title: Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° ÑÐ¸ÑÑÐµÐ¼Ñ Ð°Ð²ÑÐ¾Ð¼Ð°ÑÐ¸Ð·Ð¸ÑÐ¾Ð²Ð°Ð½Ð½Ð¾Ð³Ð¾ Ð¿Ð¾Ð¸ÑÐºÐ° Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² ÑÐ¾ÑÑÐ° ITO-Ð¿Ð¾ÐºÑÑÑÐ¸Ð¹ Ð½Ð° ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐµ Ð¼Ð°Ð³Ð½ÐµÑÑÐ¾Ð½Ð½Ð¾Ð³Ð¾ ÑÐ°ÑÐ¿ÑÐ»ÐµÐ½Ð¸Ñ
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Development of a system for automated search for growth parameters of ITO coatings on a magnetron sputtering installation
Creators: name: ÐÐµÐ»ÑÐ½Ð¾Ð², ÐÐ»ÑÑ
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2023
Subjects: Ð¾ÐºÑÐ¸Ð´ Ð¸Ð½Ð´Ð¸Ñ-Ð¾Ð»Ð¾Ð²Ð°
Ð¼Ð°Ð³Ð½ÐµÑÑÐ¾Ð½Ð½Ð¾Ðµ ÑÐ°ÑÐ¿ÑÐ»ÐµÐ½Ð¸Ðµ
Ð¼Ð¸ÐºÑÐ¾ÑÐ¸ÑÑÐµÐ¼Ð½Ð°Ñ ÑÐµÑ Ð½Ð¸ÐºÐ°
Ð¼Ð°ÑÐ¸Ð½Ð½Ð¾Ðµ Ð¾Ð±ÑÑÐµÐ½Ð¸Ðµ
ÐÐ°Ð¹ÐµÑÐ¾Ð²ÑÐºÐ°Ñ Ð¾Ð¿ÑÐ¸Ð¼Ð¸Ð·Ð°ÑÐ¸Ñ
indium tin oxide
magnetron sputtering
microsystem technology
machine learning
Bayesian optimization

description: Ð¢ÐµÐ¼Ð° Ð²ÑÐ¿ÑÑÐºÐ½Ð¾Ð¹ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð¾Ð¹ ÑÐ°Ð±Ð¾ÑÑ: Â«Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° ÑÐ¸ÑÑÐµÐ¼Ñ Ð°Ð²ÑÐ¾Ð¼Ð°ÑÐ¸Ð·Ð¸ÑÐ¾Ð²Ð°Ð½Ð½Ð¾Ð³Ð¾ Ð¿Ð¾Ð¸ÑÐºÐ° Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² ÑÐ¾ÑÑÐ° ITO-Ð¿Ð¾ÐºÑÑÑÐ¸Ð¹ Ð½Ð° ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐµ Ð¼Ð°Ð³Ð½ÐµÑÑÐ¾Ð½Ð½Ð¾Ð³Ð¾ ÑÐ°ÑÐ¿ÑÐ»ÐµÐ½Ð¸ÑÂ». Ð Ð´Ð°Ð½Ð½Ð¾Ð¹ ÑÐ°Ð±Ð¾ÑÐµ Ð±ÑÐ» ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½ Ð¿Ð¾Ð´ÑÐ¾Ð´ Ðº Ð°Ð²ÑÐ¾Ð¼Ð°ÑÐ¸Ð·Ð¸ÑÐ¾Ð²Ð°Ð½Ð½Ð¾Ð¼Ñ Ð¿Ð¾Ð¸ÑÐºÑ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² ÑÐ¾ÑÑÐ° Ð¿Ð¾ÐºÑÑÑÐ¸Ð¹ Ð¾ÐºÑÐ¸Ð´ Ð¸Ð½Ð´Ð¸Ð¹-Ð¾Ð»Ð¾Ð²Ð° (ITO) Ð½Ð° ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐµ Ð¼Ð°Ð³Ð½ÐµÑÑÐ¾Ð½Ð½Ð¾Ð³Ð¾ Ñ Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸ÐµÐ¼ Ð¼ÐµÑÐ¾Ð´Ð¾Ð² ÐÐ°Ð¹ÐµÑÐ¾Ð²ÑÐºÐ¾Ð¹ Ð¾Ð¿ÑÐ¸Ð¼Ð¸Ð·Ð°ÑÐ¸Ð¸. Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½ ÐºÐ¾Ð¼Ð¿Ð»ÐµÐºÑ Ð¿ÑÐ¾Ð³ÑÐ°Ð¼Ð¼ Ð´Ð»Ñ ÑÐ´Ð¾Ð±Ð½Ð¾Ð³Ð¾ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¸Ñ Ð¼Ð¾Ð´ÐµÐ»Ð¸ Ð¼Ð°ÑÐ¸Ð½Ð½Ð¾Ð³Ð¾ Ð¾Ð±ÑÑÐµÐ½Ð¸Ñ Ð¾Ð±ÑÑÐ½ÑÐ¼Ð¸ Ð¸Ð½Ð¶ÐµÐ½ÐµÑÐ°Ð¼Ð¸. Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ð° Ð¸ ÑÐ¾Ð·Ð´Ð°Ð½Ð° ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ° ÑÐµÐ°ÐºÑÐ¸Ð²Ð½Ð¾Ð³Ð¾ Ð¼Ð°Ð³Ð½ÐµÑÑÐ¾Ð½Ð½Ð¾Ð³Ð¾ ÑÐ°ÑÐ¿ÑÐ»ÐµÐ½Ð¸Ñ, Ð¿Ð¾Ð·Ð²Ð¾Ð»ÑÑÑÐ°Ñ Ð½Ð°Ð¿ÑÐ»ÑÑÑ Ð¿Ð»ÐµÐ½ÐºÐ¸ ITO. ÐÑÐ¾Ð²ÐµÐ´ÐµÐ½Ñ ÑÐµÑÐ¸Ð¸ ÑÐºÑÐ¿ÐµÑÐ¸Ð¼ÐµÐ½ÑÐ¾Ð², Ð¿Ð¾Ð´ÑÐ²ÐµÑÐ¶Ð´Ð°ÑÑÐ¸Ðµ Ð¿ÑÐ¸Ð¼ÐµÐ½Ð¸Ð¼Ð¾ÑÑÑ Ð´Ð°Ð½Ð½Ð¾Ð³Ð¾ Ð¿Ð¾Ð´ÑÐ¾Ð´Ð° Ðº Ð¾Ð¿ÑÐ¸Ð¼Ð¸Ð·Ð¸ÑÐ¾Ð²Ð°Ð½Ð½Ð¾Ð¼Ñ ÑÐ¾ÑÑÑ Ð¿Ð¾ÐºÑÑÑÐ¸Ð¹. Ð¦ÐµÐ»ÑÑ ÑÐ°Ð±Ð¾ÑÑ ÑÐ²Ð»ÑÐ»Ð°ÑÑ ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° ÑÐ¸ÑÑÐµÐ¼Ñ Ð°Ð²ÑÐ¾Ð¼Ð°ÑÐ¸Ð·Ð¸ÑÐ¾Ð²Ð°Ð½Ð½Ð¾Ð³Ð¾ Ð¿Ð¾Ð¸ÑÐºÐ° Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² ÑÐ¾ÑÑÐ° ITO-Ð¿Ð¾ÐºÑÑÑÐ¸Ð¹ Ð½Ð° ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐµ Ð¼Ð°Ð³Ð½ÐµÑÑÐ¾Ð½Ð½Ð¾Ð³Ð¾ ÑÐ°ÑÐ¿ÑÐ»ÐµÐ½Ð¸Ñ.
description: The topic of the masterâs thesis: "Development of a system for automated search for growth parameters of ITO coatings on a magnetron sputtering installation". In this paper, an approach was developed to the automated search for the growth parameters of indium tin oxide (ITO) coatings on a magnetron installation using Bayesian optimization methods. The programs have been developed for convenient use of the machine learning model by ordinary engineers. A reactive magnetron sputtering unit has been developed and created, which allows ITO films to be sprayed. A series of experiments have been carried out confirming the applicability of this approach to optimized coating growth. The aim of the work was to develop a system for automated search for growth parameters of ITO coatings on a magnetron sputtering unit.