title: ÐÐ­ÐÐ¡ Ð¼Ð¸ÐºÑÐ¾ÑÐ¾Ð½Ñ Ð´Ð»Ñ ÑÐ¾ÑÐ¾Ð°ÐºÑÑÑÐ¸ÑÐµÑÐºÐ¸Ñ Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ð¹
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: MEMS microphones for photoacoustic applications
Creators: name: ÐÐµÐ¿Ð¸ÑÐ¾Ð², ÐÐ¾Ð³Ð´Ð°Ð½
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2020
Subjects: ÐÐ­ÐÐ¡
ÑÐ¾ÑÐ¾Ð°ÐºÑÑÑÐ¸ÐºÐ°
Ð¼Ð¸ÐºÑÐ¾ÑÐ¾Ð½Ñ
Ð¼Ð¸ÐºÑÐ¾ÑÐµÑ Ð½Ð¾Ð»Ð¾Ð³Ð¸Ð¸
MEMS
photoacoustics
microphones
microtechnology

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description: This work is devoted to the substantiation of the choice and initial requirements for the development of microelectromechanical microphones for solving photoacoustic problems. Tasks that were solved in the course of the work: 1. Overview of the schemes and structures of modern photoacoustic devices 2. Overview of the principles and devices of classic microphones 3. Study of the design and manufacturing techniques of MEMS microphones 4. Selection of the types and designs of MEMS microphones for photoacoustic applications 5. Selection of technologies available for the manufacture of MEMS microphones. 6. Development of options for developing a MEMS microphone for photoacoustic applications. The work was carried out on the basis of the RL NMST, where a significant part of the actual material was collected on the technological processes, types and designs of MEMS devices. Surveys showing the current state of development in the field of photoacoustics and MEMS microphones have been completed. A study of the design and technologies of RL NMST was carried out, the possibilities of applying technologies to create MEMS microphones were analyzed. As a result, proposals were developed on the composition and design options for the development of MEMS microphones for photoacoustic applications.