title: ÐÑÐµÐ·Ð¾ÑÐµÐ·Ð¸ÑÑÐ¸Ð²Ð½ÑÐ¹ ÐÐ­ÐÐ¡-Ð´Ð°ÑÑÐ¸Ðº Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: Piezoresistive pressure sensors
Creators: name: ÐÐ¾Ð½Ð´ÑÐ°ÑÑÐµÐ², ÐÐ¸ÐºÐ¾Ð»Ð°Ð¹
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2023
Subjects: ÐÐ­ÐÐ¡
ÑÐµÐ½ÑÐ¾Ñ
Comsol
Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ðµ
Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ
Ð´Ð°ÑÑÐ¸Ðº
Ð¿ÑÐµÐ·Ð¾ÑÐµÐ·ÐµÑÑÐ¸Ð²Ð½Ð¾ÑÑÑ
ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½ÑÐ¹ ÑÐ»ÐµÐ¼ÐµÐ½Ñ
MEMS
sensor
pressure
simulation
piezoresistivity
sensing element

description: ÐÐ±ÑÐµÐºÑ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ â Ð¿ÑÐµÐ·Ð¾ÑÐµÐ·Ð¸ÑÑÐ¸Ð²Ð½ÑÐµ ÐÐ­ÐÐ¡-Ð´Ð°ÑÑÐ¸Ðº Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ Ð¦ÐµÐ»Ñ ÑÐ°Ð±Ð¾ÑÑ â Ð¿Ð¾ÑÑÑÐ¾ÐµÐ½Ð¸Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ Ð¸ ÑÐ°ÑÑÐµÑ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ° Ð´Ð°ÑÑÐ¸ÐºÐ° Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ðµ Ð¿Ð¾Ð»Ð¸Ð¼ÐµÑÐ½ÑÑ Ð¼Ð°ÑÐµÑÐ¸Ð°Ð»Ð¾Ð² PDMS/PMMA. Ð ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐµ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ Ð±ÑÐ»Ð¸ Ð¸Ð·ÑÑÐµÐ½Ñ ÑÐ¸Ð·Ð¸ÑÐµÑÐºÐ¸Ðµ Ð¿ÑÐ¸Ð½ÑÐ¸Ð¿Ñ ÑÐ°Ð±Ð¾ÑÑ Ð¿ÑÐµÐ·Ð¾ÑÐµÐ·Ð¸ÑÑÐ¸Ð²Ð½ÑÑ Ð´Ð°ÑÑÐ¸ÐºÐ¾Ð² Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ Ð¸ Ð¸Ñ Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ðµ Ð² Ð±Ð¸Ð¾Ð¼ÐµÐ´Ð¸ÑÐ¸Ð½ÑÐºÐ¾Ð¹ Ð¿ÑÐ¾Ð¼ÑÑÐ»ÐµÐ½Ð½Ð¾ÑÑÐ¸. ÐÐ° Ð¾ÑÐ½Ð¾Ð²Ðµ Ð°Ð½Ð°Ð»Ð¸Ð·Ð° Ð»Ð¸ÑÐµÑÐ°ÑÑÑÑ Ð±ÑÐ»Ð¸ ÑÐ°ÑÑÐ¼Ð¾ÑÑÐµÐ½Ñ ÑÐ°Ð·Ð»Ð¸ÑÐ¸Ñ Ð² ÐºÐ¾Ð½ÑÑÑÑÐºÑÐ¸Ð¸ Ð¸Ð·Ð¼ÐµÑÐ¸ÑÐµÐ»ÑÐ½ÑÑ Ð¿ÑÐ¸Ð±Ð¾ÑÐ¾Ð². ÐÑÐ»Ð¸ Ð¿Ð¾ÑÑÑÐ¾ÐµÐ½Ñ Ð¸ ÑÐ¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ñ ÑÑÐµÑÐ¼ÐµÑÐ½ÑÐµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½ÑÑ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ¾Ð² Ð´Ð»Ñ Ð´Ð¸Ð°Ð¿Ð°Ð·Ð¾Ð½Ð¾Ð² Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ð¹ 0â100 ÐºÐÐ°. ÐÐ»Ñ ÑÐ°ÑÑÐµÑÐ° Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð»Ð¸ÑÑ ÑÑÐµÐ´ÑÑÐ²Ð° Ð°Ð²ÑÐ¾Ð¼Ð°ÑÐ¸Ð·Ð¸ÑÐ¾Ð²Ð°Ð½Ð½Ð¾Ð¹ ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ¸ COMSOL Multyphysics. Ð ÐµÐ·ÑÐ»ÑÑÐ°ÑÑ Ð¿Ð¾ÐºÐ°Ð·Ð°Ð»Ð¸, ÑÑÐ¾ Ð¿ÐµÑÐ²Ð°Ñ Ð¼Ð¾Ð´ÐµÐ»Ñ Ð¸Ð¼ÐµÐ»Ð° ÑÐ°Ð±Ð¾ÑÐ¸Ð¹ Ð´Ð¸Ð°Ð¿Ð°Ð·Ð¾Ð½ 0â37 ÐºÐÐ° Ð´Ð»Ñ PMMA Ð¸ 0â10 ÐºÐÐ° Ð´Ð»Ñ PDMS, Ð²ÑÐ¾ÑÐ°Ñ Ð¼Ð¾Ð´ÐµÐ»Ñ Ð¸Ð¼ÐµÐ»Ð° Ð´Ð¸Ð°Ð¿Ð°Ð·Ð¾Ð½ 0â35 ÐºÐÐ° Ð´Ð»Ñ PMMA Ð¸ 0â9 ÐºÐÐ° Ð´Ð»Ñ PDMS, Ð° ÑÑÐµÑÑÑ Ð¼Ð¾Ð´ÐµÐ»Ñ Ð¸Ð¼ÐµÐ»Ð° ÑÐ°Ð±Ð¾ÑÐ¸Ð¹ Ð´Ð¸Ð°Ð¿Ð°Ð·Ð¾Ð½ 0â100 ÐºÐÐ° Ð´Ð»Ñ PMMA Ð¸ 0â16 ÐºÐÐ° Ð´Ð»Ñ PDMS. Ð¢Ð°ÐºÐ¶Ðµ Ð±ÑÐ»Ð¸ ÑÐ°ÑÑÑÐ¸ÑÐ°Ð½Ñ Ð·Ð½Ð°ÑÐµÐ½Ð¸Ñ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÐ¸ Ð´Ð»Ñ ÐºÐ°Ð¶Ð´Ð¾Ð¹ Ð¼Ð¾Ð´ÐµÐ»Ð¸. ÐÐµÑÐ²Ð°Ñ Ð¼Ð¾Ð´ÐµÐ»Ñ Ð¸Ð¼ÐµÐ»Ð° ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑ 0,420 Ð¼Ð/Ð/ÐºÐÐ° Ð´Ð»Ñ PMMA Ð¸ 1,322 Ð¼Ð/Ð/ÐºÐÐ° Ð´Ð»Ñ PDMS, Ð²ÑÐ¾ÑÐ°Ñ Ð¼Ð¾Ð´ÐµÐ»Ñ Ð¸Ð¼ÐµÐ»Ð° ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑ 0,433 Ð¼Ð/Ð/ÐºÐÐ° Ð´Ð»Ñ PMMA Ð¸ 1,363 Ð¼Ð/Ð/ÐºÐÐ° Ð´Ð»Ñ PDMS, Ð° ÑÑÐµÑÑÑ Ð¼Ð¾Ð´ÐµÐ»Ñ Ð¸Ð¼ÐµÐ»Ð° ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑ 0,121 Ð¼Ð/Ð/ÐºÐÐ° Ð´Ð»Ñ PMMA Ð¸ 0,910 Ð¼Ð/Ð/ÐºÐÐ° Ð´Ð»Ñ PDMS.
description: The given work is devoted to investigated the physical principles of piezoresistive pressure sensors and their applications in the biomedical industry. Based on literature analysis, differences in the design of measuring devices were examined. Three-dimensional models of sensitive elements were constructed and simulated for pressure ranges of 0â100 kPa. COMSOL Multiphysics automated development tools were used for the calculation. Results showed that the first model had an operating range of 0â37 kPa for PMMA and 0â10 kPa for PDMS, the second model had a range of 0â35 kPa for PMMA and 0â9 kPa for PDMS, and the third model had an operating range of 0â100 kPa for PMMA and 0â16 kPa for PDMS. The sensitivity values for each model were also calculated. The first model had a sensitivity of 0,420 mV/V/kPa for PMMA and 1,322 mV/V/kPa for PDMS, the second model had a sensitivity of 0,433 mV/V/kPa for PMMA and 1,363 mV/V/kPa for PDMS, and the third model had a sensitivity of 0,121 mV/V/kPa for PMMA and 0,910 mV/V/kPa for PDMS.