Title: Spectroscopic ellipsometry and reflectometry : a user's guide /
Authors: Tompkins, Harland G.; McGahan, William A., 1966-
Publisher: Wiley,
Year: 1999
Subjects: Surfaces (technologie); Ellipsometry.; Reflectometer.; Materials Optical properties.; Thin films Optical properties.; Surfaces (Technology); Ellipsométrie.; Réflectomètres.; Matériaux Propriétés optiques.; Couches minces Propriétés optiques.; Surfaces (Technologie); Espectrometria.; Propriedades óticas.; Filmes finos.; Materiais.; Dünne Schicht.; Ellipsometrie.; Oberflächeneigenschaft.; Reflektometrie.; Werkstoff.; Ellipsométrie; Réflectomètres; Matériaux Propriétés optiques; Couches minces Propriétés optiques.
Contents: 1. Perspective and History -- 2. Fundamentals -- 3. Optical Properties of Materials and Layered Structures -- 4. Instrumentation -- 5. The Anatomy of a Reflectance Spectrum -- 6. Aspects of Single-Wavelength Ellipsometry -- 7. The Anatomy of an Ellipsometric Spectrum -- 8. Analytical Methods and Approach -- 9. Optical Data Analysis -- 10. Quality Assurance -- 11. Very Thin Films -- 12. Roughness -- Prototypical Analyses. 1. Thermal Oxide, LPCVD Nitride, or Photoresist on Silicon. 2. Silicon Oxynitrides, PECVD Silicon Oxides, and Polysilicon. 3. PECVD Silicon Nitride, Silicon Dioxide, and Photoresist on Silicon. 4. LPCVD Polysilicon and Amorphous Silicon. 5. Substrate Optical Constant Determination. 6. Analysis of Films on Transparent Substrates. 7. Very Thick Films. 8. Compositional Analysis of Materials. 9. Thin Metal Films. 10. Photoresist Optical Constants -- A. Regression Algorithms -- B. Maxwell's Equations and the Wave Equation.