title: ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ðµ Ð²Ð»Ð¸ÑÐ½Ð¸Ñ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² Ð³Ð°Ð·Ð¾Ð²Ð¾Ð¹ ÑÑÐµÐ´Ñ Ð½Ð° ÑÑÑÑÐºÑÑÑÑ Ð¸ Ð¾Ð´Ð½Ð¾ÑÐ¾Ð´Ð½Ð¾ÑÑÑ Ð³ÑÐ°ÑÐµÐ½Ð°, Ð²ÑÑÐ°ÑÐ¸Ð²Ð°ÐµÐ¼Ð¾Ð³Ð¾ Ð½Ð° ÐºÐ°ÑÐ±Ð¸Ð´Ðµ ÐºÑÐµÐ¼Ð½Ð¸Ñ Ð¼ÐµÑÐ¾Ð´Ð¾Ð¼ ÑÑÐ±Ð»Ð¸Ð¼Ð°ÑÐ¸Ð¸
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: The influence of the parameters of the gas environment on the structure and ho-mogeneity of graphene grown on silicon carbide by sublimation
Creators: name: Ð¡Ð½Ð¸ÑÐºÐ¾, ÐÐ¸ÑÐ°Ð¸Ð»
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2023
Subjects: Ð³ÑÐ°ÑÐµÐ½
Ð¼ÐµÑÐ¾Ð´ ÑÑÐ±Ð»Ð¸Ð¼Ð°ÑÐ¸Ð¸
ÑÐµÑÐ¼Ð¸ÑÐµÑÐºÐ¾Ðµ ÑÐ°Ð·Ð»Ð¾Ð¶ÐµÐ½Ð¸Ðµ
ÐºÐ°ÑÐ±Ð¸Ð´ ÐºÑÐµÐ¼Ð½Ð¸Ñ
Ð¿Ð°ÑÑÐ¸Ð°Ð»ÑÐ½ÑÐ¹ Ð³Ð°Ð·
graphene
sublimation method
thermal decomposition
silicon carbide
partial gas

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description: This work is devoted to the influence of the parameters of the gas environ-ment on the structure and homogeneity of the graphene grown by sublimation. In order to make certain conclusions about the influence of the gas envi-ronment on the morphology of the samples surface growth, there were chosen certain tasks that were solved in the course of the research: 1. Growth of graphene in the medium of high-purity argon at different pressures 2. Growth of graphene in a gas mixture of argon (95%) and hydrogen (5%) at different growth temperatures 3. Growth of graphene in argon medium with increased content of Si-components in the vapor phase. 4. Analysis of the obtained samples by atomic force microscopy, Kelvin-probe microscopy and Raman spectroscopy.Â  Experiments showed that the most homogeneous graphene is formed when pure argon without impurities is used at a pressure of 750 torr. Changing the gas me-dium to a high vacuum or the addition of gaseous impurities does not affect in the best way. The obtained data are of great benefit for the development of gra-phene growth technology on an industrial scale.