸Ð½Ð°, ÐÐ°ÑÑÑ
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2023
Subjects: ÐÐ­ÐÐ¡-Ð¼Ð¸ÐºÑÐ¾ÑÐ¾Ð½
ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½ÑÐ¹ ÑÐ»ÐµÐ¼ÐµÐ½Ñ
Ð°ÐºÑÑÑÐ¸ÑÐµÑÐºÐ¸Ðµ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÑ
ÑÑÐ¾Ð²ÐµÐ½Ñ Ð·Ð²ÑÐºÐ¾Ð²Ð¾Ð³Ð¾ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ
ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑ
Ð³ÐµÐ¾Ð¼ÐµÑÑÐ¸ÑÐµÑÐºÐ¸Ðµ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÑ
MEMS-microphone
sensing element
acoustic parameters
sound pressure level
sensetivity
geometrical parameters

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description: The object of the study is a sensitive element of a capacitive MEMS microphone. The aim of the work is to reveal the dependence of sensitivity on the geometrical parameters of the sensitive element of MEMS-microphone. As a result of the study the goal was achieved: to reveal the dependence of the sensitivity on the geometrical parameters of the sensitive element of MEMS microphone. A study of various prototypes of capacitive MEMS microphones was carried out on the basis of scientific papers and available technical solutions, which are presented in Appendix A. Technical requirements were formulated based on the data obtained. The main item to be studied and obtained was the sensitivity. The practical part fully satisfies the technical requirements for the sensing element. The calculation of sensitivity in the sensitive element in MATLAB development environment was performed. The final table 4.3 shows the geometrical recommendations for the design of the sensitive element.