title: ÐÐ¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ¸ Ð¿Ð»Ð°Ð·Ð¼Ð¾Ð°ÐºÑÐ¸Ð²Ð¸ÑÐ¾Ð²Ð°Ð½Ð½Ð¾Ð³Ð¾ Ð°ÑÐ¾Ð¼Ð½Ð¾-ÑÐ»Ð¾ÐµÐ²Ð¾Ð³Ð¾ Ð¾ÑÐ°Ð¶Ð´ÐµÐ½Ð¸Ñ Ñ Ð¸ÑÑÐ¾ÑÐ½Ð¸ÐºÐ¾Ð¼ Ð¿Ð¾Ð²ÐµÑÑ Ð½Ð¾ÑÑÐ½Ð¾Ð¹ Ð²Ð¾Ð»Ð½Ð¾Ð²Ð¾Ð¹ Ð¿Ð»Ð°Ð·Ð¼Ñ
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: Modeling the installation of plasma-activated atomic layer deposition with a source of surface waves
Creators: name: Ð Ð¾Ð³Ð°ÑÐµÐ², ÐÐ¸ÑÐ¸Ð»Ð»
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2020
Subjects: Ð¿Ð»Ð°Ð·Ð¼Ð°
Ð¿Ð¾Ð²ÐµÑÑ Ð½Ð¾ÑÑÐ½ÑÐµ Ð²Ð¾Ð»Ð½Ñ
Ð°ÑÐ¾Ð¼Ð½Ð¾-ÑÐ»Ð¾ÐµÐ²Ð¾Ðµ Ð¾ÑÐ°Ð¶Ð´ÐµÐ½Ð¸Ðµ (Ð°ÑÐ¾)
ÑÐ¾Ð½ÐºÐ¸Ðµ Ð¿Ð»ÑÐ½ÐºÐ¸
3d-Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ
ÐºÐ¾Ð¼Ð¿ÑÑÑÐµÑÐ½Ð¾Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ
plasma
surface waves
atomic layer deposition (ald)
thin films
3d-modeling
computer modeling

description: ÐÐ°Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¿Ð¾ÑÐ²ÑÑÐµÐ½Ð° ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐºÐµ ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ¸ Ð¿Ð»Ð°Ð·Ð¼Ð¾Ð°ÐºÑÐ¸Ð²Ð¸ÑÐ¾Ð²Ð°Ð½Ð½Ð¾Ð³Ð¾ Ð°ÑÐ¾Ð¼Ð½Ð¾-ÑÐ»Ð¾ÐµÐ²Ð¾Ð³Ð¾ Ð¾ÑÐ°Ð¶Ð´ÐµÐ½Ð¸Ñ Ñ Ð¸ÑÑÐ¾ÑÐ½Ð¸ÐºÐ¾Ð¼ Ð¿Ð¾Ð²ÐµÑÑÐ½Ð¾ÑÑÐ½Ð¾ Ð²Ð¾Ð»Ð½Ð¾Ð²Ð¾Ð¹ Ð¿Ð»Ð°Ð·Ð¼Ñ Ð¸ Ð¿ÑÐ¾ÑÐµÑÑÐ¾Ð² Ð¿ÑÐ¾ÑÐµÐºÐ°ÑÑÐ¸Ñ Ð² ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐµ, Ñ Ð¿Ð¾Ð¼Ð¾ÑÑÑ ÐºÐ¾Ð¼Ð¿ÑÑÑÐµÑÐ½Ð¾Ð³Ð¾ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ. ÐÐ°Ð´Ð°ÑÐ¸, ÑÐµÑÑÐ½Ð½ÑÐµ Ð² ÑÐ¾Ð´Ðµ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ: 1. ÐÐ¾ÑÑÑÐ¾ÐµÐ½Ð¸Ðµ 3D Ð¼Ð¾Ð´ÐµÐ»Ð¸ ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ¸. 2. ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ðµ ÑÐ°ÑÐ¿ÑÐµÐ´ÐµÐ»ÐµÐ½Ð¸Ñ ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÑ Ð¿Ð¾ Ð¿Ð¾Ð²ÐµÑÑÐ½Ð¾ÑÑÐ¸ Ð²Ð½ÐµÑÐ½ÐµÐ³Ð¾ ÐºÐ¾Ð½ÑÑÑÐ° ÑÑÐµÐ½Ð¾Ðº ÑÐµÐ°ÐºÑÐ¾ÑÐ° ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ¸ Ð¸ Ð²ÐµÑÑÐ½ÐµÐ¹ Ð³ÑÐ°Ð½Ð¸ÑÑ Ð¿Ð¾Ð´Ð»Ð¾Ð¶ÐºÐ¾Ð´ÐµÑÐ¶Ð°ÑÐµÐ»Ñ. 3. ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ðµ Ð³Ð°Ð·Ð¾Ð´Ð¸Ð½Ð°Ð¼Ð¸ÐºÐ¸ Ð¿Ð¾ÑÐ¾ÐºÐ¾Ð² Ð² Ð¾Ð±ÑÑÐ¼Ðµ ÑÐµÐ°ÐºÑÐ¸Ð¾Ð½Ð½Ð¾Ð¹ ÐºÐ°Ð¼ÐµÑÑ. ÐÐ»Ñ ÑÐ¾Ð·Ð´Ð°Ð½Ð¸Ñ 3D Ð¼Ð¾Ð´ÐµÐ»Ð¸ Ð±ÑÐ»Ð¾ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¾ ÐÐ SolidWorks. ÐÐ»Ñ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ Ð²Ð½ÑÑÑÐµÐ½Ð½Ð¸Ñ Ð¿ÑÐ¾ÑÐµÑÑÐ¾Ð² Ð±ÑÐ» Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½ Ð¼ÐµÑÐ¾Ð´ ÐºÐ¾Ð¼Ð¿ÑÑÑÐµÑÐ½Ð¾Ð³Ð¾ ÑÐ¸ÑÐ»ÐµÐ½Ð½Ð¾Ð³Ð¾ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ Ñ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¸ÐµÐ¼ ÑÐ¿ÐµÑÐ¸Ð°Ð»Ð¸Ð·Ð¸ÑÐ¾Ð²Ð°Ð½Ð½Ð¾Ð¹ ÐÐ COMSOL Multiphysics. Ð ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐµ Ð¿ÑÐ¾Ð´ÐµÐ»Ð°Ð½Ð½Ð¾Ð¹ ÑÐ°Ð±Ð¾ÑÑ Ð±ÑÐ»Ð° ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ð° ÐºÐ¾Ð¼Ð¿ÑÑÑÐµÑÐ½Ð°Ñ Ð¼Ð¾Ð´ÐµÐ»Ñ ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ¸ ÐÐ¡Ð Ð¸ ÑÐ¾Ð·Ð´Ð°Ð½ Ð¿ÑÐ¾ÑÐ¾ÑÐ¸Ð¿ ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ¸. Ð¢Ð°ÐºÐ¶Ðµ Ð±ÑÐ»Ð¸ Ð¿Ð¾Ð»ÑÑÐµÐ½Ñ ÑÐ²ÐµÐ´ÐµÐ½Ð¸Ñ Ð¾ ÑÐ°ÑÐ¿ÑÐµÐ´ÐµÐ»ÐµÐ½Ð¸Ð¸ Ð³Ð°Ð·Ð¾Ð²ÑÑ Ð¿Ð¾ÑÐ¾Ðº Ð² ÑÐµÐ°ÐºÑÐ¸Ð¾Ð½Ð½Ð¾Ð¼ Ð¾Ð±ÑÑÐ¼Ðµ Ð¸ ÑÐ°ÑÐ¿ÑÐµÐ´ÐµÐ»ÐµÐ½Ð¸Ð¸ ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÑ Ð² ÑÐµÐ°ÐºÑÐ¾ÑÐµ Ð¸ Ð¿Ð¾ Ð¿Ð¾Ð²ÐµÑÑÐ½Ð¾ÑÑÐ¸ Ð¿Ð¾Ð´Ð»Ð¾Ð¶ÐºÐ¾Ð´ÐµÑÐ¶Ð°ÑÐµÐ»Ñ. Ð ÐµÐ·ÑÐ»ÑÑÐ°ÑÑ ÑÑÐ¾Ð¹ ÑÐ°Ð±Ð¾ÑÑ Ð¼Ð¾Ð³ÑÑ Ð±ÑÑÑ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ñ Ð¿ÑÐ¸ Ð´Ð°Ð»ÑÐ½ÐµÐ¹ÑÐµÐ¼ Ð¿ÑÐ¾Ð³Ð½Ð¾Ð·Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ð¸ Ð¿ÑÐ¾ÑÐµÑÑÐ¾Ð², Ð¿ÑÐ¾ÑÐµÐºÐ°ÑÑÐ¸Ñ Ð²Ð¾ Ð²ÑÐµÐ¼Ñ ÑÐºÑÐ¿ÐµÑÐ¸Ð¼ÐµÐ½ÑÐ¾Ð² Ð¸ Ð´Ð»Ñ Ð¼Ð¾Ð´ÐµÑÐ½Ð¸Ð·Ð°ÑÐ¸Ð¸ Ð´Ð°Ð½Ð½Ð¾Ð¹ ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ¸.
description: This work is devoted to the development of a plasma-activated atomic-layer deposition installation with a surface-wave plasma source and processes occurring in the installation using computer simulation. This search set the following goals: 1. Modeling a reliable 3D installation model. 2. The scrutiny of the temperature distribution over the surface of the installation reactor outer wall and the upper boundary of the substrate holder. 3. The scrutiny gasdynamics in the volume of the reaction chamber. SolidWorks was used to create the 3D model. To simulate internal processes, a computer numerical simulation method using the specialized COMSOL Multiphysics program was used. As a result of the work, a computer model of the ALD installation was created, according to which it can be further implemented in the material world. Information was also obtained on the distribution of pressure and gas flow in the reaction volume and the temperature distribution of the heated stage. The results of this work can be used in further forecasting and description of the results of processes carried out at this facility.