title: Ð¡Ð¾Ð»Ð½ÐµÑÐ½Ð¾-ÑÐ»ÐµÐ¿ÑÐµ ÑÐ¾ÑÐ¾Ð´ÐµÑÐµÐºÑÐ¾ÑÑ Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ðµ ÑÐ²ÐµÑÐ´ÑÑ ÑÐ°ÑÑÐ²Ð¾ÑÐ¾Ð² AlGaN
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Solar-blind photodetectors based on AlGaN solid solutions
Creators: name: ÐÑÑÐµÐ½Ð¸Ð½Ð°, ÐÐ°ÑÑÑ
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2020
Subjects: ÑÐ¾Ð»Ð½ÐµÑÐ½Ð¾-ÑÐ»ÐµÐ¿ÑÐµ ÑÐ¾ÑÐ¾Ð´ÐµÑÐµÐºÑÐ¾ÑÑ
ÑÐ²ÐµÑÐ´ÑÐµ ÑÐ°ÑÑÐ²Ð¾ÑÑ AlGaN
ÑÐ¾ÑÐ¾Ð´Ð¸Ð¾Ð´Ñ Ð¨Ð¾ÑÑÐºÐ¸
Ð¾Ð¼Ð¸ÑÐµÑÐºÐ¸Ð¹ ÐºÐ¾Ð½ÑÐ°ÐºÑ
solar-blind photodetectors
solid solution AlGaN
schottky photodiodes
ohmic contact

description: ÐÐ°Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¿Ð¾ÑÐ²ÑÑÐµÐ½Ð° ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐºÐµ Ð¿Ð¾ÑÑÑÐ¾ÑÑÐ¾Ð²Ð¾Ð¹ ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸Ð¸ ÑÐ¾Ð·Ð´Ð°Ð½Ð¸Ñ ÑÐ¾Ð»Ð½ÐµÑÐ½Ð¾-ÑÐ»ÐµÐ¿ÑÑ ÑÐ¾ÑÐ¾Ð´ÐµÑÐµÐºÑÐ¾ÑÐ¾Ð² Ð½Ð° Ð±Ð°Ð·Ðµ Ð±Ð°ÑÑÐµÑÐ° Ð¨Ð¾ÑÑÐºÐ¸. ÐÐ°Ð´Ð°ÑÐ¸, ÐºÐ¾ÑÐ¾ÑÑÐµ ÑÐµÑÐ°Ð»Ð¸ÑÑ Ð² ÑÐ¾Ð´Ðµ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ:
1. ÐÐ·ÑÑÐµÐ½Ð¸Ðµ Ð¾ÑÐ¾Ð±ÐµÐ½Ð½Ð¾ÑÑÐ¸ Ð¿Ð¾ÑÑÑÐ¾ÑÑÐ¾Ð²Ð¾Ð¹ Ð¾Ð±ÑÐ°Ð±Ð¾ÑÐºÐ¸ ÑÐ²ÐµÑÐ´ÑÑ ÑÐ°ÑÑÐ²Ð¾ÑÐ¾Ð² AlGaN.
2. ÐÐ¾Ð´Ð±Ð¾Ñ ÑÐµÐ¶Ð¸Ð¼Ð¾Ð² Ð½Ð°Ð¿ÑÐ»ÐµÐ½Ð¸Ñ Ð¸ Ð²Ð¶Ð¸Ð³Ð°Ð½Ð¸Ñ Ð¾Ð¼Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ ÐºÐ¾Ð½ÑÐ°ÐºÐ°.
3. ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ðµ Ð²Ð»Ð¸ÑÐ½Ð¸Ñ ÑÐ°Ð·Ð»Ð¸ÑÐ½ÑÑ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² Ð½Ð° Ð¾Ð¼Ð¸ÑÐ½Ð¾ÑÑÑ ÐºÐ¾Ð½ÑÐ°ÐºÑÐ°.
4. Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° Ð¿Ð¾Ð»Ð½Ð¾Ð³Ð¾ ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ ÑÐ¸ÐºÐ»Ð° Ð¿Ð¾ÑÑÑÐ¾ÑÑÐ¾Ð²Ð¾Ð³Ð¾ Ð¿ÑÐ¾Ð¸Ð·Ð²Ð¾Ð´ÑÑÐ²Ð° ÑÐ¾Ð»Ð½ÐµÑÐ½Ð¾-ÑÐ»ÐµÐ¿ÑÑ ÑÐ¾ÑÐ¾Ð´ÐµÑÐµÐºÑÐ¾ÑÐ¾Ð² Ñ Ð±Ð°ÑÑÐµÑÐ¾Ð¼ Ð¨Ð¾ÑÑÐºÐ¸ Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ðµ ÑÐ²ÐµÑÐ´ÑÑ ÑÐ°ÑÑÐ²Ð¾ÑÐ¾Ð² AlGaN.
Ð Ð°Ð±Ð¾ÑÐ° Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð° Ð² Ð»Ð°Ð±Ð¾ÑÐ°ÑÐ¾ÑÐ¸Ð¸ Ð¤Ð¢Ð Ð¸Ð¼. Ð.Ð¤. ÐÐ¾ÑÑÐµ, Ð³Ð´Ðµ Ð¸ Ð¿ÑÐ¾Ð¸Ð·Ð²Ð¾Ð´Ð¸Ð»ÑÑ ÑÐ¾ÑÑ ÑÑÑÑÐºÑÑÑ Ð¸ Ð¿Ð¾ÑÑÑÐ¾ÑÑÐ¾Ð²Ð°Ñ Ð¾Ð±ÑÐ°Ð±Ð¾ÑÐºÐ°, Ð° ÑÐ°Ðº Ð¶Ðµ Ð±ÑÐ»Ð¸ Ð¿Ð¾Ð»ÑÑÐµÐ½Ñ Ð½ÐµÐ¾Ð±ÑÐ¾Ð´Ð¸Ð¼ÑÐµ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ¸.
Ð ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐµ Ð±ÑÐ»Ð° ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ð° ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸Ñ ÑÐ¾Ð·Ð´Ð°Ð½Ð¸Ñ ÑÐ¾Ð»Ð½ÐµÑÐ½Ð¾-ÑÐ»ÐµÐ¿ÑÑ ÑÐ¾ÑÐ¾Ð´ÐµÑÐµÐºÑÐ¾ÑÐ¾Ð² Ñ Ð±Ð°ÑÑÐµÑÐ¾Ð¼ Ð¨Ð¾ÑÑÐºÐ¸ Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ðµ ÑÐ²ÐµÑÐ´ÑÑ ÑÐ°ÑÑÐ²Ð¾ÑÐ¾Ð² AlGaN, ÐºÐ¾ÑÐ¾ÑÑÐµ Ð½Ðµ ÑÑÑÑÐ¿Ð°ÑÑ Ð»ÑÑÑÐ¸Ð¼ Ð¼Ð¸ÑÐ¾Ð²ÑÐ¼ ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐ°Ð¼.
description: This work is devoted to the development of a post-growth technology for creating solar-blind photodetectors based on the Schottky barrier. Tasks that were solved during the study:
1. The study of the features of post growth processing of AlGaN solid solutions.
2. Selection of spraying and annealing of an ohmic contact.
3. The study of the influence of various parameters on the ohmic contact.
4. Development of a full production cycle for post-growth production of sun-blind photodetectors with a Schottky barrier based on AlGaN solid solutions.
The work was carried out in the laboratory of the Ioffe Institute, where the growth of structures and post-growth processing were carried out, as well as the necessary characteristics were obtained.
As a result, a technology was developed to create sun-blind photodetectors with a Schottky barrier based on AlGaN solid solutions, which are not inferior to the best world results.