title: Ð Ð°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° Ð¸ ÑÐ¾Ð·Ð´Ð°Ð½Ð¸Ðµ ÑÑÑÐ°Ð½Ð¾Ð²ÐºÐ¸ Ð°Ð½Ð¾Ð´Ð½Ð¾Ð³Ð¾ Ð²Ð°ÐºÑÑÐ¼Ð½Ð¾Ð³Ð¾ Ð±Ð¾Ð½Ð´Ð¸Ð½Ð³Ð°
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð¼Ð°Ð³Ð¸ÑÑÑÐ°
titleType: Subtitle
title: Development and creation of an anode vacuum bonding unit
Creators: name: ÐÐ²Ð°Ð½Ð¾Ð², ÐÐ¸ÐºÑÐ¾Ñ
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2022
Subjects: ÐÑÐµÐ¼Ð½Ð¸Ð¹
Ð¡ÑÐµÐºÐ»Ð¾
Ð¡Ð²Ð°ÑÐºÐ°
Ð²Ð°ÐºÑÑÐ¼Ð½ÑÐ¹ Ð°Ð½Ð¾Ð´Ð½ÑÐ¹ Ð±Ð¾Ð½Ð´Ð¸Ð½Ð³
ÑÐ»ÐµÐºÑÑÐ¾ÑÑÐ°ÑÐ¸ÑÐµÑÐºÐ°Ñ ÑÐ²Ð°ÑÐºÐ° Ð¿Ð»Ð°ÑÑÐ¸Ð½
ÑÐµÐ¿Ð»Ð¾Ð¼Ð°ÑÑÐ¾Ð¿ÐµÑÐµÐ½Ð¾Ñ
vacuum anodic bonding
electrostatic welding of plates
heat and mass transfer

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description: The subject of the graduation work is "Development and creation of an anodic vacuum bonding installation."In this work, the development and creation of an installation for vacuum anodic bonding was done. This is the most promising gluing method for a large number of advantages. To reach the aim following tasks have been solved:1. Modeling of the installation for vacuum anodic bonding.2. Computer simulation of the substrate holder heat transfer.3. Vacuum system calculation and necessary vacuum equipment selection.4. Reactor and other components creation, installation assembly.5. Approbation of the installation.During the research 3D model of the installation was developed, computer simulation of the substrate holder was done, which optimal design was selected based on heat transfer results. Vacuum system was calculated analytically, anodic vacuum bonding installation was created, verified and tested.Several successful experiments of vacuum anode bonding of glass and silicon wafers was carried out at 1.5Â·10-5 Pa pressure in the vacuum chamber. The temperature on the substrate holder surface was 375 Â°C and the applied potential on the electrodes was 750 V. Complete gluing process lasted 10 hours.