(Invited, Digital Presentation) Evaluation of Polycrystalline-Si1-XGex Thin-Film Transistors Grown Laterally on a Glass Substrate Using a Continuous-Wave Laser
Authors: Hara Akito , Sagawa Tatsuya , Kusunoki Kotaro , Kitahara Kuninori 
Published: November 2022

System-on-glass requires high-performance thin-film transistors (TFTs). In order to realize high-performance polycrystalline-Si (poly-Si) TFTs, we grew high-quality poly-Si thin films using a continuous-wave solid-state laser, in a method known as continuous-wave laser lateral crystallization (CLC). The grain boundary (G.B.) of CLC poly-Si is characterized by being parallel to the laser scan direction with shape of nearly straight line. Ge-based devices are attractive because of the superior carrier mobility of Ge in comparison to Si; however, as carriers in poly-Ge thin film are high concentration of hole generated from defects, it is difficult to control the level of doping. Moreover, fabrication of stable gate dielectric GeO2 is highly challenging. Addition of Ge to Si is expected to improve carrier mobility in Si, leading to poly-Si1-xGex TFTs with better performance than conventional poly-Si TFTs. Hence, our work here is a step in that direction. The purpose of this study is to understand the performance of poly-Si1-xGex TFTs, and to highlight the issues pertaining to poly-Si1-xGex thin films by comparing the performance of poly-Si1-xGex TFTs with that of poly-Si TFTs.
A typical TFT fabrication process is as follows. An amorphous Si1-xGex thin film (~100 nm) with a Ge concentration of 10% is grown on a quartz substrate. After cleaning the substrate surface with hydrogen fluoride solution, CLC is carried out in air without substrate heating, followed by the preparation of transistor islands using reactive ion etching (RIE). A 50-nm-thick SiO₂ film is deposited by plasma enhanced chemical vapor deposition (PECVD), followed by heat treatment in nitrogen atmosphere at 550 °C for 4 h and deposition of Mo film as the top gate. Next, P or BF₂ is ion-implanted into poly-Si1-xGex for source-drain (SD) respectively, at 10 keV and 3×1015 cm-2. After ion implantation is completed, interlayer dielectric SiO2 film is deposited by PECVD and activated by heating in nitrogen atmosphere at 550 °C for 6 h. Subsequently, contact holes and Mo electrodes are formed. Finally, hydrogenation using step-cooling is performed to complete the TFT. N-channel (n-ch) and P-channel (p-ch) poly-Si TFTs are also fabricated using identical processes. Two types of TFTs were fabricated for both poly-Si1-xGex TFTs and poly-Si TFTs: one with the G.B. lying parallel to the SD direction (parallel type) and the other with the G.B. perpendicular to the SD direction (perpendicular type).
The transfer characteristics of n-ch TFTs showed that the threshold voltages (Vth) of poly-Si1-xGex shifted in the positive direction in comparison with those of poly-Si TFTs. The mobility and sub-threshold swing (s.s.) values of poly-Si1-xGex were inferior to those of poly-Si TFTs, for both the parallel and perpendicular types.
Considering the p-ch TFTs, the transfer characteristics of parallel poly-Si1-xGex TFTs showed higher OFF current and lower ON current than the corresponding poly-Si TFTs. In case of perpendicular types, OFF currents of poly-Si1-xGex TFTs were comparable with that of poly-Si TFTs and ON currents of poly-Si1-xGex TFTs were lower than those of poly-Si TFTs. Moreover, Vth values of poly-Si1-xGex TFTs were shifted in the positive direction in comparison to those of poly-Si TFTs, for both parallel and perpendicular types.
The segregation coefficient of Ge in Si is less than 1.0, and it has been shown that Ge segregates to G.B.s in poly-Si1-xGex thin films during solidification. As acceptors are generated in regions with high Ge concentration along G.B.s, p-type quasi-one-dimensional conduction regions were formed in Si1-xGex along G.B.s. Therefore, when SD regions are parallel to a G.B., a current path connecting those regions is formed along G.B.s in p-type poly-Si1-xGex TFTs, leading to enhancement of OFF current. However, when G.B.s lie perpendicular to SD regions, the latter remain unconnected, leading to normal OFF current values.
The positive shift in Vth of poly-Si1-xGex TFTs can be explained by the formation of acceptors. It can also be concluded that the decrease of ON current in poly-Si1-xGex TFTs is due to ionized impurity scattering by the acceptors. In addition, the difference in the magnitude of ON current depending on the G.B. direction can be explained as follows: when G.B.s are parallel to the SD direction, ON current is higher than that of the perpendicular type, because G.B.s do not act as strong scattering centers.
In summary, the characteristics of CLC poly-Si1-xGex TFTs can be explained by the formation of acceptors. In particular, the large OFF current in parallel p-ch poly-Si1-xGex TFTs is explained by Ge segregation along G.B.s, resulting in formation of quasi-one-dimensional p-type conduction channels and electrical connection between SD region.