title: ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ðµ Ñ Ð°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸Ðº Ð¼Ð¸ÐºÑÐ¾Ð¼ÐµÑ Ð°Ð½Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ ÑÐ¾Ð½ÐºÐ¾Ð¿Ð»ÑÐ½Ð¾ÑÐ½Ð¾Ð³Ð¾ Ð¿ÐµÑÐµÐºÐ»ÑÑÐ°ÑÐµÐ»Ñ
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: Study of the characteristics of the micromechanical thin-film switch
Creators: name: ÐÐ¶Ð¸Ð½Ð¸ÐºÐ°ÑÐ²Ð¸Ð»Ð¸, ÐÐ»ÐµÐºÑÐ°Ð½Ð´Ñ
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2020
Subjects: ÐÐ­ÐÐ¡
Ð¼Ð¸ÐºÑÐ¾Ð¼ÐµÑ Ð°Ð½Ð¸ÑÐµÑÐºÐ¸Ð¹ Ð¿ÐµÑÐµÐºÐ»ÑÑÐ°ÑÐµÐ»Ñ
Ð¼Ð¸ÐºÑÐ¾ÑÐµÑ Ð½Ð¾Ð»Ð¾Ð³Ð¸Ð¸
MEMS
micromechanikal switch
microtechnologies

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description: This work is devoted to the development of a micromechanical switch and studies of its characteristics. Tasks that were solved in the course of the work:1.Overview of the development features of modern MEMS devices and microtechnologies.2.Overview of the principles of operation and design of optical switches.3.Study of the design and manufacturing techniques of the micromechanical thin-film switch.4.Study of micromechanical switch characteristics.The work was carried out on the basis of the R&amp;D Lab NMST, where a significant part of the actual material was collected on technological processes, types and designs of MEMS devices. Reviews have been performed showing the current state of developments in the field of MEMS micromechanical switch. A study was made of the characteristics of the micromechanical switch, which determine the influence of the temperature dependence and the operating voltage (tripping voltage) of the thin-film switch. As a result, application proposals were developed at the R&amp;D Laboratory for photoacoustic applications.