bluuebunny/crossref_metadata_2025_split huggingface dataset:
The Hitachi HD-2000 in Semicondutor Manufacturing Support and Research.
Authors: Vanfleet RR , Vartuli CB 
Published: July 2020

Abstract
A Hitachi HD-2000 dedicated STEM with a cold field emission source was installed last fall at the Lucent Technologies Semiconductor Fab site in Orlando. The close relationship between the Orlando arm of Lucent Technologies and the University of Central Florida has and will allow this instrument to be evaluated for its usefulness in two roles: Support of the development and fabrication needs of a semiconductor fabrication facility and the research needs of University based Materials research.
This Hitachi instrument was specifically designed to meet the needs of the semiconductor industry. Sample holder compatibility with the Hitachi Focused Ion Beam (FIB) allows rapid swapping between the two tools. A large solid angle Energy Disperse X-ray Spectrometer (EDS) supports increased resolution and sensitivity of X-ray analysis. Direct digital acquisition speeds image and data transfer to the end user. All these and other features speed the turn around time and usefulness for manufacturing line feedback.
Atomic Scale Grain Boundary Analysis by Incoherent Imaging With TEM/STEM
Authors: Kawasaki M , Yamazaki T , Watanabe K , Shiojiri M 
Published: July 2020

Abstract
Quantitative compositional characterization was carried out on a ceramic boundary using atomic resolution high-angle annular dark field scanning transmission electron microscopy (HAADFSTEM), with the aid of HAADF image simulation. HAADF-STEM observation was performed with a JEM-2010F TEM/STEM equipped with a field emission gun and an HAADF detector. And also the image simulation for HAADF was made on a computer by the program that was developed by the authors using Bethe's method.
The material used in this experiment that was provided by TDK Co., is a semiconducting SrTiO3 (STO) ceramic condenser. The bulk substance was formed by the process of sintering in a reduced ambience followed by the reoxidization in the air after surface coating with Bi2O3, PbO and CuO compounds resulting in having a unique structure with Bi diffusion layers at the grain boundary region.
Nanometer-Scale Cathodoluminescent Properties Through Z-Contrast Scanning Transmission Electron Microscopy
Authors: Gao H-J , Duscher G , Kim M , Kumar D , Singh RK , Pennycook SJ 
Published: July 2020

Abstract
Interest in rare earth-activated oxide-based phosphor thin films for high-resolution display devices has been growing in the last few decades. However, thin-film phosphors typically have a significantly reduced brightness compared to equivalent powder phosphor materials. Several possible explanations have been suggested for the lower brightness including internal reflection and the small interaction volume between the incident beam and the solid. In this report, we show another factor to be crucial to external radiative efficiency, the porosity of the films. Porosity creates internal surfaces that act as a "dead layer" which decreases the emission efficiency. Using Z-contrast imaging in the scanning transmission electron microscope (STEM) with simultaneous cathodoluminescence (CL) imaging, the dead layer is directly observed, and quantitative accounts for the reduction of luminescent efficiency.
Eu activated Y2O3 thin films with thickness of about 200 nm were deposited on (001) LaAlO3 substrates by laser ablation. TEM analysis of the samples was conducted in a Philips EM-400 electron microscope operated at l00kV.
Why Diffraction-Contrast of Defects is a Sad Song and How to Make it Better
Authors: Eades J A 
Published: July 2020

Abstract
Modern TEM's are not suited for the taking of diffraction-contrast images of defects. Figures in books and papers taken more than a quarter century ago show defects (dislocations, small precipitates and so on) against a uniform background, reflecting constant diffraction conditions across the field of view. Such pictures can not be taken today. Even if the sample is quite flat, TEM images are crossed by “bend contours” which arise, not from the bending of the sample, but from the changing orientation of the beam. In modern TEM's, the objective lens is an immersion lens. The sample sits deep within the magnetic field of the lens and, thus, the electrons are travelling in a helical pattern as they strike the sample. Even with a so-called parallel beam, at different places across the image, the electrons strike the sample at different angles (see figure 1).
Recent Developments in Failure Analysis in an Ultra thin Film Evaluation System
Authors: Kamino T , Konno M , Yaguchi T , Hashimoto T , Tanaka H , Nakamura K 
Published: July 2020

Abstract
The increased demand in the microelectronics industry for higher spatial resolution in the analysis of device defects has focused attention on the use of transmission electron microscopy(TEM). However, in contrast to scanning electron microscopes(SEM), the number of TEM units in the microelectronics industry is still limited. This is because TEM operation and TEM specimen preparation are rather complicated and the results dependent upon operator experience.
A innovative solution using a dedicated ultra thin film evaluation system(HD-2000) based upon a 200kV cold field emission scanning transmission electron microscopy(STEM) technique has been developed[1]. The system has STEM image resolution of 0.24nm and 0.3nm spatial resolution for elemental analysis using energy dispersive X-ray(EDX) spectroscopy with 0.3sr collection solid angle. The system therefore allows materials characterization to be performed at atomic resolution. Another advantage of the system is the ease of use due to newly developed PC-SEM operation software.
Electron Beam-Induced Chemical Reactions Of Single Crystal Calcium Floride By Time - Resolved EELS
Authors: Murooka Y , Tanaka N , Hibino M 
Published: July 2020

Abstract
Using parallel beam illumination, electron beam-induced structural transformation has been studied as radiation damages for decades. Recently, however, more attention may need to be paid to beam-induced chemical transformation which happens under illumination by a finely focused beam. Such a small probe is often used in analytical electron microscopy, particularly the core-electron energy loss spectroscopy (EELS). Since the signal for the spectroscopy is very weak long radiation is required and makes the induced chemical reactions happen. Therefore, without attentions to the reactions, the acquired data could lead to misinterpretation of specimen properties. In the present study, using a single crystal calcium fluoride (CaF2), we demonstrated by time-resolved EELS that radiation with a nanometer electron probe could induce chemical reactions between the specimen and the typical residual gases in a microscope column.
The thin films of CaF2 were fabricated by vaporizing flakes of single crystal CaF2 with an electron beam and by dissolving the vapors onto a (001) surface of sodium chloride (NaCl) heated at 300°C.
Image-Spectroscopy: Applying EELS Analysis Techniques to EFTEM Series
Authors: Thomas PJ 
Published: July 2020

Abstract
The energy-loss spectrum of transmitted electrons contains a wealth of information regarding the physical, chemical and electronic properties of the medium under analysis. It provides a powerful means for materials characterisation in the TEM by use of electron energy-loss spectroscopy (EELS) or its spatially parallel counterpart, energy-selective imaging (ESI). Essentially, both analyses probe the same core-loss information, recording transmitted intensity / as a function of energy-loss E and spatial position x, y, to yield a three-dimensional data set I(E, x, y). Acquisition of an extended series of energy-selected images across the energy-loss range of interest has been shown to provide useful spectral as well as spatial information, with the resolution of extracted ‘image-spectra’ being determined by the energy interval between acquisitions and the width of the energy-selecting slit, as illustrated in Figure la. This mode of analysis, termed ‘image-spectroscopy’ is directly analogous to spectrum-imaging in the STEM, and offers many advantages over conventional two- or three-window elemental mapping techniques.
Nanometer Crystal Structure Analysis by EF-CBED and EF-Microscopy
Authors: Tsuda K , Tanaka M 
Published: July 2020

Abstract
Crystal structure refinement by the convergent-beam electron diffraction (CBED) method has the following advantages: (i) Nanometer-size crystal structure refinement: CBED patterns can be obtained from specimen areas of a few nanometer in diameter, (ii) Dynamical diffraction effect: the CBED intensities contain phase information of crystal structure factors through the strong dynamical effect. (iii) Site-selective analysis: the use of Bloch states formed by incident electrons allows structure determination weighted for specific atom sites. Energy-filtering (EF) to revome inelastically scattered background is now getting necessary for such quantitative analysis of CBED patterns. Especially for the determination of atom positions and Debye-Waller factors, the use of energy-filtered higher-order Laue zone (HOLZ) CBED patterns is essential because small displacements of atoms can be sensitively detected using HOLZ reflections with large reciprocal vectors. For this purpose, we developed a new fl-filter transmission electron microscope (JEM-2010FEF) with a high acceptance angle [2] and a new analysis program “mbfit” to refine structural parameters using many-beam Bloch-wave calculations and least-square fitting [1].
Bonding in Ion-Implanted Diamond-Like Carbon Films Characterized by TEM Spectrum Lines and Energy-Filtered Imaging
Authors: Bentley J , Walter KC , Evans ND 
Published: July 2020

Abstract
Many of the electrical, mechanical, and electrochemical properties of diamond-like carbon (DLC) coatings are determined by the amount of sp3 bonding. Correlations of bonding and properties are important in efforts to optimize coatings for specific applications. DLC thin films were grown at LANL by plasma deposition and subsequently ion implanted with N or Ar. Cross-sectioned TEM specimens were characterized with a Gatan imaging filter (GIF) interfaced to a LaB6 Philips CM30T at the ORNL SHaRE User Facility. For elemental distribution maps the following conditions were used: incident beam divergence α = 2.9 mrad, collection angle β = 4.8 mrad, slit width ΔE = 30 eV, exposure times of typically 5 s, 2x-binned 512×512 images, and TEM magnification ∼2000. The standard 3-window method was used for producing elemental maps with AE-r background extrapolation; 2-window jump-ratio images were also produced.
Mapping the Subcellular Distribution of Calcium in Depolarized Neurons by Electron Energy Loss Spectrum Imaging
Authors: Andrews SB , Hongpaisan J , Pivovarova NB , Friel DD , Leapman RD 
Published: July 2020

Abstract
In the context of biological specimens, it is in principle desirable to quantitatively map, rather than just point analyze, the distribution of physiologically important elements, and to do so at subcellular resolution. Presently, this can be accomplished by electron energy loss spectrum-imaging (EELSI) in both the scanning transmission electron microscope (STEM) and the energy-filtering transmission electron microscope (EFTEM). Until recently, this approach has been of limited value for mapping the particularly important element Ca, mainly because intracellular total Ca concentrations are normally quite low (&lt;5 mmol/kg dry weight) and because the background in the vicinity of the Ca L23 edge is complex and requires precise background modeling to extract the very weak Ca signals. As a result, the Ca signal is usually not high enough to reach detection threshold during a practical EELSI acquisition time.
New Approaches for Energy Filtered Imaging and EELS Analysis
Authors: Botton GA 
Published: July 2020

Abstract
Electron energy-loss spectroscopy imaging is now becoming an established and indispensable tool in high-resolution materials characterization. Whether the imaging approach is based on post column filters attached to a conventional transmission electron microscope (TEM) or on parallel spectrometers on a scanning (field emission) TEM, energy filtered (EF) microscopy is having a significant impact in materials science (e.g. Ref. 1). Elemental mapping, however, is not the only imaging tool accessible with EF microscopy. EELS images and spectra are often only part of the data that is obtained when samples are characterized in an analytical TEM. Complementary information is also obtained from EDS spectra which are often analyzed independently from the EELS data and from EELS near edge structures. When the EELS fine structure is altered due to changes in chemical state of the probed atoms, additional information is accessible and can potentially be used in novel methods of image acquisition.
Applications of Energy-Filtered Imaging in Mineralogy, I: Pyroxenes
Authors: Elbert DC , Moore KT , Veblen DR 
Published: July 2020

Abstract
Chemical segregation is fundamental to a host of geologically interesting phenomena. These include exsolution, weathering, dynamic recrystallization, and interface formation. Investigation of these mineralogical processes centers on the relationship between crystal structure and chemistry. While there is an abundance of electron microprobe information available at the micron scale, Energy- Filtered Imaging (EFI) offers the first opportunity to investigate the chemistry of these diverse processes at the nearly atomistic level. In particular, we have been using Energy-Filtered Imaging (EFI) in the TEM to acquire quantitative compositional information at the scale of individual unit cells (&lt;1 nm spatial resolution) in exsolved pyroxenes. Along with the two-orders-of-magnitude improvement in spatial resolution, EFI has greater quantum efficiency and the possibility of lighter element detection than X-ray spectroscopic methods.
The complex, subsolidus phase relations of many minerals are routinely exploited by petrologists investigating the thermal and tectonic evolution of the earth, moon and meteorites.
Valence Mapping of Particulate 3D-Transition Metal Oxides Using Energyfiltered Transmission Electron Microscopy
Authors: Stroud RM , Scott JH 
Published: July 2020

Abstract
Particulate, mixed-valence transition metal oxides are frequently used for battery, catalytic and magnetic applications. For example, the Li ion exchange battery exploits charge transfer of mixed Mn+3, Mn+4 materials. Charge localization and phase separation, especially at particle surfaces, are critical issues for determining the materials’ useful properties, be it catalytic activity or saturation magnetization. The ability to image the charge localization and correlate this with crystallographic information would be extremely useful in the study of this class of materials. Using energy-filtered transmission electron microscopy (EFTEM), valence maps of Mn and Co with a ∼ 2 nm scale have been obtained for bulk samples. In principal this technique can de directly extended to the case of particulate samples, however there are some additional experimental challenges, such as thickness and edge effects, that must be addressed. We demonstrate here the feasibility of valence mapping of particulate samples, and discuss the factors that limit quantitative data extraction from the maps.
Future Trends in Modeling Electron Energy Loss Near-Edge Structure (ELNES)
Authors: Scott A J , Brydson R 
Published: July 2020

Abstract
The increasing availability of fast, multiprocessor high performance computing facilities has revolutionized iterative electronic structure calculations of solids, particularly for those systems possessing little or no symmetry. This combined with the semi-commercial dissemination of well-supported software packages for the calculation of both occupied and unoccupied electronic states at high levels of approximation has opened up the possibilities for more routine modeling and understanding of electron energy loss near-edge structure (ELNES) data obtained in the TEM/STEM, and hence the elucidation of chemical bonding in solids at high spatial resolution.
The two modeling approaches presented and compared here involve ab-initio band structure calculations based on the full linear augmented plane wave (FLAPW - WIEN97) approach, and full multiple scattering (MS) clusterbased methods. We have performed a systematic study of transition metal carbides and nitrides and compared the modeling results with high resolution EELS data.
Boron K-Edge Electron Energy Loss Fine Structure Study of Gadolinium-Containing Sodium-Alumino-Borosilicate Glasses
Authors: Qian M , Li L , Li H , Strachan D M 
Published: July 2020

Abstract
Up to 47 mass% of gadolinium can be dissolved in a baseline borosilicate glass (mol%) 20 B2O3, 5 A12O3, 60 SiO2, and 20 Na2O. Understanding the dissolution of Gd in borosilicate melts is important in the optimization of glass formulations. However, probing amorphous materials with spectroscopic techniques is challenging research when little knowledge of the local chemical environment of the glass network is available. Electron energy loss fine structure (ELFS) spectroscopy is one available technique that has several advantages for probing the local structure of amorphous materials. This technique gives local atomic structure information equally well for both amorphous and crystalline materials. There is high sensitivity for low Z elements like boron, oxygen, aluminum, and silicon whereas x-ray absorption fine structure (XAFS) technique faces experimental difficulties. Hence, results from ELFS can be complimentary to the results from XAFS. For medium to high Z elements, one can use the L- or M-edges of the elemental spectrum.
First Develoment Step and Test of The SESAM / SATEM
Authors: Kujawa S 
Published: July 2020

Abstract
For the SESAM/SATEM project is for testing and as a first development step a new fully corrected imaging energy filter of the Ω type built. It is incorporated in a 200keV EFTEM equipped with an LaB6 cathode and a objective lens with a spherical and chromatic aberration coefficient of Cs = Cc = 1.2mm. This EFTEM will be used this year by the SESAM project group at the University Tiibungen, Germany and the MPI fur Metallforschung, Stuttgart. At the same time this kind of filter will be also mounted in the final SATEM.
The energy filter is similar to the design of the so-called FHI-filter suggested by Rose and Lanio [1,2] and built at the Fritz-Haber-Institut of the MPG by Krahl [3]. The total length of the proposed filter is half of the FHI-filter and nearly the same as the length of the LEO 912Ω filter.
A New High Performance Detector for Electron Energy Loss Spectroscopy
Authors: Brink HA , Trevor C , Hunt J , Mooney PE 
Published: July 2020

Abstract
The serial detectors traditionally used in Electron Energy Loss Spectroscopy (EELS) have mostly been replaced by parallel detection systems, for reasons of efficiency and ease of use. So far most parallel detection systems have been based on fiber or lens coupled Photo Diode Array (PDA). Although these systems have proven satisfactory they have some limitations: 1) high readout noise, 2) limited correction for gain variations and 3) point spread function or cross talk between channels all of which effects the ultimate sensitivity and resolution. This paper discusses a newly developed parallel detector for EELS based on a CCD and a new type of scintillator and fiber technology. The new detector shows large improvements in all areas of performance.
The sensitivity of a detector is limited by the readout noise at low incident electron dose and the gain correction at high dose. Both these areas have been addressed in the new design. The readout noise is equivalent to approximately 1/2 a primary electron, about 40 times better than a typical PDA.
Chemical Imaging of Polymers Containing Aromatic Groups
Authors: Heckmann W , Mertes J 
Published: July 2020

Abstract
To characterize polymers by transmission electron microscopy it is necessary to use selective staining techniques in order to obtain meaningful results. The combination of a transmission electron microscope with an energy filter system as in the LEO 912 Ω however provides additional analytical information which in particular cases allows imaging without the necessity of staining. Especially a π-π*-resonance at about 6 eV in the low loss electron energy loss spectrum of polymers containing aromatic groups is suitable for imaging. These energy loss electrons are selected by a 2 eV slit in the energy dispersive plane of the spectrometer to form an image. This special type of energy spectroscopic imaging (ESI) can also be referred to as chemical imaging.
This paper presents morphological results on polymer systems containing aromatic components. Micrographs of ultra thin sections were acquired with a 2 eV energy slit at 6 eV electron loss in a LEO 912 π
Grain Boundary Characterization in Yttria-Stabilized Zirconia by TEM Spectrum Lines
Authors: Evans N D , Imamura P H , Mecartneyf M L 
Published: July 2020

Abstract
The superplasticity exhibited by some fine-grained ceramics, notably 3-mol% yttria-stabilized tetragonal zirconia polycrystals (3Y-TZP), offers interesting possibilities to lower manufacturing costs by near net shape forming. Both glassy and crystalline materials have been added to pure 3 Y-TZP to limit grain growth and promote grain boundary sliding during sintering and isostatic pressing. EDS spectrum lines have been used to characterize the distribution and extent of additive phases, but were not able to map some light-element components of additives (e.g., O and B in borosilicate glass). Additionally, quantification of the Si Kα peak was compromised by overlap with the Y L and Z L peaks. To both improve light element sensitivity and investigate potential changes in oxygen bonding at the grain boundaries, undoped 3 Y-TZP and 3 Y-TZP powders processed with 1 wt% barium silicate have been examined with TEM spectrum lines. Additionally, some elemental mapping has been performed. TEM specimens were examined in a 300 kV LaB6 Philips CM30T equipped with a Gatan imaging filter (GIF) at the ORNL SHaRE User Facility.
EXEELFS (Extended Electron Energy Loss Fine Structure) Study of Tin Grown by the DC Sputtering Technique.
Authors: A. Duarte-Moller , Espinosa-Maganña F , Martínez-S´anchez R , Contreras O 
Published: July 2020

Abstract
Titanium nitride coatings were grown in a physical vapor deposition system assisted by a direct current reactive magnetron sputtering technique. The vacuum chamber was evacuated with a mechanical pump and cryopump to a base pressure of 10-7 Torr. The Sputtering was performed with a direct current high voltage source (0-1 Kev and 1 A) on a titanium target (99.98% purity). The titanium target was sputtered with a high purity argon -nitrogen mixture. The films were deposited on monocrystalline silicon (mc-Si) (111) substrates at different nitrogen partial pressures from 0.08 mTorr to 1.5 mTorr. Total pressure, power applied to target and substrate temperature were keep constant in all the experiments.
EXEELFS analysis were done using the standard procedure [1,2]. In this case, we are find that the atomic concentration is in good agreement with the respective established stoichioinetry N/T=0.99. Figure 1 shows the window of high energy loss where appears their respective N K-edge and Ti -L23.