title: ÐÐ¿ÑÐµÐ´ÐµÐ»ÐµÐ½Ð¸Ðµ Ð²Ð»Ð¸ÑÐ½Ð¸Ñ Ð´Ð¸ÑÑÐ¸Ð¿Ð°ÑÐ¸Ð²Ð½ÑÑ ÑÐ°ÐºÑÐ¾ÑÐ¾Ð² Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ð½ÑÐµ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÑ Ð¼Ð¸ÐºÑÐ¾Ð¼ÐµÑ Ð°Ð½Ð¸ÑÐµÑÐºÐ¸Ñ Ð³Ð¸ÑÐ¾ÑÐºÐ¾Ð¿Ð¾Ð²
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: Influence research of dissipative factors to basic parameters of micromechanic gyroscopes
Creators: name: ÐÐ»Ð°Ð´Ð¸Ð¼Ð¸ÑÐ¾Ð², ÐÐ»Ð°Ð´Ð¸ÑÐ»Ð°Ð²
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2020
Subjects: Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÐµÐºÑÑÐ¾Ð¼ÐµÑ Ð°Ð½Ð¸ÑÐµÑÐºÐ¸Ð¹ Ð²Ð¸Ð±ÑÐ°ÑÐ¸Ð¾Ð½Ð½ÑÐ¹ Ð³Ð¸ÑÐ¾ÑÐºÐ¾Ð¿
Ð°Ð¼Ð¿Ð»Ð¸ÑÑÐ´Ð½Ð¾ â ÑÐ°ÑÑÐ¾ÑÐ½ÑÐµ Ñ Ð°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ¸
ÑÐ°Ð·Ð° â ÑÐ°ÑÑÐ¾ÑÐ½ÑÐµ Ñ Ð°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ¸
Ð´Ð¾Ð±ÑÐ¾ÑÐ½Ð¾ÑÑÑ
Ð°Ð¼Ð¿Ð»Ð¸ÑÑÐ´Ð° ÐºÐ¾Ð»ÐµÐ±Ð°Ð½Ð¸Ð¹
ÑÐ°Ð·Ð° ÐºÐ¾Ð»ÐµÐ±Ð°Ð½Ð¸Ð¹
ÑÐµÐ·Ð¾Ð½Ð°Ð½ÑÐ½Ð°Ñ ÑÐ°ÑÑÐ¾ÑÐ°
Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ðµ
Ð¿Ð¾ÑÐµÑÐ¸ ÑÐ½ÐµÑÐ³Ð¸Ð¸
microelectromechanical vibratory gyroscope
frequency â amplitude characteristics
phase â amplitude characteristics
quality factor
oscillating amplitude
oscillating phase
resonance frequency
pressure
damping

description: ÐÐ°Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¿Ð¾ÑÐ²ÑÑÐµÐ½Ð° Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ Ð´Ð¸ÑÑÐ¸Ð¿Ð°ÑÐ¸Ð²Ð½ÑÑ ÑÐ°ÐºÑÐ¾ÑÐ¾Ð², Ð²Ð»Ð¸ÑÑÑÐ¸Ñ Ð½Ð° ÑÐ°Ð±Ð¾ÑÑ Ð¼Ð¸ÐºÑÐ¾Ð¼ÐµÑÐ°Ð½Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ Ð²Ð¸Ð±ÑÐ°ÑÐ¸Ð¾Ð½Ð½Ð¾Ð³Ð¾ Ð³Ð¸ÑÐ¾ÑÐºÐ¾Ð¿Ð°. Ð ÑÐ¾Ð´Ðµ Ð²ÑÐ¿Ð¾Ð»Ð½ÐµÐ½Ð¸Ñ ÑÐ°Ð±Ð¾ÑÑ Ð±ÑÐ» Ð¿ÑÐ¾Ð²ÐµÐ´ÑÐ½ Ð¾Ð±Ð·Ð¾Ñ Ð»Ð¸ÑÐµÑÐ°ÑÑÑÑ, Ð¿Ð¾ÑÐ²ÑÑÑÐ½Ð½Ð¾Ð¹ Ð¿ÑÐ¸Ð½ÑÐ¸Ð¿Ñ Ð´ÐµÐ¹ÑÑÐ²Ð¸Ñ, Ð²Ð½ÑÑÑÐµÐ½Ð½ÐµÐ¹ ÑÑÑÑÐºÑÑÑÐµ Ð¸ Ð¾ÑÐ½Ð¾Ð²Ð½ÑÐ¼ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ°Ð¼ Ð²Ð¸Ð±ÑÐ°ÑÐ¸Ð¾Ð½Ð½ÑÑ Ð³Ð¸ÑÐ¾ÑÐºÐ¾Ð¿Ð¾Ð², Ð° ÑÐ°ÐºÐ¶Ðµ ÐºÐ»Ð°ÑÑÐ¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¸ Ð³Ð¸ÑÐ¾ÑÐºÐ¾Ð¿Ð¾Ð² Ð² ÑÐµÐ»Ð¾Ð¼.
Ð¢Ð°ÐºÐ¶Ðµ Ð±ÑÐ» Ð¿ÑÐ¾Ð¸Ð·Ð²ÐµÐ´ÑÐ½ Ð°Ð½Ð°Ð»Ð¸ÑÐ¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ°ÑÑÑÑ ÑÐµÐ·Ð¾Ð½Ð°Ð½ÑÐ½ÑÑ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸Ðº Ð³Ð¸ÑÐ¾ÑÐºÐ¾Ð¿Ð° Ñ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¸ÐµÐ¼ Ð·Ð°Ð´Ð°Ð½Ð½ÑÑ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² ÑÑÑÑÐºÑÑÑÑ. Ð Ð¿ÑÐ¾Ð³ÑÐ°Ð¼Ð¼Ðµ ÑÐ¸ÑÐ»ÐµÐ½Ð½Ð¾Ð³Ð¾ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ Â«Ð¡omsol MultiphysicsÂ» ÑÐ¾Ð·Ð´Ð°Ð½Ð° Ð¼Ð¾Ð´ÐµÐ»Ñ ÑÑÑÑÐºÑÑÑÑ Ð³Ð¸ÑÐ¾ÑÐºÐ¾Ð¿Ð° Ð¸ Ð¸Ð·ÑÑÐµÐ½Ð° Ð½Ð° Ð¿ÑÐµÐ´Ð¼ÐµÑ ÑÐµÐ·Ð¾Ð½Ð°Ð½ÑÐ½ÑÑ ÑÐ°ÑÑÐ¾Ñ Ð² Ð²Ð°ÐºÑÑÐ¼Ðµ, Ñ ÑÑÑÑÐ¾Ð¼ Ð¸Ð·Ð¾ÑÑÐ¾Ð¿Ð½Ð¾Ð³Ð¾ ÐºÐ¾ÑÑÑÐ¸ÑÐ¸ÐµÐ½ÑÐ° Ð¿Ð¾ÑÐµÑÑ Ð¼Ð°ÑÐµÑÐ¸Ð°Ð»Ð°, ÑÐµÐ¿Ð»Ð¾Ð²ÑÑ Ð¿Ð¾ÑÐµÑÑ, Ð° ÑÐ°ÐºÐ¶Ðµ Ð²ÑÐ·ÐºÐ¾ - ÑÐ¿ÑÑÐ³Ð¸Ñ Ð¿Ð¾ÑÐµÑÑ Ð² ÑÐ¾Ð½ÐºÐ¾Ð¹ Ð¿Ð»ÑÐ½ÐºÐµ Ð¿ÑÐ¸Ð»ÐµÐ³Ð°ÑÑÐµÐ³Ð¾ Ðº ÑÑÑÑÐ¾Ð¹ÑÑÐ²Ñ Ð³Ð°Ð·Ð°.
Ð ÑÐ¾Ð´Ðµ ÑÐºÑÐ¿ÐµÑÐ¸Ð¼ÐµÐ½ÑÐ°Ð»ÑÐ½Ð¾Ð³Ð¾ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ Ð±ÑÐ»Ð¸ Ð¸Ð·ÑÑÐµÐ½Ñ ÑÑÐ¸ Ð¾Ð±ÑÐ°Ð·ÑÐ° Ð³Ð¸ÑÐ¾ÑÐºÐ¾Ð¿Ð°, Ð´Ð²Ð° Ð¸Ð· ÐºÐ¾ÑÐ¾ÑÑÑ Ð½Ð°ÑÐ¾Ð´Ð¸Ð»Ð¸ÑÑ Ð²Ð½ÑÑÑÐ¸ Ð²Ð°ÐºÑÑÐ¼Ð½Ð¾Ð³Ð¾ ÐºÐ¾ÑÐ¿ÑÑÐ°, Ð° Ð¾Ð´Ð¸Ð½ Ð±ÐµÐ· ÐºÐ¾ÑÐ¿ÑÑÐ°. ÐÑÐ»Ð¸ Ð¸Ð·ÑÑÐµÐ½Ñ Ð°Ð¼Ð¿Ð»Ð¸ÑÑÐ´Ð½Ð¾ â ÑÐ°ÑÑÐ¾ÑÐ½ÑÐµ Ð¸ ÑÐ°Ð·Ð° - ÑÐ°ÑÑÐ¾ÑÐ½ÑÐµ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ¸ Ð²ÑÐµÑ Ð¾Ð±ÑÐ°Ð·ÑÐ¾Ð², Ð¿ÑÐ¸ ÑÑÐ¾Ð¼ Ð¾Ð±ÑÐ°Ð·ÐµÑ Ð±ÐµÐ· ÐºÐ¾ÑÐ¿ÑÑÐ° Ð±ÑÐ» Ð¸Ð·ÑÑÐµÐ½ Ð² ÑÑÐ»Ð¾Ð²Ð¸ÑÑ Ð¼ÐµÐ½ÑÑÑÐµÐ³Ð¾ÑÑ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ Ð²Ð½ÑÑÑÐ¸ Ð²Ð°ÐºÑÑÐ¼Ð½Ð¾Ð¹ ÐºÐ°Ð¼ÐµÑÑ.
Ð ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐµ Ð°Ð½Ð°Ð»Ð¸Ð·Ð° Ð´Ð°Ð½Ð½ÑÑ ÑÐµÐ¾ÑÐµÑÐ¸ÑÐµÑÐºÐ¾Ð³Ð¾ ÑÐ°ÑÑÑÑÐ°, ÐºÐ¾Ð¼Ð¿ÑÑÑÐµÑÐ½Ð¾Ð³Ð¾ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ñ Ð¸ ÑÐºÑÐ¿ÐµÑÐ¸Ð¼ÐµÐ½ÑÐ°Ð»ÑÐ½Ð¾Ð³Ð¾ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ Ð±ÑÐ»Ð¸ Ð¿Ð¾Ð»ÑÑÐµÐ½Ñ Ð·Ð½Ð°ÑÐµÐ½Ð¸Ñ ÑÐµÐ·Ð¾Ð½Ð°Ð½ÑÐ½ÑÑ ÑÐ°ÑÑÐ¾Ñ Ð¸ Ð´Ð¾Ð±ÑÐ¾ÑÐ½Ð¾ÑÑÐ¸ Ð¿ÑÐ¸ ÑÐ°Ð·Ð»Ð¸ÑÐ½ÑÑ ÑÑÐ»Ð¾Ð²Ð¸ÑÑ. ÐÐ¾ÑÑÑÐ¾ÐµÐ½Ð° Ð·Ð°Ð²Ð¸ÑÐ¸Ð¼Ð¾ÑÑÑ Ð´Ð¾Ð±ÑÐ¾ÑÐ½Ð¾ÑÑÐ¸ Ð¾Ñ Ð²Ð½ÐµÑÐ½ÐµÐ³Ð¾ Ð´Ð°Ð²Ð»ÐµÐ½Ð¸Ñ, Ð° ÑÐ°ÐºÐ¶Ðµ Ð·Ð°Ð²Ð¸ÑÐ¸Ð¼Ð¾ÑÑÐ¸ Ð°Ð¼Ð¿Ð»Ð¸ÑÑÐ´Ñ ÐºÐ¾Ð»ÐµÐ±Ð°Ð½Ð¸Ñ Ð¸ ÑÐ°Ð·Ñ Ð¾Ñ Ð¾ÑÐ½Ð¾ÑÐµÐ½Ð¸Ñ ÑÐ°ÑÑÐ¾ÑÑ ÐºÐ¾Ð»ÐµÐ±Ð°Ð½Ð¸Ñ Ðº ÑÐµÐ·Ð¾Ð½Ð°Ð½ÑÐ½Ð¾Ð¹ ÑÐ°ÑÑÐ¾ÑÐµ Ð¿ÑÐ¸ ÑÐ°Ð·Ð»Ð¸ÑÐ½ÑÑ Ð·Ð½Ð°ÑÐµÐ½Ð¸ÑÑ Ð´Ð¾Ð±ÑÐ¾ÑÐ½Ð¾ÑÑÐ¸. ÐÐ¾Ð»ÑÑÐµÐ½Ñ Ð·Ð½Ð°ÑÐµÐ½Ð¸Ñ Ð´Ð¾Ð±ÑÐ¾ÑÐ½Ð¾ÑÑÐ¸ ÑÑÑÑÐ¾Ð¹ÑÑÐ²Ð° Ð¿ÑÐ¸ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¸Ð¸ ÑÐ°Ð·Ð»Ð¸ÑÐ½ÑÑ ÐºÐ»ÐµÐµÐ²ÑÑ ÑÐ¾ÐµÐ´Ð¸Ð½ÐµÐ½Ð¸Ð¹.
ÐÐ° Ð¾ÑÐ½Ð¾Ð²Ðµ Ð²ÑÐµÑ Ð¿Ð¾Ð»ÑÑÐµÐ½Ð½ÑÑ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸Ðº Ð¸ Ð·Ð°Ð²Ð¸ÑÐ¸Ð¼Ð¾ÑÑÐµÐ¹ Ð±ÑÐ»Ð¸ Ð¿ÑÐµÐ´Ð»Ð¾Ð¶ÐµÐ½Ñ Ð¿ÑÑÐ¸ ÑÐ¼ÐµÐ½ÑÑÐµÐ½Ð¸Ñ Ð²Ð»Ð¸ÑÐ½Ð¸Ñ Ð²Ð½ÐµÑÐ½Ð¸Ñ ÑÐ°ÐºÑÐ¾ÑÐ¾Ð² Ð½Ð° Ð´Ð¾Ð±ÑÐ¾ÑÐ½Ð¾ÑÑÑ ÑÑÑÑÐ¾Ð¹ÑÑÐ²Ð°.
description: The given work devoted to investigation of dissipative factors, influencing to the work of micromechanic vibratory gyroscope. During implementation of the work, a literature review has been composed. The review is dedicated to the working principle, intrinsic structure, basic parameters of vibratory gyroscope and classification.
Besides this, an analytical calculation of resonance characteristics of gyroscope using given parameters has been made. Gyroscope structure model using numerical simulation program âComsol Mutliphysicsâ has been created. The modelâs resonance characteristics has been researched in different conditions: in vacuum, with temperature damping, also with thin-film gas damping.
During experimental research, 3 samples of gyroscope have been investigated: 2 gyroscopes implemented in vacuum body, and 1 gyroscope without body. Frequency â amplitude characteristics and phase â amplitude characteristics have studied in vacuum and in conditions of changing external pressure.
As the result of data analysis of theoretical calculation, computer modelling and experimental investigation, resonance frequency and quality factor values in different conditions have been found. Quality factor and pressure relation, oscillating amplitude and phase and quotient of oscillating frequency to resonance frequency relation at different values of quality factor has been built.
Based on received characteristics and relations, possible ways decreasing influence of external factors to the quality factor have been suggested.