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title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Development of a sensitive element of a biaxial capacitive accelerometer made by SOI technology
Creators: name: ÐÐµÐ¼ÐµÐ½ÑÑÐµÐ², ÐÐ¸ÑÐ°Ð¸Ð»
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2020
Subjects: ÐµÐ¼ÐºÐ¾ÑÑÐ½Ð¾Ð¹ Ð´Ð²ÑÑ Ð¾ÑÐ½ÑÐ¹ Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÐµÐºÑÑÐ¾Ð¼ÐµÑ Ð°Ð½Ð¸ÑÐµÑÐºÐ¸Ð¹ Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑ
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Ð¼Ð°ÑÐµÐ¼Ð°ÑÐ¸ÑÐµÑÐºÐ¾Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ
capacitive biaxial microelectromechanical accelerometer
mems
folded beam
cross sensitivity
air damping
opened circuit
mathematical modeling

description: Ð¢ÐµÐ¼Ð° Ð²ÑÐ¿ÑÑÐºÐ½Ð¾Ð¹ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð¾Ð¹ ÑÐ°Ð±Ð¾ÑÑ: âÐ Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ° Ð´Ð²ÑÑÐ¾ÑÐ½Ð¾Ð³Ð¾ ÑÐ¼ÐºÐ¾ÑÑÐ½Ð¾Ð³Ð¾ Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ°, Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð½Ð¾Ð³Ð¾ Ð¿Ð¾ ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸Ð¸ ÐÐÐâ ÐÐ°Ð´Ð°ÑÐ¸, ÐºÐ¾ÑÐ¾ÑÑÐµ ÑÐµÑÐ°Ð»Ð¸ÑÑ Ð² ÑÐ¾Ð´Ðµ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ: 1. ÐÑÐ¾Ð²ÐµÑÑÐ¸ Ð¾Ð±Ð·Ð¾Ñ ÑÑÑÐµÑÑÐ²ÑÑÑÐ¸Ñ Ð»Ð¸ÑÐµÑÐ°ÑÑÑÐ½ÑÑ Ð¸ÑÑÐ¾ÑÐ½Ð¸ÐºÐ¾Ð², Ð¾Ð¿Ð¸ÑÑÐ²Ð°ÑÑÐ¸Ñ Ð´Ð²ÑÑÐ¾ÑÐ½ÑÐµ ÐµÐ¼ÐºÐ¾ÑÑÐ½ÑÐµ ÐÐÐ, Ð¸Ñ Ð²Ð¾Ð·Ð¼Ð¾Ð¶Ð½Ð¾ÑÑÐ¸, ÐºÐ¾Ð½ÑÑÑÑÐºÑÐ¸Ð²Ð½ÑÐµ ÑÐµÑÐµÐ½Ð¸Ñ. 2. ÐÐ¿ÑÐµÐ´ÐµÐ»Ð¸ÑÑ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÑ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ° (Ð§Ð­) Ð´Ð²ÑÑÐ¾ÑÐ½Ð¾Ð³Ð¾ ÐµÐ¼ÐºÐ¾ÑÑÐ½Ð¾Ð³Ð¾ Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÐµÐºÑÑÐ¾Ð¼ÐµÑÐ°Ð½Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ° (ÐÐÐ), Ð¸ÑÑÐ¾Ð´Ñ Ð¸Ð· ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸ÑÐµÑÐºÐ¸Ñ ÑÑÐµÐ±Ð¾Ð²Ð°Ð½Ð¸Ð¹ ÑÐ°Ð±ÑÐ¸ÐºÐ¸-Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð¸ÑÐµÐ»Ñ. 3. ÐÑÐ¾Ð²ÐµÑÑÐ¸ Ð¼Ð°ÑÐµÐ¼Ð°ÑÐ¸ÑÐµÑÐºÐ¾Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ Ð§Ð­ Ð´Ð²ÑÑÐ¾ÑÐ½Ð¾Ð³Ð¾ ÐµÐ¼ÐºÐ¾ÑÑÐ½Ð¾Ð³Ð¾ ÐÐÐ Ñ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¸ÐµÐ¼ Ð¿ÑÐ¾Ð³ÑÐ°Ð¼Ð¼Ð½ÑÑ Ð¿Ð»Ð°ÑÑÐ¾ÑÐ¼ MATLAB Ð¸ COMSOL. 4. ÐÑÐ¾Ð²ÐµÑÑÐ¸ Ð°Ð½Ð°Ð»Ð¸Ð· Ð¿Ð¾Ð»ÑÑÐµÐ½Ð½ÑÑ ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐ¾Ð² Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ Ñ ÑÑÑÐµÑÑÐ²ÑÑÑÐ¸Ð¼Ð¸ Ð°Ð½Ð°Ð»Ð¾Ð³Ð°Ð¼Ð¸. Ð ÑÐ¾Ð´Ðµ ÑÐ°Ð±Ð¾ÑÑ Ð±ÑÐ»Ð¸ Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½Ñ ÑÐ°ÑÑÐµÑÑ, Ð¿Ð¾ÐºÐ°Ð·ÑÐ²Ð°ÑÑÐ¸Ðµ Ð½Ð°Ð³Ð»ÑÐ´Ð½Ð¾, ÐºÐ°ÐºÐ¸Ð¼ Ð¾Ð±ÑÐ°Ð·Ð¾Ð¼ ÐºÐ¾Ð½ÑÑÑÑÐºÑÐ¸Ð¾Ð½Ð½ÑÐµ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÑ ÑÐµÐ¼ Ð¸Ð»Ð¸ Ð¸Ð½ÑÐ¼ Ð¾Ð±ÑÐ°Ð·Ð¾Ð¼ Ð²Ð»Ð¸ÑÑÑ Ð½Ð° ÑÐ°Ð±Ð¾ÑÑ Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ°. ÐÐ½Ð°Ð»Ð¸Ð· Ð¿ÑÐ¾Ð²Ð¾Ð´Ð¸Ð»ÑÑ Ð¼ÐµÑÐ¾Ð´Ð¾Ð¼ Ð¼Ð°ÑÐµÐ¼Ð°ÑÐ¸ÑÐµÑÐºÐ¾Ð³Ð¾ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ Ñ Ð¿Ð¾Ð¼Ð¾ÑÑÑ Ð¿ÑÐ¾Ð³ÑÐ°Ð¼Ð¼Ð½Ð¾Ð³Ð¾ Ð¾Ð±ÐµÑÐ¿ÐµÑÐµÐ½Ð¸Ñ MATLAB &amp; Simulink, COMSOL Multiphisics Ð¸ Origin. Ð¡ÑÐ°Ð²Ð½ÐµÐ½Ð¸Ðµ ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐ¾Ð² Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ Ð² MATLAB Ð¸ COMSOL Ð¿Ð¾ÐºÐ°Ð·Ð°Ð»Ð¾, ÑÑÐ¾ ÑÐ°Ð·Ð»Ð¸ÑÐ¸Ñ Ð¼ÐµÐ¶Ð´Ñ Ð´Ð²ÑÐ¼Ñ ÑÐ°ÑÑÐµÑÐ°Ð¼Ð¸ Ð½Ðµ Ð¿ÑÐµÐ²ÑÑÐ°ÑÑ 5 %, ÑÑÐ¾ Ð³Ð¾Ð²Ð¾ÑÐ¸Ñ Ð¾ Ð²ÑÑÐ¾ÐºÐ¾Ð¹ ÑÐ¾ÑÐ½Ð¾ÑÑÐ¸ Ð¼Ð°ÑÐµÐ¼Ð°ÑÐ¸ÑÐµÑÐºÐ¾Ð³Ð¾ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ. Ð¢Ð°ÐºÐ¶Ðµ, Ð¿ÑÐ¾Ð²ÐµÐ´ÑÐ½Ð½ÑÐ¹ ÑÑÐ°Ð²Ð½Ð¸ÑÐµÐ»ÑÐ½ÑÐ¹ Ð°Ð½Ð°Ð»Ð¸Ð· ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ð½Ð¾Ð³Ð¾ Ð§Ð­ Ð´Ð²ÑÑÐ¾ÑÐ½Ð¾Ð³Ð¾ ÐµÐ¼ÐºÐ¾ÑÑÐ½Ð¾Ð³Ð¾ ÐÐÐ Ñ ÑÑÑÐµÑÑÐ²ÑÑÑÐ¸Ð¼Ð¸ Ð°Ð½Ð°Ð»Ð¾Ð³Ð°Ð¼Ð¸, Ð¿Ð¾ÐºÐ°Ð·Ð°Ð», ÑÑÐ¾ ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ð½Ð°Ñ ÐºÐ¾Ð½ÑÑÑÑÐºÑÐ¸Ñ Ð¸Ð¼ÐµÐµÑ Ð½Ð°Ð¸Ð»ÑÑÑÑÑ Ð¼ÐµÑÐ°Ð½Ð¸ÑÐµÑÐºÑÑ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑ, Ð½Ð°Ð¸Ð¼ÐµÐ½ÑÑÐ¸Ðµ ÑÐ°Ð·Ð¼ÐµÑÑ, Ð° ÑÐ°ÐºÐ¶Ðµ Ð½Ð°Ð¸Ð±Ð¾Ð»ÑÑÐ¸Ð¹ Ð´Ð¸Ð°Ð¿Ð°Ð·Ð¾Ð½ ÑÐ°Ð±Ð¾ÑÑ.
description: Theme of the graduate qualification work: âDevelopment of a sensitive element of a biaxial capacitive accelerometer made using the SOI technologyâ Tasks that were solved during the study: 1. To review the existing literature sources describing biaxial capacitive microelectromechanical accelerometer (MMA), their capabilities, design solutions. 2. Determine the parameters of the sensitive element (SE) of the biaxial capacitive MMA, based on the technological requirements. 3. Carry out mathematical modeling of the SE of a biaxial capacitive MMA using the MATLAB and COMSOL software platforms. 4. Analyze the obtained simulation results with existing analogues. In this work calculations were made that clearly showed how the structural parameters in one way or another affect the operation of the accelerometer. The analysis was carried out using mathematical modeling using the software MATLAB &amp; Simulink, COMSOL Multiphisics and OriginPro Comparison of the simulation results in MATLAB and COMSOL showed that the differences between the two calculations do not exceed 5%, which indicates a high accuracy of mathematical modeling. Also, a comparative analysis of the developed SE of a biaxial capacitive MMA with existing analogs showed that the developed design has the best mechanical sensitivity, smallest size, and also the largest range of operation.