bluuebunny/crossref_metadata_2025_split huggingface dataset:
Implementation of FIB Automation Methodologies for TEM Applications in Memory Devices
Authors: Lee Sang Hoon , Miller Joshua-Adams , Perez Veronica , Burns Kenton , Rui Xue , Wang Shixin , Chan SookFun , Lu Ning , Wang Yun-Yu , Jin Qiang , Gifford Robert , Lenzi Tyler , Li Cheng-Han , Beunen Sven 
Published: October 2024

Abstract
This paper presents an automated focused ion beam (FIB) workflow that revolutionizes FIB-TEM sample preparation for semiconductor analysis, particularly for NAND and DRAM devices. This system integrates with Helios 5 HX and Helios 6 HX platforms to achieve consistent, hands-free sample preparation down to ~10 nm thickness. Our approach transforms traditional manual processes into automated workflows through comprehensive best-known method (BKM) templates, custom recipes, and proprietary code development in AutoTEM and iFast software architectures. The system features advanced machine vision algorithms and custom hardware components that enable precise sample coordination, allowing for both vertical and perpendicular TEM sample preparation from 3D structures at any wafer depth. Implementation results demonstrate significant improvements over manual processes, including thousands of hours in workforce savings, reduced material waste, faster throughput, improved data consistency, and minimized human error in DRAM and NAND structural analysis.
IC Backside Deprocessing Physical Failure Analysis with Laser Ablation Technique
Authors: Tan P.K. , Ting S.L. , Teo Angela , Xu N.Y. , Quah Alfred , Tam Y.S. , Kang K.K. , Oh Jessica , Roslan A.F. , Thiruppathi Nivasini , Wicaksono G. , Thoungh H.H.W. , Yu T.T. , Ng P.T. , Chen C.Q. 
Published: October 2024

Abstract
Integrated circuit (IC) de-processing is a crucial step in failure analysis (FA) for defect validation and root cause identification. The commonly used FA de-processing technique is top-down delayering, this is because of faster and easier for sample preparation. However, backside de-processing is occasionally necessary for fault isolation, better root cause understanding, and formulating the failing mechanism such as gate oxide defects, front-end of line (FEOL) defects, back-end of line (BEOL) vertical shorts, high power Ga-N on Silicon (Si) substrate device, etc. This paper introduces an innovative backside de-processing method for ICs utilizing laser ablation by employing a commercial laser decapsulation system. We thin the backside Si substrate via laser ablation and subsequent chemical etching, revealing FEOL defects. Experimental results demonstrate the method's efficiency, offering enhanced sample handling and reduced preparation time. The proposed backside laser de-processing technique proves to be a superior choice compared to conventional methods in terms of success rate, de-processing speed, and cost-effectiveness. This research contributes to advancing FA methodologies by introducing an innovative approach for backside physical FA applications, opening new possibilities for efficient and accurate IC analysis.
Using FIB Grooving to Prepare Top-down-Nanoprobed Sample for Site-Specific Cross-Sectional Nanoprobing Analysis
Authors: Ting S.L. , Tan P.K. , Yu T.T. , Ng P.T. , Chen C.Q. 
Published: October 2024

Abstract
Cross-sectional analysis plays a crucial role in failure analysis for the identification of root causes associated with implants or junction profiles. Traditionally, this step involves junction staining. Recently, Electron Beam Induced Current (EBIC) analysis has emerged as a valuable alternative, offering the key advantage of visualizing various implantations and junction profiles through non-chemical means. This paper presents an innovative sample preparation technique for cross-sectional EBIC analysis, incorporating an additional step of FIB (Focused Ion Beam) grooving at the target site before cross-sectional polishing. Unlike conventional methods that involve laborious and time-consuming fine cross-sectional polishing, our approach enhances precision and efficiency. With the elimination of the need for extensive polishing, direct access to the target is achieved after rough polishing, thereby expediting the analytical process.
Advancing Quantitative Failure Analysis and Strain Measurements at the Nanoscale by Using Scanning Electron Diffraction Microscopy Enhanced by Beam Precession
Authors: Morávek Tomáš , Serralta Eduardo , Hladík Lukáš , Chandran Narendraraj , Němeček Daniel , Stroud Robert 
Published: October 2024

Abstract
The role of scanning transmission electron microscopy (STEM) in failure analysis has been growing since the introduction of advanced technology nodes (10-nm and beyond), in which transistors (FinFET and nanosheets) have become much smaller and more complex. Four-dimensional scanning transmission electron microscopy (4D-STEM) is a new electron diffraction technique that expands conventional STEM imaging and EDX mapping to enable phase and orientation mapping of crystalline and amorphous phases in deposited thin films at the nanometer resolution. The enhancement of electron diffraction data by beam precession is then fundamental for higher accuracy and precision, especially in the case of strain measurements. The power of precession-assisted 4D-STEM analysis is demonstrated using the example of Germanium separation from within a Ge-rich GeSbTe layer in a phase memory device and with the example of tensile and compressive strain in a Samsung 5-nm technology node. These advanced electron diffraction measurements are now accessible to a broad range of users in routine analytical procedures due to unprecedented high levels of automation and synchronization in the new analytical STEM instrument, TESCAN TENSOR.
Statistical Degradation in BGAs for Early Fault Detection
Authors: Bender Emmanuel , Avraham Tsuriel , Bernstein Joseph B. , Boning Duane S. 
Published: October 2024

Abstract
This paper presents a method for statistical analysis of ball grid array (BGA) pin degradation in packaged devices. A novel testing system is demonstrated featuring parallel monitoring of numerous pins, fast thermal cycling, and precise degradation data generation even in moderate stresses. The resistance change data due to temperature cycling stress is compared to stress on the pin due to its location on the chip. The results are vital for localizing vulnerabilities in pins that are not location-specific in the chip. The methods introduced in this study can be expanded to analyze advanced packaging assemblies.
High Contact Resistance from Preferential Oxidation of Silane Gas
Authors: Qin Wentao , Ortiz Esteban , Lent Brandon , McGrady Tim , Yousefi Golnaz , Yach Randy , Chunder Avik , Barrientos Denise , Espinosa Manny , Merino Al , Janasky Christine , Ruiz Tina-cook , Blemker Andy 
Published: October 2024

Abstract
High resistance failures in P+ and N+ contact chains were traced to contacts partially filled with silicon dioxide (SiO2) instead of the intended tungsten. Investigation revealed that oxygen (O2) entered the deposition chamber through a faulty valve during silane gas (SiH4) flow for tungsten seed deposition. This contamination triggered a gas-phase reaction producing SiO2 particles that partially filled the contacts. Analysis of reaction kinetics explained the predominance of SiO2 formation over tungsten deposition: the bond dissociation energy for SiO2 formation is lower than that for tungsten, and SiO2-producing molecular collisions occur more frequently than tungsten-producing ones. The issue was resolved by replacing the leaking valve.
Advanced Package Fault Simulation—The Impact of Accelerated Trace Model Generation
Authors: Zhang Chuan , Aguada John , Sanchez Joseph , Bhattacherjee Arpan , Li Jane Y. 
Published: October 2024

Abstract
In advanced chip package failure investigations, Electro Optical Terahertz Pulse Reflectometry (EOTPR) simulation emerges as a highly effective fault isolation technique. However, traditional manual methods for generating simulation models face significant challenges, including laboriousness, time consumption, and susceptibility to human error. To address these obstacles, we have developed an automation software script in-house. This script autonomously interfaces with the design database, extracting crucial trace information and generating an optimized equivalent trace model. This automated process markedly enhances the efficiency of EOTPR model simulations, streamlining workflow, standardizing procedures, and reducing the potential for human error. The efficacy of integrating the automation script into the workflow of advanced package failure analysis was demonstrated through two case studies. This integration significantly enhanced productivity and enabled successful root-cause investigation of advanced package failures.
Consideration of a Ga-FIB in Lamella Sample Prep for EBIC/EBAC Analysis of Advanced-Node SRAMs
Authors: Johnson Gregory M. , Hartfield Cheryl , Rummel Andreas , Stegmann Heiko , Lechner Lorenz 
Published: October 2024

Abstract
The effects of sample prep with a Ga+-ion Focused Ion Beam (Ga-FIB) on measurements of electron beam induced current (EBIC) were studied. Concerns have been occasionally raised about amorphization from the beam, or even Ga+ implantation ruining the ability to make useful measurements for purposes of either failure analysis or device tailoring. To understand the magnitude of any deleterious effects, two different lamellae from a 5 nm SRAM sample were prepared with different areas of increasingly improved polish, as indicated by decreasing, cumulative, FIB beam energy, followed by EBIC measurements at 1 or 2 kV beam landing energy. A first experiment looked at the ability to generate EBIC measurements from depletion zones and found no difference across the various beam polish cells. A second experiment considered leakage and/or shorts and found little problematic currents, within standard deviations.
AFM-in-SEM for Precise Endpoint Delayering of SRAMs
Authors: Johnson Gregory M. , Hitzel Frank 
Published: October 2024

Abstract
Milling experiments were undertaken with an AFM-in-SEM system to examine various layers in the SRAMs of a 3 nm finFET node technology chip. The simultaneous Conductive AFM and tomographic milling operation provided feedback as to the exact state of delayering in the sample. Despite the relatively rough appearance of some areas of the chip, the milling by the AFM tip was able to create local areas with high planarity. The AFM measurement provided the exact moment certain structures were polished through. Discussion of various electrical modes in the analysis that might provide clearer indications of breakthrough is also undertaken in this paper.
FA Challenges and Case Study Exploration of Multidie Fan-Out Wafer Level Packages
Authors: Zee Bernice , Wen Qiu , Mohammad-Zulkifli Syahirah 
Published: October 2024

Abstract
The semiconductor industry is no longer driven purely by performance. Miniaturization, increased functionality, low latency and high bandwidth requirements are becoming more important. Furthermore, as Moore’s law scaling becomes more difficult and costly, innovations in packaging technologies through heterogeneous integration are being adopted rapidly to meet these demands. This paper discusses how defects in InFO (Integrated Fan-Out) wafer level multi-die semiconductor packages can be successfully root caused and describes the challenges faced when doing failure analysis of such packages.
Fundamental Considerations in the Justification, Design and Construction of an Analytical Laboratory for High Tech Imaging and Processing Tools (2024 Update)
Authors: Herschbein Steven , Hartfield Cheryl , Wong Michael 
Published: October 2024

Abstract
Presentation slides for the ISTFA 2024 Tutorial session “Fundamental Considerations in the Justification, Design and Construction of an Analytical Laboratory for High Tech Imaging and Processing Tools (2024 Update).”
Asociación entre composición corporal y aptitud física en deportistas adolescentes de fútbol
Authors: Muñoz Luna Jonathan Adrián , Benavides Córdoba Danny Fernando , Burbano Coral Gabriela María , Castro Mora Liliana Lizbeth , Quiroz Delgado María Fernanda 
Published: October 2024

La aptitud física y la composición corporal son variables afectadas por la inactividad física o procesos inadecuados de preparación física en las escuelas, que afectan la salud y el rendimiento del deportista y, aumentan el riesgo de padecer enfermedades, por la ausencia de profesionales capacitados. Objetivo: determinar la composición corporal y el nivel de aptitud física en deportistas de fútbol, en la ciudad de Pasto. Metodología: se realizó un estudio descriptivo correlacional de corte transversal, usando la batería Fitness Gram para aptitud física y la bioimpedancia para la composición corporal. Resultados: respecto a talla para la edad en hombres, se observa predominancia en el rango adecuado; las mujeres se ubican en riesgo de retraso en talla; para la aptitud física, la fuerza se ubica en zona de calificación física saludable, al igual que la flexibilidad. Como conclusión, la gran mayoría tiene buena condición física.
‘Martenaut Waves’ in the Music of the French Avant-Garde Cinematographer of the First Half of the 20th Century (on the example of the creativity of A. Honegger)
Authors: Holubov Dmytro 
Published: October 2024

The purpose of the study is to reveal the figurative, semantic and symbolic specificity of the interpretation of the timbre of "Martenaut waves" in the music of the French avant-garde cinematography of the first half of the 20th century, including in the work of A. Honegger. Research methodology. Cultural-historical, interdisciplinary historical-cultural, as well as analytical-musicological methods were essential for this work. The scientific novelty of the work lies in the fact that it introduces for the first time into the circulation of art historians the materials related to the film music of A. Honegger and its timbral specificity, marked by an appeal to the semantic and expressive features of the "Martenaut waves". Conclusions. At the turn of the 19th and 20th centuries, as a result of rapid scientific and technical progress, cinematography came to the forefront of world art. The unity of cinematography as a synthetic art and music is strengthened by the emergence of sound cinema in 1926-1927, in which music is recorded on the same film as the image. The use of electric musical instruments, including "Martenaut waves", becomes organic in this process. Thanks to their unusual timbre, they acquired the meaningful status of the embodiment of "the materialisation of the intangible." The world of hallucinations and dreams, mystical spiritual revelations and unusual natural phenomena – such was the range of images that were conveyed with the help of this instrument in French film music of the 1930s and 1940s. A. Honegger worked most fruitfully in this field during the mentioned period, whose creative output includes more than forty soundtracks, including those using "Martenaut waves". One of the first films in which the expressive timbre of this instrument is used was the science fiction film "The End of the World" (1931) directed by A. Gans, as well as the animated film "Idea" (1934) directed by B. Bartosh and artist F. Mazerel. In the musical accompaniment of these films, the timbre of the "Martenaut waves" occupies almost the most important place, revealing the connection of the instrument with the sphere of the Sacred and the Cosmic and the spiritual and stylistic searches of European modern culture.
Factors Influencing the Outcome of Patients with Surgically Managed Intracranial Meningioma
Authors: Md Kamal Hossain  , Md Rabiul Karim  , Mohammad Humayun Rashid  , Mohammad Sanaullah  , Mahfujul Quader  , S M Noman Khaled Chowdhury  , Abul Hasan Md Touhidur Reza  , Tapas Sarker  , Ansar Uddin Ahmed  , Kashfia Kamal  , Md Motasimul Hasan  , Sirajul Munir Ohi  
Published: October 2024

Background: Intracranial Meningiomas are the most common primary brain tumor in adult which are predominantly non-malignant. Surgical intervention is the goldstandard treatment option for intracranial meningiomas but the surgical outcomes are influenced by various epidemiological risk factors. Understanding these factors is essential for a precise decision-making process, application of effective therapeutic intervention and prognostication. Aims: This study aimed to identify the possible predictive factors influencing surgical outcome in patients with intracranial meningioma. Materials and Methods: This Prospective Observational Study included 34 patients of intracranial Meningioma who had surgery in the Department of Neurosurgery, Chittagong Medical College Hospital between February 2022 to August 2023. Outcome measures were the Glasgow Outcome Scale (GOS) and Karnofsky Performance Status (KPS) score at the immediate postoperative period, “0” postoperative day, at the time of discharge, 1 month, 3 months, and 6 months post-surgery. GOS score 1-3 was considered as poor outcome. Results: The mean age of the patients was 46.8±12.6 years and 70.6% were female. Most of the patients were in either ASA class I (35.3%) or Class II (55.9%), and the median KPS score was 80% before surgery. Twenty-eight (82.4%) patients survived at least six months following surgery and the 6-months mortality rate was 17.6%. Twenty-seven (79.4%) patients had a good outcome and 7 (20.6%) patients had a poor outcome. Preoperative KPS score (p=0.024), tumor location (p=0.019), and tumor volume (p=0.003) were found to have a significant association with outcome in univariate analysis. However, none of these factors retained a significant association in multivariate analysis. Conclusions: In conclusion, specific influencing factors for postoperative poor outcomes revealed in univariate analysis in the present study were low preoperative KPS score, skull base meningioma, and large-size tumor
Bang. J Neurosurgery 2024; 13(2): 121-129
Introduction: Esperantists in the Twentieth Century: Making Connections in an Age of Division
Authors: Glatigny Pascal Dubourg 
Published: October 2024

The transcending of borders marked a large part of the political experience of the 20th century. This aspiration took shape in a century that strengthened and multiplied national barriers and that witnessed two world wars. In response to growing nationalism, many individuals, political movements and communities adopted an enlarged identity bound up with cosmopolitanism, internationalism, pan-Europeanism or, more recently, globalism. These categories, often part of a broader political frame of reference, established a connection between estranged nations but still referred to national divisions. Transnational history has shown how these tendencies were experienced not as a withdrawal of the border framework but as a link between nations-states. In this context, a particular and powerful way of abolishing national constraints has remained unnoticed by historians: the community of Esperanto speakers. They emerged at the end of the 19th century as an alternative to internationalizing models. With this aim, they developed a linguistic and cultural space that would not be marked by one specific culture to the detriment of the others. Nevertheless, the international language and the social movement created around it had to face the dominant ideological trends of the time. Through three case studies from the history of the Esperanto movement we propose to deepen the debate on the links between ideology and transnationalism. The first investigates the epistolary relationship between two communists, one Bulgarian and the other Japanese, discussing the trajectory of their political life and most notably their rejection of Stalinism. The second focuses on the link between Esperanto and anticolonial thinking in East Asia during the 1930s and early 1940s. Based on the study of literature and in particular of post-war Esperanto poetry, the third contribution examines the reasons that led a number of authors to choose the international language Esperanto to formulate their own account of WWII and to perpetuate the memory of the collective tragedy.
Association between varicose veins and constitution of traditional Chinese medicine plus heart-failure-like symptoms
Authors: Tsai Cheng-Ken , Nfor Oswald Ndi , Lu Wen-Yu , Liaw Yung-Po 
Published: October 2024

BackgroundVaricose veins are a common issue for employees in jobs that require prolonged standing compared with all other employees. However, its relationship with presentations of traditional Chinese medicine constitution is unknown. This study aimed to investigate their association.Material and methodsData in the study were obtained from questionnaires of patients in Taiwan Biobank, enrolled from 2008 to 2020. The responses to the statement “I can see distorted blood vessels on my four limbs (varicose veins).” were categorized into none, mild, moderate, severe. and more severe, and the same scale was also used to classify breathing difficulties and hypotension.ResultsA total of 11,293 participants were enrolled in the study. The prevalence of women was higher in the studied group compared with the control. Patients complained of breathing difficulties with moderate (30.49%) and severe discomfort (12.44%) in the diseased group. Regarding hypotension, 28.81% and 9.82% of the patients presented with moderate and severe hypotension, respectively. The cofactor odds ratio was 1.775 for severe breathing difficulty/moderate hypotension and 2.235 for severe breathing difficulty/severe hypotension, with statistical significance. The combined impact of breathing difficulties and hypotension increased with severity.ConclusionsVaricose veins had a higher association with breathing difficulties and hypotension as the severity of the condition worsened. The combined impact of breathing difficulties and hypotension increased as the disease progressed. Therefore, self-reported assessments can be a useful tool for evaluating patients with asymptomatic varicose veins before the development of “heart-failure-like symptoms” to reduce the risk of underdiagnosis.