bluuebunny/crossref_metadata_2025_split huggingface dataset:
New Carbon-bridged Hybrid Polymers for Low-k Materials
Authors: Choi Bum-Gyu , Kim Byung Ro , Moon Myung-Sun , Kang Jung-Won , Ko Min-Jin 
Published: June 2019

AbstractReducing interline capacitance and line resistance is required to minimize RC delays, reduce power consumption and crosstalk below 100nm node technology. For this purpose, various inorganic- and organic polymers have been tested to reduce dielectric constants in parallel with the use of copper as metal line. Lowering the dielectric constants, in particular, causes the detrimental effect on mechanical properties, and then leads to film damage and/or delamination during chemical-mechanical planarization CMP) or repeated thermal cure cycles. To overcome this issue, new carbon-bridged hybrid materials synthesized by organometallic silane precursors and sol-gel reaction are proposed.In this work, we have developed new organic-inorganic hybrid low-k dielectrics with linear or cyclic carbon bridged structures. The differently bridged carbon structures were formed by a controlled reaction. 1H NMR, 29Si NMR analysis and GC/MSD analysis were conducted for the structural characterization of new hybrid low-k dielectric. The mechanical and dielectric properties of these hybrid materials were characterized by using nanoindentation with continuous stiffness measurement and Al dot MIS techniques. The results indicated that these organic-inorganic hybrid materials were very promising polymers for low-k dielectrics that had low dielectric constants with high thermal and mechanical properties. It has been also demonstrated that electrical and mechanical properties of the hybrid films could be tailored by copolymerization with PMSSQ and through the introduction of porogen.
The Effect of Methylating Treatments on the Dielectric Reliability of Low-k/Cu Structures
Authors: Borthakur Swarnal , Satyanarayana Sri , Knorr Andreas , Ho Paul S. 
Published: June 2019

AbstractPost ash chemical treatments were evaluated for improving the reliability of Cu/low-k structures. The RC delays, leakage current, ramp-voltage-breakdown and timedependent- dielectric-breakdown lifetimes resulting from different treatments were compared. The pitch dependence of capacitance and breakdown was also evaluated. Post ash chemical treatments were more beneficial for the smaller line spaces. FTIR and TEM/EELS analysis were performed to determine the chemical changes occurring at the sidewall due to the post ash chemical treatments. The analysis showed that the chemical treatments increased the carbon content at the trench sidewalls. The post ash treatments were found to improve the electrical characteristics.
Modeling the Impact of Packaging Stress on Device Performance
Authors: Xu Xiaopeng , Moroz Victor 
Published: June 2019

AbstractIn this study the stress evolution for the entire transistor fabrication process is simulated and the packaging stress is modeled as the external pressure/normal stress acting on the boundaries of the transistor unit cell. The impact on device performance from both the fabrication stress and the packaging stress is investigated using a classical piezo-resistance mobility model. The effect of the packaging stress on device mobility can be either beneficial or detrimental depending on whether the stress is tensile or compressive, on stress pattern, its magnitude, and the transistor type. The results suggest that utilizing both the fabrication stress and the packaging stress for stress engineering can lead to additional device performance enhancements.
Electromigration of Electroplated Gold Interconnects
Authors: Kilgore Steve , Gaw Craig , Henry Haldane , Hill Darrell , Schroder Dieter 
Published: June 2019

AbstractElectromigration tests were performed on passivated electroplated Au four terminal Kelvin line structures using the conventional in situ resistance monitoring technique. The stress conditions were a current density of 2.0 MA/cm2 with ambient temperatures ranging from 325°C to 375°C. The temperature coefficients of resistance (TCR) values were measured prior to current stressing to calculate the Joule heated film temperatures. The times to failure (lifetimes) for the Au line structures were considered as a 50% ΔR/R0 change. The median time to failure (t50%) was plotted against the inverse film temperature to determine the activation energy value as 0.59 ± 0.09 eV. Failure analysis of void location and suggested diffusion mechanism will be discussed.
Characterization of Temporary Extrusion Failures in Quarter-Micron Copper Interconnects
Authors: Zhang Yan , Choy Junho , Chapman Glenn H. , Kavanagh Karen L. 
Published: June 2019

AbstractWe report an unusual circuit failure mode induced by short-lived extrusions observed during DC and AC electromigration (EM) tests of quarter-micron damascene copper interconnects. This novel “soft” failure mode consists of extrusions forming, then self-dissolving before the traditional permanent void or extrusion failure. These failures shorten the lifetime significantly and bring new challenges to reliability tests. Two self-dissolution mechanisms under DC test conditions are discussed and extrusion shape evolution is modeled assuming both capillary and electron wind forces are present. Our model confirms that the electrical stress will accelerate the shape evolution process.
Thin Film on ASIC (TFA) - A Technology for Advanced Image Sensor Applications
Authors: Sterzel Juergen , Blecher Frank 
Published: June 2019

AbstractThanks to its three-dimensional integration and the use of amorphous as well as crystalline silicon, the TFA technology is suitable for advanced image sensor applications. This paper describes the fundamentals of the properties: sensitivity, dark current, temporal and fixed-pattern noise of these TFA image sensors. It compares the different sensitivity definitions, especially current sensitivity and the charge conversion factor. Further, the dark current sources are pointed out, and their temperature behavior is described. By noise calculations, different pixel input stages are compared with regard to low light level detection.
Application of Magnetic Ferrite Electrodeposition and Copper Chemical Mechanical Planarization for On-Chip Analog Circuitry
Authors: Washburn Cody , Brown Daniel , Cabacungan Jay , Venkataraman Jayanti , Kurinec Santosh K. 
Published: June 2019

AbstractInductors are important components of analog circuit designs, from matching circuitry to passive filters. In this study, the application of electrophoretically deposited nano-ferrite material has been investigated as a technique to increase the inductance of integrated copper planar inductors fabricated using copper plating and chemical mechanical planarization. Sintered Mn-Zn ferrite particles are suspended in a medium of isopropyl alcohol with magnesium nitrate and lanthanum nitrate salts. The transportation of the particles to the substrate surface is assisted by applied electric field and particles adhere to the substrate surface by a glycerol based surfactant. Electrophorectic deposition process forms a self aligned polymeric thin film on the surface of a p-type silicon substrate selectively with respect to copper. This ferrite deposition method yields high selectivity to the inductor coils and patterned silicon substrates compatible with standard silicon technology.
A CMOS Medium Density DNA Microarray with Electronic Readout
Authors: Thewes Roland , Paulus Christian , Schienle Meinrad , Hofmann Franz , Frey Alexander , Schindler-Bauer Petra , Atzesberger Melanie , Holzapfl Birgit , Haneder Thomas , Hanke Hans-Christian 
Published: June 2019

AbstractA CMOS chip-based approach is reviewed for fully electronic DNA detection. The electrochemical sensor principle used, CMOS integration of the required transducer materials, chip architecture and circuit design issues are discussed, respectively. Electrochemical and biological results obtained on the basis of medium density microarray sensor CMOS chips with 16×8 sensor sites prove proper operation.
Small Angle X-Ray Scattering, FTIR and SEM Characterization of Nanostructured PVA/TEOS Hybrids by Chemical Crosslinking
Authors: Mansur Herman S. , Mansur Alexandra A.P. 
Published: June 2019

AbstractIn the present work, novel hybrid nanostructured composites were produced to be used in many potential applications such as biomedical, drug delivery systems, tri-dimensional scaffolds for biomaterials and tissue engineering, biomembranes and optical devices among others. Hybrids were synthesized by reacting poly (vinyl alcohol) (PVA) in aqueous acid solution with silicon alcoxide tetraethoxysilane (TEOS). PVA/TEOS hybrids were also modified in the nanometer-scale by crosslinking with glutaraldehyde (GA) during the synthesis involving hydrolysis and policondensation of PVA/TEOS. The hybrids were characterized by Fourier Transform Infrared Spectroscopy (FTIR), Small Angle X-ray Scattering (SAXS) and Scanning Electron Microscopy (SEM). FTIR spectra have shown major vibration bands associated with organic-inorganic chemical groups present in the hybrid composite PVA/TEOS. Also, typical absorption bands related to glutaraldehyde alkyl chain have indicated the crosslinking reaction of the hybrid network with glutaraldehyde (PVA/TEOS/GA). SAXS results have indicated different nano-ordered disperse phases for PVA, PVA/TEOS hybrid and PVA/TEOS/GA chemically crosslinked hybrid. SEM micrographs have shown morphology difference between PVA and PVA hybrid samples.
In Situ Characterization of Surface Evolution on Titanium in Hydrogen Peroxide Containing Solutions
Authors: Muyco Julie J. , Gray Jeremy J. , Ratto Timothy V. , Orme Christine A. , McKittrick Joanna , Frangos John 
Published: June 2019

AbstractTitanium implants have been used for decades with success in various applications. The characteristics of titanium that allows acceptance in the body are not well defined. It is known that hydrogen peroxide is a chemical species produced during the inflammatory response following implantation. When titanium is exposed to hydrogen peroxide, a Ti-peroxy gel (TiOOH) is formed. Three possible functions of Ti-peroxy gel are: reduction of the inflammatory response through the reduction of hydrogen peroxide and other reactive oxygen species; creation of a favorable surface for calcium phosphate nucleation; and as a transitional layer between the soft tissue and the stiff titanium. These studies utilized atomic force microscopy (AFM) force spectroscopy, electrochemical techniques, Raman spectroscopy, and optical transparency in situ to define kinetic and mechanical properties of Ti-peroxy gel as it forms on titanium during exposure to hydrogen peroxide. Peaks attributed to Ti-peroxy gel were seen to emerge over the course of several hours using in situ Raman spectroscopy. Force-distance curves suggest a layer that thickens with time on the titanium sample surface.
Surface Roughness Values Closer to Bone for Titania Nanoparticle/Poly-lactic-co-glycolic Acid (PLGA) Composites Increases Bone Cell Adhesion
Authors: Liu Huinan , Slamovich Elliott B. , Webster Thomas J. 
Published: June 2019

AbstractBone substitutes are often required to replace damaged tissue due to injuries, diseases and genetic malformations. Traditional bone substitutes, such as autografts, allografts, xenografts and metal implants, are far from ideal as each have their own specific problems and limitations. Bone tissue engineering offers a promising opportunity for bone regeneration in a natural way. However, currently the scientific challenges of bone tissue engineering lie in the development of suitable scaffold materials that can improve bone cell adhesion, proliferation and differentiation. The design of nanophase titania/polymer composites offers an exciting approach to combine the advantages of a degradable polymer with nano-size ceramic grains that optimize biological properties for bone regeneration. Importantly, nanophase titania mimics the size scale of constituent components of bone since bone itself is a nanostructured composite composed of nanometer hydroxyapatite crystals well-dispersed in a mostly collagen matrix. Previous studies have shown significant improvement in protein adsorption, osteoblast (bone-forming cell) adhesion and long-term functions on nano-grain ceramic materials compared to traditional micron-grain ceramic materials. This study used nanometer grain size titania dispersed in a model polymer (PLGA or poly-lactic-co-glycolic acid) matrix by using various sonication powers to increase osteoblast adhesion. The surface characteristics of the composites, such as topography, titania surface area coverage and surface roughness, were studied by scanning electron microscopy and atomic force microscopy. Of all the composites formulated in this study, osteoblast adhesion was the greatest on nanophase titania/PLGA (30/70 wt.%) sonicated at 118.75 for 10 minutes; this composite was the closest in terms of nanometer surface roughness compared to bone of all the composites formulated. In this manner, this study suggests that nanophase titania sonicated in PLGA under these conditions should be further studied for orthopedic applications.
Fabrication of Semiconductor Nano-particles in the Protein Cage of Apoferritin
Authors: Iwahori Kenji , Yoshizawa Keiko , Muraoka Masahiro , Yamashita Ichiro 
Published: June 2019

AbstractWe specially designed a slow chemical reaction system to synthesize the zinc selenide nanoparticles (ZnSe NPs), in the cavity of the cage-shaped protein, apoferritin. The newly designed chemical synthesis system for ZnSe NPs makes the chemical reaction of compound semiconductor element ions dramatically slow, resulting in that ZnSe NPs can be synthesized in the internal cavity of the apoferritin. The ZnSe NPs synthesized by the optimized reaction parameters are efficiently produced in the aqueous solution. The UVVis spectrum analysis of synthesized ZnSe-ferritin suggests that the formation of ZnSe nuclei in the apoferritin cavity takes about 6 hours by using our slow chemical reaction system. The synthesized ZnSe NPs were characterized by high resolution TEM, X-ray powder diffraction (XRD) and Energy Dispersive Spectrometory (EDS) and it was revealed that the synthesized NPs are a collection of cubic ZnSe crystals.
The Bio-Nano-Process: Making Semiconductor Devices Using Protein Supramolecules.
Authors: Yamashita Ichiro 
Published: June 2019

AbstractThe biology and semiconductor technology have progressed independently. There was a large distance between them and a substantial interdisciplinary research area was left untouched. Recently, this situation is gradually changing. Some researchers are stimulating semiconductor technology by introducing bio-molecules into the nano-fabrication process. We proposed a new process for fabricating functional nano-structure on a solid surface using protein supramolecules, which we named “Bio Nano Process” (BNP). We employed a cage-shaped protein, apoferritin and synthesized several kinds of nanoparticles (NP) in the apoferritin cavity. A two-dimensional array of them was made on the silicon wafer and this array was heat treated or UV/ozone treated. These processes produced a two-dimensional inorganic NP array on the silicon surface. The size of the NP is small enough to be used as quantum dot and the floating nanodots memory using this NP array is now under development. We also proposed another application of the BNP, making use of the obtained nanodot array as the nanometric etching mask. This was realized by employing the neutral beam etching and 7nm Si nano columns with high aspect ratio were fabricated. These experimental results demonstrate that the BNP can fabricate the inorganic nanostructure using protein supramolecules and the BNP opened up a biological path to nanoelectronics devices.
Bio-Inspired Evolution of Zinc Oxide-Based Materials Directed by Amino Acids and Peptides.
Authors: Bill Joachim , Gerstel Peter , Hoffmann Rudolf C. , Jeurgens Lars P. H. , Lipowsky Peter , Wildhack Stefanie , Aldinger Fritz 
Published: June 2019

AbstractWithin this paper the suitability of amino acids and dipeptides as structure-directing agents is discussed. According to that bio-inspired approach these biomolecules were investigated with respect to the evolution of zinc oxide-based architectures. Those small molecules are able to trigger the morphology of these materials ranging from grain-like via two up to three dimensional features. Besides morphological aspects the structural characterization of these solids by means of electron and atomic force microscopy as well as by photoelectron spectroscopy and X-ray diffraction are discussed in order to extract the function of the biomolecules with regard to the formation of the inorganic phases.
Fabrication and Characterization of an Active Matrix Thin Film Transistor Array for Intracellular Probing
Authors: Jun Seung-Ik , McKnight Timothy E. , Melechko Anatoli V. , Simpson Michael L. , Rack Philip D. 
Published: June 2019

AbstractIn order to achieve multiple intracellular stimulation and recording devices with high electrode density and low manufacturing cost, we have fabricated and characterized an active matrix thin film transistor array with integrated vertically aligned carbon nanofibers. This device has the potential for cell probing and screening that provides great potential to execute direct cell sensing/probing and recording with a high electrode density. Each unit pixel in the array is individually addressed by a thin film transistor (TFT) and the vertically aligned carbon nanofibers (VACNF) used to impale the cell are fabricated on the drain electrode of the TFT. The VACNF is grown by direct current plasma enhanced chemical vapor deposition (DCPECVD) using a nickel catalyst. Electroanalysis or impedance differences between the cell probing site and a reference electrode are recorded with a potentiostat or a semiconductor analyzer connected to the output terminals. Additionally, the impedance change with frequency of the intracellular probe can be measured by applying a frame signal input and the signal can be recorded in storage capacitors after the frame scan of the TFTs. Consequently, actively addressed nanofiber arrays enable bidirectional interfacing with tissue matrices in a format that provides intercellular positioning of electrode elements as well as the potential for intracellular residence of probes within individual cells. In our research, we exploit these non-planar electrode systems for efficient coupling with excitable cell matrices as well as for intracellular biochemical manipulation and sensing of and delivery to single cells. In this paper, we will discuss the fabrication sequence of the inverted metal-oxide-semiconductor (MOS) TFT, and will elaborate the materials issues related to integrating the carbon nanofibers with the TFT.
Epitaxial Growth Of Nickel Nanocrystals By Domain Matching Epitaxy
Authors: Narayan Jagdish 
Published: June 2019

AbstractWe show that epitaxial nickel (fcc structure, lattice constant of 0.3528nm) nanocrystals are formed inside magnesium oxide (sodium chloride structure, lattice constant of 0.4201nm) matrix, where the misfit ranges from 3.0% to 31.3% on different interfaces. By controlling the annealing conditions, we obtained two distinct epitaxial morphologies: (1) cube-on-cube with <100>Ni // <100> MgO with a misfit of about 18.0%; and (2) <112> morphology with <112> // <002> MgO (misfit 31.3%); <111> Ni // <200> MgO (misfit 3.0%); and <110> Ni // <020> MgO (misfit 17.0%). These results on epitaxial growth of nickel on MgO with misfit ranging from 3.0% to 31.3% are consistent with the domain matching epitaxy paradigm (DME), where integral multiple of lattice planes match across the film-substrate interface. The lattice planes include all the planes in a crystal structure, not just the diffraction planes involved in the X-ray, electron and neutron scattering. The residual misfit away from the integral multiples is accommodated by the principle of domain variation, where two or three sets of domains alternate with a certain frequency to minimize the misfit close to zero. The epitaxy in the DME paradigm is defined as the film having a fixed orientation which could be the same under certain conditions. From these results on Ni epitaxy, the dominant role of planes and matching of integral multiples of planes to accommodate small to large misfit are clearly established according to the DME paradigm.
Carbon Encapsulated Magnetic Nanoparticles Produced by a Catalytic Disproportionation of Carbon Monoxide
Authors: Prilutskiy Oleg , Katz Eugene A. , Shames Alexander I. , Mogilyanski D. , Mogilko Emma , Bruckental Ishai 
Published: June 2019

AbstractCarbon nanocapsules with a ferromagnetic core of single-crystalline Fe3O4 are demonstrated to be effectively synthesized and collected separately from the other nano-carbon products of the low-temperature reaction of catalytic disproportionation of carbon monoxide. HRTEM demonstrated a defect-free crystalline structure of the Fe3O4 nanoparticles. The encapsulating carbon shells of the Fe3O4 nanoparticles are stable in air at room temperature, but do not prevent them at high temperatures. Accordingly, these nanoparticles may also act as catalysts for the corresponding production of carbon nanomaterials via carbon monoxide disproportionation. In particular, we demonstrate the corresponding transformation of a Fe3O4 core to an iron carbide nanoparticle with simultaneous formation of additional encapsulating carbon layers. Characterization of the synthesized materials by DC magnetization represents clearly resolved hysteresis loops. However characteristic S-shape of the loops (magnetization is still not saturated at 16 kOe) points out some superparamagnetic effects driven by the nano-size origin of the samples. Analysis of the sample's EPR spectra provides an additional insight to the coexistence of several magnetic phases in the synthesized nanomaterials.
Novel Medical Ferrite Nanobeads with Bioactive Molecules Immobilized Strongly onto the Surfaces
Authors: Abe Masanori , Matsushita Nobuhiro , Tada Masaru , Gokon Nobuyuki , Nishio Kosuke , Handa Hiroshi 
Published: June 2019

AbstractUnder neutral conditions (pH=7-9) and temperature as low as 4°C we successfully synthesized ferrite nanoparticles with an intermediate structure between Fe3O4 and γ -Fe2O3 from an aqueous solution. These experimental conditions enabled us to immobilize even very unstable bioactive molecules onto the surfaces of the ferrite nanoparticles during their synthesis. The bioactive molecules were strongly fixed onto the ferrite surface intermediated by specific amino-acids or related-structure molecules each having pairs of carboxyl (COOH) groups. The COOH group pair was found to make a chemical bond with the ferrite particles. Utilizing the strong bond between such molecules and ferrites, we successfully prepared bioactive ferrite nanobeads where the ferrite nanoparticles were encapsulated in a polymer that exhibited negligible non-specific absorption of proteins. We also succeeded in fixing bioactive molecules onto the surfaces of the polymer coating of the ferrite nanobeads. We describe promising applications of our novel bioactive ferrite nanobeads such as high performance magnetic carriers for bio-screening, hypothermia, MRI contrast enhancement and magnetic drug delivery.