Microscopic TV Holography for Microsystems Metrology
Authors: Kumar Upputuri Paul , Somasundaram U. , Kothiyal M. P. , Mohan Nandigana Krishna 
Published: July 2017

<!--[if gte mso 9]><xml> <w:WordDocument> <w:View>Normal</w:View> <w:Zoom>0</w:Zoom> <w:PunctuationKerning /> <w:ValidateAgainstSchemas /> <w:SaveIfXMLInvalid>false</w:SaveIfXMLInvalid> <w:IgnoreMixedContent>false</w:IgnoreMixedContent> <w:AlwaysShowPlaceholderText>false</w:AlwaysShowPlaceholderText> <w:Compatibility> <w:BreakWrappedTables /> <w:SnapToGridInCell /> <w:WrapTextWithPunct /> <w:UseAsianBreakRules /> <w:DontGrowAutofit /> </w:Compatibility> <w:BrowserLevel>MicrosoftInternetExplorer4</w:BrowserLevel> </w:WordDocument> </xml><![endif]--><!--[if gte mso 9]><xml> <w:LatentStyles DefLockedState="false" LatentStyleCount="156"> </w:LatentStyles> </xml><![endif]--><!--[if gte mso 10]> <mce:style><! /* Style Definitions */ table.MsoNormalTable	{mso-style-name:"Table Normal";	mso-tstyle-rowband-size:0;	mso-tstyle-colband-size:0;	mso-style-noshow:yes;	mso-style-parent:"";	mso-padding-alt:0in 5.4pt 0in 5.4pt;	mso-para-margin:0in;	mso-para-margin-bottom:.0001pt;	mso-pagination:widow-orphan;	font-size:10.0pt;	font-family:"Times New Roman";	mso-ansi-language:#0400;	mso-fareast-language:#0400;	mso-bidi-language:#0400;} --> <!--[endif] --> <p class="MsoNormal" style="text-align: justify;">The continuously advancing Micro-Electro-Mechanical Systems (MEMS) technology requires a robust non-contact quantitative measurement system for the characterization of their performance, reliability and integrity. A TV holographic system with long working distance microscope is developed for the static, dynamic and 3-D surface profile characterization of Microsystems. The system can be operated either in <em>continuous</em> or <em>stroboscopic</em> illumination mode of operation.<span> </span>In this paper we present the development of a microscopic imaging system and its applications <span style="color: black;">for </span>Microsystems Metrology.</p><p class="MsoNormal" style="text-align: justify;"><strong>Defence Science Journal, 2011, 61(5), pp.491-498</strong><strong><strong>, DOI:http://dx.doi.org/10.14429/dsj.61.908</strong></strong></p> <!--[if gte mso 9]><xml> <w:WordDocument> <w:View>Normal</w:View> <w:Zoom>0</w:Zoom> <w:PunctuationKerning /> <w:ValidateAgainstSchemas /> <w:SaveIfXMLInvalid>false</w:SaveIfXMLInvalid> <w:IgnoreMixedContent>false</w:IgnoreMixedContent> <w:AlwaysShowPlaceholderText>false</w:AlwaysShowPlaceholderText> <w:Compatibility> <w:BreakWrappedTables /> <w:SnapToGridInCell /> <w:WrapTextWithPunct /> <w:UseAsianBreakRules /> <w:DontGrowAutofit /> </w:Compatibility> <w:BrowserLevel>MicrosoftInternetExplorer4</w:BrowserLevel> </w:WordDocument> </xml><![endif]--><!--[if gte mso 9]><xml> <w:LatentStyles DefLockedState="false" LatentStyleCount="156"> </w:LatentStyles> </xml><![endif]--><!--[if gte mso 10]> <mce:style><! /* Style Definitions */ table.MsoNormalTable	{mso-style-name:"Table Normal";	mso-tstyle-rowband-size:0;	mso-tstyle-colband-size:0;	mso-style-noshow:yes;	mso-style-parent:"";	mso-padding-alt:0in 5.4pt 0in 5.4pt;	mso-para-margin:0in;	mso-para-margin-bottom:.0001pt;	mso-pagination:widow-orphan;	font-size:10.0pt;	font-family:"Times New Roman";	mso-ansi-language:#0400;	mso-fareast-language:#0400;	mso-bidi-language:#0400;} --> <!--[endif] --> <p class="MsoNormal" style="text-align: justify;"> </p>