bluuebunny/crossref_metadata_2025_split huggingface dataset:
In‐depth distribution analysis of non‐flat surfaces
Authors: Dang Tuan A. , Cuddy Joann , Yang Shawn 
Published: December 2004

AbstractComparison studies of plasma and ion gun sputtering on several types of non‐flat surfaces (Au‐plated Mo wires, W spheres) have shown a superior uniformity of lateral erosion in plasma sputtering. Conical structures, absent in plasma sputtering, have frequently formed in ion gun sputtering. A superior depth‐resolution plasma depth profile consequently results.
A survey of non‐destructive surface characterization methods used to insure reliable gate oxide fabrication for silicon IC devices
Authors: Diebold Alain C. , Doris Bruce 
Published: December 2004

AbstractAs device dimensions decrease below 500 nm, transistors require a gate oxide thickness of <10 nm. Trace organic and inorganic contamination and surface roughness must be minimized before thermal growth of the SiO2 gate oxide. Both structural defects and contamination can impact device reliability. A variety of diagnostic methods are presently used to either analyze the effectiveness of water cleaning processes or electrically test gate dielectrics after processing. Owing to device dimension, characterization of surface contamination levels is more readily done using unpatterned ‘monitor’ wafers. We discuss automated, non‐destructive ‘in FAB’ analysis using total reflection x‐ray fluorescence, atomic force microscopy and spectroscopic ellipsometry. Total reflection x‐ray fluorescence is already a well‐established ‘in FAB’ technique, and tomic force microscopy and variable‐angle spectroscopic ellipsometer systems designed for ‘in FAB’ use are commercially available at the time of submission of this article. Other FAB‐compatible optical characterization methods are described and contrasted. Microroughness analysis development activities are also described.
AES and XPS characterization of SiNx layers
Authors: Pavlyák F. , Bertóti I. , Mohai M. , Biczó I. , Giber J. 
Published: December 2004

AbstractThe properties of SiNx layers are largely influenced by their composition and the chemical state of the constituents. In the present study SiNx layers obtained by plasma‐enhanced and low‐pressure chemical desorption methods were characterized by AES and XPS. In the case of the most frequently applied AES characterization, the peak shape and position of the Si LVV line largely depend on the measurement parameters. In order to derive optimum conditions to minimize these effects, the energies and intensity ratios of Si LVV and N KLL peaks were examined in a wide range of AES measurement parameters: a primary electron energy of 1.0–5.0 keV and a current of 0.1–5.0 μA; sputtering conditions are: Ar+ ion energy of 0.5–3.0 keV and a current of 0.3–1.1 μA. It is clearly demonstrated that both the composition (si/N ratio) and the chemical state of silicon are affected by the applied parameters. Also, the response of the two types of layers to Ar+ ion energy showed a marked difference. As a result, optimized conditions are proposed for AES characterization. The quantitative analysis of the layers was performed by XPS. Corrected sensitivity factors for Si LVV, Si KLL and O KVV are evaluated on the basis of XPS data. It can be stated that the low‐energy Si LVV peak is more sensitive to the conditions of the measuring parameters than the high‐energy Si KLL peak, whereas the N KLL peak showed neither a significant energy shift nor a shape change.
Neglected and hidden errors in the quantification of Auger electron spectroscopy
Authors: du Plessis J. 
Published: December 2004

AbstractTwo types of errors made in the quantification of Auger electron spectroscopy (AES) are discussed in this paper. The first error is found in the discretization of the sample into layers parallel to the surface. It is shown that the conventional integral expression and the (discrete) summation differ in the calculated surface concentration value if the inelastic mean free path (IMFP) and interlayer distances vary from alloy to element. It is found that the disagreement may be as large as 50% for small IMFPs. The second error (or rather the absence of any indication of such errors) manifests itself in the four‐way ratio of the intensities, i.e. IAIBelem/IBI Aelem, in the determination of the homogeneous surface concentration Xiϕ. Any error made in the determination of Xiϕ is hidden by the requirement that XAϕ + XBϕ = 1. It is proposed that the four‐way ratio is split into two ratios, each yielding the respective concentration, and that the sum be used as an error indication.
Automatic analysis of ISS—spectra
Authors: Creemers C. , Royer D. , Schryvers P. 
Published: December 2004

AbstractIon scattering spectroscopy (ISS) is an established technique for the analysis of atomic species in the outermost atomic layer of a solid surface. Owing to the erosive action of the primary ions, a continued experiment can show the variation of these elemental concentrations in the subsurface layer, just as in depth profiling with AES or XPS and ion sputtering. When used in this ‘depth profiling’ mode, large numbers of spectra are generated that call for automatic processing and interpretation.A complete set of software routines is described that is tailored to the specific aspects of ISS and runs on a personal computer. It allows for on‐line, real‐time peak detection and identification, as well as for background elimination and peak intensity determination, even in the case of strongly overlapping peaks. The employed strategy is quite general, so that the essence of these routines could easily be adapted to other spectroscopic techniques. The entire procedure is illustrated by a concrete analysis of a photographic material.
Energy consumption and kinetic evolution of nitrogen fixation on polyethlene terephthalate by remote nitrogen plasma: XPS study
Authors: Mutel B. , Dessaux O. , Goudmand P. , Gengernbre L. , Grimblot J. 
Published: December 2004

AbstractThe surface of polyethylene terephthalate (PET) treated by a cold remote nitrogen plasma (CRNP) has been examined by x‐ray photoelectron spectroscopy (XPS). The untreated PET surface exhibited a C 1s complex peak which corresponds to the chemical formula of this compound. The treatment induced incorporation of nitrogen as amine and nitrile groups, but no new oxygen species have been detected.The nitrogen incorporation rate on the PET surface was not modified after ageing in ambient air for at least 84 days.The nitrogen fixation rate was dependent upon the energy involved by microwave discharge. This feature is quite interesting for a possible industrial use of the process.
The relation between carbon‐fibre surface treatment and the fibre surface microstructure
Authors: Mahy J. , Jenneskens L. W. , Grabandt O. , Venema A. , Van Houwelingen G. D. B. 
Published: December 2004

AbstractThe effect of an electrochemical surface treatment on the surface microstructure of Tenax® high‐tensile‐strength carbon fibres is investigated using a multi‐technique approach. The fibres are treated in a laboratory set‐up, which simulates the production conditions. The surface functional groups are characterized and quantified, and their dependence on the treatment intensity is determined. The surface chemistry is correlated with the fibre surface topography. It is observed that for increasing treatment intensity, the surface area does not increase significantly (except at very high intensities, in which a porous structure is formed). This contrasts with the dispersive part of the surface energy, which increases with the treatment intensity. Moreover, both basic and acidic surface functionalities are formed, the relative proportions of which change with the treatment intensity.These phenomena can be interpreted in terms of the concentration of active sites, which increases with the surface treatment and may be related to ‘basal plane edges’ of the (disordered) graphitic fibre microstructure.
Secondary ion mass spectrometry round‐robin study of impurity analysis in gallium arsenide using uniformly‐doped standard gallium arsenide specimens
Authors: Shichi Hiroyasu , Ogawa Tomoya , Kurosawa Satoru , Homma Yoshikazu , Kubota Yoshikane , Nakamura Yasushi , Nomura Koichi , Shibata Masahiro , Takahashi Junichi , Yoshioka Yoshiaki , Adachi Tatsuya , Akai Toshio , Hirano Masataka , Ihara Ayako , Kamejima Taibun , Koyama Hiroshi , Maruo Tetsuya , Matsunaga Hironori , Nakamura Takashi , Obata Takeshi , Okuno Kazuhiko , Shimanuki Yasushi , Tachikawa Iwao , Takase Hiromitsu , Tanigaki Takeshige , Tsukamoto Kazuyoshi 
Published: December 2004

AbstractThis paper reports results of the second SIMS round‐robin study on GaAs impurity analysis in which 16 laboratories participated. Three different types of SIMS instruments, including Cameca IMS‐3F or IMS‐4F, Atomika ADIDA‐3000 and Hitachi IMA‐3, were used for this study. The specimens were cut from identical multielement‐doped GaAs crystals and distributed as common standards for the quantitative impurity analyses. The interlaboratory deviations in quatitative results based on the common standards were found to be 10–20%, except for some low‐concentration specimens and the results for zinc. This was approximately half of the corresponding results produced from standard specimens provided by the laboratories themselves. The interlaboratory deviations of relative ion intensity between impurity and matrix were <50% for those laboratories employing instruments of the same type, except for low‐concentration specimens. These results show that quantitative analysis to an accuracy of 50% can be performed without standard specimens by utilizing relative sensitivity factors for each type of instrument.
Maximum entropy analysis of the effects of elastic scattering on the reconstruction of depth profiles from angle‐dependent XPS measurements
Authors: Werner W. S. M. , Smith G. C. , Livesey A. K. 
Published: December 2004

AbstractThe maximum entropy technique is a powerful general‐purpose data analysis tool that has been applied to the reconstruction of composition depth profiles from angle‐resolved x‐ray photoelectron spectroscopy measurements. In this paper, the work is extended to include the effects of electron elastic scattering using a recently developed description of electron transport in solid materials. The new description of photoelectron transport has been encoded into the forward calculation of the data, and maximum entropy used to determine depth profiles from angle‐resolved XPS within this improved approximation. The effects of elastic scattering on the reconstructions are seen primarily as a reduction in the depth probed by the technique.
Role of chemical surface heterogeneity in the adhesion of photocured resins to ceramic substrates
Authors: Taylor A. M. , Watts J. F. , Bromley‐Barratt J. , Beamson G. 
Published: December 2004

AbstractThe surface composition of various ceramic substrates used for electronics applications is heterogeneous. In the case of debased alumina, this may result from the diffusion of sintering aids such as silica, added during the manufacturing process, which produce a complex bonding surface. In this study, the durability of a visible light curing resin applied to a variety of ceramic substrates of differing acidity/basicity was investigated. Butt‐joints consisting of photocured resin adhered to quartz, silicon wafers and polished alumina were produced. Following immersion in water at 50°C for periods of several weeks, joints were fractured (in situ in the VG ESCALAB Mk II and just prior to loading into the Scienta ESCA300). Angle‐resolved XPS analysis was carried out on both sides of the failure. Failure occurred cohesively, with 1–2 nm of polymer remaining on the ceramic side of the failure. Orientation of the oxygenated functional groups of the polymer was observed within this overlayer, with methoxy groups being aggregated immediately adjacent to the inorganic surface; subtle differences were observed between the polished alumina and other substrates. An absence of the aromatic groups from the photocured polymer was also noted on the ceramic side of the failure. These results are explained in terms of acid–base interactions, and a model for adhesion and subsequent failure of the system is proposed.
Quantitative analysis by XPS using the multiline approach
Authors: Jablonski A. , Lesiak B. , Zommer L. , Ebel M. F. , Ebel H. , Fukuda Y. , Suzuki Y. , Tougaard S. 
Published: December 2004

AbstractAn efficient method for quantitative XPS analysis is the so‐called multiline approach. This method does not require standards, it takes into account the instrumental and matrix effects and it derives quantitative information from statistical analysis of all photoelectron intensities visible in the spectra. One can expect the reliability of this approach to be better than the reliability of methods involving uncorrected relative sensitivity factors. This paper summarizes recent improvements in the multiline approach. In particular, a new expression for the universal energy dependence of the inelastic mean free path is currently used. Furthermore, the statistical analysis has been modified in order to account properly for the error in the countrates. Finally, a database with physical constants has been added (photoionization cross‐sections, asymmetry parameters, binding energies, etc.) to avoid errors of polynomial approximations. The modified algorithm of the multiline approach was applied to photoelectron intensities measured for AuCu alloys in four laboratories. Surfaces of these alloys were sputtered with 2 keV Ar+ ions, because at this energy the selective sputtering effects are expected to be negliible. Very consistent results were obtained. The average deviation from the bulk surface composition was found to be equal to ±3.2 at.%. Extensive software implementing the described version of the multiline approach is presently being developed.
Efficiency of plasticization of PVC by higher‐order di‐alkyl phthalates and survey of mathematical models for prediction of polymer/diluent blend Tg's
Authors: Mauritz K. A. , Storey R. F. , Wilson B. S. 
Published: December 2004

AbstractPresently, a suitable theory to predict the Tg vs. composition relationship for a given polymer‐plasticizer blend, based on detailed molecular structure and molecular energitics considerations, is not available. In particular, the plasticizer efficiency parameter, k, which is uniquely defined at low‐to‐moderate diluent concentrations, and is an essential variable in the Mauritz‐Storey theory of the diffusion of large molecules in amorphous polymers in the rubbery state, must always be determined by experiment. In this work, k was determined by DSC for PVC that was plasticized over a range of concentrations with a number of higher branched and linear di‐alkyl phthalates. The results will be used in our plasticizer diffusion theory as well as provide guidance in the future development of a general mathematical model for predicting k. It was seen that k decreased with increasing molecular weight for both the linear and branched phthalates. For a given molecular weight, the branched phthalates have higher k values than the linear structures. These results have been rationalized in terms of the additional free volume created by the inefficiency of packing polymer chains about these large penetrant molecules. The DSC scans also implied an increasing degree of microstructural heterogeneity with increasing plasticizer concentration. Finally, relationships between plasticizer diffusion coefficient in the rubbery state and the plasticized Tg were established for low‐to‐moderate diluent concentration for three of the plasticizers studied by utilizing experimental diffusion data from our earlier work on these systems.
Zur Chemie der kondensierten Phosphate und Arsenate. II. Über die Konstitution des Natriumtetrametaphosphates und Eigenschaften der Tetraphosphate
Authors: Thilo Erich , Rätz Rudis 
Published: December 2004

AbstractEs wird gezeigt, daß sich das Natriumtetrametaphosphat durch Alkali quantitativ nach der Gleichung:

zu Natriumtetraphosphat aufspalten läßt. Diese Reaktion verläuft bimolekular. Das Tetraphosphat seinerseits zerfällt bei Zimmertemperatur, schneller in der Wärme, in 2 Molekeln Na3H[P2O7]. Da außerdem von den 6 Natriumatomen des Tetraphosphates zwei leicht hydrolysierbar sind, müssen die Anionen der Tetraphosphate kettenförmig, die des Tetrametaphosphates ringförmig gebaut sein. Die Hydrolyse des gelösten Tetraphosphates führt zur Bildung von Ortho‐ und Pyrophosphat. Einige Salze und analytische Reaktionen der Tetraphosphorsäure werden beschrieben.
Über die Vorgänge beim Erschmelzen von Glas mit Na2SO4. II. Das Verhalten des Natriumsulfits bei höheren Temperaturen in Luft‐, Kohlenmonoxyd und Kohlendioxydatmosphäre
Authors: Sack Werner 
Published: December 2004

AbstractNatriumsulfit wird beim Erhitzen in Luftatmosphäre teilweise zu Natriumsulfat oxydiert. Bei 675° C disproportioniert die Hauptmenge des nicht oxydierten Sulfits spontan in Natriumsulfat und Natriumsulfid gemäß: 4 Na2SO3→3 Na2SO4 + Na2S + 35,64 kcal1) mit starker positiver Wärmetönung, wobei die Reaktionsmasse zu sintern und bei etwa 700° C zu schmelzen beginnt. Bei weiterer Temperatursteigerung auf 1000° C wird das durch die Disproportionierung entstandene Natriumsulfid durch den Luftsauerstoff ebenfalls zu Natriumsulfat oxydiert. Nur zu einem geringen Bruchteil findet bei dieser Temperatursteigerung in der Schmelze eine Umkehr der Zerfallsreaktion statt. Das hierbei entstehende Natriumsulfit dissoziiert in Natriumoxyd und Schwefeldioxyd. Neben diesen gleichzeitig sich bildenden geringen Mengen an Natriumoxyd ist daher Natriumsulfat nach dem Erstarren nahezu das ausschließliche Reaktionsprodukt bei diesen Versuchen.Im Kohlenmonoxydstrom findet bereits unterhalb 675° C eine chemische Reaktion des CO‐Gases mit dem Natriumsulfit statt. Besonders auffällig wird diese Reaktion in Gegenwart geeigneter Katalysatoren, unter deren Einfluß der Zerfall des Kohlenmonoxyds in Kohlenstoff und Kohlendioxyd stattfindet: 2CO ° C+CO2 und Umsetzung dieser Zerfallsprodukte mit dem Natriumsulfit erfolgt. Vorwiegend entstehen Natriumcarbonat und Natriumsulfid; in untergeordnetem Maße Natriumsulfat, Natriumpolysulfid und Schwefel als feste Reaktionsprodukte. In den Abgasen konnte außer Kohlenmonoxyd und Kohlendioxyd noch Kohlenoxysulfid nachgewiesen werden.Die Versuche im Kohlendioxydstrom zeigen, daß die Umsetzung des Kohlendioxyds mit dem Natriumsulfit für die Natriumsulfat‐Bildung verantwortlich ist. Darüber hinaus bestätigen diese Versuche nochmals die im Kohlenmonoxydstrom gewonnenen Erkenntnisse.
Zur Kenntnis der Vorgänge beim „Ausrühren”︁ technischen Tonerdehydrates
Authors: Wrigge Fr. W. , Ginsberg H. 
Published: December 2004

AbstractDie Impfwirkung von normalem Aluminiumhydroxyd auf die Aluminatlaugen des Bayer‐Verfahrens wurde durch Versuche ermittelt. Es wird festgestellt, daß der wesentliche Bestandteil in jedem Falle kristallisierter Hydrargillit ist. Die Wirksamkeit des Hydrargillits als Impfstoff wird auf das Vorhandensein von aktiven Stellen an der Kristalloberfläche zurückgeführt.
Die Erscheinung der Amphoterie in verschiedenen Lösungsmitteln als komplexbildender Vorgang
Authors: Grüttner Barbara , Jander Gerhart 
Published: December 2004

AbstractSCHOLDER hat bereits durch zahlreiche Experimente gezeigt, daß die Reaktion von amphoteren Hydroxyden mit stärkeren Basen in Wasser zur Bildung von Komplexverbindungen, den Hydroxysalzen, führt und nicht etwa eine Neutralisation in der klassischen Bedeutung des Begriffes ist.Es wird nun gezeigt, daß die Erscheinung der Amphoterie in anderen dissoziierenden Lösungsmitteln als Wasser diese Schlüsse SCHOLDERS erhärtet. In einer ganzen Reihe von nichtwäßrigen, aber wasserähnlichen Lösungsmitteln besteht nämlich gar keine andere Möglichkeit, als daß die amphoteren, schwachen Basenanalogen mit den stärkeren Basenanalogen unter Komplexbildung reagieren.
Über emprotide Schwermetall‐Innerkomplexe der α‐Diketondithiosemicarbazone (Thiazone). I
Authors: Bähr G. , Hess Edith 
Published: December 2004

AbstractDie Ligandeneigenschaft des Diacetyldithiosemicarbazons wird gegenüber Kupfer und Nickelionen untersucht. Die entstehenden Innerkomplexe haben auffallende Farben und Löslichkeiten, sie sind zur Bildung kristallisiert zu erhaltender, farbenprächtiger Überkomplexe befähigt. Kurze Diskussion der Konstitution. Lichtabsorptionsmessungen im Sichtbaren. Ausblicke.
Über die Reaktion von Hydrazin mit Phosgen
Authors: Glemser Oskar , Weber Hartmut , Duyster Hubert 
Published: December 2004

AbstractBei der Reaktion von Hydrazin mit Phosgen im Vakuum entstehen 53 Molproz. Hydrazindihydrochlorid, 40 Molproz. Carbohydrazid und 7 Molproz. Hydrazidicarbohydrazid; Spuren von Hydrazincarbonsäure werden nachgewiesen. Eine Deutung des Reaktionsverlaufs wird gegeben.
Über die Umwandlungen des Berylliumoxyacetats
Authors: Hendus H. , Hardt H. D. 
Published: December 2004

AbstractNach Röntgenuntersuchungen ist der Zusammenhang zwischen den Modifikationen des Berylliumoxyacetats dadurch gegeben, daß die bekannte, bei Raumtemperatur instabile monokline Modifikation (β) nur über die eigentliche Hochtemperatur‐Modifikation (γ) erhalten wird.
Über Polysilane. I. Ein Verfahren zur Darstellung von Polysilan(I)
Authors: Schott G. , Herrmann W. 
Published: December 2004

AbstractDurch Umsetzung von Tribromsilan mit Magnesium in ätherischer Lösung gelang es, das Polysilan (1) (SiH)n in größeren Mengen relativ leicht und in befriedigender Reinheit darzustellen. Eine geringe Substitution der H‐Atome durch Brom war nicht zu vermeiden, sie hielt sich jedoch in niederen Grenzen.
Geschmolzenes Antimon (III)‐chlorid alsionisierendes„wasserähnliches”︁ Lösungsmittel. I
Authors: Jander Gerhart , Swart Karl‐Heinz 
Published: December 2004

AbstractDas geschmolzene Antimon(III)‐chlorid wird als ionisierendes Lösungsmittel in den Kreis der Solventien mit gewissen „wasserähnlichen”︁ Eigenschaften eingereiht.Es zeigt ein gutes Lösungsvermögen für viele organische Verbindungen. Von anorganischen Verbindungen ist ebenfalls eine beträchtliche Anzahl löslich; einige Salzgruppen sind weitgehend unlöslich.Kristallisierte Solvate sind sowohl von organischen als auch von anorganischen Verbindungen erhältlich. Eine Solvatation dieser Verbindungen in Lösung ist ebenfalls anzunehmen.Die elektrische Eigenleitfähigkeit des geschmolzenen Antimon(III)‐chlorides in der Größenordnung von 10−6 Ohm−1 · cm−1 und der Anstieg der spezifischen Leitfähigkeit beim Auflösen von Elektrolyten in der Schmelze sowie der Verlauf dieser Leitfähigkeitskurven zeigen ein „wasserähnliches”︁ Verhalten des Solvens SbCl3 an. Die Eigenleitfähigkeit der Verbindung SbCl3 in geschmolzenem Zustande wird auf das folgende Dissoziationsschema zurückgeführt: (x + 1) SbCl3 ⇌ SbCl + Cl− · x SbCl3.Danach sind, in Analogie zum Lösungsmittel Wasser, Verbindungen, die in Lösung die Konzentration der SbCl‐Ionen erhöhen, Säurenanaloge; Verbindungen, welche die Konzentration der Cl−‐Ionen erhöhen, sind Basenanaloge. Das Verhalten solcher Verbindungen in geschmolzenem SbCl3 wird durch Leitfähigkeitsmessungen und kryoskopische Messungen untersucht.