bluuebunny/crossref_metadata_2025 huggingface dataset:
Customer Satisfaction on Social Media Marketing in Malaysian Hospitality Industry
Authors: Kong Joanna Pei Yi , Ng Alex Hou Hong
Published: February 2021

Customer satisfaction plays an important role in achieving the competitive advantage and ensures to bring success to the organizations. Nowadays, people tend to use technologies in boosting the revenue of their businesses as well as to promote the products and services. Therefore, this chapter is focusing on the factors that drive the satisfactions of the customers on the social media marketing in the hospitality industry in Malaysia. The research gaps have been identified on Malaysia's customer satisfaction on social media marketing in the hospitality industry. Hence, the objective of this research is to explore three factors that influence the satisfaction level of the customers on the technologie in the social media, namely social technology approach, social media tools, and socia media engagement. Last but not least, this study will also provide the researchers and managers with strategic plan in order to enhance the business efficiency.
Factors Affecting Online Consumer Buying Behavior Towards Essential Oils in Penang
Authors: Goh Jia Wen , Ng Alex Hou Hong
Published: February 2021

The purpose of this chapter is to determine the factors influencing the online consumer buying behavior towards essential oils in Penang as there is dissonance between what the consumers want and what has been made available in the purchase of essential oils. There are four factors influencing the online consumer buying behavior that are being evaluated in this research which are brand image, price, quality, and online advertisement. Past literatures have been reviewed on the factors to understand consumers' preferences that leads to consumer buying decision. This study adopted the theory of reasoned action (TRA) as the grounded theory. Questionnaires will be used to collect consumers' response for further testing and analysis to test the relationship and strength of factor variables by using the outlined research methodology.
A Comparison of E-Government Systems Between Developed and Developing Countries
Authors: Abubakr Mohammed , Kaya Tugberk
Published: February 2021

The term e-government provides information and conveys governmental services for employees, citizens, and businesses. The aim of this study is to determine and explain the most significant factors that have been utilized to overcome the difficulties in infrastructure, cultural, political, technical, and social aspects of e-government. The researcher tried to explain and compare two different e-government systems from developing countries (Iraq) and developed countries (Finland) and specified several points between these two countries that could help developing countries to develop good e-government. The reason to choose these two countries is that there is a gap in the e-government system between developing and developed countries which is helpful to specify weak points of the e-government system in Iraq and to get benefit from Finland's experience in this sphere. Then, the researcher highlights the good factors from developed countries that are applicable in developing counties that help to suggest a list of suggestions for developing the e-government system in Iraq.
Investigating the Nature of Expectations and Its Influence on Attitudes Towards Malaysian Government E-Services
Authors: Wong Meng Seng , Jackson Stephen
Published: February 2021

This paper investigates the nature of expectations and its influence on attitudes towards government electronic services (e-services) in Malaysia. Based on a discussion of findings from in-depth focus group studies with government providers and users of e-services in Malaysia, a conceptual model is devised which explores both the extrinsic and intrinsic forces (in the form of e-government stimuli) influencing the articulation and actualization of stakeholder expectations, which can sway attitudes toward e-services. Key contributing factors (e.g., technological issues, managerial/institutional challenges, resource constraints, user needs), which have inhibited the extent of benefits realization when using e-services are explored. The model also introduces the concept of situational context—the importance of considering e-services in relation to its specific setting or circumstances at play.
Deep Neural Network-Based Crime Prediction Using Twitter Data
Authors: Sandagiri Chamith , Kumara Banage T. G. S. , Kuhaneswaran Banujan
Published: February 2021

Crimes have affected the quality of life and economic growth of the country badly. The authors can identify the crime patterns and predict the crimes by detecting and analyzing the historical data. However, some crimes are unregistered and unsolved due to a lack of evidence. Thus, detecting crimes is a still challenging task. Individuals can use social media like Twitter to detect crime-related activities. Because Twitter users sometimes convey messages related to their surrounding environment, this paper proposed a machine learning approach to predict crimes. The proposed framework consists of three modules: data (tweet) collecting, detecting crimes, and predicting crime. Long short-term memory (LSTM) neural network model was used as a proposed approach for crime prediction. Experimental results found that by achieving the highest precision of 82.5%, precision of 86.4%, and recall of 80.4%, the proposed LSTM-based approach worked better than the other approaches.
Understanding Cyber Security
Authors: Kurebwa Jeffrey
Published: February 2021

This study provides an understanding of cyber security and further analyses the Cyber Security and Data Protection Bill of Zimbabwe. The internet and other technological developments have provided a variety of platforms for increased and sometimes unrestricted exercise of freedom of expression, association, online transactions, and access to information rights. Zimbabwe has faced increased threats from cyber activities. This has necessitated the country to enact the Cyber Security and Data Protection Bill. The purpose of the Cyber Security and Data Protection Bill is to increase cyber security in order to build confidence and trust in the secure use of information and communication technologies by data controllers, their representatives, and data subjects. This study relied on data gathered through key informant interviews and documentary search. The key informants were drawn from various institutions that deal with cybercrime. Zimbabwe does not have adequate and effective legislative instruments to combat cybercrime.
CISMET
Authors: Hasan M. Mahmudul , Kousiouris George , Anagnostopoulos Dimosthenis , Stamati Teta , Loucopoulos Peri , Nikolaidou Mara
Published: February 2021

Compliance to regulatory requirements is a critical concern in information system development projects. Managing this aspect is increasingly challenging while failures impose costly consequence on the organizations world-wide. However, how a legislation may or may not affect information system development projects is often not easily identifiable due to lack of clear understanding and guidelines. This paper presents compliant information system development (CISMET) ontology, exploiting concepts from 21 existing ontologies (regarding regulatory compliance and information system development). The key findings are the six parent classes in the CISMET ontology describing the system development goals, services, process, activities, artifacts, and resources. Also, there are 26 sub classes and 21 class properties that describe various concepts and their relationships in regulatory compliant information system development. The General Data Protection Regulation (GDPR) of the European Union has been instantiated in the proposed framework to indicate how regulatory requirements compliance concepts are mapped to system development projects. Thus, involved stakeholders (information system researchers and system developers) may identify dependencies and actions needed with relation to various rules in the regulation and their link to the system elements through a relevant software application. The latter enables users to easily submit queries towards the backend ontology through a specialized front-end application that can aid in formulating and submitting these queries.
Hybrid Query Execution on Linked Data With Complete Results
Authors: Bai Samita , Khoja Shakeel A.
Published: February 2021

The link traversal strategies to query Linked Data over WWW can retrieve up-to-date results using a recursive URI lookup process in real-time. The downside of this approach comes with the query patterns having subject unbound (i.e. ?S rdf:type:Class). Such queries fail to start up the traversal process as the RDF pages are subject-centric in nature. Thus, zero-knowledge link traversal leads to the empty query results for these queries. In this paper, the authors analyze a large corpus of real-world SPARQL query logs and identify the Most Frequent Predicates (MFPs) occurring in these queries. The knowledge of these MFPs helps in finding and indexing a limited number of triples from the original data set. Additionally, the authors propose a Hybrid Query Execution (HQE) approach to execute the queries over this index for initial data source selection followed by link traversal process to fetch complete results. The evaluation of HQE on the latest real data benchmarks reveals that it retrieves at least five times more results than the existing approaches.
Screencasts
Authors: Grebe Lindie
Published: February 2021

The main objective of the study was to investigate the potential mediating effect of relevance in the relationship between attention and confidence in Keller's ARCS model during screencasts in distance education. The paper responds to calls for further research into the ARCS model in different delivery systems, cultural settings, and learner populations, and in terms of the relationship between the motivational components. The study employed design-based research to address practical problems in distance education and used the IMMS survey to collect data. Exploratory factor analysis revealed two factors, attention with interest and basic attention for attention, and two factors, ease of use and self-confidence for confidence. This paper contributes to advance knowledge of design principles, which instructional designers could use when designing learning materials in order to motivate online students.
Privacy Preserving Data Mining as Proof of Useful Work
Authors: Turesson Hjalmar K. , Kim Henry , Laskowski Marek , Roatis Alexandra
Published: February 2021

Blockchains rely on a consensus among participants to achieve decentralization and security. However, reaching consensus in an online, digital world where identities are not tied to physical users is a challenging problem. Proof-of-work provides a solution by linking representation to a valuable, physical resource. While this has worked well, it uses a tremendous amount of specialized hardware and energy, with no utility beyond blockchain security. Here, the authors propose an alternative consensus scheme that directs the computational resources to the optimization of machine learning (ML) models – a task with more general utility. This is achieved by a hybrid consensus scheme relying on three parties: data providers, miners, and a committee. The data provider makes data available and provides payment in return for the best model, miners compete about the payment and access to the committee by producing ML optimized models, and the committee controls the ML competition.
Impacts of Resource Alertness and Change Leadership Style on Financial Performance
Authors: Zhang Ao , Chen Yong , Xu Xiaobo , Gao Yang , Zhang Lan
Published: February 2021

The dynamic competition theory emphasizes that executives must have the ability to discover and identify new resources to deal with the external environment change and implement the leadership style change for improving the financial performance. The authors studied the impacts of resource alertness and change leadership style on enterprise financial performance with the perceived competitive tension as the moderator. Data analysis from 208 valid questionnaires indicated that resource alertness and change leadership style have a direct positive impact on financial performance by changing the leadership style. The positive effect of change leadership style on enterprise performance will be strengthened with high perceived competitive tension. Important theoretical and practical implications are discussed. Limitations and future research are presented as well.
Application of System Dynamics Approach for Minapolitan Area Development
Authors: Arif Muhammad , Wirjodirjo Budisantoso , Angreni Endah
Published: February 2021

Economic growth is influenced by regional development policies and the availability of regional resources. One policy that utilizes the potential of fisheries resources is the policy of the Minapolitan area. This policy can potentially lead to conflicts over spatial use when development is carried out without concern for the environment. This study aims to assess the variables that influence and formulate the concept of sustainable regional development. The object of this research is Lekok Regency, Pasuruan Regency, East Java, Indonesia. In this paper, introducing a system dynamic approach with consideration of the complexity of the lives of coastal communities and the variety of conflicts regarding the location and limitations of existing resources, viewed from the aspects of land, economic and social activities of the Minapolitan area development system in actual conditions.
Study on Implementation of ITK Campus Drainage Master Plan (Case Study: Faculty of Mathematics and Natural Sciences)
Authors: Kadar Yanti Rossana Margaret , Sari Oryza Lhara , Wahyu Rizjal
Published: February 2021

Two main building Kalimantan Institute of Technology was established on an area of 3500 m2 on October 6, 2014 which serves as the infrastructure for teaching and learning activities of students. The rapid increase in the number of students each year results in an increase in the number of buildings as facilities for teaching and learning. This is the background for the development of the Kalimantan Institute of Technology area by adding five more lecture buildings to support teaching and learning activities for 3500 students. The expansion area for five more lecture buildings is currently under construction in the area of ​​the Faculty of Mathematics and Natural Sciences. The function of the land area has been change due to building construction resulted in an increase in runoff discharge. This condition certainly affects the region if not handled properly. Increased runoff discharge will affect inundation or flooding in the area if it is not equipped with a drainage system as needed. This research is one alternative solution given. This research is in the form of a study on the implementation of a drainage master plan that aims to obtain drainage dimensions such as drainage width, drainage length and drainage depth by observing runoff due to rainwater using the concept of environmentally friendly drainage. The research obtained from the dimensions of tertiary canals with dimensions of 0.10-0.30 meters, secondary channels 0.30-0.45 meters and primary channels 0.35-0.70 meters with the discharge area of ​​the Faculty of Mathematics and Natural Sciences ITK is 1.18 m3/ sec.
Potential and Feasibility Analysis of Biomass Energy from Palm Oil Mills on North Penajam Paser Regency Region
Authors: Nashrulloh Faruq , Sulaiman Muhammad , Budiarto Rachmawan
Published: February 2021

This paper would present a techno-economic potential and feasibility analysis in the planning of renewable energy from palm oil mills on the North Penajam Paser Regency. The analysis was done based on the last three-year production data history of 7 (seven) palm oil processing factories in the region. The total fresh fruit bunches processed were about 891.624 tons/year. The total potential electricity generated from palm oil residue reached 28.009 kWh. This analysis aimed to get a comprehensive insight from the potential biomass energy that exists at the research locations and conduct a feasibility study based on techno-economic analysis to develop renewable energy of new state capital Indonesia and the supporting regions. The technology helps evaluate the technical planning of installations that are possible to build in the area. The economic aspect of sustainability evaluates the net present value (NPV), internal rate of return (IRR), and the payback period of renewable energy installation. The results showed that North Penajam Paser Regency could generate 78,927,223 kWh in a year with a feed-in tariffs is 1,223.481 IDR/kWh. The electricity was feasible to offer to the government electrical company. Moreover, this project had a good NPV and IRR for private investors.
Engineering Properties of Concrete Based on GP-Grout with Steel Nails
Authors: Shubber Mustafa Salman , Mezher Thaer M. , Breesem Khalid M.
Published: February 2021

Portland cement-based grouting compound is called GP-Grout employed to produce a sort concrete as a replacement from the weight of cement in mixes and strengthened with steel nails to enhance the mechanical properties. GP-Grout replaced cement by 25%, 50% and 75% while the steel nails as locally steel fibres were used with 0.25%, 0.5%, 1%, 2 % and 3% by volume of concrete. GP-Grout powder enhanced mechanical properties of ordinary concrete especially; the compressive strength by increasing from 34 to 70 MPa as well as other properties including tensile and flexural strength with clear improvement by adding the steel nails at a ratio of 3% by volume and the results were 5.67, 9.81 MPa respectively.
Preparation of ZnO Nanoparticles by 1064/532nm Laser Ablation and Studying the Effect of the Ablation Wavelength
Authors: Majeed Munaf S. , Nafil Rabea Q. , Jabbar Marwa F. Abdul , Suffer Kadhim H.
Published: February 2021

We prepared Zinc oxide nanomaterial employing PLA (pulsed laser ablation) technique. A pure Zn target was immersed in ultra-pure water (UPW) and it was subjected to several pulses (1st. and 2nd. harmonic) of the pumping Nd: YAG laser. The influence of changing laser’s wavelength (1064, 532) nm on the characterization of the produced nanoparticles was studied. The results obtained from studying the structure, topography, and morphology of the product showed that the particles have a hexagonal shape. Also, changing the wavelength of the laser from 532nm to 1064nm leads to size reduction and density increasing of the nanoparticles.
Numerical Analysis of Settlement for Unusual Footing (L-Shape) on Layered Soil
Authors: Snodi Lamyaa Najah , Hameed Anfal Mansur
Published: February 2021

Transfer the load from the foundation to the soil causes deformation that soil and surface of the soil near the foundation. Results of the settlement or deformation occurring under the foundation cause destroyed of structure built on it, due to the soil fail. This paper presents a numerical analysis to study the settlement of unusual footing (L-shape) on a two-layered soil using finite element program (ELPLA). Two cases for layered soil were studied, the first case of a layer of sand over the clayey soil, and the second case of clayey soil over the sand soil. The footing (L shape) having different depth from the surface of soil (0, 0.5, 1.0, 1.5, 2.0 and 2.5m) and the loading was (0, 50, 100, 150, 200 and 250 kN/m2) for two cases of layered soil are analyzed. The results for this analysis show that the settlement increase with depth of footing for each load, and when the loading increase the settlement also increase. Curves for load – settlement were almost similar for all depths of footing. Settlements values various between two cases , when sandy soil over clayey soil the settlements was high than when clayey soil over sandy soil.
Estimation of Radionuclide Concentration in Medical Waste
Authors: Fayyadh Ahmed Hameed , Kosaj Anmar Dherar
Published: February 2021

Almost all hospitals use radioisotopes for different purposes, as their applications grow, so their concentration in the waste of those hospitals does. To address this issue, twenty-nine samples were collected from (9) sites, these samples were collected from the incinerators of medical areas and the waste collection chambers. After collecting the samples, they were prepared for the examination, where a high-purity Germanium detector (HPGe) was used to detect radioactive elements. The lead element (Pb-214) of the uranium chain (U-238) and the actinium element (Ac-228), the lead element (Pb-212) of the thorium chain (Th-246) and the potassium element (K-40) appeared in some medical areas Iodine (I-131). Some regions showed high concentrations of these elements compared to some sites, Iodine (I-131) appeared in high rates in some hospitals specialized in treating cancerous diseases. The equivalent efficacy of radium, the annual equivalent internal and external dose, and the internal and external risk factors were calculated and the results obtained were compared with the global limits.
Physical and Barrier Properties of Polylactic Acid/Halloysite Nanotubes-Titanium Dioxide Nanocomposites
Authors: Alakrach Abdulkader M. , Al-Rashdi Awad A. , Al-Omar Mohamed Khalid , Jassam Taha M. , Ting Sam Sung , Dahham Omar S. , Zulkepli Nik Noriman
Published: February 2021

In this study, PLA/TiO2 and PLA/HNTs-TiO2 nanocomposites films were fabricated via solution casting method. By testing the film density, solubility, water contact angle and water vapor permeability, the PLA nanocomposite films, the comprehensive performances of the nanocomposites were analysed. The outcomes demonstrated that maximum film density of PLA/TiO2 and PLA/HNTs-TiO2 nanocomposites films increased gradually with the increasing of nanofiller loadings. Moreover, the incorporation of TiO2 and HNTs-TiO2 significantly decreased the water vapor transmittance rate of the nanocomposite films with a slight priority to the addition of HNTs-TiO2, the water solubility was significantly improved with the addition of both nanofillers. Furthermore, the barrier properties were developed with the addition of both TiO2 and HNTs-TiO2 especially after the addition of low nanofiller loadings. Overall, the performance of the PLA/HNTs-TiO2 nanocomposite films was better than that PLA/TiO2 film. Nevertheless, both of the PLA nanocomposite samples achieved the requests of food packaging applications.
The Effects of Stearic Acid (SA) on the Thermal and Physical Properties of LLDPE/DS Composites
Authors: Elnaid Abduati , Hamzah Rosniza
Published: February 2021

In this study, polymer composites were synthesized from date seeds (DS) powder as natural filler and low-density polyethylene (LLDPE) as polymer matrix. This composite was exposed into chemical modification using different content of Stearic Acid (SA) (3, 6 and 9 wt.%). The composite was fabricated by using the process of extrusion and injection molding respectively. The prepared samples were examined using TGA, DSC, FTIR, and Gel Content test. It can be clearly observed that all the treated samples have presented three-steps of decomposition as shown in TGA curves. It is also observed that the Tm, Tc, and degree of crystallinity of the modified LLDPE/DS biocomposites increased as SA increase. Thr FTIR spectra have shown different type of stretching bands, the band at 3346 - 3347 cm-1 appeared because of hydroxyle (OH) groups that is described as a hydrophilicity measure. Beside, there was a minor decrease on the peak between 3346 and 3347 cm-1 of modified composite, whichwas attributed to the hemicellulose removal from the modified composite. The gel content of the treated mples increased due to the increase of crosslinking between DS and LLDPE in existence of SA.
Effect of Temperature on the Behavior of Slow Release Fertilizer from ENR-50/RH/Urea Composites
Authors: Al-Samarrai Marwa N , Hamzah Rosniza
Published: February 2021

Generally, chemical fertilizer is considered as a one of the most significant materials for increasing food production. However, the fast release of the conventional fertilizer could effect negatively on the plants. Thus, the idea of using controlled release method in the agriculture application has emerged recently due to the efficiency of fertilizers can be improved by the controlled-release method. The objective of this work is to synthesize a new Slow Release Fertilizer from three different materials; the first one is urea, which is the conventional fertilizer, the second one is the rice husk (RH), which represents the carrier material, and the third one is epoxidized natural rubber (ENR-50), which represents the coating material. This work was divided into three series. The first series is the production of RH/Urea beads. RH was treated with alkaline NaOH at 1wt.% according to the weight of RH. The treated RH was then mixed with urea that produced treated RH/urea beads. In the second series, 200 mg of ENR-50 was applied to produce thicknes of coating material for treated RH/urea beads. In the third series, treated RH/urea beads coated with 200 mg of ENR-50 were subjected to the released behavior at different temperature in the water. After that, the prepared samples were characterized using Scanning Electron Microscopy (SEM) and UV-visible spectroscopy. Results suggested that the increasing of temperature has increased the rate of urea release of SRF samples in the water. Furthermore, the SRF sample at 35, 45, and 55 °C showed shorter time of release at 40, 34, and 17 day as compared to 47 day of SRF at room temperature.
Influence of Annealing Methods on the Morphological and Optical Properties of Cu2O Nanoparticles Prepared by Chemical Bath Deposition
Authors: Alsultany Forat H.
Published: February 2021

In this work, the cuprous oxide (Cu2O) thin film on glass substrates were fabricated at low growth temperature by a single-step aqueous solution of chemical bath deposition method. In order to optimize optical and morphology quality, the effect of two different heat treatment methods are conventional furnace annealing process and continuous wave (CW) CO2laser annealing technique were investigated. The effect of annealing temperatures on the properties of Cu2O thin films were systematically investigated by UV-Vis spectrophotometer, X-ray diffraction (XRD), and field emission scanning electron microscopy (FESEM).
The Potential of Using Zn0.6Ni0.4Fe2O4 Nanoparticles as Corrosion Inhibitor for Carbon Steel in Oil Environment
Authors: Al-Rubaiey Najem A. , Albrazanjy Mohammed G. , Kadhim Wafaa A. , Mohammed Hassan D. , Rahim Mohd Hasbi Ab.
Published: February 2021

Corrosion is one of the serious problems in oil and gas industry. So far, many inhibitors have been used to control or reduce corrosion. Nowadays, nano-materials have been employed as inhibitors as well due to their excellent properties such as high surface area, excellent inhibition efficiency, low cost, and minimum toxicity. In the current work, nano-ferrite materials have been used as inhibitors to reduce the corrosion of carbon steel in oil environment (crude oil obtained from Iraqi Majnoon oil field). The anti-corrosion properties of the nickel and zinc ferrite on carbon steel in Iraqi oil media have been evaluated. The nano materials of nickel Ferrities (NiFe2O4) zinc Ferrities (ZnFe2O4) and Zn-Ni doped Ferities (Zn0.6. Ni0.4Fe2O4) were selected as additive ferrites. It has been found that nano-nickel and zinc ferrites could act as an effective corrosion inhibitor for the metal carbon steel. An average reduction of about 38% in the corrosion rate has been achieved when using Zn-Ni doped Ferities (Zn0.6. Ni0.4Fe2O4) with the crude oil as a corrosive environment.
Preparation and Characterization of CuO Nanoparticles Prepared by Chemical Method
Authors: Rasheed Rashed T. , Jassim Liblab S. , Easa Hamsa A. , Khazaal Shaymaa H.
Published: February 2021

Copper oxide (CuO) nanoparticles were prepared by the sol-gel method, by the reaction of copper chloride and ammonium hydroxide as procurers. Nanopowders are annealing at different temperatures (100 °C, 200 °C, and 600 °C) for 120 min and confirmed the monoclinic phase by X-ray diffraction analysis of the metal oxide with lattice parameters a = 4.694 Å, b = 3.456 Å and c = 5.165Å for annealing temperature 400°C. Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM), Fourier Transform Infrared Spectroscopy (FTIR), and UV-Visible Spectroscopy spectrum was used to determine the structure, average crystallize, and morphology. We found increasing in size and energy gap (Eg) from (62.95 nm to 106.84 nm) and from (1.72 eV to 1.49 eV), when annealing temperature increasing from 200 °C to 600 °C, respectively.
Experimental Study of a Dry Sliding Wear for a Different Materials Using a Pin-on-Disk Apparatus
Authors: Ali Hussein M. , Hamid Qussay Y. , Al-Sultan Thaer F.A.
Published: February 2021

In the present work, an experimental investigation has been made of a dry sliding wear rate for aluminum, aluminum alloy (Al-Fe-V-Si), bronze, stainless steel 304 and structural steel ASTM A36, using a pin-on-disk apparatus under the effect of sliding speed and time at constant load. The materials were tested on two types of abrasive surfaces with a grit surface of 24 and 36. The applied load was equal to 2500 grams and the same load was used for all of the pins that were tested. The relative wear was indicated by the loss in length and loss in mass. The results show that the wear rate will directly proportional with sliding speed and time, and the stainless steel has less wear rate than the other materials.
Silicon Corrosion during Selective Silicon Nitride Etch with Hot Diluted Hydrofluoric Acid
Authors: Garnier Philippe , Massin Thomas , Chatelet Corentin , Oghdayan Emmanuel , Lauerhaas Jeffrey , Morote Carlos , Butterbaugh Jeffery W.
Published: February 2021

Silicon nitride is commonly etched by hot orthophosphoric acid. Hot diluted hydrofluoric acid is hereby used as an alternative. Nonetheless, in presence of silicon surfaces, some corrosion has been evidenced, degrading significantly active areas during the STI (Shallow Trench isolation) integration. Oxygen in hot deionized water or hot HF generates this corrosion and selecting a relevant chemical oxide before dispensing hot diluted HF is key in solving the concern.
Removal of SOC Hard Mask for Patterning of Work Function Metal by Thermally Activated Ozone Gas
Authors: Iwahata Shota , Inaba Masaki , Sebaai Farid , Sánchez Efrain Altamirano
Published: February 2021

Thermally activated ozone gas (TAO) was demonstrated as an alternative technology to conventional spin-on carbon (SOC) stripping. The SOC stripping rate with ozone gas was found to be a function of substrate temperature and actual ozone amount calculated from the ozone flow rate and concentration. Furthermore, work function metal (WFM) stripping rate showed a high selectivity to SOC films, and the amount of oxidation TiN, which is a WFM metal, was also equivalent to conventional technology of SOC stripping. This TAO gas process can be used in clean tools, making it a promising integrated solution for SOC stripping followed by post clean.
High Performance, Eco-Friendly SPM Cleaning Technology Using Integrated Bench-Single Wafer Cleaning System
Authors: Chen Fu Ping , Lei Hai Bo , Zhang Xiao Yan , Wang Wen Jun , Jia She Na , Wang Jane , Lee Jason , Kim Y.Y. , Lee Bruce , Henry Sally Ann , Wang David H. , Yu Zhang Yu , Zhang Tao , Huang Jun , Li Fang , Wang Chung Wei , Li Hong , Yang Yi
Published: February 2021

Batch SPM systems do not meet the current clean specification/requirements below 28nm. Single wafer SPM systems use a high volume of chemistry which runs to drain, while meeting the cleaning specifications below 28nm. The work in this paper describe the use of a batch SPM system and a single wafer clean in an integrated system, Ultra-C Tahoe which results in meeting the technical specification and using less that 80% of the SPM chemistry used in single wafer systems. The data collected shows this new system meet the specifications, whilst saving more than 80%of SPM chemistry.
Effect of Hydrophobicity and Surface Potential of Silicon on SiO2 Etching in Nanometer-Sized Narrow Spaces
Authors: Ueda Dai , Hanawa Yousuke , Kitagawa Hiroaki , Fujiwara Naozumi , Otsuji Masayuki , Takahashi Hiroaki , Fukami Kazuhiro
Published: February 2021

Wet etching in nanometer-sized three-dimensional spaces creates new challengesbecause of the scaling of semiconductor devices with complex 3D architecture. Wet etching withinspaces is affected by the mass transport of the etchant ions that are impacted by the hydrophobicityand surface potential of surface. However, the kinetics of chemical reactions within the spaces is stillunclear.In this paper, we studied the effect of hydrophobicity and surface potential of silicon surface on SiO2etching in nanometer-sized narrow spaces by adding various additive components to etching solutions.We found that the transport of etchant ions into narrow spaces is governed by controlling thehydrophobicity and surface potential of the confined system walls.
Particle Removal in Ultrasonic Water Flow Cleaning Role of Cavitation Bubbles as Cleaning Agents
Authors: Ando Keita , Sugawara Mao , Sakota Riria
Published: February 2021

Visualization experiments are performed to examine the role of acoustic cavitation bubbles that appear in 0.43-MHz ultrasonic water flow spreading over glass surfaces in the context of physical cleaning. The cleaning performance is evaluated using glass samples on which small silica particles are spin-coated. The visualization suggests that acoustic cavitation bubbles play a major role in particle removal as in the case of conventional cleaning with ultrasonic cleaning baths.
Investigation of Contaminants in Single Wafer Wet Cleaning Using Isopropyl Alcohol
Authors: Oh Seungjun , Lee Sunyoung , Kim Heehwan , Kwak Donggeon , Bae Chulwoo , Kim Taesung
Published: February 2021

Technological control over ultra-trace level contaminants is important for semiconductor development. Despite technological developments, defects remain in the single wafer wet cleaning process. In this paper, the source of the contamination is explained via trace analytical methods. Fluorine resin materials of polytetrafluoroethylene (PTFE) and ethylene tetrafluoroethylene (ETFE) are commonly used in semiconductor equipment. Isopropyl alcohol (IPA) oxidation reactions occur at high temperature below the boiling point due to impurities. IPA changed to different alcohol forms from gas chromatography (GCMS) analysis. The oxygen concentration in the X-ray photoelectron spectroscopy (XPS) results increased and formed new bonds in IPA with fluorine resin. These reactions confirmed that cations were a catalyst from the time-of-flight secondary ion mass spectrometry (TOF-SIMS) results. Representative ions were Fe+, K+, and Na+ with different concentrations for each material.
Contact Vs. Non-Contact Cleaning: Correlating Interfacial Reaction Mechanisms to Processing Methodologies for Enhanced FEOL/BEOL Post-CMP Cleaning
Authors: Wortman-Otto Katherine M. , Linhart Abigail N. , Mikos Allie M. , Cahue Kiana A. , Keleher Jason J.
Published: February 2021

Due to the emergence of sub-7 nm technologies, next generation CMP slurry formulations have continued to increase in additive (nanoparticle and chemistry) complexity to meet stringent device specifications. Therefore, it is essential to probe the molecular level interactions at the nanoparticle/slurry chemistry/substrate interface and in turn correlate them to key performance metrics such as removal rate, post CMP defects, and planarization efficiency. This work will address key interactions through a series of case studies focusing on the role of supramolecular structure and cleaning method (i.e. contact vs. non-contact) during STI post-CMP cleaning, probing the impact of supramolecular structure and mode of cleaning relevant to Cu post-CMP, and development of a biomimetic matrix with chemical activity to act as a brush in STI post-CMP cleaning processes. Results show in both BEOL and FEOL post-CMP cleaning there is a strong correlation to the delivery and “soft” nature of the chemistry to allow for effective particle removal at low mechanical force and prevent further defect formation. Furthermore, this work shows a clear correlation between supramolecular structure and particle removal efficiency under both contact and non-contact post-CMP processes.
Tribological Characterization of Anionic Supramolecular Assemblies in Post-STI-CMP Cleaning Solution Using a Novel Post-CMP PVA Brush Scrubber
Authors: Philipossian Ara , Sampurno Yasa , Theng Sian , Sudargho Fransisca , Wortman-Otto Katherine M. , Graverson Carolyn , Keleher Jason J.
Published: February 2021

We have shown how different micellar (SDBS) vs. polyelectrolytic (PSSA) supramolecular assemblies in post-CMP cleaning solutions differ in their tribological performance when used in a novel PVA scrubber for 300-mm silicon dioxide wafer cleaning. Significant differences in real-time shear force and coefficient of friction data from the wafer-solution-brush interface (both in time domain as well as frequency domain) have been attributed to differences in each supramolecule’s chemical functionality and structure, which in turn, have been correlated to wafer-level defects. The work has underscored the importance of measuring the tribological attributes of post-CMP cleaning processes in an effort to improve cleaning performance.
Roughness and Uniformity Control during Wet Etching of Molybdenum
Authors: Pacco Antoine , Akanishi Yuya , Le Quoc Toan
Published: February 2021

In this work the wet etching of molybdenum thin films was investigated for applications requiring controlled recess without roughening or pattern loading. First, continuous etching of Mo in alkaline and oxidative peroxide solutions was studied. Then, additives like glycine and diethylenetriamine were used and their effect on etch rate and roughness was assessed. Finally, we evaluated if the requirements for a stepwise etching approach for Mo recess using peroxide or ozonated water as the oxidizing step and ammonia as the oxide dissolution agent were met.
Effect of Surface Chemistry on Ruthenium Wet Etching
Authors: Le Quoc Toan , Kesters E. , Doms M. , Sánchez Efrain Altamirano
Published: February 2021

Different types of ALD Ru films, including as-deposited, annealed Ru, without and with a subsequent CMP step, were used for wet etching study. With respect to the as-deposited Ru, the etching rate of the annealed Ru film in metal-free chemical mixtures (pH = 7-9) was found to decrease substantially. X-ray photoelectron spectroscopy characterization indicated that this behavior could be explained by the presence of the formation of RuOx (x = 2,3) caused by the anneal. A short CMP step applied to the annealed Ru wafer removed the surface RuOx, at least partially, resulting in a significant increase of the etching rate. The change in surface roughness was quantified using atomic force microscopy.
Remote Plasma Etching of Backend Semiconductor Materials for Reliable Packaging
Authors: Evertsen Rogier , Beckers Nicolle , Wang Shao Ying , van der Stam Richard
Published: February 2021

This paper describes a study on the remote plasma etching of silicon-based semiconductor wafers after laser separation. Several process parameters having impact on the chip reliability, expressed as changes in die material strength, have been studied and optimized. The results show the potential of fluorine-based plasma processing for cleaning dies and improving die performance and thus have a role as a process enabling advanced packaging technologies.
Towards Si-Cap-Free SiGe Passivation: Impact of Surface Preparation on Low-Pressure Oxidation of SiGe
Authors: Wostyn Kurt , Arimura Hiroaki , Kimura Yosuke , Hikavyy Andriy , Rondas Dirk , Conard Thierry , Ragnarsson Lars Åke , Horiguchi Naoto
Published: February 2021

The steam oxidation of SiGe shows a transition from Si-like to Ge-like oxidation behavior depending on Ge concentration and oxidation temperature. Ge-like oxidation is described by the generation of oxygen vacancies (VO) at the interface between the oxide and SiGe virtual substrate. [1] Due to the different oxidation behavior, the presence of a Ge-oxide-free interfacial layer (IL) can suppress SiGe oxidation. [2] Here we show how a passivating interfacial layer can be grown using low-pressure oxidation and highlight the importance of SiGe surface preparation prior to low-pressure oxidation.
Reaction Kinetics of Poly-Si Etching in TMAH Solution
Authors: Park Taegun , Lim Sangwoo
Published: February 2021

Tetramethylammonium hydroxide (TMAH) is a metal-free strong alkaline solution which can etch poly-Si. The concentration of dissolved gas as well as the concentration of TMAH affects etching rate of poly-Si. The detailed kinetics of poly-Si etching in TMAH solution is investigated in this study. The effect of water and TMAH concentration on the etching kinetics of poly-Si was investigated by using various concentrations of TMAH solution. It is found that H2O in TMAH solution plays an important role in etching poly-Si. Presence of dissolved CO2 and O2 in TMAH solution tends to inhibit etching of poly-Si. The concentration of dissolved CO2 and O2 in TMAH were reduced by Ar bubbling, thereby the poly-Si etching rate increased.
GaN MOS Structures with Low Interface Trap Density
Authors: Chu Rong Ming
Published: February 2021

GaN based electronic devices have gained great success in the arena of high-frequency and high-power applications. A high-quality GaN MOS structure has the potential to enable new device designs and higher device performance, thereby bringing the success of GaN electronics to a new level. This paper discusses results of the work on GaN MOS structures show that with adequate surface preparation samples featuring interface trap density down to the ~ 1010 eV-1cm-2 range can be formed.
Analysis of Surface Reaction for Group III-V Compound Semiconductors in Functional Water
Authors: Nishio Kenya , Oinoue Takashi , Saito Suguru , Hagimoto Yoshiya , Ogawa Yuichi , Ida Junichi , Iwamoto Hayato
Published: February 2021

Group III–V compound semiconductors are attracting attention as new channel materials that have higher carrier mobility than Si. However, defects easily occur at the interface between the semiconductor and insulator film, which degrades performance. In an earlier study, we demonstrated that the interfacial properties of InP are degraded by the growth of In2O3 and that In2O3 grows better in water than in air. Therefore, it is necessary to suppress the growth of In2O3 to improve the interfacial properties of InP. In this work, we focused on functional water, which can be controlled by adjusting the water conditions, and investigated the growth behavior of In2O3 in functional water. As a result, we found that the growth is suppressed in the low-pH range and in hydrogen water. It is important that H+ ions reduce OH− ions, which contributes to the reaction with InP.
Characterization and Removal of Metallic Contamination in H2O and H2O2 Using Single Particle Inductively Coupled Plasma Mass Spectrometry
Authors: Sampath Siddarth , Maharjan Kusum , Ozzello Anthony , Bhabhe Ashutosh
Published: February 2021

Metallic contamination is a major challenge in multiple semiconductor processes, including photolithography and wet etch and cleans (WEC). Though there are several contributors to metallic contamination, significant efforts have focused on improving the incoming quality of process chemicals, especially commodity chemicals. Another key contributor to on-wafer metallic contamination is water (H2O), which is used to dilute most aqueous chemicals. Single Particle Inductively Coupled Plasma Mass Spectroscopy (SP-ICP-MS), a technique relying on time-based resolution of pulses generated during a standard ICP-MS analysis, is used to aid the understanding of metal particle contamination in water and process chemicals.In this paper, we studied water and 30% Hydrogen Peroxide (H2O2), two of the most widely used chemicals across all WEC processes. We used a high purity grade of 30% H2O2, further diluted to a typical use concentration (5% by volume) using two grades of Deionized Water (unfiltered and filtered) where the concentration of metallic particles was the key variable. The metals studied included Iron (Fe), Chromium (Cr), Zinc (Zn), Titanium (Ti), Nickel (Ni) and Aluminum (Al), representing some of the most commonly observed metallic contaminants in H2O2 and water. After analyzing the distribution of contaminants in the chemicals, filters were introduced into the system to observe the impact of filtration on metal removal. The importance of filtration on the overall quality of the diluted process chemical was demonstrated by using a Polysulfone (PS) membrane to filter the lower grade Deionized Water (DIW).
Characterization of Wet Chemical Atomic Layer Etching of InGaAs
Authors: Hirano Tomoki , Nishio Kenya , Fukatani Takashi , Saito Suguru , Hagimoto Yoshiya , Iwamoto Hayato
Published: February 2021

In this work, we characterized the wet chemical atomic layer etching of an InGaAs surface by using various surface analysis methods. For this etching process, H2O2 was used to create a self-limiting oxide layer. Oxide removal was studied for both HCl and NH4OH solutions. Less In oxide tended to remain after the HCl treatment than after the NH4OH treatment, so the combination of H2O2 and HCl is suitable for wet chemical atomic layer etching. In addition, we found that repetition of this etching process does not impact on the oxide amount, surface roughness, and interface state density. Thus, nanoscale etching of InGaAs with no impact on the surface condition is possible with this method.
Impact of Samurdhi Program on Poverty Alleviation: An Empirical Investigation of Samurdhi Beneﬁciaries in Kopay DS Division in Jaﬀna district
Authors: Thavarasasingam H. , Balagobei S.
Published: February 2021

The aim of this study is to investigate the impact of Samurdhi Program on poverty alleviation in Kopay DS Division. Two hundred questionnaires were issued to the Samurdhi beneﬁciaries of Kopay DS division, in Jaﬀna district, Sri Lanka Such as Kopay north (J/262),Irupalai South (J/257), Urelu (J/267) and Urumpirai south (J/265) divisions. Urelu (J/267) and Urumpirai south (J/265) divisions. Out of which, 177 questionnaires only could be collected. Hence, 177 Samurdhi beneﬁciary families were incorporated as samples. Correlation analysis and multiple linear regression analysis were used to analyze the data and examine the hypotheses by using the SPSS. The adjusted R2 0.250 for the model implies that approximately 25% of the total variance in poverty alleviation can be determined by all dimensions of Samurdhi program as the independent variable in this model. Further, the model reveals that the remaining 75% of variability was not explained in this model. In this study the ﬁndings revealed that there is a signiﬁcant impact of Samurdhi program on poverty alleviation. Microcredit has a positive and signiﬁcant impact on poverty alleviation. Livelihood activity has an insigniﬁcant impact on poverty alleviation. Welfare has a positive and signiﬁcant impact on poverty alleviation. Based on the ﬁndings the researcher can conclude that Microcredit and welfare activity is eﬀectively worked, and livelihood activity needs to improve itself.