title: ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ðµ ÑÐ¸Ð·Ð¸ÑÐµÑÐºÐ¸Ñ Ð¿ÑÐ¾ÑÐµÑÑÐ¾Ð², Ð¾Ð¿ÑÐµÐ´ÐµÐ»ÑÑÑÐ¸Ñ Ð¿ÑÐµÐ´ÐµÐ»ÑÐ½ÑÐµ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÑ ÑÐ°Ð±Ð¾ÑÑ ÑÑÑÑÐ¾Ð¹ÑÑÐ² Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ðµ ÐÐ­ÐÐ¡
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: Research of physical processes determined critical operating options of MEMS devices
Creators: name: ÐÑÐ´Ð°Ð½ÑÐµÐ², ÐÐ»ÐµÐºÑÐ°Ð½Ð´Ñ
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2020
Subjects: ÐÐ­ÐÐ¡
Ð¸Ð½ÐµÑÑÐ¸Ð¾Ð½Ð½ÑÐµ Ð´Ð°ÑÑÐ¸ÐºÐ¸
Ð¿ÑÐµÐ·Ð¾ÑÐµÐ·Ð¸ÑÑÐ¸Ð²Ð½ÑÐµ Ð´Ð°ÑÑÐ¸ÐºÐ¸
ÐºÐ°ÑÐ±Ð¸Ð´ ÐºÑÐµÐ¼Ð½Ð¸Ñ
ÐÐÐ
ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÐ½Ð°Ñ ÑÑÐ¾Ð¹ÐºÐ¾ÑÑÑ
ÑÐ°Ð´Ð¸Ð°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÑÐ¾Ð¹ÐºÐ¾ÑÑÑ
MEMS
inertia sensors
piezoresistive sensors
carborundum
SOI
thermal durability
radioactive durability

description: ÐÐ°Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¿Ð¾ÑÐ²ÑÑÐµÐ½Ð° Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸Ð¹ Ð¿Ð¾Ð²ÑÑÐµÐ½Ð¸Ñ ÑÐ°ÐºÐ¸Ñ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸Ðº Ð¸Ð½ÐµÑÑÐ¸Ð¾Ð½Ð½ÑÑ ÐÐ­ÐÐ¡-Ð´Ð°ÑÑÐ¸ÐºÐ¾Ð², ÐºÐ°Ðº Ð´Ð¸Ð°Ð¿Ð°Ð·Ð¾Ð½ ÑÐ°Ð±Ð¾ÑÐ¸Ñ ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑ Ð¸ ÑÐ°Ð´Ð¸Ð°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÑÐ¾Ð¹ÐºÐ¾ÑÑÑ. ÐÐ°Ð´Ð°ÑÐ¸, ÐºÐ¾ÑÐ¾ÑÑÐµ ÑÐµÑÐ°Ð»Ð¸ÑÑ Ð² ÑÐ¾Ð´Ðµ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ: 1. ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ðµ Ð²Ð»Ð¸ÑÐ½Ð¸Ñ ÑÐ°Ð´Ð¸Ð°ÑÐ¸Ð¾Ð½Ð½Ð¾Ð³Ð¾ Ð²Ð¾Ð·Ð´ÐµÐ¹ÑÑÐ²Ð¸Ñ Ð½Ð° Ð¸Ð½ÐµÑÑÐ¸Ð¾Ð½Ð½ÑÐ¹ ÐÐ­ÐÐ¡-Ð´Ð°ÑÑÐ¸Ðº; 2. ÐÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ðµ Ð²Ð»Ð¸ÑÐ½Ð¸Ñ ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑÐ½Ð¾Ð³Ð¾ Ð²Ð¾Ð·Ð´ÐµÐ¹ÑÑÐ²Ð¸Ñ; 3. ÐÐ±Ð·Ð¾Ñ Ð¿ÑÐ¸Ð¼ÐµÐ½ÑÐµÐ¼ÑÑ Ð¸ ÑÐ°Ð·ÑÐ°Ð±Ð°ÑÑÐ²Ð°ÐµÐ¼ÑÑ ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸Ð¹; 4. ÐÐ½Ð°Ð»Ð¸Ð· Ð¿ÑÐ±Ð»Ð¸ÐºÐ°ÑÐ¸Ð¹, Ð¿Ð¾ÑÐ²ÑÑÑÐ½Ð½ÑÑ Ð¿ÐµÑÑÐ¿ÐµÐºÑÐ¸Ð²Ð½ÑÐ¼ ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸ÑÐ¼; 5. Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ñ Ð¿ÐµÑÑÐ¿ÐµÐºÑÐ¸Ð²Ð½ÑÑ ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸Ð¹. Ð Ð°Ð±Ð¾ÑÐ° Ð²ÑÐ¿Ð¾Ð»Ð½ÑÐ»Ð°ÑÑ Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ðµ Ð»Ð¸ÑÐµÑÐ°ÑÑÑÐ½Ð¾Ð³Ð¾ Ð°Ð½Ð°Ð»Ð¸Ð·Ð° Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ð¹, ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸Ð¹ Ð¸ Ð¿Ð°ÑÐµÐ½ÑÐ¾Ð². Ð ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐµ Ð±ÑÐ»Ð¸ Ð¿ÑÐ¾Ð°Ð½Ð°Ð»Ð¸Ð·Ð¸ÑÐ¾Ð²Ð°Ð½Ñ ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸Ð¸, Ñ Ð¿Ð¾Ð¼Ð¾ÑÑÑ ÐºÐ¾ÑÐ¾ÑÑÑ Ð²Ð¾Ð·Ð¼Ð¾Ð¶Ð½Ð¾ ÑÐ¾Ð·Ð´Ð°Ð½Ð¸Ðµ Ð¸Ð½ÐµÑÑÐ¸Ð¾Ð½Ð½Ð¾Ð³Ð¾ ÐÐ­ÐÐ¡-Ð´Ð°ÑÑÐ¸ÐºÐ°, Ð¾Ð±Ð»Ð°Ð´Ð°ÑÑÐµÐ³Ð¾ ÑÐ¸ÑÐ¾ÐºÐ¸Ð¼ Ð´Ð¸Ð°Ð¿Ð°Ð·Ð¾Ð½Ð¾Ð¼ Ð¸Ð·Ð¼ÐµÑÑÐµÐ¼ÑÑ ÑÑÐºÐ¾ÑÐµÐ½Ð¸Ð¹, ÑÐ°Ð±Ð¾ÑÐ¸Ñ ÑÐµÐ¼Ð¿ÐµÑÐ°ÑÑÑ Ð¸ ÑÐ°Ð´Ð¸Ð°ÑÐ¸Ð¾Ð½Ð½Ð¾Ð¹ ÑÑÐ¾Ð¹ÐºÐ¾ÑÑÑÑ, ÑÑÐ¾ Ð¿Ð¾Ð·Ð²Ð¾Ð»ÑÐµÑ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°ÑÑ ÐµÐ³Ð¾ Ð´Ð»Ñ Ð¸ÑÐ¿ÑÑÐ°Ð½Ð¸Ð¹ Ð¸ Ð¼Ð¾Ð½Ð¸ÑÐ¾ÑÐ¸Ð½Ð³Ð° Ð°Ð²Ð¸Ð°ÑÐ¸Ð¾Ð½Ð½ÑÑ Ð¸ ÐºÐ¾ÑÐ¼Ð¸ÑÐµÑÐºÐ¸Ñ Ð´Ð²Ð¸Ð³Ð°ÑÐµÐ»ÐµÐ¹.
description: The given work is devoted to research of technologies which are able to increase such operating options of inertia MEMS sensors as diapason of working temperature and radioactive durability. The research set the following goals: 1. Research of radiation effects on MEMS sensor; 2. Research of thermal effects; 3. Review of technologies which are both being used and being under development; 4. Analysis of contributions devoted to advanced technologies; 5. Propose of usage advanced technologies. The work was made based on analysis of researches, technologies and patents. As a result, technologies which allow production of inertia MEMS-sensor with wide diapasons of calculated accelerations and working tem-perature and radiation durability were analyzed.