title: ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ðµ ÑÑÑÑÐºÑÑÑÑ Ð¸ Ð´Ð¸ÑÐ»ÐµÐºÑÑÐ¸ÑÐµÑÐºÐ¸Ñ ÑÐ²Ð¾Ð¹ÑÑÐ² Ð³ÑÐ°Ð´Ð¸ÐµÐ½ÑÐ½ÑÑ ÑÐ¾Ð½ÐºÐ¸Ñ Ð¿Ð»ÑÐ½Ð¾Ðº ÑÐ¸ÑÐºÐ¾Ð½Ð°ÑÐ°-ÑÐ¸ÑÐ°Ð½Ð°ÑÐ° ÑÐ²Ð¸Ð½ÑÐ°
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Study of the structure and dielectric properties of gradient lead zirconate-titanate thin films
Creators: name: ÐÐ°Ð»ÐµÐµÐ²Ð°, ÐÐ»ÑÑ
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2021
Subjects: ÐÐ»ÐµÐ½ÐºÐ¸ ÑÐ¾Ð½ÐºÐ¸Ðµ
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high-frequency magnetron sputtering
non-uniform thickness distribution of lead

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description: The method of radio-frequency magnetron sputtering was used to fabricate thin-film ferroelectric two-layer structures of lead zirconatetitanate, consisting of layers deposited at pressures of an argon-oxygen gas mixture of 4Pa and 8Pa. The content of lead atoms in the deposited layers differed by ~20%. The formed structures differed in the sequence of layers deposition. Subsequenthigh-temperature annealing led to the formation of the perovskite phase in the deposited structures. Using the methods of scanning electron microscopy and dielectric diagnostics, the phase state, compositionand dielectric properties of two-layer structures have been studied. It is shown that, depending on the order of the layers, the crystallization conditions of the perovskite phase, the dielectric parameters, and the unipolar properties of the films changesignificantly.