Title: Materials, technology and reliability for advanced interconnects and low-k dielectrics--2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A /
Authors: McKerrow, Andrew J.; Carter, R. J. 1948-; Materials Research Society. (2004 :; Materials Research Society. (2004 :
Publisher: Materials Research Society,
Year: 2004
Subjects: Semiconductors Materials Congresses.; Semiconductors Junctions Congresses.; Dielectric films Congresses.; Integrated circuits Materials Congresses; Integrated circuits Reliability Congresses