title: Ð§Ð¸ÑÐ»ÐµÐ½Ð½Ð¾Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ Ð³Ð°Ð·Ð¾ÑÐ°Ð·Ð½Ð¾Ð¹ ÑÐ¿Ð¸ÑÐ°ÐºÑÐ¸Ð¸ Ð¸Ð· Ð¼ÐµÑÐ°Ð»Ð»Ð¾Ð¾ÑÐ³Ð°Ð½Ð¸ÑÐµÑÐºÐ¸Ñ ÑÐ¾ÐµÐ´Ð¸Ð½ÐµÐ½Ð¸Ð¹ Ð² Ð¿Ð°ÐºÐµÑÐµ OpenFOAM
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Numerical simulation of vapor phase epitaxy from organometallic compounds in OpenFOAM
Creators: name: ÐÐ°Ð»Ð°ÑÑÐ¸Ð½Ð°, ÐÐºÐ°ÑÐµÑÐ¸Ð½Ð°
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2021
Subjects: ÐÐ¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ
Ð§Ð¸ÑÐ»ÐµÐ½Ð½ÑÐµ Ð¼ÐµÑÐ¾Ð´Ñ
Ð¯Ð´ÐµÑÐ½ÑÐµ ÑÐµÐ°ÐºÑÐ¾ÑÑ
ÐÑÐ¸ÑÑÐ°Ð»Ð»Ñ
openfoam
Ð³Ð°Ð·Ð¾ÑÐ°Ð·Ð½Ð°Ñ ÑÐ¿Ð¸ÑÐ°ÐºÑÐ¸Ñ
ÐµÑÑÐµÑÑÐ²ÐµÐ½Ð½Ð°Ñ ÐºÐ¾Ð½Ð²ÐµÐºÑÐ¸Ñ
Ð½Ð¸ÑÑÐ¸Ð´ Ð³Ð°Ð»Ð»Ð¸Ñ
gas-phase epitaxy
free convection
gallium nitride

description: ÐÐ°Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¿Ð¾ÑÐ²ÑÑÐµÐ½Ð° Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ Ð²Ð»Ð¸ÑÐ½Ð¸Ñ Ð³ÐµÐ¾Ð¼ÐµÑÑÐ¸ÑÐµÑÐºÐ¸Ñ Ð¸ Ð´ÑÑÐ³Ð¸Ñ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² Ð½Ð° ÑÐµÑÐµÐ½Ð¸Ðµ Ð¸ ÑÐ¿Ð¸ÑÐ°ÐºÑÐ¸Ñ Ð² Ð¿ÑÐ¾ÑÐ¾ÑÐ¸Ð¿Ðµ Ð½Ð¾Ð²Ð¾Ð³Ð¾ ÑÐµÐ°ÐºÑÐ¾ÑÐ° Ð¿ÑÐ¸ Ð¿Ð¾Ð¼Ð¾ÑÐ¸ ÑÐ¸ÑÐ»ÐµÐ½Ð½Ð¾Ð³Ð¾ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ Ð² Ð¿Ð°ÐºÐµÑÐµ OpenFOAM. ÐÐ°Ð´Ð°ÑÐ¸, ÐºÐ¾ÑÐ¾ÑÑÐµ ÑÐµÑÐ°Ð»Ð¸ÑÑ Ð² ÑÐ¾Ð´Ðµ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ: 1. ÐÐµÑÐ¸ÑÐ¸ÐºÐ°ÑÐ¸Ñ ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐ¾Ð², Ð¿Ð¾Ð»ÑÑÐ°ÐµÐ¼ÑÑ Ñ Ð¿Ð¾Ð¼Ð¾ÑÑÑ ÑÐ¿ÑÐ¾ÑÑÐ½Ð½Ð¾Ð¹ Ð¼Ð¾Ð´ÐµÐ»Ð¸ Ð² OpenFOAM; 2. ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ðµ Ð²Ð»Ð¸ÑÐ½Ð¸Ñ Ð³ÐµÐ¾Ð¼ÐµÑÑÐ¸ÑÐµÑÐºÐ¸Ñ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² Ð¸ ÑÐ°Ð·Ð»Ð¸ÑÐ½ÑÑ ÑÐµÐ¶Ð¸Ð¼Ð¾Ð² ÑÐ°Ð±Ð¾ÑÑ ÑÐµÐ°ÐºÑÐ¾ÑÐ° Ð½Ð° Ð¿ÑÐ¾ÑÐµÑÑÑ ÑÐ¾ÑÑÐ° Ð¸ Ð¾ÑÐ°Ð¶Ð´ÐµÐ½Ð¸Ðµ Ð´ÐµÐ¿Ð¾Ð·Ð¸ÑÐ¾Ð². Ð Ð½Ð°ÑÑÐ¾ÑÑÐµÐ¹ ÑÐ°Ð±Ð¾ÑÐµ Ð¿ÑÐµÐ´ÑÑÐ°Ð²Ð»ÐµÐ½Ñ ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÑ ÑÐ¸ÑÐ»ÐµÐ½Ð½Ð¾Ð³Ð¾ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ ÑÐµÐ°ÐºÑÐ¾ÑÐ° Ð´Ð»Ñ Ð²ÑÑÐ°ÑÐ¸Ð²Ð°Ð½Ð¸Ñ ÐºÑÐ¸ÑÑÐ°Ð»Ð»Ð¾Ð² Ð¼ÐµÑÐ¾Ð´Ð¾Ð¼ Ð³Ð°Ð·Ð¾ÑÐ°Ð·Ð½Ð¾Ð¹ ÑÐ¿Ð¸ÑÐ°ÐºÑÐ¸Ð¸ Ð¸Ð· Ð¼ÐµÑÐ°Ð»Ð»Ð¾Ð¾ÑÐ³Ð°Ð½Ð¸ÑÐµÑÐºÐ¸Ñ ÑÐ¾ÐµÐ´Ð¸Ð½ÐµÐ½Ð¸Ð¹. ÐÐ° Ð±Ð°Ð·Ðµ ÑÐ¿ÑÐ¾ÑÑÐ½Ð½Ð¾Ð¹ ÑÐ°ÑÑÐµÑÐ½Ð¾Ð¹ Ð¼Ð¾Ð´ÐµÐ»Ð¸ Ð´Ð»Ñ ÑÐ¾ÑÑÐ° GaN Ð² OpenFOAM Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð° ÑÐµÑÐ¸Ñ Ð²ÑÑÐ¸ÑÐ»Ð¸ÑÐµÐ»ÑÐ½ÑÑ ÑÐºÑÐ¿ÐµÑÐ¸Ð¼ÐµÐ½ÑÐ¾Ð² Ñ ÑÐµÐ»ÑÑ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ Ð²Ð»Ð¸ÑÐ½Ð¸Ñ ÑÐ°Ð·Ð»Ð¸ÑÐ½ÑÑ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² Ð½Ð° ÑÐµÑÐµÐ½Ð¸Ðµ Ð² ÑÐµÐ°ÐºÑÐ¾ÑÐµ Ð¸ ÐºÐ°ÑÐµÑÑÐ²Ð¾ ÑÐ°ÑÑÑÑÐµÐ³Ð¾ ÐºÑÐ¸ÑÑÐ°Ð»Ð»Ð°; Ð² ÐºÐ°ÑÐµÑÑÐ²Ðµ ÑÐµÐ»ÐµÐ²ÑÑ ÑÑÐ½ÐºÑÐ¸Ð¹ Ð²ÑÑÑÑÐ¿Ð°Ð»Ð¸ Ð¾Ð´Ð½Ð¾ÑÐ¾Ð´Ð½Ð¾ÑÑÑ ÑÐºÐ¾ÑÐ¾ÑÑÐ¸ ÑÐ¾ÑÑÐ° Ð½Ð° Ð¿Ð¾Ð´Ð»Ð¾Ð¶ÐºÐµ Ð¸ Ð¸Ð½ÑÐµÐ³ÑÐ°Ð»ÑÐ½Ð¾Ðµ Ð¿Ð°ÑÐ°Ð·Ð¸ÑÐ½Ð¾Ðµ Ð¾ÑÐ°Ð¶Ð´ÐµÐ½Ð¸Ðµ Ð½Ð° Ð´ÐµÑÐ°Ð»ÑÑ ÑÐ¾ÑÑÐ¾Ð²Ð¾Ð¹ ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ¸. Ð ÐºÐ°ÑÐµÑÑÐ²Ðµ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² Ð²ÑÑÑÑÐ¿Ð°Ð»Ð¸ Ð³ÐµÐ¾Ð¼ÐµÑÑÐ¸ÑÐµÑÐºÐ¸Ðµ ÑÐ°Ð·Ð¼ÐµÑÑ, ÑÐºÐ¾ÑÐ¾ÑÑÐ¸ Ð¿Ð¾Ð´Ð°ÑÐ¸ Ð³Ð°Ð·Ð¾Ð², ÑÐ¾ÑÑÐ°Ð² ÑÐ¼ÐµÑÐ¸. Ð ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐµ ÑÐ°Ð±Ð¾ÑÑ Ð¿Ð¾Ð»ÑÑÐµÐ½Ñ ÑÐ»ÑÑÑÐµÐ½Ð½ÑÐµ Ð³ÐµÐ¾Ð¼ÐµÑÑÐ¸ÑÐµÑÐºÐ¸Ðµ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ¸ Ð´Ð»Ñ Ð¿ÑÐ¾ÑÐ¾ÑÐ¸Ð¿Ð° Ð½Ð¾Ð²Ð¾Ð³Ð¾ ÑÐµÐ°ÐºÑÐ¾ÑÐ°. ÐÑÑÐ°Ð±Ð¾ÑÐ°Ð½Ñ ÑÐµÐºÐ¾Ð¼ÐµÐ½Ð´Ð°ÑÐ¸Ð¸ Ð¿Ð¾ ÑÐµÐ¶Ð¸Ð¼Ð°Ð¼ ÑÐ°Ð±Ð¾ÑÑ Ð´Ð»Ñ ÑÐ°Ð·ÑÐ°Ð±Ð°ÑÑÐ²Ð°ÐµÐ¼Ð¾Ð¹ ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ¸.
description: The given work is devoted to studying the influence of geometrical and other parameters on the flow and epitaxy in the prototype of a new reactor, using numerical simulations in the OpenFOAM. The research set the following goals: 1. Verification of the results obtained using a simplified model in OpenFOAM; 2. Investigation of the influence of geometrical parameters and different regimes on the crystal growth and deposition processes. This work presents the results of numerical simulation of a MOCVD reactor. Based on a simplified model for GaN growth in OpenFOAM, a series of computational experiments were performed to study the effect of various parameters on the flow in the reactor and the quality of the crystal; the target characteristics were the uniformity of the growth rate on the substrate and the integral parasitic deposition on the walls. The parameters were geometric sizes, flow rates, and mixture composition. As a result of the work, improved geometric characteristics for the new reactor were obtained. Recommendations for regimes for the new reactor have been developed.