title: ÐÐµÐ»Ð¸Ð½ÐµÐ¹Ð½Ð°Ñ Ð´Ð¸Ð½Ð°Ð¼Ð¸ÐºÐ° ÑÐ»ÐµÐºÑÑÐ¾ÑÑÐ°ÑÐ¸ÑÐµÑÐºÐ¾Ð³Ð¾ Ð³ÑÐµÐ±ÐµÐ½ÑÐ°ÑÐ¾Ð³Ð¾ Ð¿ÑÐ¸Ð²Ð¾Ð´Ð° Ñ Ð¿ÐµÑÐµÐ¼ÐµÐ½Ð½ÑÐ¼ Ð¼ÐµÐ¶ÑÐ»ÐµÐºÑÑÐ¾Ð´Ð½ÑÐ¼ Ð·Ð°Ð·Ð¾ÑÐ¾Ð¼
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Nonlinear dynamics of electrostatic comb-drive with variable gap
Creators: name: ÐÐ¾Ð¶Ð³Ð¾Ð²Ð°, ÐÐ°Ð´ÐµÐ¶Ð´Ð°
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2021
Subjects: Ð­Ð»ÐµÐºÑÑÐ¸ÑÐµÑÐºÐ¸Ðµ ÐºÐ¾Ð»ÐµÐ±Ð°Ð½Ð¸Ñ
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Ð¼ÐµÑÐ¾Ð´ Ð¼Ð½Ð¾Ð³Ð¸Ñ Ð¼Ð°ÑÑÑÐ°Ð±Ð¾Ð²
variable-clearance drives
comb drives
multiple-scale method

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description: In the given work the investigation of nonlinear dynamics of electrostatic comb-drive with variable gap, based on analytic model given by using an asymptotic method of nonlinear dynamics, is stated. The design of the key elements of a micromachined dual-mass LL-type gyroscope was carried out, for which the excitation system in the form of a comb drive with a variable gape is subsequently investigated. The equations of motion are derived in two ways, considering the cubic nonlinearity of the elastic suspension of the device, systems of equations in slow variables are obtained by the multiple-scale method and verified. The amplitude-frequency and amplitude-force characteristics of the system are investigated. The methods of the theory of bifurcations and continuation with respect to the parameter are applied to obtain a qualitative dependence of the amplitude and frequency at the main resonance depending on the constant and variable components of the voltage. On the basis of the obtained dependencies, the ranges of parameter values, that provide the required amplitude of oscillations of the moving masses along the drive-axis, are determined. The influence of the second fixed electrode on the dynamics of the comb-drive is estimated.