bluuebunny/crossref_metadata_2025_split huggingface dataset:
Preparation of CuTi‐Cu3Ti compound alloy films and their applications as diffusion barrier in Cu/CuTi‐Cu3Ti/TiN/Si multilayered contact system
Authors: Yoshimoto Ken‐Ichi , Sasaki Katsutaka , Yanagisawa Hideto , Noya Atsushi 
Published: July 2007

AbstractThe CuTi2 intermediate layer in a Cu/CuTi2/Ti/Si multilayered contact system disappears when heat‐treated at a temperature higher than 500°C. Thus, to improve the thermal stability of a Cu/CuTi2/Ti/Si multilayered contact system, it is necessary to replace the CuTi2 layer with other Cu‐Ti compounds that are thermally stable at temperatures higher than 500°C. Among various Cu‐Ti compounds, Cu3Ti is the most stable compound formed by heat‐treating the Cu/Ti bilayered system. However, since it is difficult to form a monolithic layer of Cu3Ti intermetallic compound, Cu‐Ti alloy systems which contain Cu3Ti and can be formed at relatively low temperature were investigated. The CuTi‐Cu3Ti compound alloy films were formed when the Cu/Ti bilayers were heat treated at 350°C for four hours. Thus, the thermal stability of a Cu/CuTi‐Cu3Ti/TiN/Si contact system was investigated. The experimental results indicate that the top layer of Cu can be preserved even when heated at 600°C and the interdiffusion between Cu and Si can be minimized.
Photolithography using half‐tone phase‐shifting mask
Authors: Hasegawa Norio , Imai Akira , Terasawa Tsuneo , Hayano Katsuya , Tanaka Toshihiko , Oki Yumiko , Murai Fumio 
Published: July 2007

AbstractA half‐tone phase‐shifting mask (HPM) is effective in improving resolution and focus latitude of an isolated hole pattern. HPM can be fabricated by the conventional method and a practical phase‐shifting technique can be realized using HPM.The authors developed a mask‐defect repair method and an opaque pattern formation technique which suppresses the peripheral exposure due to light leakage. The mask defect was repaired by blackening the defect. The formation of an opaque ring in the peripheral area of a main field was achieved by placing patterns with dimensions smaller than the resolution limit. In addition, it was found by both simulation and experiment that the focus latitude could be expanded by placing additional patterns at proper locations and by illumination of highly coherent light.
Fixed pattern noise of amplified MOS imager in scaling down
Authors: Andoh Fumihiko , Tanaka Katsu , Kawashima Hiroshi , Yamawaki Masao 
Published: July 2007

AbstractAmplified MOS imagers (AMIs) have random noise figures comparable with those of charge‐coupled devices (CCDs) but suffer from significant fixed pattern noise (FPN). AMIs are now being experimentally scaled down to a size of 250, 000 pixels per quarter inch for possible use in Hi‐Vision systems. We fabricated test devices in order to determine which elements make the greatest contribution to FPN after scaling down. The amplification transistors and reset transistors proved to make comparable contributions to FPN and, in addition, exhibited similar gate‐length fluctuations (rms value about 21 nm). Fluctuations in the gate lengths of other components of the devices produced no significant effect on FPN. In the amplification transistors, variations in the voltage threshold produced four times as great an effect on FPN as variations in the gain factor. On exposure to light, FPN increased with aperture.
Diffusion barrier effects of Al3Zr/Zr bilayered films interposed between Al and Si
Authors: Yanagisawa Hideto , Noya Atsushi , Sasaki Katsutaka , Abe Yoshio 
Published: July 2007

AbstractThe interfacial solid‐phase reactions taking place in the Al/Al3Zr/Zr/Si contact systems have been investigated to evaluate the effectiveness of Al3Zr/Zr bilayered films as a diffusion barrier in Al‐metallization technology. The interposition of an intermediate Al3Zr layer can successfully suppress the possible spontaneous rections between the Al and Zr layers because nearly‐minimum free energy states are realized at interfaces of both Al/Al3Zr and Al3Zr/Zr. It is revealed that the present system tolerates heat treatment at temperatures of up to 470°C and the formation of a Zr‐silicide layer is observed at the Zr/Si interface after heat treatment in the temperature range of 450 ∼ 470°C.
Memory macrocell techniques for 1‐V battery‐operated ASICs
Authors: Shibata Nobutaro , Date Shigeru 
Published: July 2007

AbstractLow‐power ASICs with a single Ni‐Cd battery cell are necessary to implement small, lightweight.and economical portable equipment. This paper describes SRAM and mask‐ROM macrocell techniques for 1‐V battery‐operated ASICs. Synchronous specification combined with pipeline technique is employed to enhance the performance of maximum operating frequency.Six‐transistor CMOS SRAM cells are realized by using high threshold‐voltage (VTH) MOSFETs to reduce the power dissipation due to the subthreshold leakage current. Peripheral circuitry is designed with multi‐threshold‐voltage CMOS (MTCMOS) technology, which is implemented by using high‐ and low‐VTHMOSFETs. A test chip including several memory macrocells is fabricated with 0.5‐μm MTCMOS technology, and the macrocell demonstrated 30‐MHz operation at a 1‐V power supply.
Development of a liquid crystal photo fabrication system
Authors: Kimura Masayuki , Kubota Etsuo , Bessho Nobuo , Fukuda Ichiro 
Published: July 2007

AbstractReduction of fabrication and operational costs has become an important issue in today's laser scanning photo‐fabrication system. In this paper, a novel liquid crystal‐type photo‐fabrication system (LC‐PFS) that does hot require a laser will be proposed. It will be shown that this system is useful for three‐dimensional visualization of CAD and CT image data.In this study, the design indices for a double‐layered STN (DSTN) liquid crystal panel for electrically rewriting exposure mask were fust clarified by numerical analysis. Then the optimum design condition for the liquid crystal panel that maximizes the contrast ratio (hardening sensitivity corrected contrast) was experimentally obtained. Finally, a liquid crystal panel with a diagonal dimension of 11.4 inches and 1.9 × 105 pixels was fabricated. Using LC‐PFS test equipment with the forementioned panel, a real‐sized skeleton was created to demonstrate the advantage of this system.
Deep‐submicron CMOS technologies for low‐power and high‐performance operation
Authors: Deura Manabu , Nara Yasuo , Yamazaki Tatsuya , Gotoh Kenichi , Ohtake Fumio , Kurata Hajime , Sugii Toshihiro 
Published: July 2007

AbstractIntegrated circuits with 1GHz logic, 1G bit DRAM, and 1G transistors, together with the CMOS technology with a gate length of less than 0.2 μm are the ingredients of the “Giga‐Era.” However, in order to integrate these billions of MOSs at giga‐frequencies, the problem of the power consumption cannot be avoided. It is a common practice to cope with this problem by reducing the power supply voltage. In deep submicron MOS, although the basic gate delay is not likely to degrade as the power supply voltage is reduced, it is necessary to set a low threshold value (Vth) within the wafer plane with reduced parasitic devices, if the absolute current values become important, as in the interconnect load. However, reliability problems involving the short‐channel effect and hot carriers then cannot be avoided. This paper describes the use of the cobalt silicide process and shallow extension structure of the source/drain to reduce the parasitic resistance. It is also shown that setting a low Vth with fewer fluctuations is possible by combining the double‐side‐wall process and the counter‐dose process. By means of the above process, deep submi‐cron CMOS with low parasitic resistance and low Vth can be fabricated.
Alleviation of subthreshold swing and short‐channel effect in buried‐channel MOSFETs: The counter‐doped surface‐channel MOSFET structure
Authors: Enda Toshiyuki , Shigyo Naoyuki 
Published: July 2007

AbstractOne of the important issues for the realization of deep, submicrometer CMOS is the choice between a buried channel or a surface channel for pMOS. Conventionally, buried‐channel devices have been considered difficult to miniaturize and operate at low voltage. This is because they have a distinct short‐channel effect and a large S‐swing (subthreshold swing). However, the conventional analysis considers only the case in which the buried layer is deep. The junction depth is reduced on miniaturization, but there has not been sufficient analysis for the case of a shallow buried layer. Therefore, we have analyzed by simulation the way in which the buried‐channel S‐swing and short‐channel effect depend on the depth of the buried layer and the source/drain junctions. We have found that if the buried layer is shallow enough for complete depletion, the S‐swing becomes smaller than that for a surface channel and the subthreshold characteristics become sharper. In other words, we have shown for the first time that the optimized structure for a minimum S‐swing is not a surface channel but a buried channel. This structure is called CDSC (counter‐doped surface‐channel). It is also demonstrated that the short‐channel effect can be suppressed better than in a surface channel if the source/drain is shallower than the buried layer. Therefore, CDSC is promising for deep, sub‐micrometer pMOS.
Reasons for heat resistance and reduced oxide thickness of Ta2N anodized capacitors
Authors: Yamane Misao , Sasaki Katsutaka , Abe Yoshio , Kawamura Midori , Noya Atsushi 
Published: July 2007

AbstractTa2N anodized capacitors have much greater heat resistance than Ta anodized capacitors. The difference between the heat resistances of the Ta and Ta2N capacitors was investigated by Auger analysis and it was found that the Ta2N compound thin film itself has a high heat resistance: Very little thermal oxidation of this film occurs until relatively high temperatures. The thermal degradation of TaN2 anodized capacitors which takes place at temperatures above 450°C was found to be due to the oxygen diffusion from the anodized layer to the Ta2N underlayer. Another cause of thermal degradation was the oxidation of the Al electrode at high temperatures. Therefore, both the breakdown of the interface between the electrode and anodized layer and the oxidation of Al also contributed to the thermal degradation of the capacitors at high temperature. Even though the thickness of the Ta2N anodized layer was reduced by using a 30 V anodizing voltage, the heat resistance was greater and the capacitance was 3 times as high as that of Ta capacitors anodized at 160 V.
Efficiency improvement by frequency modulation of carrier signal for an inductor commutation soft‐switched PWM inverter
Authors: Nagao Michihiko , Watanabe Shinichirou , Harada Koosuke 
Published: July 2007

AbstractThe inductor communication soft switched PWM inverter (ICSI) gives good output waveforms and allows high carrier frequencies. However, to realize soft switching, a circulating current must always flow, so that the efficiency is not as good as in the conventional hard‐switched PWM inverter (CHSI).In this paper, to alleviate the efficiency deterioration due to the circulating current, we propose a technique which uses frequency modulation (FM) of the carrier signal. The frequency is designed to be higher at zero of the input signal and lower at its peak. By this technique, the circulating current is suppressed efficiently without sensing of the voltage and current of the main circuit, and efficiency is greatly improved. We quantitatively investigate this FM method and analyze the loss and efficiency of ICSI based on the FM method (FM‐ICSI). We also compare it with ICSI without the FM method and discuss the effectiveness of the FM method.
Propagation characteristics of microstrip line with semiconductor substrate under laser spot illumination
Authors: Horii Yasushi , Tsutsumi Makoto 
Published: July 2007

AbstractIn this paper, the scattering characteristics of an optically controlled microstrip gap fabricated on a silicon substrate are analyzed theoretically using the (FD)2TD method, and the effects of the spot diameter of the laser beam, the location of illumination, and the plasma thickness on such characteristics are studied. The theoretical results show that twin peaks can be observed in the transmission coefficient (S21) by the use of a laser beam with a spot diameter smaller than the gap, and that nondispersive characteristics can be developed by a laser beam having a large spot diameter. Finally, the theoretical results are compared with measurements.
The BETA‐MOSFET: A novel high‐performance transistor
Authors: Yoh Kanji , Koizumi Ryouji , Hashimoto Naotaka , Ikeda Shuji 
Published: July 2007

AbstractThe bipolar enhanced transistor action (BETA)‐MOSFET, operating in a mixture of FET mode and bipolar mode, has been fabricated. Unlike the lateral bipolar transistor, its base current can be automatically controlled by the gate voltage. Hence, the device operating voltage can be in a wide range and is a maximum of −4 V. It is confirmed that the device can be treated as a high‐performance MOS‐FET in circuit analysis. Three types of device structures, with a gate‐substrate contact that includes an ultrathin‐film tunnel junction, are fabricated and evaluated. In the p‐channel BETA‐MOSFET, the drain current and the maximum transconductance are about four times those of the conventional MOSFET while maintaining the same threshold voltage. This result implies that the BETA‐MOSFET with a gate length of 1.3 μm exhibits a superior performance equivalent to a 0.1‐μm p‐MOSFET.
Boundary management in action reflection learning™ research: Taking the role of a sophisticated barbarian
Authors: Yorks Lyle , O'Neil Judy , Marsich Victoria J. , Nilson Glenn E. , Kolodny Robert 
Published: July 2007

AbstractBoundary management is a challenge in all forms of participant observation. Here the authors explore considerations that they believe are unique to participant observation research within Action Reflection Learning™ (ARL™) programs. The authors hypothesize that field researchers' efforts to manage boundaries bear some similarities to a key phenomenon of the program itself, that is, learning takes place as a result of reflection informed by an outsider's perspective. The researcher's role is given the label of sophisticated barbarian because researchers have some specialized knowledge and can thus ask some sophisticated questions. Yet, because they maintain some distance from the existing group's culture and mindset, they may ask some questions that seem barbaric to insiders.
Systematic agreement: A theory of organizational alignment
Authors: Semler Steven W 
Published: July 2007

AbstractOrganizational alignment is a concept often mentioned in human resource development (HRD) models but rarely explained in detail. This theory of alignment looks at the extent to which strategy, structure, and culture create an environment that facilitates the achievement of organizational goals. The concept of alignment lends itself to the creation of high‐performance work systems by explaining how the interdependent elements of the organization can achieve greater individual and collective efficiency and effectiveness. Well‐aligned organizations apply effective leadership and HRD processes to create systematic agreement among strategic goals, tactical behaviors, performance and reward systems, and the organizational culture. This agreement helps people to remove barriers to cooperation and performance and thereby increases the performance of individuals, processes, and the organization as a whole.
Toward construct validation of a transfer climate instrument
Authors: Holton Elwood F. , Bates Reid A. , Seyler Dian L. , Carvalho Manuel B. 
Published: July 2007

AbstractDespite general acknowledgment of the difficulty in transferring learning, no validated and generally accepted instrument exists to measure factors believed to affect its transfer. Rouiller and Goldstein (1993) developed an eight‐factor structure for a transfer climate instrument but could not validate the structure because their sample size was inadequate. This study attempted to validate their hypothesized constructs using factor analysis and found a substantially different factor structure, suggesting a different direction for future transfer climate instrument research. The results suggest that trainees perceive climate according to referents in the organization rather than according to psychological cues, as Rouiller and Goldstein proposed. Consequently, a transfer climate instrument incorporating additional constructs was analyzed. The resulting nine‐factor solution suggested additional constructs and indicated that transfer climate was perceived according to organizational referents.
Ratee preferences concerning performance management and appraisal
Authors: Gosselin Alain , Werner Jon M. , Hallé Nicole 
Published: July 2007

AbstractA diverse sample of 265 employees was surveyed for ratee preferences concerning seven performance management and appraisal issues. Research questions were formulated on appraisal source, feedback issues, and the performance management process. Results indicated that subjects most trusted their immediate supervisor as an accurate source for their appraisal and that they preferred having prior knowledge of their supervisor's expectations, receiving ongoing informal feedback throughout the appraisal period, and receiving formal appraisals at least twice a year. Subjects expressed preferences for developmentally oriented appraisals that were based mostly on the results of work. Preferences were not moderated by ratee experience or gender. Implications for human resource development professionals are discussed.
Environmental factors and the effectiveness of workforce diversity training
Authors: Hanover Jeanne M. B. , Cellar Douglas F. 
Published: July 2007

AbstractThis study examined the effects of a diversity training workshop on self‐perceptions of behavior and importance of related management practices among ninety‐nine middle managers in a large corporation. It also examined relationships between environmental variables and training criterion variables. It was hypothesized that the workshop would positively affect perceptions of behavior and ratings of importance and that the work and social environments would influence the training outcomes. Analyses were conducted to determine if the environmental variables had direct or indirect effects on the training criterion variables. The study found that those who attended the workshop did rate management practices related to diversity as more important and did perceive themselves as engaging in such practices more than did a control group. The social environment variable indirectly affected posttest importance ratings of diversity‐related management practices and self‐perceptions of behavior through its effect on initial levels of those variables, but the work environment measure was not related to the criterion variables.
Informal learning in corporate workplaces
Authors: Garrick John 
Published: July 2007

AbstractThis article examines the informal learning of two principal HRD practitioners working at the Sydney 2000 Olympic Games construction sites, highlighting tensions between individual experience and the workplace. The article is based on an interpretive study in which findings are “counterpointed” by postmodern and critical perspectives. Key questions include these: Why is informal learning, at this particular moment, an important research focus in HRD? What are the problems of defining informal learning? How does one learn informally, and what affects it? The article concludes by rethinking informal learning and discussing implications for future HRD research and practice.
Leadership styles and management practices of russian entrepreneurs: Implications for transferability of western HRD interventions
Authors: Ardichvili Alexander , Cardozo Richard N. , Gasparishvili Alexander 
Published: July 2007

AbstractThis study explores the degree of readiness among Russian entrepreneurs to adopt Western HRD interventions. Structured interviews were conducted with 256 owners and CEOs of private Russian companies created after 1986 as independent start‐ups or as spinoffs from state‐owned firms. Manufacturing, retail, wholesale trade, and service sectors were represented. Entrepreneurs from the eight largest Russian cities were selected to represent the major economic regions. The study examined leadership styles, management decision‐making processes, and the degree of involvement in management and HRD interventions. Among other results, it found that work design and performance management interventions were used more often than employee training and development or interventions aimed at changing the organizational culture.
Learning network theory: The tension between learning systems and work systems in organizations
Authors: van der Krogt Ferd J. 
Published: July 2007

AbstractThis article presents a theory on the organization and development of learning systems—the learning network theory. In this theory, learning systems in work organizations are analyzed in a network approach to organizations. Learning systems are subject to tensions, which arise from their dual orientation: an orientation toward the development of human potential (humanity) and an orientation toward the development of the work process (work relevance). Learning network theory offers a frame of reference for analyzing the tensions between humanity and work relevance and provides leads for handling such tensions. The article concludes with a number of suggestions for further research into the organization of learning systems.
An extension of the theory of margin: A framework for assessing readiness for change
Authors: Hanpachern Chutima , Morgan George A. , Griego Orlando V. 
Published: July 2007

AbstractThe study investigated the relationships of margin in life (MIL) and demographic variables to readiness for change. Results, based on 131 employees of a manufacturing company, showed that overall MIL and five work subscales had significant positive relationships with readiness for change. The demographic variables of department, position, and length of employment were also related to readiness for change but not to MIL. Three variables combined to predict readiness: employees who get more personal power than burden from their relations with managers, employees who themselves are in managerial positions, and employees who are relatively new to the company. Among the MIL subscales, all of the work aspects, except social relations in the workplace, had higher ratings on load than on power, whereas the reverse was true for the nonwork aspects of family, self, and health. The results suggest strategies to facilitate effective change interventions.
Influence behaviors and managerial effectiveness in lateral relations
Authors: Church Allan H. , Waclawski Janine 
Published: July 2007

AbstractThis article reports on a study of the influence practices and effectiveness of 207 middle‐level staff and program management personnel in nonmanagerial positions in a high‐tech government agency in the United States. Multiple regression results were used to identify specific influence behaviors practiced in lateral relations with peers that directly affected supervisors' perceptions of effectiveness. As hypothesized, managerial self‐awareness (operationalized as congruence in self‐peer ratings) was found to contribute significantly to relationship management aspects of individual effectiveness. Implications of these results for team‐based work in organizations as well as OD and HRD initiatives are discussed.
Understanding support for innovation in a large‐scale change effort: The manager‐as‐instructor approach
Authors: Watkins Karen E. , Ellinger Andrea D. , Valentine Thomas 
Published: July 2007

AbstractA large‐scale organizational innovation, a cascaded training delivery strategy, at a Fortune 10 automotive manufacturer was studied to evaluate its overall impact and to determine possible predictors of support for the innovation. Findings from this innovation study inform a model of innovation implementation and suggest guidelines for using mangagers as instructors.