Title: A production-compatible microelectronic test pattern for evaluating photomask misalignment /
Authors: Russell, T. J. 1943-; Maxwell, Dwight A.,; United States.; United States.
Publisher: U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off.,
Year: 1979
Subjects: Integrated circuits Masks Testing.