(G03 Best Paper Award Winner) Si-Passivated Ge Gate Sacks with Low Interface State and Oxide Trap Densities Using Thulium Silicate
Authors: Zurauskaite Laura , Abedin Ahmad , Hellström Per-Erik , Östling Mikael 
Published: December 2020

Germanium is considered as a high mobility channel material for its potential to be introduced in future CMOS technology nodes. Ge surface passivation with a thin silicon layer (Si-cap) has been shown to be efficient for pFETs because of a sufficient valence band offset between Ge and Si-cap, which confines the holes in the Ge layer. Strained Ge pFinFETs outperforming Si pFinFETs due to four times higher mobility have been demonstrated using Si-cap process [1]. Interfacial defects can be further passivated with a high-pressure anneal in H2 resulting in reduced sub-threshold swing and increased mobility in Ge nanowires [2]. Moreover, by using a Si-cap, Negative-bias temperature instability reliability is improved compared to GeOx passivation because of the energy decoupling between holes and defects in SiO2/HfO2 gate stack [3]. However, a Si-cap process poses gate stack scalability issues because in order to achieve sufficient surface passivation, the Si-cap thickness cannot be scaled. An introduction of a high-k interfacial layer instead of a chemical oxide SiO2 could potentially help to scale down equivalent oxide thickness. Integrating thulium silicate (TmSiO) as a replacement of the SiO2 interfacial layer has been demonstrated on silicon, and a hole and electron mobility enhancement compared to SiO2/HfO2 gate stacks has been achieved for an equivalent oxide thickness (EOT) < 1 nm [4]. Moreover, we have previously displayed the compatibility of Tm2O3 with Ge by demonstrating GeOx/Tm2O3 gate stacks with interface state density Dit < 5·1011 eV-1cm-2 [5]. In this work, we integrate TmSiO with a Si-cap process to achieve Dit comparable to GeO2 passivation.
In order to evaluate Ge/Si/TmSiO interfaces, MOS capacitors (MOSCAPs) were fabricated on n-type Ge strain relaxed buffers epitaxially grown on n-type Si wafers in a two-step process using GeH4 precursor [6]. Si-caps of different thicknesses were grown at 400 °C using Si2H6. Si growth was confirmed by ellipsometry spectroscopy and testing that the surface is hydrophobic. While trying to keep the Si-cap exposure to air to a minimum, 400 nm PECVD SiO2 was deposited and active areas were defined. After removing the remaining SiO2 from the active areas with 1 % HF, Tm2O3 was deposited by atomic layer deposition (ALD) at 225 °C. Rapid thermal anneal at 550 °C for 60 s in N2 was then employed to form TmSiO layer. High-k HfO2 was deposited by ALD at 350 °C followed by a post deposition anneal in O3 for 10 min. TiN gate metal was deposited at 425 °C by ALD and 500 nm Al was deposited by sputtering for probing purposes. After patterning, the samples were subjected to a forming gas anneal of 10% H2 in N2 at 400 °C for 30 min. Reference MOSCAPs with Ge/GeOx/Tm2O3/HfO2 gate stacks were also fabricated as described in [5] with addition of ALD HfO2.
Interface state density in the midgap of Ge/Si/TmSiO/Tm2O3/HfO2 gate stacks was evaluated by CV measurements where measured CV characteristics where compared to calculated ones assuming a parabolic Dit distribution. Dit highly depends on Si-cap thickness, as displayed in Fig. 1. An optimal Si-cap thickness corresponding to 40-50 min deposition time provides Dit at midgap ~5·1011 cm-2eV-1 at CET of 4 nm. Reference MOSCAPs with Ge/GeOx/Tm2O3/HfO2 gates exhibit similar Dit of 4-5·1011 cm-2eV-1. Interface state density distribution within the band gap of Ge/Si/TmSiO interface with 40 min Si-cap deposition time was evaluated using the conductance method at different temperatures and is displayed in Fig. 2. Dit in the midgap is in agreement with the results obtained from CV measurements, and increases towards the valence and conduction band edges. The oxide trapped charge Qox of 2.5·1010 cm-2 (40 times lower than in the Ge reference devices without Si-cap) was determined from CV measurements and corresponds to only 5 mV hysteresis showing the potential of superior reliability.
A Si-cap process with high-k TmSiO interface has been demonstrated on Ge MOS devices. A low Dit comparable to GeOx passivation has been shown. In addition, devices with TmSiO potentially have a superior reliability vs GeOx devices due to low oxide trapped charge density.
References:
[1] J. Mitard et al., Dig. Tech. Pap. - Symp. VLSI Technol., vol. 2016–Septe, 1–2, 2016.
[2] H. Arimura et al., 2017 Symposium on VLSI Technology, 2017, T196–T197.
[3] J. Franco et al., 2013 Int. Electron Devices Meet., 397–400, 2013.
[4] E. Dentoni Litta et al., Eur.
Solid-State Device Res. Conf., vol. 2, 155–158, 2013.
[5] L. Žurauskaitė et al., ECS Trans., vol. 86, no. 7, 67–73, Jul. 2018.
[6] A. Abedin et al., ECS Trans., vol. 75, no. 8, 615–621, 2016.

Figure 1