title: Ð¡ÑÐµÐ´Ð½ÐµÐ²Ð¾Ð»Ð½Ð¾Ð²ÑÐµ ÑÐ¾ÑÐ¾Ð¿ÑÐ¸ÐµÐ¼Ð½Ð¸ÐºÐ¸ Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ðµ ÑÐ²ÐµÑÐ´Ð¾Ð³Ð¾ ÑÐ°ÑÑÐ²Ð¾ÑÐ° InAsSb
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Medium-wave infrared photodetectors based on solid solution InAsSb (xâ¤0.22)
Creators: name: ÐÐ»Ð¸Ð¼Ð¾Ð², ÐÐ»ÐµÐºÑÐ°Ð½Ð´Ñ
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2021
Subjects: ÐÑÐ¸ÐµÐ¼Ð½Ð¸ÐºÐ¸ Ð¾Ð¿ÑÐ¸ÑÐµÑÐºÐ¾Ð³Ð¾ Ð¸Ð·Ð»ÑÑÐµÐ½Ð¸Ñ
Ð¡Ð¿ÐµÐºÑÑÐ¾ÑÐºÐ¾Ð¿Ð¸Ñ Ð¸Ð½ÑÑÐ°ÐºÑÐ°ÑÐ½Ð°Ñ
Ð Ð°ÑÑÐ²Ð¾ÑÑ ÑÐ²ÐµÑÐ´ÑÐµ
ÐÐ¾Ð»ÑÐ¿ÑÐ¾Ð²Ð¾Ð´Ð½Ð¸ÐºÐ¸

description: Ð Ð°Ð±Ð¾ÑÐ° Ð¿Ð¾ÑÐ²ÑÑÐµÐ½Ð° ÑÐ¾Ð·Ð´Ð°Ð½Ð¸Ñ Ð¸ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ ÑÐ¸ÑÐ¾ÐºÐ¾Ð¿Ð¾Ð»Ð¾ÑÐ½ÑÑ ÑÐ¾ÑÐ¾Ð¿ÑÐ¸ÐµÐ¼Ð½Ð¸ÐºÐ¾Ð² Ñ ÑÐ´Ð°Ð»ÐµÐ½Ð½Ð¾Ð¹ Ð¿Ð¾Ð´Ð»Ð¾Ð¶ÐºÐ¾Ð¹ Ð¸ Ð´Ð²ÑÑÑÐ¿ÐµÐºÑÑÐ°Ð»ÑÐ½ÑÑ ÑÐ¾ÑÐ¾Ð¿ÑÐ¸ÐµÐ¼Ð½Ð¸ÐºÐ¾Ð², ÑÐ¾ÑÐ¾ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½ÑÑ Ð² ÑÑÐµÐ´Ð½ÐµÐ¹ Ð¸Ð½ÑÑÐ°ÐºÑÐ°ÑÐ½Ð¾Ð¹ Ð¾Ð±Ð»Ð°ÑÑÐ¸ ÑÐ¿ÐµÐºÑÑÐ° Î»=3-5 Ð¼ÐºÐ¼, ÑÐ°Ð±Ð¾ÑÐ°ÑÑÐ¸Ñ Ð² Ð¸Ð½ÑÐµÑÐ²Ð°Ð»Ðµ ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑ 77-350 Ð. Ð¤Ð¾ÑÐ¾Ð´Ð¸Ð¾Ð´Ñ Ð±ÑÐ»Ð¸ Ð¿Ð¾Ð»ÑÑÐµÐ½Ñ Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ðµ Ð´Ð²Ð¾Ð¹Ð½ÑÑ Ð³ÐµÑÑÐ¾ÑÑÑÑÐºÑÑÑ Ñ ÑÐ¾ÑÐ¾ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½ÑÐ¼Ð¸ Ð¾Ð±Ð»Ð°ÑÑÑÐ¼Ð¸ InAs Ð¸ InAsSb, Ð²ÑÑÐ°ÑÐµÐ½Ð½ÑÑ Ð½Ð° Ð¿Ð¾Ð´Ð»Ð¾Ð¶ÐºÐ°Ñ n-InAs (100) Ð¼ÐµÑÐ¾Ð´Ð¾Ð¼ ÐÐ¤Ð­. ÐÐ¾ÑÑÑÐ¾ÑÑÐ¾Ð²Ð°Ñ Ð¾Ð±ÑÐ°Ð±Ð¾ÑÐºÐ° Ð¿ÑÐ¾Ð²Ð¾Ð´Ð¸Ð»Ð°ÑÑ Ð¿ÑÐ¸ ÐºÐ¾Ð¼Ð±Ð¸Ð½Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ð¸ Ð¼ÐµÑÐ¾Ð´Ð¸Ðº Ð¿Ð»Ð°Ð·Ð¼Ð¾-ÑÐ¸Ð¼Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ Ð¸ Ð¼Ð¾ÐºÑÐ¾Ð³Ð¾ ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ð¹, Ð²ÐºÐ»ÑÑÐ°Ñ ÑÐµÐ»ÐµÐºÑÐ¸Ð²Ð½Ð¾Ðµ ÑÐ¸Ð¼Ð¸ÑÐµÑÐºÐ¾Ðµ ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ðµ. Ð ÑÐ¾Ð´Ðµ ÑÐ°Ð±Ð¾ÑÑ Ð±ÑÐ»Ð¸ ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ñ: ÐºÐ¾Ð½ÑÑÑÑÐºÑÐ¸Ð¸ Ð¼Ð°ÑÑÐ¸ÑÐ½Ð¾Ð³Ð¾ ÑÐ¸ÑÐ¾ÐºÐ¾Ð¿Ð¾Ð»Ð¾ÑÐ½Ð¾Ð³Ð¾ ÑÐ¾ÑÐ¾Ð¿ÑÐ¸ÐµÐ¼Ð½Ð¸ÐºÐ° Ñ ÑÐ´Ð°Ð»ÐµÐ½Ð½Ð¾Ð¹ Ð¿Ð¾Ð´Ð»Ð¾Ð¶ÐºÐ¾Ð¹ Ð¸ ÑÐ°Ð·Ð´ÐµÐ»ÐµÐ½Ð½ÑÐ¼Ð¸ Ð¾Ð´Ð¸Ð½Ð¾ÑÐ½ÑÐ¼Ð¸ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ°Ð¼Ð¸; Ð´Ð²ÑÑÑÐ¿ÐµÐºÑÑÐ°Ð»ÑÐ½Ð¾Ð³Ð¾ ÑÐ¾ÑÐ¾Ð¿ÑÐ¸ÐµÐ¼Ð½Ð¸ÐºÐ° ÑÐ»Ð¸Ð¿-ÑÐ¸Ð¿ ÐºÐ¾Ð½ÑÑÑÑÐºÑÐ¸Ð¸ Ñ ÑÐ¾ÑÐ¾ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½ÑÐ¼Ð¸ Ð¾Ð±Ð»Ð°ÑÑÑÐ¼Ð¸, ÑÐ°ÑÐ¿Ð¾Ð»Ð¾Ð¶ÐµÐ½Ð½ÑÐ¼Ð¸ Ñ Ð¾Ð´Ð½Ð¾Ð¹ ÑÑÐ¾ÑÐ¾Ð½Ñ Ð¿Ð¾Ð´Ð»Ð¾Ð¶ÐºÐ¸ Ð¸ Ð´Ð²ÑÑÑÐ¿ÐµÐºÑÑÐ°Ð»ÑÐ½Ð¾Ð³Ð¾ ÑÐ¾ÑÐ¾Ð¿ÑÐ¸ÐµÐ¼Ð½Ð¸ÐºÐ° Ñ ÑÐ¾ÑÐ¾ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½ÑÐ¼Ð¸ Ð¾Ð±Ð»Ð°ÑÑÑÐ¼Ð¸, ÑÐ°ÑÐ¿Ð¾Ð»Ð¾Ð¶ÐµÐ½Ð½ÑÐ¼Ð¸ Ñ ÑÐ°Ð·Ð½ÑÑ ÑÑÐ¾ÑÐ¾Ð½ Ð¿Ð¾Ð´Ð»Ð¾Ð¶ÐºÐ¸; Ð° ÑÐ°ÐºÐ¶Ðµ ÑÐ¾ÑÐ¾ÑÐ°Ð±Ð»Ð¾Ð½Ñ, Ð¾Ð±ÐµÑÐ¿ÐµÑÐ¸Ð²Ð°ÑÑÐ¸Ðµ Ð¿Ð¾ÑÑÑÐ¾ÑÑÐ¾Ð²ÑÑ Ð¾Ð±ÑÐ°Ð±Ð¾ÑÐºÑ Ð¸ Ð²Ð¾Ð·Ð¼Ð¾Ð¶Ð½Ð¾ÑÑÑ Ð¿Ð¾ÑÐ»ÐµÐ´ÑÑÑÐµÐ¹ ÑÐ±Ð¾ÑÐºÐ¸ Ð¿ÑÐµÐ´Ð»Ð¾Ð¶ÐµÐ½Ð½ÑÑ ÐºÐ¾Ð½ÑÑÑÑÐºÑÐ¸Ð¹. Ð ÑÐ¾Ð´Ðµ ÑÐ°Ð±Ð¾ÑÑ Ð±ÑÐ»Ð¸ Ð²ÑÐ¿Ð¾Ð»Ð½ÐµÐ½Ñ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ Ð¸ Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½ Ð°Ð½Ð°Ð»Ð¸Ð· ÑÐ¾ÑÐ¾ÑÐ»ÐµÐºÑÑÐ¸ÑÐµÑÐºÐ¸Ñ ÑÐ²Ð¾Ð¹ÑÑÐ² ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ð½ÑÑ ÑÐ¾ÑÐ¾Ð¿ÑÐ¸ÐµÐ¼Ð½Ð¸ÐºÐ¾Ð² Ð¸ Ð¿Ð¾ÐºÐ°Ð·Ð°Ð½Ð¾, ÑÑÐ¾: - ÑÐ´Ð°Ð»ÐµÐ½Ð¸Ðµ Ð¿Ð¾Ð´Ð»Ð¾Ð¶ÐºÐ¸ Ð¿ÑÐ¸Ð²Ð¾Ð´Ð¸Ñ Ðº Ð¿Ð¾Ð»ÑÑÐµÐ½Ð¸Ñ ÑÐ¸ÑÐ¾ÐºÐ¾Ð¿Ð¾Ð»Ð¾ÑÐ½Ð¾Ð³Ð¾ ÑÐ¿ÐµÐºÑÑÐ° ÑÐ¾ÑÐ¾Ð¾ÑÐ²ÐµÑÐ°, ÐºÐ¾ÑÐ¾ÑÑÐ¹ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸Ð·ÑÐµÑÑÑ Ð¿Ð¾Ð»Ð¾Ð³Ð¸Ð¼ ÑÐ¿Ð°Ð´Ð¾Ð¼ Ð² ÐºÐ¾ÑÐ¾ÑÐºÐ¾Ð²Ð¾Ð»Ð½Ð¾Ð²Ð¾Ð¹ Ð¾Ð±Ð»Ð°ÑÑÐ¸ Ñ ÐºÐ²Ð°Ð½ÑÐ¾Ð²Ð¾Ð¹ ÑÑÑÐµÐºÑÐ¸Ð²Ð½Ð¾ÑÑÑÑ Ð¾ÐºÐ¾Ð»Ð¾ 0.5 (Î» = 2 Ð¼ÐºÐ¼, Ð¢ = 80-250 Ð), Ð° ÑÐ°ÐºÐ¶Ðµ ÑÐ²ÐµÐ»Ð¸ÑÐµÐ½Ð¸Ñ ÑÐ¾ÐºÐ¾Ð²Ð¾Ð¹ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÐ¸ Ð² Ð¼Ð°ÐºÑÐ¸Ð¼ÑÐ¼Ðµ ÑÐ¿ÐµÐºÑÑÐ° ÑÐ¾ÑÐ¾Ð¾ÑÐ²ÐµÑÐ°. ÐÑÐ¸ ÑÑÐ¾Ð¼, ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÐ½ÑÐµ Ð·Ð°Ð²Ð¸ÑÐ¸Ð¼Ð¾ÑÑÐ¸ Ð´Ð»Ð¸Ð½Ð½Ð¾Ð²Ð¾Ð»Ð½Ð¾Ð²Ð¾Ð¹ Ð³ÑÐ°Ð½Ð¸ÑÑ ÑÐ¾ÑÐ¾ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÐ¸ Î»0.5 Ð°Ð¿Ð¿ÑÐ¾ÐºÑÐ¸Ð¼Ð¸ÑÑÑÑÑÑ ÑÑÐ½ÐºÑÐ¸ÐµÐ¹, Ð¸Ð¼ÐµÑÑÐ¸Ð¹ Ð²Ð¸Ð´, ÑÐ°ÑÐ°ÐºÑÐµÑÐ½ÑÐ¹ Ð´Ð»Ñ ÑÐ¼Ð¿Ð¸ÑÐ¸ÑÐµÑÐºÐ¾Ð¹ ÑÐ¾ÑÐ¼ÑÐ»Ñ, Ð¾Ð¿Ð¸ÑÑÐ²Ð°ÑÑÐµÐ¹ ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÐ½Ð¾Ðµ Ð¸Ð·Ð¼ÐµÐ½ÐµÐ½Ð¸Ðµ ÑÐ¸ÑÐ¸Ð½Ñ Ð·Ð°Ð¿ÑÐµÑÐµÐ½Ð½Ð¾Ð¹ Ð·Ð¾Ð½Ñ InAs Ñ ÐºÐ¾ÑÑÑÐ¸ÑÐ¸ÐµÐ½ÑÐ¾Ð¼ 0.28 Ð¼ÑÐ/Ð; - Ð² Ð´Ð²ÑÑÑÐ¿ÐµÐºÑÑÐ°Ð»ÑÐ½ÑÑ ÑÐ¾ÑÐ¾Ð¿ÑÐ¸ÐµÐ¼Ð½Ð¸ÐºÐ°Ñ ÑÐ¾ÑÐ¾ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑ Ð² Ð¼Ð°ÐºÑÐ¸Ð¼ÑÐ¼Ð°Ñ ÑÐ¿ÐµÐºÑÑÐ° (3.3 Ð¸ 4.0 Ð¼ÐºÐ¼) Ð´Ð»Ñ ÑÐ¾ÑÐ¾Ð´Ð¸Ð¾Ð´Ð¾Ð², ÑÐ½Ð°Ð±Ð¶ÐµÐ½Ð½ÑÑ Ð¸Ð¼Ð¼ÐµÑÑÐ¸Ð¾Ð½Ð½ÑÐ¼Ð¸ Ð»Ð¸Ð½Ð·Ð°Ð¼Ð¸ Ñ Ð´Ð¸Ð°Ð¼ÐµÑÑÐ¾Ð¼ Ð¾ÑÐºÑÑÑÐ¾Ð¹ ÑÐ°ÑÑÐ¸ 3.2 Ð¼Ð¼, ÑÐ¾ÑÑÐ°Ð²Ð»ÑÐ»Ð° 1.3 (QE=0.52) Ð¸ 1 (QE=0.3) Ð/ÐÑ, Ð° Ð¾Ð±Ð½Ð°ÑÑÐ¶Ð¸ÑÐµÐ»ÑÐ½Ð°Ñ ÑÐ¿Ð¾ÑÐ¾Ð±Ð½Ð¾ÑÑÑ 4 Ð¸ 2 Ã10Â¹â° cÐ¼ÐÑÂ¹/Â²ÐÑ â»Â¹ ÑÐ¾Ð¾ÑÐ²ÐµÑÑÑÐ²ÐµÐ½Ð½Ð¾, ÑÑÐ¾ Ð±Ð»Ð¸Ð·ÐºÐ¾ Ðº Ð·Ð½Ð°ÑÐµÐ½Ð¸ÑÐ¼ Ð´Ð»Ñ Ð¾Ð´Ð½Ð¾Ð²Ð¾Ð»Ð½Ð¾Ð²ÑÑ ÑÐ¾ÑÐ¾Ð´Ð¸Ð¾Ð´Ð¾Ð² Ð¸ Ð¾ÑÐºÑÑÐ²Ð°ÐµÑ Ð¿ÐµÑÑÐ¿ÐµÐºÑÐ¸Ð²Ñ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¸Ñ ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ð½Ð¾Ð³Ð¾ Ð¿Ð¾Ð´ÑÐ¾Ð´Ð° Ð´Ð»Ñ Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð¸Ñ Ð´Ð²ÑÑÐ²Ð¾Ð»Ð½Ð¾Ð²ÑÑ Ð¼Ð°ÑÑÐ¸Ñ, ÑÐ°Ð±Ð¾ÑÐ°ÑÑÐ¸Ñ Ð¿ÑÐ¸ ÐºÐ¾Ð¼Ð½Ð°ÑÐ½Ð¾Ð¹ ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÐµ Ð² Ð´Ð¸Ð°Ð¿Ð°Ð·Ð¾Ð½Ðµ Ð´Ð»Ð¸Ð½ Ð²Ð¾Ð»Ð½ 3-4 Ð¼ÐºÐ¼.
description: This work is devoted to the creation and study of double-spectral and matrix photodetectors with a remote substrate based on InAs and its solid solutions for operation in the mid-IR region of the spectrum, in a wide temperature range. The samples were grown on n-InAs (100) substrates (n = 2 Ã 10Â¹â¶ cmâ»Â³) by liquid-phase epitaxy. Post-growth processing was carried out by lithography methods: dry, wet etching, their combinations; methods of selective chemical etching. In the course of the work, the current-voltage characteristics, photoresponse and electroluminescence spectra of the obtained experimental samples were analyzed in a wide temperature range of 80 - 400 K. It was demonstrated that removing the substrate from the samples resulted in a broadband spectrum, which is characterized by a gentle drop in the short-wavelength region with a quantum efficiency of about 0.5 (Î» = 2 Î¼m, T = 80-250 K), as well as an increase in the current sensitivity at the maximum of the photoresponse spectrum. Two-spectral photodetectors of the "flip-chip" design with immersion lenses demonstrated the value of the quantum efficiency 0.52 and 0.3, while the calculated value of the detectability for wavelengths 3.3 and 4 Î¼m was 4 and 2 Ã 10Â¹â° cmHzÂ¹/Â² Wâ»Â¹, respectively, which is close to the values for single-wave PDs. The obtained results apply the investigated photodetectors as photosensitive components of photodetectors for gas analysis, ratio pyrometers and Earth remote sensing systems.