Integration Aspects of Plasmonic TiN-based Nano-Hole-Arrays on Ge Photodetectorsin a 200mm Wafer CMOS Compatible Silicon Technology
Authors: Mai Christian , Marschmeyer Steffen , Peczek Anna , Kroh Aleksandra , Jose Josmy , Reiter Sebastian , Fischer Inga , Wenger Christian , Mai Andreas 
Published: November 2022

During the last decade optical sensor technologies have attracted increased attention for various applications. Plasmon-based optical sensor concepts for the detection of refractive index changes that rely on propagating surface-plasmon polaritons at metal-dielectric interfaces or on localized plasmons in metallic nanostructures prove their potential for these application due to their fast detection speed, high specificity and sensitivities [1, 2]. Combining plasmonic structures directly with optoelectronic devices could enable a high level of integration, however, it represents a significant technological challenge to develop an on-chip solution for these concepts including the integration of sensor and detector components. Previous works demonstrated first approaches mainly for the integration of refractive index sensor components on wafer level [3, 4]. In [5] and [6] a proof-of-concept of a fully integrated on-chip solution with high sensitivities was presented, which can be easily combined with microfluidics [7] for potential applications in biosensing. In this concept, a nanohole array (NHA) was structured in a 100 nm thick aluminum layer on top of a vertical PIN germanium photodetector (GePD) with an intrinsic germanium sheet of 480 nm. This sensor concept relies on extraordinary optical transmission through the NHA [8]: Light transmission is only possible for narrow wavelength ranges determined by the NHA geometry which determine the transmission peaks at the resonance wavelength of the NHA. Thus, the NHA acts as a high quality wavelength filter. Due to the change in the refractive index, a material under test (MUT) contacting directly the surface of the NHA, provokes a shift of the wavelength maximum, which can be detected by measuring the photocurrent spectra of the GePD. While responsivities and sensitivities of (0 V) = 0.075 A/W and = 1200 nm/RIU could be attained in this proof-of-concept device [6, 7], the semiconductor device layers were deposited using molecular beam epitaxy (MBE). Furthermore the vertical PIN GePD was realized by a mesa procedure to enable large areas for top illuminated operations. These techniques are unsuitable for an industrial CMOS fabrication process with high throughput. Therefore, the development of a CMOS compatible technology process with low costs and high yields is an important step towards large-scale fabrication of this sensor concept.
In this work we present the progress for the realization of a surface plasmon resonance (SPR) refractive index sensor in a 200 mm wafer Silicon based technology. One main challenge is the fabrication of a large area photodetector for top illuminated sensor devices. We developed a process, which is mainly based on the IHP electronic photonic integrated circuits (ePIC) technology [9]. This ePIC technology enables the production of waveguide coupled lateral PIN GePDs with high bandwidth and high responsivities [10]. However, these PDs are unsuitable for top illuminated applications because of their small germanium areas. Due to certain process conditions with respect to chemical mechanical polishing procedures there are limits for feasible large detector areas. Furthermore, large detector areas for lateral PIN GePDs would result in very low electric fields in the intrinsic zone where carriers are generated by photon absorption. Thus, very high voltages for reversed bias are necessary for sufficient carrier drifts.
For the first time we have developed a modern detector design concept which is compatible to the IHP ePIC technology. This concept allows the realization of large area detectors of 1600µm² (40µm x 40µm) with optimized optical responsivities for top illuminated applications. The detector consists of several parallel connected lateral PIN GePDs. We designed different variations and varied Ge width and distance between neighboring GePDs in order to investigate process limits. The p- and n-doped regions were defined by dopant implantation using a photo resist mask. We used a finger-like design as implantation masks to enable one contact area for each p-doped and each n-doped region (Fig. 1). This contacting approach differs from the standard GePD offered in the IHP ePIC technology. We analyzed I-V characteristics in dependence of detector design and contacting scheme (Fig. 2). In addition, process adjustments for the optimization of the germanium quality were investigated to reduce dark currents and to improve optical responsivities (Fig.3).
Titanium nitride (TiN) is very promising metallic alloy with respect to thickness homogeneity and low surface roughness. Therefore we used titanium nitride which was deposited by a sputtering process to develop plasmonic active NHA layers. Various process development runs were done to evaluate the NHA performance. Ellipsometry and atomic force microscope measurements were performed to characterize the quality of the TiN layer (Fig.4).

Figure 1