title: ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ðµ Ð¿ÑÐ¸Ð²Ð¾Ð´Ð¸Ð¼ÑÑ Ð² Ð´ÐµÐ¹ÑÑÐ²Ð¸Ðµ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸ÐµÐ¼ Ð¼Ð½Ð¾Ð³Ð¾ÑÐ»Ð¾Ð¹Ð½ÑÑ Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÑÐ¸Ð´Ð½ÑÑ ÑÑÑÑÐ¾Ð¹ÑÑÐ², Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð½ÑÑ Ñ Ð¿Ð¾Ð¼Ð¾ÑÑÑ Ð»Ð¸ÑÐ¾Ð³ÑÐ°ÑÐ¸Ð¸ Ð¸ 3Ð Ð¿ÐµÑÐ°ÑÐ¸
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: The study of pressure actuated microfluidic devices fabricated using photolithography and 3D printing
Creators: name: ÐÐ°ÑÐ¼Ð¾Ð², ÐÐ²Ð³ÐµÐ½Ð¸Ð¹
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2021
Subjects: Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÑÐ¸Ð´Ð¸ÐºÐ°
Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÑÐ¸Ð´Ð½ÑÐµ ÑÐ¸Ð¿Ñ
ÑÐ¾ÑÐ¾Ð»Ð¸ÑÐ¾ÑÐ°ÑÐ¸Ñ
3Ð Ð¿ÐµÑÐ°ÑÑ
microfluidics
microfluidic microchips
photolithography
3D printing

description: ÐÐ°Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¿Ð¾ÑÐ²ÑÑÐµÐ½Ð° ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐºÐµ Ð¼ÐµÑÐ¾Ð´Ð° Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð¸Ñ Ð¼Ð½Ð¾Ð³Ð¾ÑÐ»Ð¾Ð¹Ð½ÑÑ Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÑÐ¸Ð´Ð½ÑÑ ÑÑÑÑÐ¾Ð¹ÑÑÐ² Ð¸ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ Ð¸Ñ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸Ðº. ÐÐ°Ð´Ð°ÑÐ¸, ÐºÐ¾ÑÐ¾ÑÑÐµ ÑÐµÑÐ°Ð»Ð¸ÑÑ Ð² ÑÐ¾Ð´Ðµ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ: 1. Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° ÐºÐ¾Ð½ÑÑÑÑÐºÑÐ¸Ð¸ Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÑÐ¸Ð´Ð½ÑÑ ÑÐ¸Ð¿Ð¾Ð² Ñ Ð¸Ð½ÑÐµÐ³ÑÐ¸ÑÐ¾Ð²Ð°Ð½Ð½ÑÐ¼Ð¸ Ð¿Ð½ÐµÐ²Ð¼Ð°ÑÐ¸ÑÐµÑÐºÐ¸Ð¼Ð¸ ÐºÐ»Ð°Ð¿Ð°Ð½Ð°Ð¼Ð¸ Ð¸ Ð½Ð°ÑÐ¾ÑÐ°Ð¼Ð¸. 2. Ð¡Ð¾Ð·Ð´Ð°Ð½Ð¸Ðµ Ð¼Ð¾Ð´ÐµÐ»ÐµÐ¹ Ð¼Ð¸ÐºÑÐ¾ÑÐ¸Ð¿Ð¾Ð² Ð´Ð»Ñ Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð¸Ñ Ñ Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸ÐµÐ¼ Ð»Ð¸ÑÐ¾Ð³ÑÐ°ÑÐ¸Ð¸ Ð¸ 3Ð Ð¿ÐµÑÐ°ÑÐ¸. 3. ÐÐ·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð¸Ðµ ÑÑÑÑÐ¾Ð¹ÑÑÐ² Ð¸Ð· ÐÐÐÐ¡ Ñ Ð¿Ð¾Ð¼Ð¾ÑÑÑ ÐºÑÐµÐ¼Ð½Ð¸ÐµÐ²ÑÑ Ð¼Ð°ÑÑÐµÑ ÑÐ¾ÑÐ¼. 4. ÐÐ·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð¸Ðµ ÑÑÑÑÐ¾Ð¹ÑÑÐ² Ñ Ð¿Ð¾Ð¼Ð¾ÑÑÑ Ð¼Ð°ÑÑÐµÑ ÑÐ¾ÑÐ¼, Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð½ÑÑ Ð¼ÐµÑÐ¾Ð´Ð¾Ð¼ 3Ð Ð¿ÐµÑÐ°ÑÐ¸. 5. ÐÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð¸Ðµ ÑÐºÑÐ¿ÐµÑÐ¸Ð¼ÐµÐ½ÑÐ°Ð»ÑÐ½ÑÑ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ð¹ ÑÐ²Ð¾Ð¹ÑÑÐ² Ð¿Ð¾Ð»ÑÑÐµÐ½Ð½ÑÑ ÑÑÑÑÐ¾Ð¹ÑÑÐ². Ð Ð°Ð±Ð¾ÑÐ° Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð° Ð½Ð° Ð±Ð°Ð·Ðµ Ð¡ÐÐ±ÐÐ£, Ð³Ð´Ðµ Ð¿ÑÐ¾Ð²Ð¾Ð´Ð¸Ð»Ð°ÑÑ Ð·Ð½Ð°ÑÐ¸ÑÐµÐ»ÑÐ½Ð°Ñ ÑÐ°ÑÑÑ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ. ÐÑÐ»Ð¸ ÑÐ¿ÑÐ¾ÐµÐºÑÐ¸ÑÐ¾Ð²Ð°Ð½Ñ Ð¸ Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ñ Ð´Ð²Ð° Ð²Ð¸Ð´Ð° ÑÑÑÑÐ¾Ð¹ÑÑÐ² Ñ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¸ÐµÐ¼ ÑÐ°Ð·Ð½ÑÑ ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸Ð¹ Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð¸Ñ. Ð ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐµ Ð±ÑÐ»Ð¸ Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ñ ÑÑÑÑÐ¾Ð¹ÑÑÐ²Ð¾ Ð² Ð²Ð¸Ð´Ðµ ÑÐ¸ÑÑÐµÐ¼Ñ Ð¸Ð· ÑÑÐµÑ ÐºÐ»Ð°Ð¿Ð°Ð½Ð¾Ð², Ð·Ð°ÐºÑÑÐ²Ð°ÑÑÐ¸ÑÑÑ Ð¿Ð¾Ð´ Ð´ÐµÐ¹ÑÑÐ²Ð¸ÐµÐ¼ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ Ð¸ ÑÐ¸ÑÑÐµÐ¼Ð° Ð¸Ð· Ð½Ð°ÑÐ¾ÑÐ° Ð¸ ÐºÐ½Ð¾Ð¿ÐºÐ¸, Ð¿ÑÐ¸ Ð½Ð°Ð¶Ð°ÑÐ¸Ð¸ Ð½Ð° ÐºÐ¾ÑÐ¾ÑÑÑ Ð½Ð°ÑÐ¾Ñ Ð¿ÑÐ¾ÐºÐ°ÑÐ¸Ð²Ð°ÐµÑ Ð¶Ð¸Ð´ÐºÐ¾ÑÑÑ. ÐÑÐ»Ð¸ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ñ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ Ð·Ð°ÐºÑÑÑÐ¸Ñ ÐºÐ»Ð°Ð¿Ð°Ð½Ð¾Ð² Ð¸ Ð¾Ð±ÑÐµÐ¼ Ð¿ÑÐ¾ÐºÐ°ÑÐ¸Ð²Ð°ÐµÐ¼ÑÑ Ð½Ð°ÑÐ¾ÑÐ¾Ð¼ Ð¶Ð¸Ð´ÐºÐ¾ÑÑÐµÐ¹.
description: The given work is devoted to fabrication of multilayered microfluidic devices and investigation of their properties. The research set following goals: 1. The concept development of the microfluidic chips with integrated pumps and valves. 2. The design creation of microchips with fabrication using photolithography and 3D printing. 3. The devices fabrication from PDMS using silicon master molds. 4. The devices fabrication using 3D printed master molds. 5. Conducting the research of fabricated devices properties. The work was fulfilled on the premises of SPbAU, where the significant part took place. Two different types of devices were produced using different fabrication technologies. The study resulted in fabrication of the device with three valves and the device with the button actuated pump. The valve closing pressures and pump liquid pumping volumes were investigated.