title: ÐÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ðµ Ð¸Ð¾Ð½Ð½Ð¾-Ð»ÑÑÐµÐ²Ð¾Ð³Ð¾ ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ñ Ð² Ð¿ÑÐ¾ÑÐµÑÑÐµ Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð¸Ñ Ð°ÐºÑÑÑÐ¸ÑÐµÑÐºÐ¾Ð¹ Ð»Ð¸Ð½Ð¸Ð¸ Ð·Ð°Ð´ÐµÑÐ¶ÐºÐ¸
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: The use of ion beam etching in the process of manufacturing an acoustic delay line
Creators: name: ÐÐ°ÑÑÑÐ¸Ð¶Ð½Ð°Ñ, ÐÐ°ÑÐ¸Ð½Ð°
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2022
Subjects: Ð¸Ð¾Ð½Ð½Ð¾-Ð»ÑÑÐµÐ²Ð¾Ðµ ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ðµ
Ð½Ð¸Ð¾Ð±Ð°Ñ Ð»Ð¸ÑÐ¸Ñ
Ð°ÐºÑÑÑÐ¸ÑÐµÑÐºÐ°Ñ Ð»Ð¸Ð½Ð¸Ñ Ð·Ð°Ð´ÐµÑÐ¶ÐºÐ¸
ÑÐºÐ¾ÑÐ¾ÑÑÑ ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ñ
Ð³Ð»ÑÐ±Ð¸Ð½Ð° ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ñ
ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ° Ð¸Ð¾Ð½Ð½Ð¾-Ð»ÑÑÐµÐ²Ð¾Ð³Ð¾ ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ñ
ion beam etching
lithium niobate
acoustic delay line
etching speed
etching depth
ion beam etching installation

description: Ð¦ÐµÐ»Ñ ÑÐ°Ð±Ð¾ÑÑ â Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ðµ Ð¸Ð¾Ð½Ð½Ð¾-Ð»ÑÑÐµÐ²Ð¾Ð³Ð¾ ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ñ Ð² Ð¿ÑÐ¾ÑÐµÑÑÐµ Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð¸Ñ Ð°ÐºÑÑÑÐ¸ÑÐµÑÐºÐ¾Ð¹ Ð»Ð¸Ð½Ð¸Ð¸ Ð·Ð°Ð´ÐµÑÐ¶ÐºÐ¸. Ð ÑÐ¾Ð´Ðµ ÑÐ°Ð±Ð¾ÑÑ Ð±ÑÐ» Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½ Ð¼ÐµÑÐ¾Ð´ Ð¸Ð¾Ð½Ð½Ð¾-Ð»ÑÑÐµÐ²Ð¾Ð³Ð¾ ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ñ Ð´Ð»Ñ ÑÐ¾Ð³Ð¾, ÑÑÐ¾Ð±Ñ Ð¿ÑÐ¾Ð²ÐµÑÐ¸ÑÑ Ð¿ÑÐ°Ð²Ð¸Ð»ÑÐ½Ð¾ Ð»Ð¸ Ð·Ð°ÑÐ²Ð»ÐµÐ½Ð° Ð¼Ð¾Ð´ÐµÐ»ÑÐ½ÑÐ¼ Ð²Ð°ÑÐ¸Ð°Ð½ÑÐ¾Ð¼ ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ¸ Ð¸Ð¾Ð½Ð½Ð¾-Ð»ÑÑÐµÐ²Ð¾Ð³Ð¾ ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ñ Ð³Ð»ÑÐ±Ð¸Ð½Ð° ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ñ. ÐÐ»Ñ Ð¿ÑÐ¾Ð²ÐµÑÐºÐ¸ Ð½ÑÐ¶Ð½Ð¾ Ð±ÑÐ»Ð¾ Ð¿ÑÐ¾Ð²ÐµÑÑÐ¸ ÑÐºÑÐ¿ÐµÑÐ¸Ð¼ÐµÐ½Ñ, Ð° Ð¸Ð¼ÐµÐ½Ð½Ð¾ Ð¸Ð·Ð¼ÐµÑÐ¸ÑÑ Ð¿Ð¾ÑÐµÑÐ¸ ÑÐ¸Ð³Ð½Ð°Ð»Ð° Ð¿ÑÐ¸ Ð·Ð°Ð´Ð°Ð½Ð½ÑÑ Ð°ÑÐ¿ÐµÐºÑÐ°Ñ, ÐºÐ¾ÑÐ¾ÑÑÐ¹ ÐºÐ°Ðº ÑÐ°Ð· Ð¸ Ð¿Ð¾ÐºÐ°Ð·Ð°Ð», Ð·Ð° ÐºÐ°ÐºÐ¾Ðµ Ð²ÑÐµÐ¼Ñ Ð¿ÑÐ¸ Ð²Ð¾Ð·Ð¼Ð¾Ð¶Ð½ÑÑ Ð¿Ð¾ÑÐµÑÑÑ Ð³Ð»ÑÐ±Ð¸Ð½Ð° Ð·Ð°Ð»ÐµÐ³Ð°Ð½Ð¸Ñ Ð±ÑÐ´ÐµÑ Ð¾ÑÐ»Ð¸ÑÐ°ÑÑÑÑ Ð¾Ñ Ð·Ð°Ð´Ð°Ð½Ð½Ð¾Ð¹ Ð¼Ð¾Ð´ÐµÐ»ÑÑ. ÐÐ±ÑÐ°Ð·ÑÐ¾Ð¼ ÑÐ²Ð»ÑÐµÑÑÑ Ð¿Ð¾Ð´Ð»Ð¾Ð¶ÐºÐ° Ð¸Ð· Ð¼Ð¾Ð½Ð¾ÐºÑÐ¸ÑÑÐ°Ð»Ð»Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ Ð½Ð¸Ð¾Ð±Ð°ÑÐ° Ð»Ð¸ÑÐ¸Ñ, Ð¿Ð¾ÑÐ¾Ð¼Ñ ÑÑÐ¾ Ð¾Ð½ ÑÐ°ÑÐµ Ð²ÑÐµÐ³Ð¾ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·ÑÑÑ ÐºÐ°Ðº Ð·Ð²ÑÐºÐ¾Ð¿ÑÐ¾Ð²Ð¾Ð´, Ð¿Ð¾ÑÐ¾Ð¼Ñ ÑÑÐ¾ ÑÑÐ¾ Ð¿Ð¾Ð·Ð²Ð¾Ð»ÑÐµÑ ÑÐ´ÐµÐ»Ð°ÑÑ Ð¿Ð¾Ð´Ð»Ð¾Ð¶ÐºÑ Ð´Ð¾Ð²Ð¾Ð»ÑÐ½Ð¾ Ð±Ð¾Ð»ÑÑÐ¾Ð¹ Ð´Ð»Ð¸Ð½Ñ. Ð ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐµ Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð½Ð¾Ð³Ð¾ Ð¾Ð¿ÑÑÐ° ÑÑÐ°Ð»Ð¾ Ð¿Ð¾Ð½ÑÑÐ½Ð¾, Ð·Ð° ÐºÐ°ÐºÐ¾Ðµ Ð²ÑÐµÐ¼Ñ Ð¿ÑÐ¸ Ð²Ð¾Ð·Ð¼Ð¾Ð¶Ð½ÑÑ Ð¿Ð¾ÑÐµÑÑÑ Ð³Ð»ÑÐ±Ð¸Ð½Ð° Ð·Ð°Ð»ÐµÐ³Ð°Ð½Ð¸Ñ Ð±ÑÐ´ÐµÑ Ð¾ÑÐ»Ð¸ÑÐ°ÑÑÑÑ Ð¾Ñ Ð·Ð°Ð´Ð°Ð½Ð½Ð¾Ð¹ Ð¼Ð¾Ð´ÐµÐ»ÑÑ. ÐÐ»ÑÐ±Ð¸Ð½Ð° ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ñ Ð¿Ð¾Ð»ÑÑÐ¸Ð»Ð°ÑÑ ÑÐ°Ð²Ð½Ð¾Ð¹ ~ 600 Â± 30 Ã Ð¿ÑÐ¸ Ð²ÑÐµÐ¼ÐµÐ½Ð¸ 1180 Ñ. Ð­ÑÐ¾ ÑÐ²Ð»ÑÐµÑÑÑ Ð½Ð°Ð¸Ð»ÑÑÑÐ¸Ð¼ ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐ¾Ð¼ Ð¿ÑÐ¸ Ð¿Ð¾ÑÐµÑÑÑ Ð² 44 Ð´Ð, Ð¿ÑÐ¸ ÑÐ¾Ð¼, ÑÑÐ¾ Ð¼Ð°ÐºÑÐ¸Ð¼Ð°Ð»ÑÐ½Ð¾Ðµ Ð²Ð¾Ð·Ð¼Ð¾Ð¶Ð½Ð¾Ðµ Ð·Ð½Ð°ÑÐµÐ½Ð¸Ðµ â 48Ð´Ð. Ð¡Ð»ÐµÐ´Ð¾Ð²Ð°ÑÐµÐ»ÑÐ½Ð¾, Ð² Ð¸ÑÐ¾Ð³Ðµ Ð¼Ð¾Ð¶Ð½Ð¾ ÑÐ´ÐµÐ»Ð°ÑÑ Ð²ÑÐ²Ð¾Ð´, ÑÑÐ¾ Ð½Ð° Ð¿ÑÐ°ÐºÑÐ¸ÐºÐµ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ¸ Ð¼Ð¾Ð´ÐµÐ»ÑÐ½Ð¾Ð³Ð¾ Ð²Ð°ÑÐ¸Ð°Ð½ÑÐ° ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ¸ Ð¾ÑÐ»Ð¸ÑÐ°ÑÑÑÑ Ð¸ Ð²ÑÐµÐ³Ð´Ð° ÑÑÐ¾Ð¸Ñ ÑÑÐ¾ ÑÑÐ¸ÑÑÐ²Ð°ÑÑ Ð¸ Ð¿ÑÐ¾Ð²ÐµÑÑÑÑ.
description: The purpose of the work is the use of ion beam etching in the process of manufacturing an acoustic delay line.In the course of the work, the ion-beam etching method was used in order to check whether the etching depth was correctly declared by the model version of the ion-beam etching installation. To test it, it was necessary to conduct an experiment, namely, to measure signal losses at specified aspects, which just showed how long, with possible losses, the depth of occurrence would differ from the specified model. The sample is a substrate made of monocrystalline lithium niobate, because it is most often used as a sound conductor, because it allows you to make a substrate of a fairly large length.As a result of the conducted experience, it became clear for how long, with possible losses, the depth of occurrence will differ from the specified model. The etching depth turned out to be ~ 600 Â± 30 Ã at a time of 1180 s. This is the best result with a loss of 44 dB, despite the fact that the maximum possible value is 48dB. Consequently, as a result, we can conclude that in practice the characteristics of the model version of the installation are different and it is always worth taking this into account and checking.