Влияние режимов электрохимического травления при одностадийном и двухстадийном формировании пористого кремния на степень окисления его поверхностных слоев в естественных условиях
Authors: Lenshin Alexander S. , Barkov Konstantin A. , Skopintseva Natalya G. , Agapov Boris L. , Domashevskaya Evelina P. 
Published: January 2020

В работе методами растровой электронной микроскопии и ультрамягкойрентгеновской эмиссионной спектроскопии были проведены исследования особенностейформирования многослойных структур пористого кремния и установлено влияние изменения плотности тока при электрохимическом травлении монокристаллических пластин кремния на фазовый состав поверхностных слоев сформированной пористой структуры.

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