title: Ð Ð°ÑÑÐµÑ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² ÐºÐ°ÑÐºÐ°Ð´Ð¾Ð² ÑÑÐ¾Ð»ÐºÐ½Ð¾Ð²ÐµÐ½Ð¸Ð¹ Ð¿ÑÐ¸ Ð¸Ð¾Ð½Ð½Ð¾Ð¹ Ð±Ð¾Ð¼Ð±Ð°ÑÐ´Ð¸ÑÐ¾Ð²ÐºÐµ Ð¾ÐºÑÐ¸Ð´Ð° Ð³Ð°Ð»Ð»Ð¸Ñ
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: Calculation of parameters of collision cascades during ion bombardment of gallium oxide
Creators: name: ÐÐ¾ÑÐ½Ðµ, Ð¯Ð½Ð°
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2023
Subjects: Ð¿Ð»Ð¾ÑÐ½Ð¾ÑÑÑ ÐºÐ°ÑÐºÐ°Ð´Ð°
Ð¾ÐºÑÐ¸Ð´ Ð³Ð°Ð»Ð»Ð¸Ñ Ð°Ð»ÑÑÐ°
ÑÑÐ°ÐºÑÐ°Ð»ÑÐ½ÑÐµ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÑ
Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ Ð¾Ð±Ð»ÑÑÐµÐ½Ð¸Ñ Ð¸Ð¾Ð½Ð°Ð¼Ð¸
cascade density
gallium oxide alpha
fractal parameters
ion irradiation modeling

description: Ð ÑÐ°Ð±Ð¾ÑÐµ Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½ ÑÐ°ÑÑÑÑ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² ÑÑÑÐµÐ´Ð½ÐµÐ½Ð½Ð¾Ð³Ð¾ Ð¸Ð½Ð´Ð¸Ð²Ð¸Ð´ÑÐ°Ð»ÑÐ½Ð¾Ð³Ð¾ ÐºÐ°ÑÐºÐ°Ð´Ð° ÑÐ¼ÐµÑÐµÐ½Ð¸Ð¹ Ð² Ð¾ÐºÑÐ¸Ð´Ðµ Ð³Ð°Ð»Ð»Ð¸Ñ.Â  Ð¡Ð´ÐµÐ»Ð°Ð½ Ð¾Ð±Ð·Ð¾Ñ Ð¾Ð¿ÑÐ±Ð»Ð¸ÐºÐ¾Ð²Ð°Ð½Ð½Ð¾Ð¹ Ð»Ð¸ÑÐµÑÐ°ÑÑÑÑ Ð¾Ð± Ð¾Ð±ÑÐ°Ð·Ð¾Ð²Ð°Ð½Ð¸Ð¸ ÑÑÑÑÐºÑÑÑÐ½ÑÑ Ð¿Ð¾Ð²ÑÐµÐ¶Ð´ÐµÐ½Ð¸Ð¹. ÐÑÐ¾Ð²ÐµÐ´ÑÐ½ Ð°Ð½Ð°Ð»Ð¸Ð· Ð¾ÑÐ¾Ð±ÐµÐ½Ð½Ð¾ÑÑÐµÐ¹ Ð´ÐµÑÐµÐºÑÐ¾Ð¾Ð±ÑÐ°Ð·Ð¾Ð²Ð°Ð½Ð¸Ñ Ð² Ð¾ÐºÑÐ¸Ð´Ðµ Ð³Ð°Ð»Ð»Ð¸Ñ. ÐÑÐ¾Ð²ÐµÐ´ÐµÐ½Ð¾ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ ÑÐ¾ÑÐ¼Ð¾Ð¶ÐµÐ½Ð¸Ñ Ð¸Ð¾Ð½Ð¾Ð² Ð² Ð¾ÐºÑÐ¸Ð´Ðµ Ð³Ð°Ð»Ð»Ð¸Ñ Ð² ÑÐ¸ÑÐ¾ÐºÐ¾Ð¼ Ð´Ð¸Ð°Ð¿Ð°Ð·Ð¾Ð½Ðµ Ð¼Ð°ÑÑ Ð¸ ÑÐ½ÐµÑÐ³Ð¸Ð¹ Ð² Ð¿ÑÐ¸Ð±Ð»Ð¸Ð¶ÐµÐ½Ð¸Ð¸ Ð¿Ð°ÑÐ½ÑÑ ÑÑÐ¾Ð»ÐºÐ½Ð¾Ð²ÐµÐ½Ð¸Ð¹ Ð² Ð¿ÑÐ¾Ð³ÑÐ°Ð¼Ð¼Ðµ TRIM. ÐÐ¾Ð»ÑÑÐµÐ½Ñ Ð·Ð½Ð°ÑÐµÐ½Ð¸Ñ ÑÑÐµÐ´Ð½ÐµÐ³Ð¾ Ð¿ÑÐ¾ÐµÐºÑÐ¸Ð²Ð½Ð¾Ð³Ð¾ Ð¿ÑÐ¾Ð±ÐµÐ³Ð° Ð¸Ð¾Ð½Ð¾Ð² (Rp), Ð¸ Ð³Ð»ÑÐ±Ð¸Ð½Ñ Ð¼Ð°ÐºÑÐ¸Ð¼Ð°Ð»ÑÐ½Ð¾Ð³Ð¾ ÑÐ½ÐµÑÐ³Ð¾Ð²ÑÐ´ÐµÐ»ÐµÐ½Ð¸Ñ Ð² ÑÐ¿ÑÑÐ³Ð¸Ñ ÑÑÐ¾Ð»ÐºÐ½Ð¾Ð²ÐµÐ½Ð¸ÑÑ (Rpd), Ð° ÑÐ°ÐºÐ¶Ðµ Ð¿Ð¾ÑÑÑÐ¾ÐµÐ½ Ð³ÑÐ°ÑÐ¸Ðº Ð·Ð°Ð²Ð¸ÑÐ¸Ð¼Ð¾ÑÑÐ¸ Rpd Ð¾Ñ Ð³Ð»ÑÐ±Ð¸Ð½Ñ Ð´Ð»Ñ Ð²ÑÐµÑ Ð¸ÑÑÐ»ÐµÐ´ÑÐµÐ¼ÑÑ Ð¸Ð¾Ð½Ð¾Ð² Ð¸ Ð³ÑÐ°ÑÐ¸Ðº Ð·Ð°Ð²Ð¸ÑÐ¸Ð¼Ð¾ÑÑÐ¸ Rpd Ð¾Ñ Ð¼Ð°ÑÑÑ. Ð¡ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¸ÐµÐ¼ ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ð½Ð¾Ð³Ð¾ ÑÐ°Ð½ÐµÐµ Ð°Ð»Ð³Ð¾ÑÐ¸ÑÐ¼Ð°, Ð° ÑÐ°ÐºÐ¶Ðµ ÑÐ°Ð½ÐµÐµ Ð½Ðµ Ð¿ÑÐ¸Ð¼ÐµÐ½ÑÐµÐ¼Ð¾Ð³Ð¾ Ð¼ÐµÑÐ¾Ð´Ð° Ñ Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð½Ð¸ÐµÐ¼ ÑÑÐ°ÐºÑÐ°Ð»ÑÐ½ÑÑ Ð¿Ð°ÑÐ°Ð¼ÐµÑÑÐ¾Ð² ÑÐ°ÑÑÑÐ¸ÑÐ°Ð½Ð° Ð¿Ð»Ð¾ÑÐ½Ð¾ÑÑÑ Ð¸Ð½Ð´Ð¸Ð²Ð¸Ð´ÑÐ°Ð»ÑÐ½ÑÑ ÐºÐ°ÑÐºÐ°Ð´Ð¾Ð² ÑÐ¼ÐµÑÐµÐ½Ð¸Ð¹ Ð¸ Ð¿Ð¾ÑÑÑÐ¾ÐµÐ½Ñ Ð³ÑÐ°ÑÐ¸ÐºÐ¸ Ð·Ð°Ð²Ð¸ÑÐ¸Ð¼Ð¾ÑÑÐ¸ Ð¿Ð»Ð¾ÑÐ½Ð¾ÑÑÐ¸ ÐºÐ°ÑÐºÐ°Ð´Ð¾Ð² Ð¾Ñ Ð³Ð»ÑÐ±Ð¸Ð½Ñ Ð¿ÑÐ¾Ð½Ð¸ÐºÐ½Ð¾Ð²ÐµÐ½Ð¸Ñ. Ð Ð°ÑÑÐµÑÑ Ð¿ÑÐ¾Ð²ÐµÐ´ÐµÐ½Ñ Ð´Ð»Ñ Ð²ÑÐµÑ Ð¸Ð¾Ð½Ð¾Ð² Ð¸ ÑÐ½ÐµÑÐ³Ð¸Ð¹ Ð² Ð·Ð°Ð²Ð¸ÑÐ¸Ð¼Ð¾ÑÑÐ¸ Ð¾Ñ Ð³Ð»ÑÐ±Ð¸Ð½Ñ. Ð ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐµ Ð¿Ð¾ÐºÐ°Ð·Ð°Ð½Ð¾, ÑÑÐ¾ Ð¾Ð±Ð° Ð¼ÐµÑÐ¾Ð´Ð° Ð¿ÑÐ¸Ð¼ÐµÐ½Ð¸Ð¼Ñ Ð´Ð»Ñ ÑÐ°ÑÑÑÑÐ° Ð¿Ð»Ð¾ÑÐ½Ð¾ÑÑÐ¸ ÐºÐ°ÑÐºÐ°Ð´Ð¾Ð² ÑÐ¼ÐµÑÐµÐ½Ð¸Ð¹. Ð¢Ð°ÐºÐ¶Ðµ ÑÐ°ÑÑÑÐ¸ÑÐ°Ð½Ñ ÑÑÐ°ÐºÑÐ°Ð»ÑÐ½ÑÐµ ÑÐ°Ð·Ð¼ÐµÑÐ½Ð¾ÑÑÐ¸ ÑÐ¾ÑÐ¼Ð¸ÑÑÐµÐ¼ÑÑ ÐºÐ°ÑÐºÐ°Ð´Ð¾Ð² ÑÐ¼ÐµÑÐµÐ½Ð¸Ð¹.
description: In this work, we calculated the parameters of an averaged individual cascade shifted in gallium oxide. A review of the published literature on the formation of structural damage is made. The features of defect formation in gallium oxide are analyzed. The simulation of deceleration of ions in gallium oxide in the reduction of mass and energy in the approximation of pair collisions in the TRIM program is carried out. The values of the average projective range of ions (Rp), as well as the maximum value of energy release in elastic actions (Rpd), were obtained, and a graph of the dependence of Rpd on the indicator for all insulins and a graph of the dependence of Rpd on mass were plotted. Using the previously developed algorithm, as well as a previously unused method using the fractal parameters of the measured value of the statistical value of displacements and the constructed graph of the dependence of the statistical value of the propagation velocity. Calculations were carried out for all ions and energy depending on the frequency. As a result, it turned out that both methods are applicable for calculating the sizes of displacement cascades, and the advantage of the method of fractal parameters is a greater calculation of the number, since at the output, we get the value of the statistics for different radii of the spheres inside which we consider neighboring vacancies.