title: ÐÐ¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ ÑÐ°Ð·Ð²Ð¸ÑÐ¾Ð¹ Ð¿Ð¾Ð²ÐµÑÑ Ð½Ð¾ÑÑÐ¸ Ð¿Ð¾Ð»ÐµÐ²ÑÑ ÑÐ¼Ð¸ÑÑÐµÑÐ¾Ð² Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ðµ ÐÐ¡Ð - Ð¿ÑÐ¾ÑÐ¸Ð»Ð¾Ð³ÑÐ°Ð¼Ð¼
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: Simulation of the developed surface of field emitters based on AFM - profilograms
Creators: name: ÐÑÑÐµÐ¼ÑÑÐº, ÐÐ»ÑÐ½Ð°
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2019
Subjects: Ð¿Ð¾Ð»ÐµÐ²Ð°Ñ ÑÐ¼Ð¸ÑÑÐ¸Ñ
Ð°Ð²ÑÐ¾ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½Ð°Ñ ÑÐ¼Ð¸ÑÑÐ¸Ñ
Ð¿Ð¾Ð»ÐµÐ²Ð¾Ð¹ ÑÐ¼Ð¸ÑÑÐµÑ
ÐºÐ°ÑÐ¾Ð´
ÑÐ¼Ð¸ÑÑÐ¸Ð¾Ð½Ð½ÑÐµ Ñ Ð°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ¸
Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ
ÐºÐ°ÑÐ±Ð¸Ð´ ÐºÑÐµÐ¼Ð½Ð¸Ñ
ÐÐ¡Ð â Ð¿ÑÐ¾ÑÐ¸Ð»Ð¾Ð³ÑÐ°Ð¼Ð¼Ð°
field emission
autoelectronic emission
field emitter
cathode
emission characteristics
modeling
Comsol Multiphysics
silicon carbide
AFM - profilogram

description: Ð ÑÐ°Ð±Ð¾ÑÐµ ÑÐµÐ°Ð»Ð¸Ð·ÑÐµÑÑÑ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ Ð¿Ð¾Ð²ÐµÑÑÐ½Ð¾ÑÑÐ¸ Ð¿Ð¾Ð»ÐµÐ²Ð¾Ð³Ð¾ ÑÐ¼Ð¸ÑÑÐµÑÐ° Ð¸Ð· SiC Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ðµ Ð´Ð°Ð½Ð½ÑÑ Ð°ÑÐ¾Ð¼Ð½Ð¾-ÑÐ¸Ð»Ð¾Ð²Ð¾Ð¹ Ð¼Ð¸ÐºÑÐ¾ÑÐºÐ¾Ð¿Ð¸Ð¸ (ÐÐ¡Ð) Ð² Ð¿ÑÐ¾Ð³ÑÐ°Ð¼Ð¼Ð½Ð¾Ð¼ Ð¿Ð°ÐºÐµÑÐµ COMSOL Multiphysics. Ð ÑÐ²ÑÐ·Ð¸ Ñ ÑÑÐ¸Ð¼ Ð² Ð´Ð°Ð½Ð½Ð¾Ð¹ ÑÐ°Ð±Ð¾ÑÐµ ÑÐ°Ð·ÑÐ°Ð±Ð°ÑÑÐ²Ð°ÐµÑÑÑ Ð¼ÐµÑÐ¾Ð´Ð¸ÐºÐ° Ð¿Ð¾ÑÑÑÐ¾ÐµÐ½Ð¸Ñ Ð¼Ð¾Ð´ÐµÐ»Ð¸ Ð¿Ð¾Ð»ÐµÐ²Ð¾Ð³Ð¾ ÐºÐ°ÑÐ¾Ð´Ð° Ñ Ð¿Ð¾Ð¼Ð¾ÑÑÑ Ð°Ð¿Ð¿Ð°ÑÐ°ÑÐ½Ð¾Ð³Ð¾ Ð¾Ð±ÐµÑÐ¿ÐµÑÐµÐ½Ð¸Ñ Ð¸ Ð½Ð°Ð±Ð¾ÑÐ° Ð¿ÑÐ¾Ð³ÑÐ°Ð¼Ð¼Ð½ÑÑ ÑÑÐµÐ´ÑÑÐ². ÐÐ»Ñ ÑÑÐ¾Ð³Ð¾ Ð¿Ð¾Ð»ÑÑÐµÐ½Ð° ÐÐ¡Ð â Ð¿ÑÐ¾ÑÐ¸Ð»Ð¾Ð³ÑÐ°Ð¼Ð¼Ð° ÐºÐ°ÑÐ¾Ð´Ð°. Ð Ð°ÑÑÐ¼Ð¾ÑÑÐµÐ½Ñ Ð¼ÐµÑÑÐ¾Ð»Ð¾Ð³Ð¸ÑÐµÑÐºÐ¸Ðµ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ¸ ÐÐ¡Ð. Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ð° Ð¿ÑÐ¾ÑÐµÐ´ÑÑÐ° Ð·Ð°Ð³ÑÑÐ·ÐºÐ¸ ÐÐ¡Ð - Ð¿ÑÐ¾ÑÐ¸Ð»Ð¾Ð³ÑÐ°Ð¼Ð¼Ñ Ð¿Ð¾Ð»ÐµÐ²Ð¾Ð³Ð¾ ÑÐ¼Ð¸ÑÑÐµÑÐ° Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ðµ SiC Ð² ÑÑÐµÐ´Ñ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ Ð¸ Ð¿Ð¾ÑÑÑÐ¾ÐµÐ½Ð° ÑÐ¾Ð¾ÑÐ²ÐµÑÑÑÐ²ÑÑÑÐ°Ñ ÐµÐ¹ Ð¼Ð¾Ð´ÐµÐ»Ñ Ð¿Ð¾Ð²ÐµÑÑÐ½Ð¾ÑÑÐ¸. ÐÐ»Ñ Ð¼Ð¾Ð´ÐµÐ»Ð¸ Ð¿Ð¾Ð²ÐµÑÑÐ½Ð¾ÑÑÐ¸ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¾ ÑÐ°ÑÐ¿ÑÐµÐ´ÐµÐ»ÐµÐ½Ð¸Ðµ Ð½Ð°Ð¿ÑÑÐ¶ÑÐ½Ð½Ð¾ÑÑÐ¸ Ð¿Ð¾Ð»Ñ Ð¸ Ð²ÑÑÐ²Ð»ÐµÐ½Ñ ÐµÐ³Ð¾ Ð¾ÑÐ¾Ð±ÐµÐ½Ð½Ð¾ÑÑÐ¸. Ð¢Ð°ÐºÐ¶Ðµ Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½ Ð°Ð½Ð°Ð»Ð¸Ð· ÑÐµÑÐ¾ÑÐ½Ð¾Ð¹ ÑÑÐ¾Ð´Ð¸Ð¼Ð¾ÑÑÐ¸ Ð¼Ð¾Ð´ÐµÐ»Ð¸. Ð Ð·Ð°ÐºÐ»ÑÑÐµÐ½Ð¸Ð¸ Ð¿ÑÐµÐ´ÑÑÐ°Ð²Ð»ÐµÐ½Ñ Ð¾ÑÐ½Ð¾Ð²Ð½ÑÐµ ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÑ ÑÐ°Ð±Ð¾ÑÑ Ð¸ Ð¿Ð¾ÐºÐ°Ð·Ð°Ð½Ñ Ð¿ÐµÑÑÐ¿ÐµÐºÑÐ¸Ð²Ñ Ð´Ð°Ð»ÑÐ½ÐµÐ¹ÑÐµÐ³Ð¾ Ð¸Ñ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¸Ñ.
description: The paper implements a simulation of the surface of a field emitter made of SiC based on atomic force microscopy (AFM) data in the COMSOL Multiphysics software package. In this regard, this paper develops a method for constructing a field cathode model using hardware and a set of software tools. For this, an AFM profilogram of the cathode was obtained. Metrological characteristics of AFM are considered. A procedure has been developed for loading the AFM profilogram of a field emitter based on SiC into the modeling environment and the corresponding surface model has been constructed. For the surface model, the distribution of the field was investigated and its features were revealed. The analysis of the mesh convergence of the model was also carried out. In the conclusion presents the main results of the work and shows the prospects for their further use.