title: ÐÐ°ÑÐµÐ¼Ð°ÑÐ¸ÑÐµÑÐºÐ¾Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ Ð¿ÐµÑÑÐ¿ÐµÐºÑÐ¸Ð²Ð½Ð¾Ð³Ð¾ Ð½Ð°Ð½Ð¾/Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÐµÐºÑÑÐ¾Ð¼ÐµÑ Ð°Ð½Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ ÑÐµÐ·Ð¾Ð½Ð°Ð½ÑÐ½Ð¾Ð³Ð¾ Ð´ÐµÑÐµÐºÑÐ¾ÑÐ° Ð¼Ð°ÑÑÑ Ð¾ÑÐ°Ð¶Ð´Ð°ÐµÐ¼ÑÑ ÑÐ°ÑÑÐ¸Ñ
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: Mathematical modeling of a perspective nano/microelectromechanical resonant sensor of the mass of adsorbed particles
Creators: name: ÐÐ¾ÑÑÑÐºÐ¸Ð¹, Ð¡ÐµÑÐ°ÑÐ¸Ð¼
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2022
Subjects: ÐÐ­ÐÐ¡
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ÑÐ´Ð²Ð¸Ð³ ÑÐ°ÑÑÐ¾ÑÑ
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MEMS
resonant mass sensor
micro/nanobeam
frequency shift
added mass
beam electrostatic deflection
parameter extension method
Galerkin method
symmetric mass sensor
asymmetric mass sensor

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description: The subject of the graduate qualification work is âMathematical modeling of a perspective nano/microelectromechanical resonant sensor of the mass of adsorbed particlesâ.The given work is devoted to the development of a mathematical model of a resonant mass sensor based on a clamped-clamped microbeam excited by an electric field. Due to the adsorption of the particle on the surface of the beam, the eigenfrequencies of the system oscillations shifts. The method of this paper consisted in modeling frequency shifts using the known position of the added mass and its value. Frequency shifts were considered by various numerical methods, such as the method of continuation with respect to a parameter based on the Galerkin method, the finite element method. Also, the finite difference method was used in the process of solving the problem. Among those used, the optimal method for further modeling was chosen. Based on the simulation of frequency shifts, a was developed method for determining the position of a particle and its mass from the measured frequency shifts. Were proposed two variants of advanced mass sensors based on the developed method - symmetric and asymmetric mass sensors. For each option, were determined the necessary and optimal conditions for the sensor operation and was given an estimate of the detector error based on the inaccuracy of the model.