title: Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ° ÐÐ­ÐÐ¡ - Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ°
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Development of a sensitive element of the MEMS accelerometer
Creators: name: ÐÐ¾ÑÐ´Ð²Ð¸Ð½Ð¾Ð², ÐÐ¼Ð¸ÑÑÐ¸Ð¹
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2023
Subjects: ÐÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÑ
ÐÐ°ÑÐµÐ¼Ð°ÑÐ¸ÑÐµÑÐºÐ¾Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ
ÑÐ»ÐµÐºÑÑÐ¾Ð´Ð½ÑÐµ ÑÑÑÑÐºÑÑÑÑ
ÑÐ¿ÑÑÐ³Ð¸Ð¹ Ð¿Ð¾Ð´Ð²ÐµÑ
ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½ÑÐ¹ ÑÐ»ÐµÐ¼ÐµÐ½Ñ
Ð¸Ð½ÐµÑÑÐ¸Ð¾Ð½Ð½Ð°Ñ Ð¼Ð°ÑÑÐ°
electrode structures
elastic suspension
folded beam
sensitive element

description: ÐÐ±ÑÐµÐºÑ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ â ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½ÑÐ¹ ÑÐ»ÐµÐ¼ÐµÐ½Ñ (Ð§Ð­) Ð¼Ð¸ÐºÑÐ¾Ð¼ÐµÑÐ°Ð½Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ° (ÐÐÐ). Ð¦ÐµÐ»Ñ ÑÐ°Ð±Ð¾ÑÑ â Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ ÑÐ´Ð°ÑÐ¾Ð¿ÑÐ¾ÑÐ½Ð¾Ð³Ð¾ Ð§Ð­ ÐµÐ¼ÐºÐ¾ÑÑÐ½Ð¾Ð³Ð¾ ÐÐÐ. Ð ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐµ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ Ð¿ÑÐ¾Ð²Ð¾Ð´Ð¸Ð»ÑÑ Ð¾Ð±Ð·Ð¾Ñ Ð°ÐºÑÑÐ°Ð»ÑÐ½Ð¾Ð¹ Ð»Ð¸ÑÐµÑÐ°ÑÑÑÑ. Ð Ð°ÑÑÐ¼Ð¾ÑÑÐµÐ½Ñ Ð¾ÑÐ½Ð¾Ð²Ð½ÑÐµ ÑÐ¸Ð¿Ñ Ð´Ð°ÑÑÐ¸ÐºÐ¾Ð² Ð´Ð»Ñ Ð¸Ð·Ð¼ÐµÑÐµÐ½Ð¸Ñ ÑÑÐºÐ¾ÑÐµÐ½Ð¸Ñ, Ð¾Ð¿Ð¸ÑÐ°Ð½Ñ Ð¿ÑÐ¸Ð½ÑÐ¸Ð¿Ñ Ð¸Ñ ÑÐ°Ð±Ð¾Ñ, Ð¾ÑÐ½Ð¾Ð²Ð½ÑÐµ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÑ, ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸Ð·ÑÑÑÐ¸Ðµ Ð´Ð°Ð½Ð½ÑÐµ ÑÑÑÑÐ¾Ð¹ÑÑÐ², ÑÑÐ¼Ñ, Ð²Ð»Ð¸ÑÑÑÐ¸Ðµ Ð½Ð° Ð¿Ð¾ÐºÐ°Ð·Ð°Ð½Ð¸Ñ Ð¿ÑÐ¸Ð±Ð¾ÑÐ¾Ð². Ð Ð°ÑÑÐ¼Ð¾ÑÑÐµÐ½Ñ Ð¾ÑÐ½Ð¾Ð²Ð½ÑÐµ ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸Ð¸ Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð¸Ñ, Ð¼Ð°ÑÐµÑÐ¸Ð°Ð»Ñ Ð¸ ÑÑÑÑÐºÑÑÑÑ, ÐºÐ¾ÑÐ¾ÑÑÐµ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·ÑÑÑÑÑ Ð¿ÑÐ¸ Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð¸Ð¸ ÐÐÐ.Â ÐÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð¾ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ Ð§Ð­ ÐÐÐ. Ð Ð°ÑÑÑÐ¸ÑÐ°Ð½Ñ Ð¾ÑÐ½Ð¾Ð²Ð½ÑÐµ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÑ ÑÐ¿ÑÑÐ³Ð¾Ð³Ð¾ Ð¿Ð¾Ð´Ð²ÐµÑÐ° (Ð£Ð) Ð¸ ÑÐ»ÐµÐºÑÑÐ¾Ð´Ð½ÑÑ ÑÑÑÑÐºÑÑÑ (Ð­Ð¡). ÐÑÐµÐ½ÐµÐ½Ð¾ Ð²Ð»Ð¸ÑÐ½Ð¸Ðµ Ð¼ÐµÑÐ°Ð½Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ ÑÑÐ¼Ð° Ð½Ð° Ð§Ð­. ÐÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð¾ Ð¸Ð¼Ð¸ÑÐ°ÑÐ¸Ð¾Ð½Ð½Ð¾Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ Ñ ÑÐµÐ»ÑÑ ÑÑÐ°Ð²Ð½ÐµÐ½Ð¸Ñ Ð¿Ð¾Ð»ÑÑÐµÐ½Ð½ÑÑ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸Ðº Ñ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ°Ð¼Ð¸, Ð¿Ð¾Ð»ÑÑÐµÐ½Ð½ÑÐ¼Ð¸ Ð² Ð¼Ð°ÑÐµÐ¼Ð°ÑÐ¸ÑÐµÑÐºÐ¾Ð¼ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ð¸. ÐÐ°Ð½Ð½ÑÐ¹ Ð§Ð­ Ð¸Ð¼ÐµÐµÑ Ð¿Ð¾Ð²ÑÑÐµÐ½Ð½ÑÑ ÑÐ´Ð°ÑÐ¾Ð¿ÑÐ¾ÑÐ½Ð¾ÑÑÑ, Ð¼ÐµÐ½ÑÑÑÑ Ð¼Ð°ÑÑÑ Ð¸ Ð¼Ð°Ð»ÑÐµ Ð³Ð°Ð±Ð°ÑÐ¸ÑÑ, ÑÑÐ¾ ÑÐ²Ð»ÑÐµÑÑÑ Ð¿ÑÐµÐ¸Ð¼ÑÑÐµÑÑÐ²Ð¾Ð¼ Ð² ÑÑÐ°Ð²Ð½ÐµÐ½Ð¸Ð¸ Ñ ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ð½ÑÐ¼Ð¸ ÑÑÑÑÐ¾Ð¹ÑÑÐ²Ð°Ð¼Ð¸. Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ð½ÑÐ¹ Ð§Ð­ Ð¼Ð¾Ð¶ÐµÑ Ð¿ÑÐ¸Ð¼ÐµÐ½ÑÑÑÑÑ Ð² Ð¿ÑÐ¸Ð»Ð¾Ð¶ÐµÐ½Ð¸ÑÑ Ñ Ð²ÑÑÐ¾ÐºÐ¸Ð¼Ð¸ ÑÑÐµÐ±Ð¾Ð²Ð°Ð½Ð¸ÑÐ¼Ð¸ Ðº ÑÐ´Ð°ÑÐ½ÑÐ¼ Ð½Ð°Ð³ÑÑÐ·ÐºÐ°Ð¼, Ð½Ð°Ð¿ÑÐ¸Ð¼ÐµÑ, Ð² Ð±ÑÑÐ¾Ð²ÑÑ ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ°Ñ.
description: Object of study is micromechanical accelerometer (MMA) sensing element (SE). The aim is to simulate the impact-resistant SE of the capacitive MMA. As a result of the study, a review of the current literature was conducted. The main types of sensors for measuring acceleration were considered, the principles of their work, the main parameters characterizing these devices, the noises affecting the readings of the devices were described. The basic manufacturing technologies, materials and structures that are used in the manufacture of MMA are reviewed.Â The simulation of MMA SE is carried out. The basic parameters of the folded beam and electrode structures are calculated. The influence of mechanical noise on SE is evaluated. The simulation modeling is carried out in order to compare the obtained characteristics with the characteristics obtained in the mathematical modeling. The given SE has an increased impact strength, less weight and small dimensions, which is an advantage in comparison with the developed devices. The developed SE can be used in applications with high requirements to shock loads, for example, in drilling rigs.