Title: Cleanroom design /
Authors: Whyte, W.
Publisher: Wiley,
Year: 1991
Subjects: Clean rooms.
Contents: An introduction to the design of clean and containment areas / W. Whyte -- The design of cleanrooms for the microelectronics industry / J.G. King -- The design of cleanrooms for the pharmaceutical industry / G.J. Farquharson and W. Whyte -- Contamination control facilities for the biotechnology industry / P.J. Tubito -- International standards for the design of cleanrooms / A.L. Möller -- Cost-efficiency and energy-saving concepts for cleanrooms / H.H. Schicht -- High efficiency air filtration / G.H. Cadwell, Jr and W. Whyte -- Surface finishes in cleanrooms / G. Clough -- Purification techniques for clean water / T. Hodgkiess -- The design of an ultra-pure water system for use in the manufacture of integrated circuits ; The production and transmission of high purity gases for the semiconductor industry / W.S. McCartney -- Materials for services pipework / T. Hodgkiess.