bluuebunny/crossref_metadata_2025_split huggingface dataset:
Enhanced Scanning Nonlinear Dielectric Microscopy with Stepwise dC/dV and dC/dz Imaging—Achieving Qualitative, Quantitative and Artifact-Free Carrier Density Profiling of Semiconductor Devices
Authors: Yamaoka T. , Hasumura S. , Hirose R. , Ueno T. , Tamura K. , Yu Jing-jiang 
Published: December 2020

Abstract
High-resolution and high-sensitivity detection of free carriers in semiconductors is critical due to the trend of device miniaturization and diversification. To address this need, the AFM-based techniques of scanning spreading resistance microscopy, scanning capacitance microscopy, scanning nonlinear dielectric microscopy (SNDM), scanning microwave impedance microscopy, and scanning microwave microscopy are used. This paper demonstrates enhanced SNDM with stepwise dC/dV and dC/dz imaging, qualitative analysis, quantitative analysis, and artifact-free carrier-density profiling of semiconductor devices. The trace mode in enhanced SNDM is switched between contact (dC/dV measurement) state and non-contact (dC/dz measurement) state for every line scan whereby the sampling intelligent scan mode is switched these states every pixel. Using IMEC Si standards and Si power MOSFET as examples demonstrates that this SNDM methodology can provide qualitative, quantitative, and artifact-free carrier density profiling of semiconductor devices.
Novel Carrier Measurement Methodology for Floating Gate of Sub-20 nm Node Flash Memory Using Scanning Nonlinear Dielectric Microscopy
Authors: Hirota Jun , Takeno Shiro , Yamagishi Yuji , Cho Yasuo 
Published: December 2020

Abstract
The transistor structure of memory devices and other cutting-edge semiconductor devices has become extremely minute and complicated owing primarily to advances in process technology and employment of three-dimensional structures. Among the various approaches to improve the device performance and functionality, optimizing the carrier distribution is considered to be quite effective. This study focuses on scanning nonlinear dielectric microscopy (SNDM), a capacitance-based scanning probe microscopy technique. First, to evaluate SNDM's potential for high-resolution measurement, the most commonly used metal coated tip with a tip radius of 25 nm was used to measure a quite low-density impurity distribution. Then, after confirming that the SNDM's S/N ratio was sufficiently high for the smaller probe tip, an ultra-fine diamond probe tip with a nominal tip radius of lesser than 5nm as an SNDM probe tip to measure sub-20 nm node flash memory cell transistors was employed. Successful results were obtained and are reported.
GHz-Scanning Acoustic Microscopy Combined with ToF-SIMS/AFM for Wafer-Level Failure Analysis of Bonding Interfaces
Authors: De Wolf Ingrid , Khaled Ahmad , Franquet Alexis , Spampinato Valentina , Conard Thierry , Brand Sebastian , Kögel Michael , Wiesler Ingo 
Published: December 2020

Abstract
This paper discusses the implementation of GHz-Scanning Acoustic Microscopy (GHz-SAM) into a wafer level scanning tool and its application for the detection of delamination at the interface of hybrid bonded wafers. It is demonstrated that the in-plane resolution of the GHz-SAM technique can be enhanced by thinning the sample. In the current study this thinning step has been performed by the ion beam of a ToF-SIMS tool containing an in-situ AFM, which allows not only chemical analysis of the interface but also a well-controlled local thinning (size, depth and roughness).
Interpreting Laser-Based Fault Localization Results: Case Studies
Authors: Lee Sukho , van den Biggelaar John , van Veenhuizen Marc 
Published: December 2020

Abstract
Laser-based dynamic analysis has become a very important tool for analyzing advanced process technology and complex circuit design. Thus, many good reference papers discuss high resolution, high sensitivity, and useful applications. However, proper interpretation of the measurement is important as well to understand the failure behavior and find the root cause. This paper demonstrates this importance by describing two insightful case studies with unique observations from laser voltage imaging/laser voltage probing (LVP), optical beam induced resistance change, and soft defect localization (SDL) analysis, which required an in-depth interpretation of the failure analysis (FA) results. The first case is a sawtooth LVP signal induced by a metal short. The second case, a mismatched result between an LVP and SDL analysis, is a good case of unusual LVP data induced by a very sensitive response to laser light. The two cases provide a good reference on how to properly explain FA results.
Fast and Accurate Fault Localization Through Effective Use of Design Schematics
Authors: Oberai Ankush , Kamoji Rupa , Bhattacherjee Arpan 
Published: December 2020

Abstract
In modern-day semiconductor failure analysis (FA), the need for computer-aided design (CAD) has extended beyond the sole physical layout to a much larger scope of integrated circuit (IC) design data, such as the source schematic and netlist. Due to the improved accuracy of predicted failures reported by test and diagnosis tools, it has become virtually mandatory to correlate the potential failing schematic features (e.g., nets and instances) to their corresponding location on the physical-CAD layout and actual device under test (DUT). This paper covers the latest advancements of utilizing IC design schematics for fast and accurate fault localization; along with some of the most-effective methodologies for efficient root-cause analysis.
Failure Analysis on Inter Polysilicon Oxide Reliability Issues of 40nm Automotive NVM Device
Authors: Tan P. K. , Fransiscus R. , Pan Y. L. , Thoungh H. H. W. , Ting S. L. , Zhao Y. Z. , Wee T. L. , Tan H. , Neo S. P. , Chen C. Q. 
Published: December 2020

Abstract
Reliability tests, such as Time-Dependent Dielectric Breakdown (TDDB), High-Temperature Operating Life (HTOL), Hot Carrier Injection (HCI), etc., is required for the lifetime prediction of an integrated circuit (IC) product. Those reliability tests are more stringent and complex especially for automotive Complementary Metal–Oxide–Semiconductor (CMOS) devices, this because it involves human lives and safety. In foundries failure analysis (FA), Transmission Electron Microscopy (TEM) analysis often required in order to provide insights into the defect mechanisms and the root cause of the reliability tests. In this paper, application of high resolution Nano-probing Electron Beam Absorbance Current (EBAC), Nano-probing active passive voltage contrast (APVC), and TEM with Energy Dispersive X-Ray Spectroscopy (EDX) to identify the failing root cause of Inter- Poly Oxide (IPO) TDDB failure on an automotive grade Non- Volatile Memory (NVM) device was investigated. We have successfully demonstrated that TEM analysis after Nanoprobing EBAC/APVC fault isolation is an effective technique to reveal the failure root cause of IPO breakdown after reliability stresses.
Application of Two-pin EBIC Technique to Isolate the Defective Fin(s) in Advanced Bulk FinFET Devices
Authors: Cheong Kah Chin , Chen Liangshan , Wei Yuting , Zhang Yu , Popielarski Brian , Zhang Xiaodong , Oh Chongkhiam 
Published: December 2020

Abstract
This paper demonstrates a two-pin Electron Beam Induced Current (EBIC) isolation technique to isolate the defective Fin with gate oxide damage in advanced Fin Field Effect Transistor (FinFET) devices. The basic principle of this twopin configuration is similar to two-point Electron Beam Absorption Current (EBAC) technique: a second pin as ground on the gate is added to partially shunt the EBIC current and thus creates EBIC contrast from the defective Fin. In this way, the challenge of highly resistive short path inside the Fin in a narrow gate can be overcome. The paper will provide failure analysis details using this technique for defective Fin isolation.
Conductive-Dissipative-Isolating - Do the Actual Limits in Process Equipment Meet the Requirements of ESD-Sensitive Devices?
Authors: Jacob Peter , Kunz Albert 
Published: December 2020

Abstract
When considering CDM-like discharge, as it happens frequently in modern high-speed process and test equipment, it is important to avoid a so-called hard discharge in various electrostatic discharge (ESD)-sensitive devices. This study presents the results of experiments that were conducted to characterize the nature of hard discharge in various ESD sample materials: electrical pre-characterization, hard- vs. soft discharge test, oscilloscope measurements of the discharge characteristics, thickness measurements of metal table coatings and mates, and chargeability experiment. The results show that, following the existing standards in semiconductor manufacturing, hard CDM discharge cannot be prevented within the standardized lower resistance bandwidth. Insofar, the related standards ANSI 20.20 and IEC EN 61340-5-1 need to undergo a significant revision in the near future. For failure analysts, the results should be taken into consideration in order to advice useful corrective actions when accompanying client audits or doing ESD risk evaluations, especially within automated process equipment.
Study of Thermal Cycle Induced CPI Failure Mode in a Lidded FC-BGA Package
Authors: Morshed Muhammad Monzur , Chen Esther , Madan Anita 
Published: December 2020

Abstract
Dissimilarities of thermal expansion coefficient between chip and package materials results in stress and strain at the solder interconnect leading to fatigue failures. Underfill is used between chip and package to reduce the interfacial stress and hence increase reliability. In this work, four flipchip package test vehicles underwent thermal cycling to accelerate the stress and were investigated systematically with different failure analysis techniques to study their failure modes. The prevalent failure mode was observed to be at the corner area between the chip and package using different advanced failure analysis techniques. This work demonstrates the technical complexity of analyzing stress induced defects and provides insight into CPI-based material selection.
Unintentional Doping Effects on Atomically-Thin Nb-doped MoS2 Observed by Scanning Nonlinear Dielectric Microscopy
Authors: Yamasue Kohei , Cho Yasuo 
Published: December 2020

Abstract
Two-dimensional semiconductors such as atomically-thin MoS2 have recently gained much attention because of their superior material properties fascinating for the future electronic device applications. Here we investigate the nanoscale dominant carrier distribution on atomically-thin natural and Nbdoped MoS2 mechanically exfoliated on SiO2/Si substrates by using scanning nonlinear dielectric microscopy. We show that a few-layer natural MoS2 sample is an n-type semiconductor, as expected, but Nb-doped MoS2, normally considered as a p-type semiconductor, can unexpectedly become an n-type semiconductor due to strong unintentional electron doping.
З історії нумізматичної колекції Церковно-Археологічного музею при Київський духовній академії
Authors: Zraziuk Zinaida Alekseevna 
Published: December 2020

Стаття присвячена нумізматичній колекції Церковно-археологічного музею при Київській духовній академії. Впродовж свого існування (1872-1920 рр.) музей зібрав прекрасну колекцію нумізматики, яка була широковідомою далеко за межі Російської імперії. 31 січня 1873 року указом Св. Синоду був затверджений статут київського Церковно-археологічного товариства та музей при ньому. Першим і єдиним секретарем Товариства став молодий викладач, що пропрацював у академії лише два роки, – Микола Іванович Петров (Рис. 1), який у майбутньому став відомим істориком, заслуженим ординарним професором, академіком. Поряд з церковними старожитностями музей збирав і нумізматичну колекцію. Однією з перших значних пожертв до новоствореного музею була колекція старожитностей і монет, подарована архімандритом Антоніном (А.І. Капустіним). У різні роки до музею дарували монети М.П. Чернєв,і А.Ф. Новицький, М. О. Леопардов та багато інших. Наприкінці ХІХ століття колекції монет нараховувала близько 17 тисяч одиниць. Після революції 1917 року діяльність Товариства була майже зупинена. У 1920 р. Київська духовна академія була ліквідована, а всі колекції передали до Лаврського музею культів і побуту. У 30-рр. ХХ століття нумізматичну колекцію Церковно-археологічного музею передали до історичного музею. У роки революції, громадянської війни, Першої світової колекція понесла значні втрати – її кількість скоротилась більше ніж вдвічі і сьогодні предмети, що походять з Церковно-археологічного музею є окрасою нумізматичної збірки Національного музею історії України. У статті прослідковано історію її створення, згадано людей, які зробили значний вклад у її створення.
Pengembangan Media Pembelajaran Power Point Macro Berbasis Problem Based Learning Materi Besaran dan Pengukuran Sebagai Sumber Belajar Siswa Kelas X
Authors: Miswati Miswati , Amin Ahmad , Lovisia Endang 
Published: December 2020

Penelitian ini bertujuan untuk “Mengembangkan Media Pembelajaran Power Point Macro Berbasis Problem Based Laerning pada Materi Besaran dan Pengukuran Sebagai Sumber Belajar Siswa Kelas X”. Masalah dalam penelitian ini 1) Bagaimana cara mengembangkan media pembelajaran power point macro berbasis problem based laerning pada materi besaran dan pengukuran sebagai sumber belajar siswa kelas X?, 2) Bagaimanakah karakteristik media pembelajaran power point macro berbasis problem based laerning yang dikembangkan memenuhi sasaran kevalidan dan kepraktisan?, 3) Bagaimanakah respon siswa selama pembelajaran menggunakan media pembelajaran power point macro berbasis problem based laerning?. Model pengembangan yang digunakan yaitu Borg and Gall. Yang terdapat 10 tahapan yaitu: tahap potensi dan masalah, pengumpulan data, desain produk, validasi desain, revisi desain, uji coba produk, revisi produk, uji coba pemakaian, revisi produk dan produksi massal. Subjek penelitian kelas X MIPA SMA AL-IKHLAS Lubuklinggau dengan teknik purposive sampling. Pengumpulan data dilakukan dengan teknik observasi, wawancara, dan angket. Validasi yang dilakukan mendapatkan hasil dengan kategori sangat baik dengan skor 128. İnstrumentasi yang digunakan untuk menguku respon siswa menggunakan angket. Respon siswa kelompok terbatas dan guru mendapatkan skor 146 dalam kategori sangat setuju..Respon kelompok main field testing dengan mengerjakan soal quis 6 siswa tuntas berdasarkan KKM. Untuk angket respon siswa kelompok main field testing mendapatkan skor 312 dalam kategori sangat setuju. Sehingga dapat dikatakan bahwa media pembelajaran power point macro berbasis problem based laerning yang dikembangkan telah valid dan praktis.
Authors: Lestantyo Daru , Cahyaningrum Dwi , Jayanti Siswi 
Published: December 2020

Introduction : Nutrition services in hospitals are supporting facilities that have an important role in patient recovery. Food handlers who are the core workers of hospital nutrition services need to pay attention to individual hygiene and sanitation in order to work in a healthy condition. This study aims to analyze the role of occupational health in supporting the success of food safety in hospitals. Methods: The research was carried out by observation with a qualitative approach. The main research responden were food handlers. Result:. Most of the main responden have good knowledge regarding food hygiene and its application objectives. Results : The results of the work environment measurement show that the temperature in the room is above the Threshold Limit Value (TLV) set by the Ministry of Health. The health check is carried out by the MCU unit but has not been on a scheduled basis. Conclusion: This study found that the implementation of the Occupational Safety and Health program has not been carried out in hospital kitchen unit. There are still indicators of the physical work environment that need to be improved and are at risk of causing safety incidents and patient safety. The involvement of officers in the OSH program still needs to be improved through routine training and safety talk.
Keywords: hospital kitchen, occupational health, food handler, hospital food safety
Diversity of Zooplankton in Lindu Lake Waters Central Sulawesi Province
Authors: Hartina Siti , Trianto Manap 
Published: December 2020

Zooplankton is small animals that swim or float in water pools and significantly affect the life of lake aquatic organisms, especially as natural food in the development and cultivation of fish. The purpose of this study was to determine the diversity of Zooplankton species in the waters of Lake Lindu. This research was conducted in April - June 2019 using a purposive sampling method. The results obtained nine types of Zooplankton in the waters of Lake Lindu, Central Sulawesi Province, namely Daphnia sp, Epischura lacustris, Hyperia sp, Cyclops vicinus, Pseudophausia sp, Temora sp, Alonella dadayi, Nebela caudate, Brachionys havanaensis. The diversity of Zooplankton species found in the waters of Lake Lindu is 2.190 (moderate diversity level). The highest H value is at station III (Inlet) which is 2.175, and the lowest H 'value is at station II (settlements) of 2.149.
IDENTIFIKASI JAMUR MAKROSKOPIS DI KAWASAN HUTAN LINDUNG KALEAKAN KECAMATAN NANGGALA TORAJA UTARA
Authors: Arif Arwin 
Published: December 2020

Identifikasi jamur makroskopis dikawasan hutan lindung Kaleakan. Tujuan dalam penelitian ini adalah untuk mengetahui berbagai jenis Jamur Makroskopis yang terdapat di kawasan Hutan Lindung Kaleakan Kecamatan Nanggala Toraja Utara?”.Teknik pengumpulan sampel dilakukan dengan metode jelajah.Sedangkan teknik analisis data dilakukan secara deskriftif kualitatif.Dalam penelitian ini menunjukkan terdapat 33 spesies jenis jamur makroskopis yang ditemukan di lokasi penelitian, dimana seluruhnya berasal dari divisi Basidiomycota yang terdiri atas 3 kelas, 8 ordo, 22 famili, 28 genus. Ordo yang paling banyak ditemukan adalah ordo Polyporales dan famili yang paling banyak ditemukan adalah kelompok jamur dari famili Poliporaceae. Berdasarkan keadaan tutupan lahan pada daerah hutan gundul dengan intensitas cahaya tinggi ditemukan 3 jenis jamur, yaitu Ganoderma sp, Postia stipticus, Nigroporus vinosus. Berdasarkan substratnya, pada kayu lapuk ditemukan 19 jenis jamur(53%), serasah/tanah 13 jenis jamur(36%) dan pada kayu hidup 4 jenis jamur(11%). Sehingga kebanyakan jamur yang hidup di kawasan hutan lindung Kaleakan Kecamatan Nanggala Toraja Utara adalah jenis jamur kayu (wood fungy) yang umumnya berperan sebagai Sabrofit, pelakuk kayu/dekomposer.
Oficinas pedagógicas para feira de ciências: Diagrama V como proposição metodológica
Authors: Xavier Lucas Antonio , Segatto Breno Rodrigues , Ferracioli Laércio 
Published: December 2020

O presente artigo relata o uso da heurística de Gowin, no formato de Diagrama V, como método científico em projetos de Física para a Feira de Ciências da Escola Estadual do Ensino Fundamental e Médio situada no município de Piúma-ES. A escola apresenta um histórico de 35 anos de realização do evento científico. O uso do Diagrama V ocorreu por meio de oficinas pedagógicas, planejadas e estruturadas. A proposta de utilização do diagrama no contexto experimental objetiva promover a ruptura de práticas de roteiros tradicionais e maior engajamento de professores e alunos na Feira de Ciências. Dos dez grupos de alunos das três séries do ensino médio que utilizaram o Diagrama V como instrumento norteador para os experimentos pode-se inferir que os resultados se revelaram promissores, pois perceberam a importância do método científico.
Estatuto da temática ensino-aprendizagem no âmbito da expressão gráfica: o graphica em questão
Authors: Machado Gabrielly Beatriz Batista , Ramos Kátia Maria da Cruz 
Published: December 2020

A linguagem gráfica cada vez mais vem sendo reconhecida como imprescindível para a comunicação em geral, no âmbito deste reconhecimento o GRAPHICA vem se configurando espaço privilegiado do debate sobre temáticas relacionadas à expressão gráfica. Neste sentido, considerando que tal evento também se destina a docentes e discentes, o presente estudo tem como propósito apontar o estatuto que vem ocupando questões relativas ao ensino-aprendizagem nesta área. Para tanto, teve como fonte de dados os três últimos congressos GRAPHICA (2011, 2013 e 2015) e como descritores os termos aprendizagem, avaliação, ensino, metodologia e recursos didáticos. Como resultado foi observado que a temática ensino-aprendizagem vem assumindo um estatuto de pertinência no debate, apresentando um percentual maior de trabalhos, cuja maior incidência recai em estudos sobre aspectos metodológicos do ensino no campo da Expressão Gráfica.
Relações de Gênero na Educação Superior: uma análise do Programa Ciências sem Fronteiras
Authors: MELO Hildete Pereira de 
Published: December 2020

Há um consenso mundial de que a educação é importante para o desenvolvimento econômico e social do mundo moderno e que esta reduz disparidades sociais e econômicas de um país ou região. No entanto, o desenvolvimento do processo educacional foi ao longo do tempo marcado pelo sexismo e relegou as mulheres a uma educação diferenciada por séculos. Esta diferença só foi, parcialmente, vencida pelas mulheres nos últimos 200 anos. Os feminismos têm desenvolvido a consciência de que a diferença que existe entre os sexos no espaço científico e tecnológico deve ser ultrapassada e que para isso a educação necessita integrar e visibilizar as mulheres nos feitos científicos e tecnológicos do mundo atual. Este estudo tem como objetivo analisar se amplificação da insurgência feminista do século XXI, clamando por igualdade entre os sexos e raças e se isso significou alguma mudança na definição das carreiras profissionais das meninas e moças nas duas últimas décadas. Assim, escolheu-se para avaliar este impacto o Programa Ciência sem Fronteiras, desenvolvido na segunda década deste século, pelo Estado brasileiro nas áreas das ciências exatas e tecnológicasGênero. Ciências. Tecnologia. Carreiras profissionais. Política pública.Gender Relations: an analysis of the Sciences without Frontiers program Abstract There is a worldwide consensus that education is important for the economic and social development of the modern world and that it reduces social and economic disparities in a country or region. However, the development of the educational process was over time marked by sexism and relegated women to a differentiated education for centuries. This difference has only been partially overcome by women in the last 200 years. Feminisms have developed the awareness that the difference between the sexes in scientific and technological space must be overcome and that education needs to integrate and make women aware of the scientific and technological achievements of today's world. This study aims to analyze whether the feminist insurgency of the 21st century has amplified, claiming equality between the sexes and races, and whether this meant any change in the definition of the professional careers of girls and women in the last two decades. Thus, the Science without Borders Program, developed in the second decade of this century, was chosen to evaluate this impact by the Brazilian State in the areas of exact and technological sciences.Gender. Science. Technology. Professional careers. Public policy.