title: Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ° ÐÐ­ÐÐ¡-Ð¼Ð¸ÐºÑÐ¾ÑÐ¾Ð½Ð° Ð´Ð»Ñ ÑÐ»ÑÑ Ð¾Ð²ÑÑ Ð¸Ð¼Ð¿Ð»Ð°Ð½ÑÐ¾Ð²
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Development of a sensitive element of a MEMS microphone for hearing implants
Creators: name: ÐÐ°Ð¹ÑÐ±, Ð£Ð¼Ð°Ð¼Ð°
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2023
Subjects: ÐÐ¸ÐºÑÐ¾ÑÐ¾Ð½Ñ
Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÐµÐºÑÑÐ¾Ð¼ÐµÑ Ð°Ð½Ð¸ÑÐµÑÐºÐ°Ñ ÑÐ¸ÑÑÐµÐ¼Ð°
ÑÐ»ÑÑ Ð¾Ð²ÑÐµ Ð¸Ð¼Ð¿Ð»Ð°Ð½ÑÑ
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ÐºÑÐµÐ¼Ð½Ð¸Ð¹ Ð½Ð° Ð¸Ð·Ð¾Ð»ÑÑÐ¾ÑÐµ
microelectromechanical system
hearing implants
capacitive accelerometer
silicon on insulator

description: Ð Ð´Ð°Ð½Ð½Ð¾Ð¹ Ð¼Ð°Ð³Ð¸ÑÑÐµÑÑÐºÐ¾Ð¹ Ð´Ð¸ÑÑÐµÑÑÐ°ÑÐ¸Ð¸ Ð¿ÑÐµÐ´ÑÑÐ°Ð²Ð»ÐµÐ½Ñ ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÑ ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ¸ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ° ÐÐ­ÐÐ¡-Ð¼Ð¸ÐºÑÐ¾ÑÐ¾Ð½Ð° Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ðµ Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ° Ð´Ð»Ñ ÑÐ»ÑÑÐ¾Ð²ÑÑ Ð¸Ð¼Ð¿Ð»Ð°Ð½ÑÐ¾Ð². ÐÐ¸ÐºÑÐ¾ÑÐ¾Ð½ MEMS Ð¿ÑÐµÐ´Ð»Ð°Ð³Ð°ÐµÑÑÑ Ð´Ð»Ñ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¸Ñ Ð² Ð¿Ð¾Ð»Ð½Ð¾ÑÑÑÑ Ð¸Ð¼Ð¿Ð»Ð°Ð½ÑÐ¸ÑÑÐµÐ¼Ð¾Ð¹ ÐºÐ¾ÑÐ»ÐµÐ°ÑÐ½Ð¾Ð¹ Ð¿ÑÐ¾ÑÐµÐ·Ð½Ð¾Ð¹ ÑÐ¸ÑÑÐµÐ¼Ðµ ÐºÐ¾ÑÑÐ½Ð¾Ð¹ ÑÑÑÑÐºÑÑÑÑ ÑÑÐµÐ´Ð½ÐµÐ³Ð¾ ÑÑÐ°. Ð±ÑÐ» Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½ ÑÐ¿ÐµÑÐ¸Ð°Ð»Ð¸Ð·Ð¸ÑÐ¾Ð²Ð°Ð½Ð½Ð¾Ðµ Ð¿ÑÐ¾Ð³ÑÐ°Ð¼Ð¼Ð½Ð¾-Ð¼Ð°ÑÐµÐ¼Ð°ÑÐ¸ÑÐµÑÐºÐ¾Ðµ Ð¾Ð±ÐµÑÐ¿ÐµÑÐµÐ½Ð¸Ðµ Ð´Ð»Ñ ÑÐ°ÑÑÐµÑÐ° Ð¾ÑÐ½Ð¾Ð²Ð½ÑÑ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸Ðº ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ° Ð¸ Ð²ÑÐ²Ð¾Ð´Ð° ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐ¾Ð² Ð² Ð²Ð¸Ð´Ðµ ÑÐ°Ð±Ð»Ð¸Ñ, Ð³ÑÐ°ÑÐ¸ÐºÐ¾Ð² Ð¸ Ð´Ð¸Ð°Ð³ÑÐ°Ð¼Ð¼ Ð´Ð»Ñ ÑÐ°ÑÑÐµÑÐ° Ð¾ÑÐ½Ð¾Ð²Ð½ÑÑ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸Ðº ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ° Ð¸ Ð¾ÑÐ¾Ð±ÑÐ°Ð¶ÐµÐ½Ð¸Ñ ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐ¾Ð² Ð² Ð²Ð¸Ð´Ðµ ÑÐ°Ð±Ð»Ð¸Ñ, Ð³ÑÐ°ÑÐ¸ÐºÐ¾Ð² Ð¸ Ð´Ð¸Ð°Ð³ÑÐ°Ð¼Ð¼ Ñ Ð¿Ð¾Ð¼Ð¾ÑÑÑ COMSOL MULTIPHYSICS 6.0. ÐÐ¾Ð´ÑÐ¾Ð´, ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ð½ÑÐ¹ Ð² Ð´Ð°Ð½Ð½Ð¾Ð¼ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ð¸, Ð¸Ð¼ÐµÐµÑ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑ 0,3 ÑÐ¤/Ð³ Ð¸ ÑÐ¾Ð±ÑÑÐ²ÐµÐ½Ð½ÑÑ ÑÐ°ÑÑÐ¾ÑÑ 79686 ÐÑ Ð¿ÑÐ¸ Ð¼Ð°ÑÑÐµ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ° 8,2895 Ð¼ÐºÐ³. ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¾ Ð²Ð»Ð¸ÑÐ½Ð¸Ðµ ÑÐ°Ð±Ð¾ÑÐµÐ¹ ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÑ Ð½Ð° Ð²ÐµÐ»Ð¸ÑÐ¸Ð½Ñ ÐµÐ¼ÐºÐ¾ÑÑÐ¸, ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÐ½Ð°Ñ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑ ÑÐ¾ÑÑÐ°Ð²Ð¸Ð»Ð° 0,04 ÑÐ¤/Â°Ð¡.
description: This masters thesis presents the results of the development of a sensitive element of a MEMS microphone based on an accelerometer for hearing implants. A MEMS microphone is proposed for deployment in a fully implantable cochlear prosthetic system of the middle ear bone structure. The design used mathematical and specialized software to calculate the main characteristics of the sensing element and display the results in tables, graphs and diagrams using COMSOL MULTIPHYSICS 6.0. The approach that was developed in this study has sensitivity of 0,3 fF/g and natural frequency of 79686 Hz where the mass of the sensitive element is 8,2895 Î¼g. The effect of operating temperature on the capacitance value was studied, the temperature sensitivity was 0,04 fF/Â°C.