title: Ð¢ÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÐ½ÑÐµ ÑÐµÐ½ÑÐ¾ÑÑ Ð½Ð° Ð±Ð°Ð·Ðµ Ð¼Ð½Ð¾Ð³Ð¾ÑÐ»Ð¾Ð¹Ð½ÑÑ ÑÐ¾Ð½ÐºÐ¾Ð¿Ð»ÑÐ½Ð¾ÑÐ½ÑÑ Ð½Ð°Ð½Ð¾ÑÑÑÑÐºÑÑÑ
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: Multilayer thin films as temperature sensors
Creators: name: ÐÐ°Ð»Ð¸Ð½Ð¾Ð²ÑÐºÐ¸Ð¹, ÐÐ³Ð¾Ñ
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2020
Subjects: Ð¼Ð½Ð¾Ð³Ð¾ÑÐ»Ð¾Ð¹Ð½ÑÐµ ÑÐ¾Ð½ÐºÐ¾Ð¿Ð»ÑÐ½Ð¾ÑÐ½ÑÐµ Ð½Ð°Ð½Ð¾ÑÑÑÑÐºÑÑÑÑ
ÑÐ´ÐµÐ»ÑÐ½Ð¾Ðµ ÑÐ¾Ð¿ÑÐ¾ÑÐ¸Ð²Ð»ÐµÐ½Ð¸Ðµ
ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÐ½ÑÐ¹ ÐºÐ¾ÑÑÑÐ¸ÑÐ¸ÐµÐ½Ñ ÑÐ¾Ð¿ÑÐ¾ÑÐ¸Ð²Ð»ÐµÐ½Ð¸Ñ
Ð¿Ð¾Ð²ÐµÑÑ Ð½Ð¾ÑÑÐ½Ð¾Ðµ ÑÐ°ÑÑÐµÑÐ½Ð¸Ðµ
Ð·ÐµÑÐ½Ð¾Ð³ÑÐ°Ð½Ð¸ÑÐ½Ð¾Ðµ ÑÐ°ÑÑÐµÑÐ½Ð¸Ðµ
Ð¼Ð°Ð³Ð½ÐµÑÑÐ¾Ð½Ð½Ð¾Ðµ ÑÐ°ÑÐ¿ÑÐ»ÐµÐ½Ð¸Ðµ
Ð´Ð»Ð¸Ð½Ð½Ð° ÑÐ²Ð¾Ð±Ð¾Ð´Ð½Ð¾Ð³Ð¾ Ð¿ÑÐ¾-Ð±ÐµÐ³Ð°
Ð²ÑÑÐ¾ÐºÐ¾ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÐ½Ð°Ñ ÑÑÐ°Ð±Ð¸Ð»ÑÐ½Ð¾ÑÑÑ
multilayer thin films
electrical resistivity
temperature coefficient of resistivity
surface scattering
grain boundaries scattering
magnetron sputtering
mean free path
high-temperature stability

description: ÐÐ°Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¿Ð¾ÑÐ²ÑÑÐµÐ½Ð° ÑÐµÐ¾ÑÐµÑÐ¸ÑÐµÑÐºÐ¾Ð¼Ñ Ð¾Ð¿Ð¸ÑÐ°Ð½Ð¸Ñ Ð¼Ð½Ð¾Ð³Ð¾ÑÐ»Ð¾Ð¹Ð½ÑÑ ÑÐ¾Ð½ÐºÐ¾-Ð¿Ð»ÑÐ½Ð¾ÑÐ½ÑÑ Ð½Ð°Ð½Ð¾ÑÑÑÑÐºÑÑÑ Ð¸ Ð¸Ñ Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ñ Ð² ÐºÐ°ÑÐµÑÑÐ²Ðµ Ð´Ð°ÑÑÐ¸ÐºÐ¾Ð² ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÑ. ÐÐ¿Ð¸ÑÐ°Ð½Ñ Ð¾ÑÐ½Ð¾Ð²Ð½ÑÐµ ÑÐµÐ¾ÑÐµÑÐ¸ÑÐµÑÐºÐ¸Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ ÑÐ´ÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ¾Ð¿ÑÐ¾ÑÐ¸Ð²Ð»ÐµÐ½Ð¸Ñ Ð¸ ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÐ½Ð¾Ð³Ð¾ ÐºÐ¾ÑÑÑÐ¸ÑÐ¸ÐµÐ½ÑÐ° ÑÐ¾Ð¿ÑÐ¾ÑÐ¸Ð²Ð»ÐµÐ½Ð¸Ñ Ð¼Ð½Ð¾Ð³Ð¾ÑÐ»Ð¾Ð¹Ð½ÑÑ Ð½Ð°Ð½Ð¾ÑÑÑÑÐºÑÑÑ, ÑÐ°ÑÑÐ¼Ð¾ÑÑÐµÐ½Ñ Ð¼ÐµÑÐ¾Ð´Ñ Ð¸Ñ Ð¿Ð¾Ð»ÑÑÐµÐ½Ð¸Ñ, Ð² ÑÐ°ÑÑÐ½Ð¾ÑÑÐ¸ Ñ Ð¿Ð¾Ð¼Ð¾ÑÑÑ Ð¼Ð°Ð³Ð½ÐµÑÑÐ¾Ð½Ð½Ð¾Ð³Ð¾ ÑÐ°ÑÐ¿ÑÐ»ÐµÐ½Ð¸Ñ. Ð ÑÐ¾Ð´Ðµ ÑÐ°ÑÑÑÐ¶Ð´ÐµÐ½Ð¸Ð¹ Ð±ÑÐ»Ð¸ Ð¾Ð¿Ð¸ÑÐ°Ð½Ñ Ð¿ÑÐ¾ÑÐµÑÑÑ, Ð²Ð»Ð¸ÑÑÑÐ¸Ðµ Ð½Ð° Ð¼Ð°ÐºÑÐ¾ÑÐºÐ¾Ð¿Ð¸ÑÐµÑÐºÐ¸Ðµ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÑ ÑÐ¾Ð½ÐºÐ¸Ñ Ð¿Ð»ÑÐ½Ð¾Ðº: Ð¿Ð¾Ð²ÐµÑÑÐ½Ð¾ÑÑÐ½Ð¾Ðµ Ð¸ Ð·ÐµÑÐ½Ð¾Ð³ÑÐ°Ð½Ð¸ÑÐ½Ð¾Ðµ ÑÐ°ÑÑÐµÑÐ½Ð¸Ðµ ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð¾Ð², ÑÐ¼ÐµÐ½ÑÑÐµÐ½Ð¸Ðµ Ð´Ð»Ð¸Ð½Ð½Ñ ÑÐ²Ð¾Ð±Ð¾Ð´Ð½Ð¾Ð³Ð¾ Ð¿ÑÐ¾Ð±ÐµÐ³Ð° Ð·Ð° ÑÑÑÑ ÑÐ°Ð·Ð¼ÐµÑÐ½Ð¾Ð³Ð¾ ÑÑÑÐµÐºÑÐ°, ÑÐ°Ð·Ð¾Ð¾Ð±ÑÐ°Ð·Ð¾Ð²Ð°Ð½Ð¸Ðµ Ð½Ð° Ð³ÑÐ°Ð½Ð¸ÑÐµ ÑÐ°Ð·Ð´ÐµÐ»Ð° ÑÐ»Ð¾ÑÐ². ÐÐ¾ Ð¸ÑÐ¾Ð³Ñ ÑÐ°Ð±Ð¾ÑÑ Ð±ÑÐ»Ð¸ Ð½Ð°Ð¹Ð´ÐµÐ½Ñ ÑÑÐ°Ð±Ð¸Ð»ÑÐ½ÑÐµ Ð¿ÑÐ¸ Ð²ÑÑÐ¾ÐºÐ¸Ñ ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÐ°Ñ Ð¼Ð°ÑÐµÑÐ¸Ð°Ð»Ñ Ð¼Ð½Ð¾Ð³Ð¾ÑÐ»Ð¾Ð¹Ð½ÑÑ Ð¿Ð»ÑÐ½Ð¾Ðº Ð¸ Ð¾Ð±Ð¾ÑÐ½Ð¾Ð²Ð°Ð½Ð¾ Ð¸Ñ ÐºÐ°ÑÐµÑÑÐ²ÐµÐ½Ð½ÑÐµ Ð¿ÑÐµÐ¸Ð¼ÑÑÐµÑÑÐ²Ð° Ð² ÑÐ¾Ð»Ð¸ ÑÐµÑÐ¼Ð¾ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½ÑÑ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ¾Ð². ÐÐ»Ð°Ð³Ð¾Ð´Ð°ÑÑ ÑÐ²Ð¾Ð¸Ð¼ ÑÐ¸Ð·Ð¸ÑÐµÑÐºÐ¸Ð¼ ÑÐ²Ð¾Ð¹ÑÑÐ²Ð°Ð¼ Ð¿Ð°ÑÑ Nb/Ta, Mo/W, Hf/Zr Ð¼Ð¾Ð³ÑÑ Ð±ÑÑÑ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ñ ÐºÐ°Ðº ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÐ½ÑÐµ ÑÐµÐ½ÑÐ¾ÑÑ Ñ Ð²ÑÑÐ¾ÐºÐ¾Ð¹ ÑÑÐ°Ð±Ð¸Ð»ÑÐ½Ð¾ÑÑÑÑ Ð¸ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑÑ.
description: The given work is devoted to the discussion of multilayer thin films and its application as temperature sensors. The main theoretical models of resistivity and temperature coefficient of resistivity were observed, there is a note about the deposition of thin films by magnetron sputtering in a vacuum chamber. The paper describes the basic parameter of metallic films, such as scattering on the surface, mean free path, interdiffusion on the interface, and size effect on these parameters. in conclusion, new suitable materials were chosen for production multilayer thin film with high-temperature stability. There were underlined good match between some metals like Nb/Ta, Mo/W, Hf/Zr, that demonstrate high stability and sensitivity.