title: ÐÐ¼ÐºÐ¾ÑÑÐ½Ð¾Ð¹ ÐÐ­ÐÐ¡-Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑ
title: Ð²ÑÐ¿ÑÑÐºÐ½Ð°Ñ ÐºÐ²Ð°Ð»Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ°Ð±Ð¾ÑÐ° Ð±Ð°ÐºÐ°Ð»Ð°Ð²ÑÐ°
titleType: Subtitle
title: capacitive MEMS accelerometer
Creators: name: Ð¡ÑÐ¾Ð»Ð±Ð¾Ð², Ð¡ÐµÐ¼ÐµÐ½
Publisher: name: Ð¡Ð°Ð½ÐºÑ-ÐÐµÑÐµÑÐ±ÑÑÐ³ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ ÐÐµÑÑÐ° ÐÐµÐ»Ð¸ÐºÐ¾Ð³Ð¾
Year: 2023
Subjects: ÐµÐ¼ÐºÐ¾ÑÑÐ½Ð¾Ð¹ Ð´Ð²ÑÑ Ð¾ÑÐ½ÑÐ¹ Ð¼Ð¸ÐºÑÐ¾ÑÐ»ÐµÐºÑÑÐ¾Ð¼ÐµÑ Ð°Ð½Ð¸ÑÐµÑÐºÐ¸Ð¹ Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑ
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ÐºÐ¾Ð¼Ð¿ÐµÐ½ÑÐ°ÑÐ¸Ð¾Ð½Ð½ÑÐ¹
Ð´Ð¸ÑÑÐµÑÐµÐ½ÑÐ¸Ð°Ð»ÑÐ½Ð°Ñ ÐµÐ¼ÐºÐ¾ÑÑÑ
ÐºÐ»Ð°ÑÑÐ¸ÑÐ¸ÐºÐ°ÑÐ¸Ñ Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ¾Ð²
Ð¸Ð½ÐµÑÑÐ¸Ð¾Ð½Ð½Ð°Ñ Ð¼Ð°ÑÑÐ°
ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½ÑÐ¹ ÑÐ»ÐµÐ¼ÐµÐ½Ñ
capacitive biaxial microelectromechanical accelerometer
mems
IMU
compensation
differential capacitance
classification of accelerometers
inertial mass
sensitive element

description: Ð¦ÐµÐ»Ñ ÑÐ°Ð±Ð¾ÑÑ â ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ° ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ° ÐÐ­ÐÐ¡-Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ°, Ñ Ð¿Ð¾Ð²ÑÑÐµÐ½Ð½Ð¾Ð¹ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑÑ Ð½Ð° Ð¾ÑÐ½Ð¾Ð²Ðµ ÑÐµÑÐ½Ð¾Ð»Ð¾Ð³Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ Ð¿ÑÐ¾ÑÐµÑÑÐ° ÐºÐ¾Ð¼Ð¿Ð°Ð½Ð¸Ð¸ Ð¦ÐÐÐ âÐ­Ð»ÐµÐºÑÑÐ¾Ð¿ÑÐ¸Ð±Ð¾Ñâ Ð´Ð»Ñ Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ñ Ð² Ð±ÐµÑÐ¿Ð»Ð°ÑÑÐ¾ÑÐ¼ÐµÐ½Ð½Ð¾Ð¹ Ð¸Ð½ÐµÑÑÐ¸Ð¾Ð½Ð½Ð¾ Ð½Ð°Ð²Ð¸Ð³Ð°ÑÐ¸Ð¾Ð½Ð½Ð¾Ð¹ ÑÐ¸ÑÑÐµÐ¼Ðµ. ÐÑÐ¾Ð²ÐµÐ´ÐµÐ½ Ð°Ð½Ð°Ð»Ð¸Ð· Ð°ÐºÑÑÐ°Ð»ÑÐ½Ð¾Ð¹ Ð»Ð¸ÑÐµÑÐ°ÑÑÑÑ, Ð²ÑÐ±ÑÐ°Ð½ ÑÐ¸Ð¿ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ° Ð°ÐºÑÐµÐ»ÐµÑÐ¾Ð¼ÐµÑÑÐ° Ð¾Ð±ÐµÑÐ¿ÐµÑÐ¸Ð²Ð°ÑÑÐµÐ³Ð¾ Ð²ÑÑÐ¾ÐºÐ¸Ðµ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ¸ Ð´Ð»Ñ Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ñ Ð² ÑÐ¸ÑÑÐµÐ¼Ð°Ñ ÐÐÐÐ¡ (Ð±ÐµÑÐ¿Ð»Ð°ÑÑÐ¾ÑÐ¼ÐµÐ½Ð½Ð°Ñ Ð¸Ð½ÐµÑÑÐ¸Ð¾Ð½Ð½Ð°Ñ Ð½Ð°Ð²Ð¸Ð³Ð°ÑÐ¸Ð¾Ð½Ð½Ð°Ñ ÑÐ¸ÑÑÐµÐ¼Ð°). Ð ÑÐµÐ·ÑÐ»ÑÑÐ°ÑÐµ ÑÐ°Ð±Ð¾ÑÑ ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐ°Ð½Ð° Ð¼Ð¾Ð´ÐµÐ»Ñ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ°, Ð²ÑÐ¿Ð¾Ð»Ð½ÐµÐ½Ð½Ð°Ñ Ð¸Ð· Ð¼Ð¾Ð½Ð¾ÐºÑÐ¸ÑÑÐ°Ð»Ð»Ð¸ÑÐµÑÐºÐ¾Ð³Ð¾ ÐºÑÐµÐ¼Ð½Ð¸Ñ. ÐÐ¾Ð´ÐµÐ»Ñ Ð¸Ð¼ÐµÐµÑ ÑÐ»ÐµÐºÑÑÐ¾ÑÑÐ°ÑÐ¸ÑÐµÑÐºÑÑ ÑÐ»ÐµÐºÑÑÐ¾Ð´Ð½ÑÑ ÑÑÑÑÐºÑÑÑÑ ÑÑÐµÐ¼Ð°, Ð° ÑÐ°ÐºÐ¶Ðµ ÑÐ»ÐµÐºÑÑÐ¾Ð´Ð½ÑÑ ÑÑÑÑÐºÑÑÑÑ Ð¾Ð±ÑÐ°ÑÐ½Ð¾Ð¹ ÑÐ²ÑÐ·Ð¸, ÑÑÐ¾ ÑÐ²Ð»ÑÐµÑÑÑ Ð½Ð°Ð¸Ð±Ð¾Ð»ÐµÐµ Ð¾Ð¿ÑÐ¸Ð¼Ð°Ð»ÑÐ½ÑÐ¼ ÑÐµÑÐµÐ½Ð¸ÐµÐ¼ Ð´Ð»Ñ Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ñ Ð² ÑÐ¸ÑÑÐµÐ¼Ð°Ñ Ð¾ÑÐ¸ÐµÐ½ÑÐ°ÑÐ¸Ð¸ Ð±ÐµÑÐ¿Ð¸Ð»Ð¾ÑÐ½Ð¾Ð¹ Ð°Ð²Ð¸Ð°ÑÐ¸Ð¸. ÐÐ»Ñ ÑÐ°ÑÑÐµÑÐ¾Ð² Ð¸ÑÐ¿Ð¾Ð»ÑÐ·Ð¾Ð²Ð°Ð»Ð¸ÑÑ ÑÑÐµÐ´ÑÑÐ²Ð° Ð°Ð²ÑÐ¾Ð¼Ð°ÑÐ¸Ð·Ð¸ÑÐ¾Ð²Ð°Ð½Ð½Ð¾Ð¹ ÑÐ°Ð·ÑÐ°Ð±Ð¾ÑÐºÐ¸ COMSOL Multyphysics. ÐÐ¾Ð»ÑÑÐµÐ½Ñ ÑÐ»ÐµÐ´ÑÑÑÐ¸Ðµ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ¸ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ°: ÑÐ°Ð±Ð¾ÑÐ¸Ð¹ Ð´Ð¸Ð°Ð¿Ð°Ð·Ð¾Ð½ Ð¸Ð·Ð¼ÐµÑÐµÐ½Ð¸Ñ ÑÑÐºÐ¾ÑÐµÐ½Ð¸Ð¹ Â± 15g; Ð¼ÐµÑÐ°Ð½Ð¸ÑÐµÑÐºÐ°Ñ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾Ð³Ð¾ ÑÐ»ÐµÐ¼ÐµÐ½ÑÐ° 0,007 Ð¼ÐºÐ¼/g; ÐµÐ¼ÐºÐ¾ÑÑÐ½Ð°Ñ ÑÑÐ²ÑÑÐ²Ð¸ÑÐµÐ»ÑÐ½Ð¾ÑÑÑ Ð§Ð­ 14 ÑÐ¤/g; ÑÐµÐ·Ð¾Ð½Ð°Ð½ÑÐ½ÑÐµ ÑÐ°ÑÑÐ¾ÑÑ 1632,2 ÐÑ Ð²Ð´Ð¾Ð»Ñ Ð¾ÑÐ¸ x Ð¸ 1522 ÐÑ Ð²Ð´Ð¾Ð»Ñ Ð¾ÑÐ¸ y; ÑÐ°ÑÑÐ¾ÑÐ½Ð°Ñ Ð¿Ð¾Ð»Ð¾ÑÐ° Ð¿ÑÐ¾Ð¿ÑÑÐºÐ°Ð½Ð¸Ñ - 300 ÐÑ Ð¸ ÑÐ¾ÑÑÐ°Ð²Ð»ÑÐµÑ 0,18-0,20 Ð¾Ñ ÑÐµÐ·Ð¾Ð½Ð°Ð½ÑÐ½Ð¾Ð¹ ÑÐ°ÑÑÐ¾ÑÑ. Ð¡ÑÐ¼Ð¼Ð°ÑÐ½Ð°Ñ ÐµÐ¼ÐºÐ¾ÑÑÑ ÑÐ»ÐµÐºÑÑÐ¾Ð´Ð½Ð¾Ð¹ ÑÑÑÑÐºÑÑÑÑ ÑÑÐµÐ¼Ð° ÑÐ°Ð²Ð½Ð° 4,652 Ð¿Ð¤, Ð° Ð¼Ð°ÐºÑÐ¸Ð¼Ð°Ð»ÑÐ½Ð°Ñ ÑÐ»ÐµÐºÑÑÐ¾ÑÑÐ°ÑÐ¸ÑÐµÑÐºÐ°Ñ ÑÐ¸Ð»Ð°, ÑÐ¾Ð·Ð´Ð°Ð²Ð°ÐµÐ¼Ð°Ñ ÑÐ»ÐµÐºÑÑÐ¾Ð´Ð°Ð¼Ð¸ Ð¾Ð±ÑÐ°ÑÐ½Ð¾Ð¹ ÑÐ²ÑÐ·Ð¸, ÑÐ¾ÑÑÐ°Ð²Ð¸Ð»Ð° 6,1864â10^(-5)Â  Ð.
description: The purpose of the work is to develop a sensitive element of a MEMS accelerometer with increased sensitivity based on the technological process of the CRI âElektropriborâ for use in an inertial navigation system. The analysis of the current literature is carried out, the type of the accelerometer sensor element providing high characteristics for use in BINC systems (free-form inertial navigation system) is selected. As a result of the work, a model of a sensing element made of monocrystalline silicon was developed. The model has an electrostatic electrode removal structure, as well as an electrode feedback structure, which is the most optimal solution for use in unmanned aircraft orientation systems. COMSOL Multiphysics automated development tools were used for calculations. The following results were obtained: the operating range of acceleration measurement is Â± 15g; the mechanical sensitivity of the sensing element is 0.007 Î¼m/g; the capacitive sensitivity is 14 fF/g; the resonant frequencies are 1632.2 Hz along the x axis and 1522 Hz along the y axis; the frequency bandwidth is 300 Hz and is 0.18-0.20 of the resonant frequency. The total capacitance of the electrode structure of the removal is equal to 4,652 pF, and the maximum electrostatic force generated by the feedback electrodes was 6,1864â10^(-5)Â  N. â