title: ÐÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ðµ Ð¼ÐµÑÐ¾Ð´Ð° Ð¸Ð¾Ð½Ð½Ð¾-Ð»ÑÑÐµÐ²Ð¾Ð³Ð¾ ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ñ Ð² Ð¿ÑÐ¾Ð¸Ð·Ð²Ð¾Ð´ÑÑÐ²Ðµ Ð¸Ð·Ð´ÐµÐ»Ð¸Ð¹ Ð¼Ð¸ÐºÑÐ¾ÑÐ¸ÑÑÐµÐ¼Ð¾ÑÐµÑ Ð½Ð¸ÐºÐ¸
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: Application of the ion-beam etching method for the production of microsystems products
Creators: name: ÐÐ°ÑÐ¸Ð¼Ð¾Ð², ÐÑÑÑÑ
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2023
Subjects: Ð¸Ð¾Ð½Ð½Ð¾-Ð»ÑÑÐµÐ²Ð¾Ðµ ÑÑÐ°Ð²Ð»ÐµÐ½Ð¸Ðµ
Ð´Ð¸ÑÐ¿ÐµÑÑÐ¸Ð¾Ð½Ð½Ð¾-Ð°ÐºÑÑÑÐ¸ÑÐµÑÐºÐ°Ñ Ð»Ð¸Ð½Ð¸Ñ Ð·Ð°Ð´ÐµÑÐ¶ÐºÐ¸
Ð°Ð¼Ð¿Ð»Ð¸ÑÑÐ´Ð½Ð¾-ÑÐ°ÑÑÐ¾ÑÐ½Ð°Ñ Ñ Ð°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ°
Ð¸Ð¾Ð½Ð½ÑÐ¹ Ð¸ÑÑÐ¾ÑÐ½Ð¸Ðº
ion-beam etching
dispersive-acoustic delay line
amplitude-frequency characteristic
ion source

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description: The work is devoted to studying the influence of the ion-beam etching time on workpieces for the product of a dispersive-acoustic delay line. The work was carried out on the basis of JSC NITI Avangard under the supervision of the head of the group Kapachinskikh A.A. A method of etching the workpiece blank using stencils was developed to minimize the number of blanks used. Ion-beam etching of blanks for the product was carried out at constant parameters, but at different etching times. The etched sections of the workpiece were analyzed on a ZNB 40 machine with a special probe to obtain their amplitude-frequency characteristics. Further, starting from the technical requirements for our product, a plot of the dependence of the obtained amplitude values on the time of ion-beam etching was plotted. According to this graph, the optimal etching time was determined, at which the experimental value of the amplitude fits into the technical requirements of this product.