title: Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° Ð¼ÐµÑÐ¾Ð»Ð¸ÐºÐ¸ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ ÐµÐ¼ÐºÐ¾ÑÑÐ½ÑÑ Ð´Ð°ÑÑÐ¸ÐºÐ¾Ð² Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Development of a methodology for modeling capacitive pressure sensors
Creators: name: ÐÐ°ÑÐ¿Ð¾Ð²Ð°, Ð®Ð»Ð¸Ñ
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2023
Subjects: ÐÐ°ÑÑÐ¸ÐºÐ¸ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ
ÐÐ¾Ð½ÐµÑÐ½ÑÑ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ¾Ð² Ð¼ÐµÑÐ¾Ð´
ÐÐ¾Ð¼Ð¿ÑÑÑÐµÑÐ½Ð¾Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ
Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ Ð¼ÐµÐ¼Ð±ÑÐ°Ð½Ñ Ð´Ð°ÑÑÐ¸ÐºÐ°
Ð¼ÐµÐ¼Ð±ÑÐ°Ð½Ð° Ñ Ð¶ÐµÑÑÐºÐ¸Ð¼ ÑÐµÐ½ÑÑÐ¾Ð¼
modeling of sensor membrane
rigid center membrane

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description: The topic of the final qualifying work: "Development of a methodology for modeling capacitive pressure sensors". This work is devoted to the study of a membrane in a capacitive pressure sen-sor and the development of a methodology for its modeling. Tasks that were solved during the study: 1. Analyze the sensors, the principle of their operation. 2. To develop a modeling methodology, to simulate the membrane, with the finding of boundary conditions. 3. Examination of the membrane with changes in its parameters. 4. Examination of a membrane with a rigid center with a membrane without a rigid center. The work was carried out in the ELCUT program, where a significant part of the factual material was collected: simulation results, indications of deformation and elasticity, with various changes in the parameters of the membrane. The modeling was carried out using the finite element method using the ELCUT 5.1 PRO software. As a result, recommendations were given on the parameters of the membrane in the capacitive pressure sensor for its optimization.