title: ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ðµ Ð²Ð»Ð¸ÑÐ½Ð¸Ñ ÑÐµÑ Ð½Ð¾Ð»Ð¾Ð³Ð¸ÑÐµÑÐºÐ¸Ñ Ð¿ÑÐ¾ÑÐµÑÑÐ¾Ð² Ð½Ð° Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ð¸Ðµ Ð¸ Ñ Ð°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ¸ Ð¼ÐµÐ¼Ð±ÑÐ°Ð½Ð½Ð¾Ð³Ð¾ Ð´Ð°ÑÑÐ¸ÐºÐ° Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ ÐºÐ¾Ð¼Ð¿ÐµÐ½ÑÐ°ÑÐ¸Ð¾Ð½Ð½Ð¾Ð³Ð¾ ÑÐ¸Ð¿Ð°
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Exploring of influence of technological processes on producing and characteristics of pressure sensor diaphragm of compression-compensating type
Creators: name: Ð¢ÐµÑÐµÐ½ÑÑÐµÐ²Ð°, ÐÐ»ÑÐ½Ð°
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2020
Subjects: ÐÐµÐ¼Ð±ÑÐ°Ð½Ð½ÑÐµ Ð¿ÑÐ¸Ð±Ð¾ÑÑ
ÐÐµÐ¼Ð±ÑÐ°Ð½Ñ
ÐÐ°ÑÑÐ¸ÐºÐ¸ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ
ÐÐ°Ð½Ð¾ÑÑÑÑÐºÑÑÑÐ½ÑÐµ Ð¼Ð°ÑÐµÑÐ¸Ð°Ð»Ñ
Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÐµÐºÑÑÐ¾Ð¼ÐµÑ Ð°Ð½Ð¸ÑÐµÑÐºÐ¸Ðµ ÑÐ¸ÑÑÐµÐ¼Ñ
ÑÐµÑ Ð½Ð¾Ð»Ð¾Ð³Ð¸Ð¸ ÐÐ­ÐÐ¡
MEMS
MEMS-technology

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description: The given work is devoted to developing of construction of detecting element of pressure sensor diaphragm of compression-compensating type, calculating of basic parameters of detecting element of pressure sensor diaphragm, suggestion of technological process for producing of developed detecting element of pressure sensor diaphragm for further research of influence of technological processes on producing and characteristics of pressure sensor diaphragm of compression-compensating type. Problems that were solving in the given work: 1. developing of construction of detecting element of pressure sensor diaphragm of compression-compensating type; 2. conducting necessary calculations of basic parameters of detecting element of pressure sensor diaphragm by analytical method and finite element modeling; 3. for developed construction was suggested technological process of producing detecting element of pressure sensor diaphragm of compression-compensating type; 4. on suggested technological process was produced detecting element of pressure sensor diaphragm of compression-compensating type. The work was made on the base of Â«GYROOPTICSÂ» where the main part of work was done: developing of construction of detecting element, conducting calculations of detecting element of pressure diaphragm transducer by analytical method and finite element modeling, was also suggested technological process for producing of detecting element. As a result, detecting element of pressure sensor diaphragm of compression-compensating type was produced.