bluuebunny/crossref_metadata_2025_split huggingface dataset:
The Influence of Low Temperature Pre-Annealing on the Defect Removal and the Reduction of Junction Depth in Excimer Laser Annealing
Authors: Baek Sungkweon , Jang Taesung , Hwang Hyunsang 
Published: June 2019

AbstractThe influence of low temperature pre-annealing on p+/n ultra-shallow junction was investigated. An ultra-shallow junction was formed by means of B2H6 plasma doping at an energy of 500V. The activation was performed by excimer laser annealing. To study the low temperature annealing prior to laser annealing, furnace annealing at 300°C∼500°C for 5min was performed. Compared with control samples with no pre-annealing, the low temperature preannealing significantly improves junction characteristics, resulting in a reduction of junction depth and a lower leakage current density. A cross-sectional transmission electron microscopy analysis confirmed the lower defect density, which explains the lower leakage current. By optimizing the process conditions, excellent electrical characteristics of the p+/n ultra-shallow junction such as a junction depth of 28nm and a sheet resistance of 250Δ/sq. can be obtained.
Single-Shot Excimer Laser Annealing and In Process Ellipsometry Analysis for Ultra Shallow Junctions
Authors: Noguchi T. , Kerrien G. , Sarnet T. , Débarre D. , Boulmer J. , Zahorski D. , Hernandez M. , Defranoux C. , Laviron C. , Semeria M.N. 
Published: June 2019

AbstractSingle-shot Excimer Laser Annealing (ELA) was performed onto Si surface that was previously B+ implanted with or without Ge+ pre-amorphization. As a result, p+ type USJ (Ultra-Shallow Junction) has been formed. In process analysis, using Infrared Spectroscopic Ellipsometry (IR-SE) has been performed and compared with conventional 4-point probe method. Also, the corresponding crystallinity for the USJ of Si surface has been studied using Ultraviolet-Visible (UV-Vis) Spectroscopic Ellipsometry. In the case of pre-amorphization by Ge+ implantation, the laser energy density threshold required for melting the surface, and therefore for electrical activation, decreased drastically because of the difference in the thermodynamic properties of the amorphized Si. Estimation of the junction depth shows a shallower junction when using UV-SE, as compared to IR-SE. This can be explained by the fact that, in the UV range, the crystallinity of the top layer is predominant while IR-SE is more sensitive to dopant activation. This efficient single-shot ELA is a candidate for the USJ formation for sub-0.1 νm CMOS transistors. The effective method for investigating the activation state related to the crystallinity by using UV-SE and IR-SE is expected to apply as a non-contact analytical tool for USJ formation.
Structural and Optical Properties of the Multilayer Structures Formed by Ge Sub-Critical Insertions in a Si Matrix
Authors: Cirlin George E. , Zakharov Nikolai D. , Werner Peter , Makarov Alexander G. , Tsatsul'nikov Andrei F. , Ustinov Victor M. , Ledentsov Nikolai N. , Egorov Vyatcheslav A. , Gösele Ulrich 
Published: June 2019

AbstractSi/Ge multilayer structures formed by the deposition of relatively small amounts of Ge layers (less then the critical thickness for 3D islands formation) are obtained by molecular beam epitaxy. Their structural and optical properties are investigated in detail. Appropriate growth parameter of the stacked island structures lead to significant increasing of the luminescence efficiency even at room temperature.
Junction and Profile Analysis using Carrier Illumination
Authors: Clarysse T. , Vandervorst W. , Lindsay R. , Borden P. , Budiarto E. , Madsen J. , Nijmeijer R. 
Published: June 2019

AbstractCarrier Illumination™ (CI) is an optical technique for non-destructive in-line monitoring of post-anneal junction depth and pre-anneal PAI depth and dose with wafer mapping capabilities. This work intends to extend the use of the CI-measurements from a range-specific quantitative measurement towards a more universal quantitative analysis of junction depth, profile abruptness and implant dose. For that purpose this paper presents a systematic study of the CI response to a wide variety of post anneal implant processes, varying parameters including implant species, dose and energy, annealing condition, and surface preparation.Samples containing B, BF2 and As-implants with and without Ge PAI layers, with junction depths between 10-120 nm, were measured. In addition near-ideal box-like profiles (as obtained with CVD-growth) were fabricated and measured. For the abrupt CVD profiles, CI measures the junction position with sub-nm resolution independent of the CI-analysis conditions. For more graded profiles resulting from annealed implants, the correlation to the SIMS junction depth becomes a function of generation laser current (which is proportional to the applied power). As the concentration level, at which the correlation is made, can be adjusted over a concentration range of approximately 2x1018 to 2x1019/cm3 by changing the laser current, a route towards correlating the CI measurement with profile abruptness becomes feasible.
A New Ferroelectric Varactor From Water Based Inorganic Precursors
Authors: Dougherty T. Kirk , Drab John , Brand Mike , Kehle Kathleen 
Published: June 2019

AbstractSolution deposition processes for the production of thin multi-element metal oxide films continue with great interest and varied success. Solution deposition via either sol-gel or MOD (Metal Organic Decomposition) methods are of interest due to the ability to produce a wide variety of compositional products at low capital investment cost. The sol-gel method generally uses hydrolytically sensitive metal alkoxides as the starting materials. Manipulation of the reagents and different hydrolysis rates for multi-element mixtures are issues. The MOD method utilizes large organic acid metal salts as the starting materials. In general, MOD solutions are more hydrolytically stable than the sol-gel solutions. MOD process challenges include large quantities of carbon to be decomposed during the firing, shrinkage and stress of the thin films, variable chemistry in synthesis of the starting materials (especially when the starting materials for the MOD precursors are metal alkoxides), and long reaction times for the synthesis. For both the sol-gel and MOD precursors, toxic and volatile organic chemical (VOC's) solvents are employed as the vehicle.This paper will review the chemistry-related issues to production of consistent highquality metal oxide films via the MOD process. The fabrication of thin BaxSr(1-x)TiO3 (BST) films is described. A new class of MOD precursor has been implemented using polyether acids as the organic vehicle. These new materials are both water stable and water soluble. High quality BST thin films made from these precursors are described and capacitors made from these films are compared to the aliphatic acid MOD materials. Improved capacitors using lower resistance electrodes and interconnects are described, as well as devices designed specifically for our specific application.
Characteristics Analysis of Saw Filter Using Al0.36Ga0.64N Thin Film
Authors: Kim Sun-Ki , Park Min-Jung , Jang Cheol-Yeong , Choi Hyun-Chul , Lee Jung-Hee , Lee Yong-Hyun 
Published: June 2019

AbstractAlxGa1-xN sample with x=0.36 was epitaxially grown on sapphire by MOCVD. SAW velocity of 5420 m/s and TCF (temperature coefficient of frequency) of -51.20 ppm/°C were measured from the SAW devices fabricated on the AlxGa1-xN sample, when kh value was 0.078, at temperatures between –30 °C and 60 °C Electromechanical coupling coefficient was ranged from 1.26 % to 2.22 %. The fabricated SAW filter have shown a good device performance with insertion loss of -33.853 dB and side lobe attenuation of 20 dB.
Sub 0.1 μm Asymmetric Γ-gate PHEMT Process Using Electron Beam Lithography
Authors: Sul W. S. , Shin D. H. , Rhee J. K. 
Published: June 2019

AbstractIn this paper, we have studied on the fabrication of GaAs-based pseudomorphic high electron mobility transistors (PHEMT's) for the purpose of millimeter-wave applications. To fabricate the high performance GaAs-based PHEMT's, we have developed unit processes, such as 0.1 μm Γ-gate lithography, silicon nitride passivation, and air-bridge process to achieve high performance of device characteristics. The DC characteristics of the fabricated PHEMT was measured at a unit gate width of 70 μm and 2 gate fingers, and showed a good pinch-off property (VP = -1 V) and a drain-source saturation current density (Idss) of 373.53 mA/mm. Maximum extrinsic transconductance (gm) was 522.4 mS/mm at Vgs = -0.3 V, Vds = 1.5 V, and Ids = 0.5 Idss. The RF measurements were performed in the frequency range of 1.0 ∼ 50 GHz. For this measurement, the drain and gate voltage were 1.5 V and -0.3 V, respectively. At 50 GHz, 9.2 dB of maximum stable gain (MSG) and 4.2 dB of S21 gain were obtained, respectively. A current gain cut-off frequency (fT) of 113 GHz and a maximum frequency of oscillation (fmax) of 180 GHz were achieved from the fabricated PHEMT with a 0.1 μm gate length.
Evidence for Antiferroelectric Behavior in KNbO3/KTaO3 Superlattices
Authors: Sigman J. , Christen H. M. , Fleming P. H. , Boatner L. A. , Norton D. P. 
Published: June 2019

AbstractThe dielectric response in artificially layered 1x1 KTaO3/KNbO3 perovskite superlattice structures is reported. While KTaO3 and KNbO3 are ferroelectric or paraelectric, respectively, superlattices appear antiferroelectric based on an increase in dielectric constant with applied dc bias. This “positive tunability” in dielectric response occurs at the same temperature region where a structural phase transition is observed. This dielectric behavior is inconsistent with the nonlinear response for either paraelectric or ferroelectric materials. However, an increase in the dielectric constant with applied electric field is consistent with antiferroelectric behavior. The antiferroelectric ordering correlates with cation modulation imposed by the superlattice.
Review Molecular Mechanism of Bacterial Magnetite Formation and Its Application
Authors: Matsunaga Tadashi , Okamura Yoshiko 
Published: June 2019

AbstractNano-technology has been identified as an area which will bring about new evolutions in materials, devices and processes. The challenges of nano-biotechnology entail manufacturing more sophisticated and highly efficient biosensors and biomaterials at the nano-scale level for use in interdisciplinary fields. Here, we introduce a biomaterial produced by magnetic bacteria, bacterial magnetic particles (BMPs), and the molecular architecture technique we have used for its application.Magnetic bacteria synthesize intracellular magnets which are encapsulated by lipid bilayer membranes. Sizes of BMPs vary from 50 - 100 nm in diameter, and number over 10 per cell. BMPs are composed of magnetite (Fe3O4) with a single magnetic domain. Easy aqueous dispersion of BMPs enable development of highly sensitive chemiluminescence enzyme immunoassays by the chemical coupling of antibodies on BMP surfaces. BMPs can likewise be used as drug delivery systems employing magnetoliposomes with high capture volumes. We previously reported a technique for preparing recombinant BMPs on which proteins were displayed by gene-fusion. We furthermore applied such recombinant BMPs to biotechnologically-important issues, including novel bioassay platforms for medicine and environmental management. We envisage the production of more refined chemicals and agents through expression on BMPs by gene-fusion followed by simple purification using magnet.
Poly(glycerol sebacate)—A Novel Biodegradable Elastomer for Tissue Engineering
Authors: Wang Yadong , Sheppard Barbara J. , Langer Robert 
Published: June 2019

AbstractBiodegradable polymers have significant potential in biotechnology and bioengineering. However, for some applications, they are limited by their inferior mechanical properties and unsatisfactory compatibility with cells and tissues. A strong, biodegradable, and biocompatible elastomer could be useful for fields such as tissue engineering, drug delivery, and in vivo sensing [1, 2]. We designed, synthesized, and characterized a tough biodegradable elastomer from biocompatible monomers. This elastomer forms a covalently crosslinked three-dimensional network of random coils with hydroxyl groups attached to its backbone. Both crosslinking and the hydrogen bonding interactions between the hydroxyl groups likely contributes to the unique properties of the elastomer. In vitro and in vivo studies show the polymer has good biocompatibility. Subcutaneous (SC) polymer implants are absorbed completely within 60 days with restoration of the implantation sites to their normal architecture.
Nanoscale Patterning of Antigen on Silicon Substrate to Examine Mast Cell Activation
Authors: Orth Reid N. , Wu Min , Clark Theodore G. , Holowka David A. , Baird Barbara A. , Craighead Harold G. 
Published: June 2019

AbstractRat Basophilic Leukemia (RBL) cells are immobilized and stimulated on micro- and nanometer scale patterns of supported lipid bilayers. The patterns are realized as the photolithographically patterned polymer is mechanically peeled away in one contiguous piece in solution. The 0.36 μm2to 4, 489 μm2patches can contain both fluorescent lipids and lipid-linked antigen and provide a synthetic biological substrate for analysis of cell surface receptor-mediated events. 100-nm unilamellar lipid vesicles spread to form a supported lipid bilayer on a thermally oxidized silicon surface as confirmed by fluorescence recovery after photobleaching (FRAP). Aggregation of fluorescently labeled receptors is observed as their coincidence with the patterned antigen. Cell morphology is analyzed with scanning electron microscopy (SEM). Thus, a novel method has been developed for patterning antigen, capturing and immobilizing cells via specific receptors, and spatially controlling antigenic stimulus on the nanoscale.
Effects of Counterface Roughness and Conformity on the Tribological Performance of Crosslinked and Non-crosslinked Medical-Grade Ultra-High Molecular Weight Polyethylene
Authors: Chawan A. D. , Chakravartula A. M. , Zhou J. , Pruitt L. A. , Ries M. , Komvopoulos K. 
Published: June 2019

AbstractThe tribological behavior of crosslinked ultra-high molecular weight polyethylene (UHMWPE) was compared to that of non-crosslinked UHMWPE, used as control sample. A reciprocating pin-on-disk tribometer was used to determine the effects of countersurface roughness and conformity on wear mechanisms occurring during the initial stage of sliding. Pin samples of two different radii of curvature were slid against medical-grade Co-Cr alloy disks with surface roughness ranging from 0.005 to 0.04 μm in a lubricant of bovine serum. Normal loads were chosen to provide physiological contact stresses. The focus of this study was on the dependence of early wear mechanisms on surface roughness and conformity. Although a correlation between coefficient of friction data and dominant wear mechanisms was not observed, different wear mechanisms were found between control and crosslinked UHMWPE. The results of this study provide insight into the differences of the initial wear behavior of noncrosslinked and crosslinked UHMWPE used in total joint replacements.
Influence of DNA, Alginate, Lysozyme and Bovine Serum Albumin on Sodium Silicate Condensation
Authors: Coradin Thibaud , Coupé Aurélie , Livage Jacques 
Published: June 2019

AbstractThe interaction of DNA, alginate, Lysozyme and Bovine Serum Albumin with diluted solutions of sodium silicate was studied using the molybdosilicate method. DNA and alginate showed very weak interactions with silica precursors whereas both proteins were able to form silica gels. Both electrostatic interactions and hydrogen bonds are suggested to arise between peptide chain and polysilicates, bringing new informations on the nature of inorganic and bio-organic species involved in the natural biosilicification processes.
Colorimetric Biosensor Vesicles for Biotechnological Applications
Authors: Halevy Revital , Kolusheva Sofiya , Hancock Robert E.W. , Jelinek Raz 
Published: June 2019

AbstractSupramolecular assemblies of vesicles composed of natural lipids embedded in a matrix of polydiacetylene are shown to undergo blue-to-red color changes related to specific interactions between the lipids or recognition elements and biomolecules. The colorimetric transitions observed in the vesicles are due to structural modifications within the conjugated PDA polymer backbone. This colorimetric assay could serve as a membrane-mimicking environment for detection of interfacial processes, such as peptide-membrane interactions, antibody-antigen binding, enzymatic catalysis, and detection of physiological ions. The lipid/PDA mixed vesicles are robust and can be readily applied to diagnosis of physiological molecules and rapid screening of biological and chemical libraries.
Microstructure and Thermal Expansion Properties of Ostrich Eggshell
Authors: Heredia A. , Lozano L. , Martinez-Matias C.A. , Peña-Rico M.A. , Rodriguez-Hernández A. , Villarreal E. , Martínez A. , García-Garduño M.V. , Basiuk V.A. , Bucio L. , Orozco E. 
Published: June 2019

AbstractTextures of calcite crystals from ostrich (Struthio camelus) eggshells were examined with X ray diffractometry (XRD), transmission and scanning electron microscopy (TEM, SEM), and the thermal stability by thermal expansion analysis (TEA). Results showed that textures vary through the thickness of the eggshell and that expansion properties and thermal behaviour are unusual. Crystals from ostrich eggshell are arranged in two main configurations or layers; the outer layer with the c-axis of crystals oriented perpendicular to the eggshell surface and the inner layer with the c-axes of the crystals arranged almost parallel to eggshell surface; thermal expansion analysis show high stability through a wide range of temperatures until a steep growth near 450-460°C. These results show that the manipulation of crystal texture and properties is under biological control and a better understanding of this biological phenomenon will provide more and better data for improving new synthetic composite materials.
Lipid Exchange Rates of Conventional and Polymer Stabilized Liposomes
Authors: Ahmed Awad , Heldt Nicole , Slack Gregory , Li Yuzhuo 
Published: June 2019

AbstractPolymer-stabilized liposome systems consisting of polyethylene glycol bound lipids (PEG-lipids) and conventional (nonpolymer stabilized) liposomes were compared in terms of their inter-membrane lipid migration rates. In order to monitor the exchange of lipids between the membranes, 1-hexadecanoyl-2-(1-pyrenedecanoyl)-sn-glycero-3-phosphocholine (PY-PC), a phospholipid with pyrene attached to the hydrophobic tail, was used to label the liposome. Labeled and unlabeled liposome systems were mixed and fluorescence spectroscopy was used to examine the lipid transfer. More specifically, the relative employed to deduce the exchange kinetics. After labeled and unlabeled liposome systems were mixed, the E/M ratio for PY-PC in a polymer stabilized liposome system decreased by 66% over a period of 80 minutes, while the E/M for PY-PC in a conventional liposome system decreased 70% in less than 2 minutes. This suggests that the exchange rate for lipids in polymer stabilized liposome systems is much slower than that of conventional liposome systems. In addition, the exchange rates for both conventional and polymer stabilized liposome systems are accelerated at an elevated temperature.
Biomimetic Networks For Selective Recognition of Biomolecules
Authors: Byrne Mark E. , Park Kinam , Peppas Nicholas A. 
Published: June 2019

AbstractStudies of protein binding domains reveal molecular architectures with specific chemical moieties that provide a framework for selective recognition of target biomolecules in aqueous environment. By matching functionality and positioning of chemical residues, we have been successful in designing biomimetic polymer networks that specifically bind biomolecules in aqueous environments. Our work addresses the preparation, behavior, and dynamics of the three-dimensional structure of biomimetic polymers for selective recognition via non-covalent complexation. In particular, the synthesis and characterization of recognitive gels for the macromolecular recognition of D-glucose is highlighted. Novel copolymer networks containing poly(ethylene glycol) (PEG) and functional monomers such as acrylic acid, methacrylic acid, and acrylamide were synthesized in dimethyl sulfoxide (polar, aprotic solvent) via UV-free radical polymerization. Polymers were characterized by single and competitive equilibrium and kinetic binding studies, single and competitive fluorescent and confocal microscopy studies, dynamic network swelling studies, DPC, and FE-SEM. Results qualitatively and quantitatively demonstrate effective glucose-binding polymers in aqueous solvent. Due to the presence of template, the template mediated polymerization process resulted in a more macroporous structure as exhibited by dynamic swelling experiments, confocal microscopy, and SEM. Recognitive networks had a more macroporous structure with absorption of water occurring via non-fickian diffusion at a faster rate and with a higher equilibrium value. Polymerization kinetic studies suggest that the template molecule has more than a dilution effect on the polymerization, and the effect of the template is related strongly to the rate of propagation. The processes and analytical techniques presented are applicable to other biologically significant molecules and recognitive networks, in which hydrogen bonding, hydrophobic, or ionic contributions will direct recognition. Further developments are expected to have direct impact on applications such as analyte controlled and modulated drug and protein delivery, drug and biological elimination, drug targeting, tissue engineering, and micro- or nano-devices.
Microcontact Printing via a Polymer-Induced Liquid-Precursor (PILP) Process
Authors: Kim Yi-yeoun , Gower Laurie B. 
Published: June 2019

AbstractOur biomimetic approach for patterned crystallization is based on the combination of the Micro-Contact Printing technique and a novel mineralization process, called the Polymer-Induced-Liquid-Precursor (PILP) process, which enables the deposition of mineral films under low-temperature and aqueous-based conditions. We demonstrate that a liquid-phase mineral precursor is deposited onto specific areas templated with self-assembled monolayers of alkanethiolate on gold, and then the patterned calcitic films grow under constrained conditions via transformation of the PILP phase, leading to control over the location and morphology of calcitic films.
Polymer Nanocomposites: Molecular Dynamics Simulations of Polystyrene and Polystyrene-Polyisoprene Block Copolymer Nanocomposites
Authors: Shah D. , Bitsanis I. A. , Natarajan U. , Hackett E. , Giannelis E.P. 
Published: June 2019

AbstractMolecular dynamics simulations were used to study the interlayer structure and dynamics of polystyrene (PS) and polystyrene-polyisoprene (PS-PI) block copolymers intercalated in organically modified layered silicates. In the case of PS the polymer chains displace the aliphatic surfactant chains and reside adjacent to the silicate layers. The electrostatic interactions between the aromatic rings on the PS chains and the silicate surface drive the intercalation of the polymer into the host galleries. PI, which lacks such electrostatic interactions, is immiscible (does not intercalate) with the host. There appears to be a minimum number of PS mers for intercalation of PS-PI copolymers to take place. The intercalated copolymer appears to structure inside the host galleries with the PS mers adjacent to the silicate layers and the corresponding PI away from the surface and towards the middle of the gallery. Using the mean square displacements we find that PS is the least mobile species in the galleries with the surfactant chains been the most mobile of all.