(Digital Presentation) Internal Friction, Mechanical Spectroscopy of SiO2, Radiation Functionalized Nanocomposites of Multiwalled Carbon Nanotubes and Polyamide, Polyethylene, Polyvinylchloride
Authors: Onanko Yurii Anatoliyovich , Yatsiuk Mykhailo Vasylovych , Onanko Anatoliy Petrovich , Matseliuk Eugene Michaylovich , Dmytrenko Oksana Petrivna , Kulish Mukola Polikarpovich , Pinchuk-Rugal Tatiana Mukolaivna , Il'in Peter Petrovich , Kuzmych Anna Andriivna 
Published: December 2024

Introduction

A method for determining the integral density of structural defects nD
in SiO2+Si disk – wafer plates was developed, which is the basis of metal – dielectric – semiconductor (MDS) structures in the manufacture of large integrated circuits (LIC) for production technology to express the post-operational control of the perfection of the structure of multilayer epitaxial structures and the growth reliability of decent p-n junctions in the production of semiconductor devices [1-3]. Amplitude-dependent IF measurement (ADIF) can be used as a highly sensitive method to monitor the nanoplastic deformation eND
of SiO2+Si wafer plates [4-6].

Experimental procedure

The study of the influence of structural defects on the damping of vibrations of SiO2+Si wafer plates with diameter D ≈ 100 mm and thicknesses of hSiO2
≈ 600 nm allows the estimation of the degree of perfection of the crystalline structure. Ultrasonic (US) pulse-phase method using USMV-LETI, modernized USMV-KNU and computerized “KERN-4” devices with frequencies f┴

≈ 0.7 MHz and f║

≈ 1 MHz and were used [7-10].

Results and discussion

The temperature dependence of IF Q-1(T) in SiO2+Si wafer plates p-type, doped with B, KDB-7.5(100) with diameter D ≈ 100∙10-3 m, SiO2 layer thickness hSiO2
≈ 100 nm, and Si layer thickness hSi
≈ 460∙103 nm are shown. IF Q-1
, mechanical spectroscopy of radiation functionalized nanocompositesof MCNT polyamide (NH(CH2)5CO)n, polyethylene (C2H4)n, and polyvinylchloride (C2H3Cl)n are presented. The influence of ultrasound (US) deformation εUS
studied on IF Q-1
and dynamic elastic modulus E =
r
V║
2
, dynamic shear modulus G =
r
V

^

2
of MCNT nanocomposites.

Conclusions

The study of SiO2+Si wafer-plate vibrations at adjacent harmonic frequencies f0
and f2
made it possible to develop a technique for determining the structural defect density nD
and the broken layer depth hBL
.

Internal friction Q-1
, dynamical shear modulus G, dynamical elastic modulus Е, Poisson coefficient μ are dependent from SiO2+Si wafer-plate anisotropy.

The increase of the nanocomposite crystallinity degree at growth of multiwalled carbon nanotubes concentration filling with the nanotubes of matrix results in the decline of content of organized phase.

As the result of mechanical study the presence of the strong effect between polyamide, polyvinylchloride, polyethylene and multiwalled carbon nanotubes was confirmed. The presence of the strong interaction for nanocomposite between polyamide-6 (NH(CH2)5CO)n and multiwalled carbon nanotubes was confirmed by mechanical studies.

References

[1] Onanko A. P., Charny D. V., Onanko Y. A. et al. 2019 Inelastic, elastic characteristics of SiO2, porous polystyrene and automated system. 18th International Conference on Geoinformatics - Theoretical and Applied Aspects
2019, 16116(5).

DOI: https://doi.org/10.3997/2214-4609.201902110

[2] Kuzmych L. 2007 Development of organizational and technical measures for keeping items of hydrotechnical structures in the good condition. Materials of Scientific Conference of Young Scientists. The Role of Reclamation Sustainable Development of Agriculture.

[3] Onanko A. P., Charnyi D. V., Onanko, Y. A. et al. 2020 Peculiarity of inelastic properties of sedimentary SiO2, foam polystyrene. Geoinformatics: Theoretical and Applied Aspects 2020
2020, 18428(5).

DOI: https://doi.org/10.3997/2214-4609.2020geo040

[4] Ornatskyi D., Kuzmych L., and Kvasnikov V. 2019 Simulation of the analog interface for remote measurements using multiplexer and resistive strain gauges. Metrology and Instruments
1, 31–36.

[5] Bereka V., Boshko I., Kondratenko I. et al. 2021 Efficiency of plasma treatment of water contaminated with persistent organic molecules. Journal of Environmental Engineering and Science
16, № 1, 40–47.

DOI: https://doi.org/10.1680/jenes.20.00028

[6] Kuzmych L., Volk L., Kuzmych A. et al. 2022 Simulation of the influence of non - gaussian noise during measurement. 2022 IEEE 41st International Conference on Electronics and Nanotechnology (ELNANO), 595–599.

DOI: https://doi.org/10.1109/ELNANO54667.2022.9927008

[7] Onanko A. P., Dmytrenko O. P., Pinchuk-Rugal, T. M. et al. 2022 Characteristics of monitoring and mitigation of water resources clay particles pollution by ζ-potential research. 16th International Conference Monitoring of Geological Processes and Ecological Condition of the Environment
2022, 1–5.

DOI: https://doi.org/10.3997/2214-4609.2022580005

[8] Rokochinskiy A., Kuzmych L. and Volk P. 2023 Handbook of Research on Improving the Natural and Ecological Conditions of the Polesie Zone (Hershey: IGI Global).

DOI: https://doi.org/10.4018/978-1-6684-8248-3

[9] Onanko Yu., Charnyi D, Onanko, A. et al. 2022 Oil and gas reservoir rock sandstone SiO2 porosity research by internal friction method. International Conference of Young Professionals «GeoTerrace-2022»
2022, 1–5.

DOI: https://doi.org/10.3997/2214-4609.2022590062

[10] Kuzmych L., Furmanets O., Usatyi S. et al. 2022 Water supply of the ukrainian Polesie ecoregion drained areas in modern anthropogenic climate changes. Archives of Hydro-Engineering and Environmental Mechanics
69, № 1, 79–96.

DOI: https://doi.org/10.2478/heem-2022-0006

Figure 1. Dependence of the difference in the internal friction ΔQ-1
of SiO2+Si wafer plate at the adjacent harmonics f1
and f2
on dislocations density n

D
.

Figure 1