bluuebunny/crossref_metadata_2025_split huggingface dataset:
In Situ Wafer Emissivity Variation Measurement in a Rapid Thermal Processor
Authors: Dilhac J-M. , Ganibal C. , Nolhier N. 
Published: March 2011

AbstractWafer backside reflectivity measurements at room temperature have been performed in a rapid thermal processor equipped with two rows of heating lamps by measuring, with the process optical pyrometer, the light emitted by the lower row of the heating lamps and reflected by the wafer. The differences in reflectivity have been correlated with the process temperature variations induced by emissivity changes. Optical pyrometer recalibration procedures have then been established. It has been demonstrated that the reflectivity measurement, performed automatically for each wafer prior to the thermal cycle, may drastically improve the accuracy of temperature control.
Rapid Thermal Processing and Properties of Sol-Gel Derived Ferroelectric Thin-Films for Non-Volatile Memories.
Authors: Barlingay C. K. , Dey S. K 
Published: March 2011

AbstractFerroelectric Pb(Zr0.52Ti0.48)O3 or PZT (52/48) thin-films (0.5 μm) were integrated onto Pt passivated Si wafers (3–4 inches) by polymeric solgel processing followed by rapid thermal annealing. Dense and crack-free perovskite microstructures were obtained by densification of the amorphous gel-matrix prior to crystallization. The films exhibited submicron grains (0.2–0.6 μm) with a columnar growth habit. High field measurements on thin-films determined Pr, Psp, and Ec in the ranges of 29–32 μC/cm2. 44–58 μC/cm2, and 50–60 kV/cm, respectively, and ferroelectric switching times below 3 ns.
The Nature of Electrically Inactive Implanted Arsenic in Silicon after Rapid Thermal Annealing
Authors: Altrip John L. , Evans Alan G.R. , Young Nigel D. , Logan John R. 
Published: March 2011

AbstractThe electrical activation of As implanted Si has been investigated on rapid thermal annealing timescales using sheet resistance, spreading resistance and Hall Effect techniques. For high dose implants (>1015 As cm-2) differential Hall Effect and spreading resistance profiles confirm the existence of a temperature dependent electrical solubility limit. However for low dose implants, annealing schedules chosen such that the electrical solubility limit is not exceeded reveal electrical deactivation which is not accounted for in the clustering theory. Hall Effect measurements performed as a function of temperature have enabled us to reveal directly electrically inactive As which is not observable at room temperature using standard electrical techniques. The results indicate that As atoms in Si introduce deep trapping levels within the bandgap which are responsible forremoving As from the conduction process at room temperature. This temperature activated process is characterized with an activation energy of 0.4eV.
Rapid Isothermal Processing of Strained GeSi Layers
Authors: Nayak D. K. , Kamjoo K. , Park J. S. , Woo J. C. S. , Wang K. L. 
Published: March 2011

AbstractThe effects of high temperature-time thermal cycles on the structural stability of GexSi1−x/Si and Si/GexSi1−x/Si layers are studied, using double-crystal x-ray diffraction. The temperature-time cycles chosen in this study are useful for the fabrication of submicron Si MOSFETs. The electrical characteristics of GeSi/Si p-n heterojunctions as a function of annealing temperature and time are also presented.
A Continuous Heterogeneous Model for the Crystalline to Amorphous Transition in Ion Implanted Semiconductors : Relationship to the “Critical Damage Energy Density” Model
Authors: Vieu C. , Claverie A. , Faure J. , Beauvillain J. 
Published: March 2011

AbstractA method is presented for calculating amorphization doses of ion implanted semiconductors, based on a continuous heterogeneous description of damage accumulation. This new approach is compared to the classical “critical damage energy density” (CDED) model. For high dose implantations the equivalence of both descriptions is formally established. It is proposed that the main limitation of the CDED model lies in the linear additivity of damage rather than the homogeneous damage build-up.
Effect of Processing Conditions on the Surface Morphology of thin Polysilicon Films Used for Dram Cell Capacitors
Authors: Mathews Viju K. 
Published: March 2011

AbstractThe surface texture of polysilicon films, used for capacitor storage nodes, have been investigated for various deposition conditions. An increase in capacitance of approx. 70% has been observed in this work. The reproducibility of the surface texture and the resulting capacitance can be improved by optimizing the deposition pressure. The gain in capacitance was also observed to be affected by the thickness of the film. In the mass flow controlled regime the increase in capacitance was 12%. The increase in surface roughness and the gain in capacitance for the hot wall process provides a simple alternative for satisfying the charge capacity requirements in high density dynamic random access memories.
Real Time X-Ray Studies of Interface Kinetics in Epitaxial Strained Layers
Authors: Clarke Roy , Passos Waldemar Dos , Lowe Walter , Rodricks Brian , Brizard Cristine 
Published: March 2011

AbstractA new time-resolved x-ray method of probing the kinetics of interfacial strains in semiconductor heterostructures is presented. High-resolution synchrotron radiation measurements of the strain relaxation during rapid thermal annealing (RTA) show that the lattice strain of an as-grown strained layer structure GaAs-Inx.Ga1−x-As-GaAs/GaAs is relieved cooperatively by a series of sluggish discontinuous transitions. We find that ion implantation enhances the annealing kinetics of InAlAs strained layers.
Characterization of Lead Zirconate-Titanate Thin Films Prepared by Pulsed Laser Deposition
Authors: Chiang C. K. , Wong-Ng W. , Schenck P. K. , Cook L. P. , Vaudin M. D. , Brody P. S. , Rod B. J. , Bennett K. W. 
Published: March 2011

AbstractDense smooth lead zirconate-titanate thin films have been prepared by excimer laser deposition. The as-deposited films are amorphous as indicated by x-ray powder patterns. Differential scanning calorimetry studies show that the film has a glass transition at 301 °C, and the amorphous to crystalline transformation takes place above 350°C to 650°C. Phase formation as a result of post-deposition heat treatment is described.
Analytical Electron Microscopy Studies of Bi-Substituted Garnet Films
Authors: Crozier P. A. , Labun P. A. , Suzuki T 
Published: March 2011

ABSTRACTIn-situ heating in an electron microscope, together with EDX and EELS analysis, was used to characterize as-deposited amorphous and transformed garnet films. It was found that upon initial crystallization, a non-uniform precipitation of a second phase occurred, altering the local chemistry and microstructure of the transformed film. In addition, to study the transformation kinetics in more detail some experiments were conducted at slower heating rates and lower temperatures. It is hoped that the data obtained can be correlated to magnetic property measurements and contribute to the development of improved processing conditions.
Characterization of Contaminants by S-Sims Mapping for Magnetic Recording Devices
Authors: Viswanathan K. V. , Wadkins P. J. 
Published: March 2011

ABSTRACTThe magnetic storage industry moved from particulate to thin fdm disks during the 1980's due to the trend toward higher density media. The disk dimensions also shrunk, from 350 mm to 95 mm and are expected to go down to 62.5 mm. The head-disk fly height will be reduced from 35 nanometers to below 10 nanometers during the coming decade. Contamination build-up on the disk, the head, and at the head-disk interface can create problems and may ultimately lead to head crashing. Therefore, it is important to build hard disk drives using very clean components. Some of the important components are the disk, the bearing, the head, the actuator, the comb, and the spindle. Hydrocarbon contamination is ubiquitous. Lubricants used can be collected by the head and may cause head print problems. Depending upon the curvature of the head and asperities on the disk, there will be head-disk interactions which can lead to smears on the disk surface. Build-up of such smears on the head and disk can reduce fly height and cause performance problems.Static Secondary Ion Mass Spectrometry (S-SIMS) is a powerful technique used to analyze both organics (characteristic fragmentation pattern) and inorganics (by mass number, including isotopic ratio). This approach is not possible with other analytical techniques. Further, the technique is surface sensitive and the detection limit is very low. This paper discusses S-SIMS mapping of smears and head prints following contact/start/stop (CSS) testing. The roles played by individual file components in generating smears are identified. S-SIMS can also be extended to contaminant analysis on silicon wafers, printed board circuits, etc.
Effective Magnetic Permeability of Composite Materials Near the Percolation Threshold
Authors: Lagar'kov A. N. , Panina L. V. , Sarychev A. K. 
Published: March 2011

ABSTRACTA proposed cluster model is used to determine analytically the effective magnetic permeability of ferromagnetic percolating systems. It is shown that on the approach to the percolation threshold the real part of the magnetic permeability tends to zero in spite of the increase of ferromagnetic component. This anomaly is due to the formation of large conducting clusters.
Pseudomorphic Growth of Fcc FeMn Thin Film on NiFe and its Interfacial Structure
Authors: Hwang Chcrngyc , Nguyen Thao A. 
Published: March 2011

ABSTRACTThin film couple of NiFe/FeMn has been used in the magnetoresistive read head design in the magnetic recording industry. The strong magnetic coupling between FeMn and NiFe is of most importance in providing the stability of the MR head. FeMn has been shown to grow epitaxially on NiFe surface and form a metastable fcc structure. The existence of this fcc structure is believed to be the source of the magnetic coupling. It has also been shown that the grain to grain epitaxy exists in this polycrystalline thin film couple, however with only indirect evidence such as Moiré fringes across the interface boundary. To further study this pseudomorphic growth phenomenon, a specially prepared large grain FeMn/NiFe thin film couple was used. Lattice imaging of the interfacial structure was obtained by high resolution cross-section transmission electron microscopy. The plan-view TEM imaging and electron dilfraction patterns also show clear evidence of the grain to grain epitaxy in almost all the grains. The epitaxial strain associated with each coupled grain was also evidenced by the isolated strain contours within each grain. Detailed interfacial structure analysis will be given to elucidate the mechanism(s) by which the interfacial strain is accommodated.
Soft Magnetic Properties and Microstructures for the Fe Based Sputtered Films with High Bs
Authors: Takahashi Migaku , Shimatsu T. 
Published: March 2011

ABSTRACTPhysical origin of high initial permeability, μi, in Fe based films with large magnetocrystalline anisotropy and magnetostriction is systematically discussed in connection with the microstructure of the films. In order to decrease the local anisotropy fluctuation to determine μi in these films, decrease of effective magnetic anisotropy, Ueff, of each grain mainly caused by the sufficient reduction of grain size is required. Induced uniaxial magnetic anisotropy energy, Ku, in film plane plays an important role to decrease Ueff through the micromagnetic interaction. The ratio of Ueff /Ku proposed as the important key to analyse the magnetization process. The dependence of μi Ku is classified concerning for Ueff/Ku.
Soft Magnetic Properties and Brittleness of Boron-Doped Sendust Alloy
Authors: Shoa Yuan-Zhi , Gu Shou-Ren , Chen Nan-Ping 
Published: March 2011

ABSTRACTSendust is limited in its application due to its brittleness. This paper shows the brittleness of sendust ribbon made by rapid quenching can be improved by microalloying of boron with negligible influence on its magnetic properties. The mechanims of boron effect on its properties is discussed.
Magnetic Anisotropy of FeAlSi Sputtered Films
Authors: Ohta Toshihiko , Ohsawa Yuichi , Iwasaki Hitoshi 
Published: March 2011

ABSTRACTThe FeAlSi film magnetic anisotropy has been studied in relation to the residual stress and crystalline orientation. Experiments show that the magnetic anisotropy behavior depends on the geometrical location of the substrate with the target during the deposition. The main origin of the magnetic anisotropy is attributable to the magnetoelastic effect due to the residual stress anisotropy, which may be induced by the anisotropic incidence of sputtered particles to the substrate.
Microstructure and Coercivity of Rapidly Quenched ND-FE-B Magnets
Authors: Pinkerton Frederick E. 
Published: March 2011

ABSTRACTRapidly quenched Nd2Fe14B-based permanent magnets owe their high intrinsic coercivity Hci to their unique submicron-sized grain structure. While no clear consensus has yet emerged regarding the microscopic origin of coercivity in these fascinating materials, magnetic and structural data suggest pinning of magnetic domain walls at or in an intergranular phase between Nd2Fe14B grains as the most likely mechanism. The small, randomly oriented grains in isotropic melt-spun ribbons produce a magnetic structure wherein each Nd2Fe14B grain is a single magnetic domain, with the domain walls expelled to the grain boundaries. The magnetic interaction between neighboring grains plays an important role in the magnetization reversal of individual grains, as revealed, for example, by detailed examination of the initial magnetization and demagnetization processes. The formation of large domain structures via these interactions is frustrated by the random grain orientation in ribbons, but short range magnetic correlations between grains (“interaction domains”) are observed locally.The oriented grains in aligned die upset magnets produce a very different magnetic structure having large scale coherent domains which extend through many grains. A variety of experiments, including studies of the temperature dependence of Hci, suggest that coercivity arises from pinning of the extended domain walls at Nd2Fe14B grain edges.
Dynamics of a Superparamagnetic Ensemble
Authors: Garanin D. A. , Panina L. V. , Ischenko V. V. 
Published: March 2011

ABSTRACTWe have completed a detailed consideration for dynamics (the processes of remagnetization and linear susceptibility) of a superparamagnetic ensemble. The results were obtained using analytical and numerical solutions of the initial Fokker-Plank equation.
Formation of InSb Thin Film as a Magnetic Sensor Material Using In/Sb/In Multilayer Structure
Authors: Yun Chong-Man , Lee Seung-Ki , Han Min-Koo , Yun Mun-Soo 
Published: March 2011

ABSTRACTThis paper proposes the novel processing technique on the formation of InSb thin film which may not be influenced by the vapor pressure difference between In and Sb. Three layers which are composed of In with 1000 A of thickness, Sb with 5000 A and In with 4000 A are deposited sequentially at room temperature. During post heat treatment of these layers, InSb compound phase begins to form and the outer In layer suppresses the reevaporation of more volatile material, Sb. Since multiple single layers are sequentially evaporated, the problem of the severe vapor pressure difference betweentwoevaporating materialsmaynotcontributetothestoichiometriccomposition which may be the most critical parameter to determine the quality of films. The characterization of a fabricated InSb thin film by X-ray diffraction and scanning electron microscope shows that the proposed multilayer method may be a powerful technique to form a high quality InSb compound thin film.
Micromagnetic Processes in Steels
Authors: Beale A. D. , Hetherington M. G. , Jakubovics J. P. , Lewis B. A. , Scruby C. B. 
Published: March 2011

ABSTRACTMagnetoacoustic emission (MAE) and Barkhausen emission (BE) measurements have been carried out on steel specimens heat treated to produce various microstructures ranging from martensitic/bainitic to ferritic/pearlitic. The magnetic domain structure of the specimens has been studied using transmission electron microscopy, and micromagnetic processes have been observed using an in-situ magnetizing device. The results are used in the interpretation of the MAE and BE measurements.
Magnetic Materials for New Sensors — Sensor Magnetics —
Authors: Mohri K. 
Published: March 2011

ABSTRACT”Magnetics sensors” are the key devices to establish intelligent electronics measurement and control systems for development of high level factory automations ( FA ). Various magnetics sensors having quick response, high sensitivity and robustness have been widely developed in these years using amorphous magnetic alloys, magnetoresistive ( MR ) elements, soft ferrites, and high temperature superconductors. These high-performance sensors are spreading in use in the fields of Power-Electronics ( Power Magnetics ), Mechatronics, Medical Electronics ( Medical Magnetics), Information Apparatus, Security Electronics ( Security Magnetics ) etc..Relations between new magnetic materials and high-performance sensors are summarized and a principle for constitution of these sensors is proposed.
Magnetic and Microstructural Studies On Co-Cr Films Investigated Using NMR
Authors: Yoshida Kazuetsu , Kakibayashi Hiroshi , Yasuoka Hiroshi 
Published: March 2011

ABSTRACTThe compositional distribution of Co-Cr vacuum evaporated films is investigated using the 59Co nuclear magnetic resonance technique. The dependence of the spin-echo spectra of Co-Cr films and powders on Cr concentration is measured. The spectra of the films evaporated at 260°C are found to be similar to those of powder samples with the Cr concentration of approximately 6 at%, although the Cr concentration of the films is between 10 at% and 24 at%. It is concluded that the Cr concentration of the ferromagnetic regions in Co-Cr films remains at 6 at%, although Cr concentration increased to 25 at%. The spin-echo spectra of the films evaporated at 160°C show that the Cr concentration in ferromagnetic regions is slightly higher than that found in the films deposited at 265 °C. This implies that segregation is less developed in the 160°C films The relationship between the magnetic properties and the segregation is also discussed
Magneto-Optical Spectroscopy of RE/TM Alloys and TM/CO Multilayers
Authors: Weller D. , Rcim W. 
Published: March 2011

ABSTRACTThis paper reviews on magneto-optical spectroscopy of alloys, metallic multilayers and interference enhancement structures for magneto-optic (MO) recording. Mainly rare earth transition metal (RE-TM) alloys and Co/transition metal (Co/X) multilayers will be discussed. The read out performance in MO write/read tests is given by tile reflectivity and Kerr rotation strongly depends on the wavelength. While the magneto-optical transitions in the near infrared (IR:≈820nm) are dominated by tile 3d magnetic transition metals Fe and Co, the properties in the ultraviolet (UV: <400nm) can be dominated by either rare earths like Nd or Pr in RE-TM alloys or by exchange polarized Pt or Pd in Co/X multilayers and their respective alloys.In an attempt to correlate the magneto-optic Kerr effect to electronic properties we have systematically investigated alloys and multilayers with x-ray photoemission (XPS) and polar magneto-optical Kerr spectroscopy (0.5–5.3eV range). It is found that electronic 4f levels in Nd or Pr contribute to the Kerr elffct via Γ→, d transitions in the order of 0.3°. Exchange polarized Pd and Pt in Co/X multilayers give rise to a room temperature Kerr rotation in the same order of magnitude via excitations of the 4d and 5d bands, respectively. These effects clearly depend on film compositions and thickness ratios.,
TEM Samples of Semiconductors Prepared by a Small-Angle Cleavage Technique
Authors: McCaffrey J. P. 
Published: March 2011

AbstractA small-angle cleavage technique has been developed for transmission electron microscopy (TEM) of semiconductors and related materials. In this technique, samples are prepared by back-thinning the material to a prescribed thickness, back-scribing the material at a specific angle to a standard cleavage plane, and cleaving along these scribe lines. A second cleave is made along the standard cleavage plane to intersect the first cleave, forming a thin wedge. This wedge is mounted on a grid, providing an electron transparent tip free of ion milling artifacts.
Preparation of Cross-Sectional TEM Samples of Fe-Zn Couples
Authors: Giannuzzi L. A. , Howell P. R. , Pickering H. W. , Bidter W. R. 
Published: March 2011

AbstractA preparation technique for the production of cross-sectional transmission electron microscope (TEM) samples from the interdiffusion regions of Fe-Zn binary couples is described. To alleviate the problem of unequal ion milling rates between the Fe and Zn, a 0.75mm thick Fe sheet has been double plated with a thick electrodeposited Zn coating to achieve a total couple thickness of ˜3mm. After slicing the couple in cross-section, the Fe region of the sample is dimpled to perforation near the Fe-Zn interface. Final thinning for TEM analysis is obtained by ion milling using a liquid nitrogen cold stage and sector speed control. The ion milling procedure is stopped when the perforated hole in the Fe-side of the couple extends through the faster eroding Zn-side of the interface. This technique, in modified form, is expected to be suitable for commercial steels coated with Zn-based alloys.
Preparation of Microindentations In Cross-Section
Authors: Morris Jonathan C. , Pharr George M. , Callahan Daniel L. 
Published: March 2011

AbstractThe increased usage of indentation testing for the determination of the toughness of brittle materials has raised many questions about the nature and extent of plastic deformation in these materials. Of particular interest is the behavior of single crystal silicon in indentation (hardness) testing. Recent studies point to some interesting properties of silicon under indentation loading and unloading. The least understood of these properties is the apparent phase change and subsequent cracking that the crystalline silicon experiences upon indentation. The pressure induced phase transformation is thought to proceed by crystalline Si changing to metallic and then changing to amorphous. Accompanying this phase transformation is usually a characteristic cracking pattern.It is the goal of a larger study to characterize the deformation process during indentation. This can be best achieved by producing an electron transparent cross section of a microindentation which is suitable for structural characterization using a Transmission Electron Microscope (TEM). The various conventional and unconventional methods we have attempted to employ to produce suitable samples, the problems we have encountered, preliminary results, and proposed modifications are discussed.
Tem Specimen Preparation of Tial Alloy Powders Produced by Plasma Rotating Electrode Process
Authors: Nishida M. , Chiba A. , Tateyama T. , Tomoshige R. , Morita K. , Aoyagi E. 
Published: March 2011

AbstractTEM specimens of PREPed Ti -48 at.% Al powders can be prepared reproducibly in a straight-forward manner. There are two kinds of powders with respect to surface and crosssectional morphologies. One is with an Widmanstitten-like structure and or a surface relief of martensitic phase and the other is with a dendritic structure. The primary phase during solidification and relative cooling rate in both the powders are discussed by comparing the macroscopic and microscopic features.