Title: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A. /
Authors: Wilson, Syd R.; Powell, Ronald A.; Davies, D. Eirug.
Publisher: Materials Research Society,
Year: 1987
Subjects: Semiconductors Heat treatment Congresses.; Semiconductor doping Congresses.; Rapid thermal processing Congresses.