Preparation and ultraviolet detection performance of Cu doped <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> thin films
Authors: Liu Wei , Feng Qiu-Ju , Yi Zi-Qi , Yu Chen , Wang Shuo , Wang Yan-Ming , Sui Xue , Liang Hong-Wei ,   School of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029, China,   School of Microelectronics, Dalian University of Technology, Dalian 116024, China
Published: August 2023

Solar-blind UV photodetectors (SBPs) have attracted great attention because they are widely used in missile tracking, fire detection, biochemical analysis, astronomical observations, space-to-space communications, etc. At present, it is found that wide bandgap semiconductor materials such as Al<sub><i>x</i></sub>Ga<sub>1-<i>x</i></sub>N, Mg<sub>1</sub>Zn<sub>1-<i>x</i></sub>O, diamond and <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> are ideal semiconductor materials for developing high-performance SBPs. The ultra-wide band gap semiconductor material, <i>β</i>-Ga<sub>2</sub>O<sub>3</sub>, has a large band gap width of 4.9 eV, strong breakdown electric field, absorption edge located in the solar blind ultraviolet band (200–280 nm), and it also has high transmittance in the near ultraviolet and the whole visible band. Therefore, <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> is a very suitable material for making solar blind UV photodetectors. However, the p-type <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> is difficult to dope, which limits the further development of <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> devices. In this work, the <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> thin films with different Cu doping content are grown on sapphire substrates by chemical vapor deposition method, and the morphology, crystal structure and optical properties of <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> films are measured. The test results show that the surfaces of <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> films with different Cu content are relatively smooth, and the (<inline-formula><tex-math id="M2">\begin{document}$ \bar 201 $\end{document}</tex-math><alternatives><graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="19-20230971_M2.jpg"/><graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="19-20230971_M2.png"/></alternatives></inline-formula>) diffraction peak positions shift toward the lower degree side with the increase of Cu content, which indicates that Cu<sup>2+</sup> replaces Ga<sup>3+</sup> and enters into the <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> lattice. The optical absorption spectrum measurement indicates that the energy gaps of samples are evidently narrowed with the increase of Cu doping concentration. Hall measurements indicate that the Cu doped <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> thin films have a p-type conductivity with a hole concentration of 7.36 × 10<sup>14</sup>, 4.83 × 10<sup>15</sup> and 1.69 × 10<sup>16 </sup>cm<sup>–3</sup>, respectively. In addition, a photoconductive UV detector with metal-semiconductor-metal structure is prepared by evaporating Au on a Cu-doped <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> thin film, and its UV detection performance is studied. The results show that the photocurrent value of the device increases with Cu content increasing. The photo-to-dark current ratio (<i>I</i><sub>l</sub>/<i>I</i><sub>d</sub>) is about 3.8×10<sup>2</sup> of 2.4% Cu content device under 254 nm-wavelength light at 10 V. The rise time and decay time are 0.11 s and 0.13 s, respectively. Furthermore, the responsivity and external quantum efficiency can reach 1.72 A/W and 841% under 254 nm-wavelength light with a light intensity of 64 μW/cm<sup>2</sup>.