INCREASING THE ACCURACY OF DETERMINING THE WORKING PARAMETERS OF THE RIBBON-SHAPED ELECTRONIC FLOW IN THE ELECTRON-BEAM MICRO-PROCESSING OF DIELECTRICS
Authors: Zhaivoronok Ihor , Kovalenko Yurii 
Published: December 2022

The article shows the possibility of increasing the accuracy of determining the operating parameters of the ribbon-shaped electron flow during electron beam micromachining of dielectric materials in a vacuum (using the example of Kp0 grade polycrystalline silicon and K8 grade optical glass) as a result of the analysis and selection of the most acceptable energy modes of operation of the Pierce wire electron-beam gun. The purpose of the work is to study the influence of the volt-current characteristics of the Pierce wire electron-beam gun on the quality and repeatability of the process of processing dielectric materials with a ribbon-shaped electron flow, which allows choosing the most rational modes of determining the operating parameters of the electron flow with higher accuracy.

The paper proposes a technological experiment on electron-beam micromachining of dielectric surfaces, as well as defined and investigated the working parameters of the process of such processing, depending on the possible energy characteristics of the main working node of the electron-beam equipment, namely, the Pierce electron-beam gun.

The operating parameters of the ribbon-shaped electron flow obtained as a result of the experimental study made it possible to ensure the highest quality processing of the surfaces of dielectric materials due to the improvement of such indicators of the accuracy of determining these parameters as precision (for example, the standard deviation of the repeatability of Sr decreased from 8.33% to 4.95%, and the standard the SR reproducibility deviation decreased from 13.28% to 6.18%), which confirms the representativeness of the working parameters, as well as the correctness (the bias of the method of determining the working parameters in the electronic flow is statistically insignificant under the conditions of the confidence interval on the axis d = 0 at the significance level a = 0.05). The analysis of the obtained results regarding the electron-beam microprocessing of the surfaces of dielectric materials according to the selected operating parameters proves the improvement of quality and the increase in the reproducibility of the results of the processing of these surfaces in terms of purity, as well as the reduction of the residual nanorelief by 18-25%.

A comparison of the results of experimental electron-beam microprocessing of dielectrics with the results of their laser surface treatment made it possible to establish a reduction in residual micro-uniformities of the surface, as in electron-beam microprocessing (for optical glass K8 by 17-27 times; for silicon Kp0 - by 14-22 times) , as well as during surface laser treatment (for both types of material – 12-14 times). At the same time, surface laser treatment does not allow to eliminate surface waviness, which is related to the specifics of the interaction of the laser beam with the surface of the optical material, while when processing with an electron flow of the ribbon form, the occurrence of such waviness is not observed.

The conclusions and analyzed data obtained in the article based on the results of experimental research can be used to optimize the technological regimes of electron-beam micromachining in the production of products of microoptics, integrated optics, nanoelectronics, etc.